JP7054502B2 - Valve with built-in heater - Google Patents

Valve with built-in heater Download PDF

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JP7054502B2
JP7054502B2 JP2017191770A JP2017191770A JP7054502B2 JP 7054502 B2 JP7054502 B2 JP 7054502B2 JP 2017191770 A JP2017191770 A JP 2017191770A JP 2017191770 A JP2017191770 A JP 2017191770A JP 7054502 B2 JP7054502 B2 JP 7054502B2
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valve
heater
built
lid member
insertion hole
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JP2019065957A (en
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浩司 平松
昌彦 曽我尾
忠幸 薬師神
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Fujikin Inc
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Fujikin Inc
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Priority to TW107126286A priority patent/TWI761563B/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
  • Lift Valve (AREA)

Description

この発明は、ヒータ内蔵バルブに関する。 The present invention relates to a valve with a built-in heater.

半導体製造工程で真空チャンバー内と真空ポンプとを接続する流路の途中に設けられるバルブには、ヒータを内蔵し、２００℃を超えるような高温条件で使用されるものもある。 Some valves provided in the middle of the flow path connecting the inside of the vacuum chamber and the vacuum pump in the semiconductor manufacturing process have a built-in heater and are used under high temperature conditions exceeding 200 ° C.

特許文献１に記載のバルブは、高温用のベローズ弁であり、外部からの加熱を行うとともに、弁体にヒータを内蔵している。 The valve described in Patent Document 1 is a bellows valve for high temperature, which heats from the outside and has a heater built in the valve body.

特許第４９２３１０５号公報Japanese Patent No. 4923105

バルブを高温条件下で使用する場合、バルブを流れるガスによっては温度の不均一により、バルブ内部にガスの液化・蒸着が生じる。ヒータ内蔵バルブはこのような課題を解決するために用いられるが、特許文献１のように弁体にヒータを内蔵したバルブにおいても、バルブ内部の温度の不均一性により条件によってはガスの液化・蒸着が生じることがある。このとき、液化・蒸着は主にベローズ上部において生じるため、バルブ上方からの放熱を防ぎバルブ内部全体を均一に加熱することが望まれる。 When the valve is used under high temperature conditions, gas liquefaction / vapor deposition occurs inside the valve due to non-uniform temperature depending on the gas flowing through the valve. A valve with a built-in heater is used to solve such problems, but even in a valve with a built-in heater in the valve body as in Patent Document 1, gas liquefaction may occur depending on the conditions due to the non-uniformity of the temperature inside the valve. Evaporation may occur. At this time, since liquefaction / condensation occurs mainly in the upper part of the bellows, it is desired to prevent heat dissipation from above the valve and uniformly heat the entire inside of the valve.

本発明（１）は、ガスの入口流路、出口流路およびこれらの流路の間に形成された弁座を有するバルブボディと、前記弁座と当接・離間する弁体を下端部に有する弁棒と、前記バルブボディの上部に気密に固定され、前記弁棒が貫通する蓋部材と、前記弁棒および前記蓋部材に溶着固定されるベローズと、を有するヒータ内蔵バルブであって、前記上部蓋部材は、少なくとも１つのヒータ挿入孔を有し、前記ヒータ挿入孔に少なくとも１つの棒状ヒータが挿入配置されるヒータ内蔵バルブである。 In the present invention (1), a valve body having a gas inlet flow path, an outlet flow path, and a valve seat formed between these flow paths, and a valve body that abuts and separates from the valve seat are provided at the lower end portion. A valve with a built-in heater, comprising a valve rod having a valve rod, a lid member airtightly fixed to the upper portion of the valve body through which the valve rod penetrates, and a bellows welded and fixed to the valve rod and the lid member. The upper lid member is a valve with a built-in heater having at least one heater insertion hole and in which at least one rod-shaped heater is inserted and arranged in the heater insertion hole.

本発明（１）は、この構造を有しているので、バルブ内部の温度の不均一性が是正され、ベローズ上部でバルブを通過するガスの液化や蒸着を防止することができる。また、蓋部材にヒータ挿入孔が備えられ、このヒータ挿入孔に棒状ヒータを挿入するだけでよいので、ヒータの取り換えが容易となる。 Since the present invention (1) has this structure, the temperature non-uniformity inside the valve can be corrected, and liquefaction and vapor deposition of gas passing through the valve can be prevented at the upper part of the bellows. Further, since the lid member is provided with a heater insertion hole and it is only necessary to insert the rod-shaped heater into the heater insertion hole, the heater can be easily replaced.

本発明（２）は、本発明（１）に記載のヒータ内蔵バルブであって、さらに前記弁棒内部に配置されるヒータを設けたヒータ内蔵バルブである。 The present invention (2) is the valve with a built-in heater according to the present invention (1), and is a valve with a built-in heater provided with a heater arranged inside the valve stem.

本発明（２）は、本発明（１）の蓋部材内部に備えられた棒状ヒータ以外に、弁棒内部にもヒータが設けられているので、ヒータ内部の温度は、本発明（１）と比べてより均一となり、バルブ内部の温度の不均一性が改善され、バルブを通過するガスの液化や蒸着をさらに防止することができる。 In the present invention (2), in addition to the rod-shaped heater provided inside the lid member of the present invention (1), a heater is also provided inside the valve rod, so that the temperature inside the heater is the same as that of the present invention (1). Compared with this, it becomes more uniform, the non-uniformity of the temperature inside the valve is improved, and the liquefaction and vapor deposition of the gas passing through the valve can be further prevented.

本発明（３）は、前記ヒータ挿入孔が、前記蓋部材の側面に設けられている本発明（１）または（２）に記載のヒータ内蔵バルブである。 The present invention (3) is the valve with a built-in heater according to the present invention (1) or (2), wherein the heater insertion hole is provided on the side surface of the lid member.

本発明（３）によれば、ヒータ挿入孔が蓋部材の側面に設けられているので、ヒータの交換や修理等の際にヒータを抜き取り、再挿入をする必要が生じた場合、バルブの分解が必要でなく、その作業が容易となる。 According to the present invention (3), since the heater insertion hole is provided on the side surface of the lid member, the valve is disassembled when it becomes necessary to remove and reinsert the heater when replacing or repairing the heater. Is not required and the work is easy.

本発明（４）は、前記ヒータ挿入孔は貫通孔である本発明（３）に記載のヒータ内蔵バルブである。 The present invention (4) is the heater built-in valve according to the present invention (3), wherein the heater insertion hole is a through hole.

本発明（４）によれば、ヒータ挿入孔は両端で開口しているので、ヒータはそのどちら側の開口部からでも挿入・抜き取りが可能となり、バルブの設置環境に起因するヒータの出し入れの困難さを少なくすることができる。 According to the present invention (4), since the heater insertion holes are opened at both ends, the heater can be inserted and removed from either side of the opening, and it is difficult to insert and remove the heater due to the installation environment of the valve. It can be reduced.

本発明（５）は、ヒータ挿入孔が弁棒を挟んで平行に設けられた少なくとも２つの孔である本発明（３）に記載のヒータ内蔵バルブである。 The present invention (5) is the valve with a built-in heater according to the present invention (3), wherein the heater insertion holes are at least two holes provided in parallel with the valve rod interposed therebetween.

本発明（５）によれば、ヒータ挿入孔は弁棒を挟んで２つ以上設けられているので、予め予想される数のヒータ挿入孔を穿孔しておけば、液化・蒸着が他の種類のガスに比べて高いようなガスをバルブに流す場合、使用していないヒータ挿入孔にヒータを挿入してヒータ増設を容易に行うことができる。 According to the present invention (5), since two or more heater insertion holes are provided with the valve rod interposed therebetween, if the expected number of heater insertion holes are drilled in advance, liquefaction / condensation can be performed in another type. When a gas that is higher than the gas of No. 1 is passed through the valve, the heater can be easily added by inserting the heater into the unused heater insertion hole.

この発明のベローズを加熱するヒータを有するヒータ内蔵バルブによると、バルブを通過するガスの液化・蒸着が従来のヒータ内蔵バルブと比べてより少なくすることができ、ヒータの交換等も容易に行うことができる。 According to the valve with a built-in heater having a heater for heating the bellows of the present invention, the liquefaction / vapor deposition of gas passing through the valve can be reduced as compared with the conventional valve with a built-in heater, and the heater can be easily replaced. Can be done.

図１は、この発明によるヒータ内蔵バルブの実施例１を示す。FIG. 1 shows Example 1 of a valve with a built-in heater according to the present invention. 図２は、実施例１のヒータ内蔵バルブの蓋部材を上面から見た時の平面図を示す。FIG. 2 shows a plan view of the lid member of the valve with a built-in heater of the first embodiment when viewed from above. 図３は、実施例２のヒータ内蔵バルブのバルブボディ、蓋部材あたりの斜視図を示す。FIG. 3 shows a perspective view of the valve body and the lid member of the valve with a built-in heater according to the second embodiment.

以下、図面を参照して、本発明の好適な実施例を例示的に詳しく説明する。但し、この実施例に記載されている構成部品の相対的配置等は特に特定的な記載がない限りは、この発明の範囲をそれに限定する趣旨ではなく、単なる説明例に過ぎない。また、便宜的に図面上での方向によって部材等の方向を上下左右と指称することがあるが、これらは本発明の範囲を限定するものではない。 Hereinafter, preferred embodiments of the present invention will be described in detail exemplary with reference to the drawings. However, unless otherwise specified, the relative arrangement of the components described in this embodiment is not intended to limit the scope of the present invention to that, and is merely an explanatory example. Further, for convenience, the directions of the members and the like may be referred to as up, down, left, and right depending on the directions on the drawings, but these do not limit the scope of the present invention.

図１は、この発明によるヒータ内蔵バルブの実施例１を示すものであり、このバルブ1は、ヒータ内蔵真空開閉バルブとも呼ばれるものである。 FIG. 1 shows Example 1 of a valve with a built-in heater according to the present invention, and this valve 1 is also called a vacuum open / close valve with a built-in heater.

バルブボディ10の内部には、入口流路11と出口流路12が備えられ、その間に弁座13が形成されている。流体は左方向から入り、バルブが開いている状態では下方向に流れていく構成となっている。 Inside the valve body 10, an inlet flow path 11 and an outlet flow path 12 are provided, and a valve seat 13 is formed between them. The fluid enters from the left and flows downward when the valve is open.

弁の開閉状態は、弁座13と当接する弁体21の移動によって制御され、弁座13と弁体21が密接しているときは流体の流れは遮断され、離間しているときは、流体は左方向からバルブに流入して、バルブの下方向に流れ出るようになっている。 The open / closed state of the valve is controlled by the movement of the valve body 21 in contact with the valve seat 13, the fluid flow is blocked when the valve seat 13 and the valve body 21 are in close contact with each other, and the fluid is blocked when the valve seat 13 and the valve body 21 are in close contact with each other. Flows into the valve from the left and flows out downward from the valve.

弁体21は、弁棒20の下端部に形成されており、弁棒20の内部にはヒータ収容空間22が形成され、その中に第１カートリッジヒータ35がはめ込まれている。なお、ヒータは弁棒内部をヒーティング可能であれば何でも良く、シースヒータ等も用いることが可能である。 The valve body 21 is formed at the lower end of the valve rod 20, and a heater accommodating space 22 is formed inside the valve rod 20, and the first cartridge heater 35 is fitted therein. The heater may be anything as long as the inside of the valve stem can be heated, and a sheath heater or the like can also be used.

バルブボディ10の上部には、弁棒20が貫通する蓋部材31が設けられている。蓋部材31にはベローズ39の一端が溶接され、ベローズ39の他端が弁棒に設けられたベローズフランジ30に溶接されることで、流体の外部へのリークが防止されている。 A lid member 31 through which the valve rod 20 penetrates is provided on the upper portion of the valve body 10. One end of the bellows 39 is welded to the lid member 31, and the other end of the bellows 39 is welded to the bellows flange 30 provided on the valve stem to prevent the fluid from leaking to the outside.

蓋部材31には、棒状の第２カートリッジヒータ36C, 36Dが挿入されるヒータ挿入貫通孔34C, 34Dが設けられている。ヒータ挿入貫通孔34は、正面から背面に向かう方向に左右に穿孔された２箇所のヒータ挿入貫通孔34A, 34Bと、左方から右方へ向かう方向に（点線で示す）ヒータ挿入貫通孔34Cと貫通孔34Cの背後側（図１においては紙面の後ろ側）に隠れている34Dである。 The lid member 31 is provided with heater insertion through holes 34C, 34D into which rod-shaped second cartridge heaters 36C, 36D are inserted. The heater insertion through holes 34 are the two heater insertion through holes 34A and 34B drilled to the left and right in the direction from the front to the back, and the heater insertion through holes 34C (indicated by the dotted line) in the direction from the left to the right. And 34D hidden behind the through hole 34C (the back side of the paper in FIG. 1).

図１は、前側のヒータ挿入貫通孔34Cに右から第２カートリッジヒータ36Cが挿入され、後ろ側のヒータ挿入貫通孔34Dに左から第２カートリッジヒータ36Dが挿入されている状態を示し、左側のヒータ挿入貫通孔34Aおよび右側のヒータ挿入貫通孔34Bには第２カートリッジヒータ36は挿入されていない状態を示している。そして挿入された第２カートリッジヒータ36には動力ライン40aが接続されている。なお、ヒータ挿入貫通孔34に挿入されるヒータはカートリッジヒータに限らず、棒状のものであればよい。 FIG. 1 shows a state in which the second cartridge heater 36C is inserted from the right into the heater insertion through hole 34C on the front side, and the second cartridge heater 36D is inserted from the left into the heater insertion through hole 34D on the rear side. The second cartridge heater 36 is not inserted into the heater insertion through hole 34A and the heater insertion through hole 34B on the right side. A power line 40a is connected to the inserted second cartridge heater 36. The heater inserted into the heater insertion through hole 34 is not limited to the cartridge heater, and may be a rod-shaped heater.

アクチュエータ（符号略）はステー51を介してカバー14に支持されて、ステム50を介して弁棒20を電動力または電磁力で上下方向に動作させる。 The actuator (reference numeral omitted) is supported by the cover 14 via the stay 51, and the valve rod 20 is operated in the vertical direction by electric force or electromagnetic force via the stem 50.

バルブボディ10の外周には、入口流路用バンドヒータ43a、出口流路用バンドヒータ43bおよびバルブボディ用バンドヒータ43cが巻かれている。これらのバンドヒータによっても、バルブボディ10の外部からバルブボディ10の内部を加熱することもできる。 A band heater 43a for an inlet flow path, a band heater 43b for an outlet flow path, and a band heater 43c for a valve body are wound around the outer periphery of the valve body 10. These band heaters can also heat the inside of the valve body 10 from the outside of the valve body 10.

また、流すガスの種類によって流すガスの液化・蒸着の防止のために追加でヒータを追加したい場合がある。本実施例１の発明では、蓋部材31に追加のヒータ挿入貫通孔34A, 34Bがあるので、新たなヒータ挿入孔を設けるための設計変更や追加工が必要でない。 In addition, depending on the type of gas to be flowed, it may be desired to add an additional heater to prevent liquefaction and vapor deposition of the gas to be flowed. In the invention of the first embodiment, since the lid member 31 has additional heater insertion through holes 34A and 34B, no design change or additional machining is required to provide a new heater insertion hole.

図２は、Ａ－Ａから見た矢視図である。蓋部材31に、ヒータ挿入貫通孔34（34A, 34B, 34C, 34D）が４本、図面で縦向きに２本34A, 34B、横向きに２本34C, 34Dが穿孔され、縦に穿孔された２本34A, 34Bと、横に穿孔された２本34C, 34Dとは、図１に示すヒータ内蔵バルブ1の上下方向で異なった高さに位置している。蓋部材31は、ボルト44によってバルブボディ10に固定されている。実施例１においては、第２カートリッジヒータ36Aおよび36Bは挿入されていないので、図２においては二点鎖線で記載している。 FIG. 2 is an arrow view seen from AA. Four heater insertion through holes 34 (34A, 34B, 34C, 34D) were drilled in the lid member 31, two vertically 34A, 34B and two horizontally 34C, 34D in the drawing, and vertically drilled. The two 34A and 34B and the two 34C and 34D drilled laterally are located at different heights in the vertical direction of the heater built-in valve 1 shown in FIG. The lid member 31 is fixed to the valve body 10 by bolts 44. In the first embodiment, since the second cartridge heaters 36A and 36B are not inserted, they are described by a two-dot chain line in FIG.

蓋部材31の上面にはカバー14が取り付けられ、蓋部材31とカバー14とは、ボルト42によって固定され、ステー51の下端部がカバー14の上面に固定されている。 A cover 14 is attached to the upper surface of the lid member 31, the lid member 31 and the cover 14 are fixed by bolts 42, and the lower end portion of the stay 51 is fixed to the upper surface of the cover 14.

蓋部材31の右側面には、熱電対45が挿入されており、第２カートリッジヒータ36近傍の温度がモニターされている。 A thermocouple 45 is inserted on the right side surface of the lid member 31, and the temperature in the vicinity of the second cartridge heater 36 is monitored.

図３は、バルブボディ10、蓋部材31近傍の斜視図であり、部分的に断面を示している。図１および図２で説明した個所については省略する。 FIG. 3 is a perspective view of the vicinity of the valve body 10 and the lid member 31, and partially shows a cross section. The parts described with reference to FIGS. 1 and 2 will be omitted.

１ ；ヒータ内蔵バルブ
１０；バルブボディ
１１；入口流路
１２；出口流路
１３；弁座
２０；弁棒
２１；弁体
３１；蓋部材
３４；ヒータ挿入貫通孔
３５；第１カートリッジヒータ
３６；第２カートリッジヒータ
３９；ベローズ 1; Valve with built-in heater 10; Valve body 11; Inlet flow path 12; Outlet flow path 13; Valve seat 20; Valve rod 21; Valve body 31; Cover member 34; Heater insertion through hole 35; First cartridge heater 36; 2 cartridge heater 39; bellows

Claims (4)

ガスの入口流路、出口流路およびこれらの流路の間に形成された弁座を有するバルブボディと、
前記弁座と当接・離間する弁体を下端部に有する弁棒と、
前記バルブボディの上部に気密に固定され、前記弁棒が貫通する蓋部材と、
前記弁棒および前記蓋部材に溶着固定されるベローズと、を有するヒータ内蔵バルブであって、
前記蓋部材は、少なくとも１つのヒータ挿入孔を有し、当該ヒータ挿入孔は、前記蓋部材の側面であって前記ベローズの上端よりも上に開口し、当該蓋部材を水平方向に通るように形成されており、
前記ヒータ挿入孔に少なくとも１つの棒状ヒータが挿入配置されるヒータ内蔵バルブ。 A valve body having a gas inlet, outlet and valve seats formed between these channels,
A valve rod having a valve body at the lower end that abuts and separates from the valve seat,
A lid member that is airtightly fixed to the upper part of the valve body and through which the valve rod penetrates.
A valve with a built-in heater having a bellows welded and fixed to the valve stem and the lid member.
The lid member has at least one heater insertion hole so that the heater insertion hole opens on the side surface of the lid member above the upper end of the bellows and passes horizontally through the lid member. Is formed and
A valve with a built-in heater in which at least one rod-shaped heater is inserted and arranged in the heater insertion hole. 前記弁棒内部にヒータが設けられている請求項１に記載のヒータ内蔵バルブ。 The valve with a built-in heater according to claim 1, wherein a heater is provided inside the valve stem. 前記ヒータ挿入孔が貫通孔である請求項１または２に記載のヒータ内蔵バルブ。 The valve with a built-in heater according to claim 1 or 2 , wherein the heater insertion hole is a through hole. 前記ヒータ挿入孔は前記弁棒を挟んで平行に設けられた少なくとも２つの孔である請求項１～３のいずれか１項に記載のヒータ内蔵バルブ。 The valve with a built-in heater according to any one of claims 1 to 3, wherein the heater insertion hole is at least two holes provided in parallel with the valve rod interposed therebetween.
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JP2017191770A JP7054502B2 (en) 2017-09-29 2017-09-29 Valve with built-in heater
TW107126286A TWI761563B (en) 2017-09-29 2018-07-30 Valve with built-in heater
CN201811139592.XA CN109578598A (en) 2017-09-29 2018-09-28 Valve built in heater

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US20040011404A1 (en) 2002-07-19 2004-01-22 Ku Vincent W Valve design and configuration for fast delivery system
JP2004156720A (en) 2002-11-07 2004-06-03 Smc Corp Poppet valve with heater
JP2004270716A (en) 2003-03-05 2004-09-30 Ckd Corp Fluid control valve
JP2016180495A (en) 2015-03-25 2016-10-13 Ckd株式会社 Vacuum valve

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JP3778851B2 (en) * 2001-12-25 2006-05-24 Ｓｍｃ株式会社 Poppet valve with heater
JP4596409B2 (en) * 2003-04-21 2010-12-08 株式会社東京技術研究所 Heater unit for valve mounting
CN101663525B (en) * 2007-04-02 2011-11-30 株式会社富士金 Valve with built-in heater
TW200949112A (en) * 2008-01-23 2009-12-01 Ham Let Motoyama Japan Ltd Highly clean and hot valve
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JP2003161382A (en) 2001-11-26 2003-06-06 Smc Corp Poppet valve with heater
US20040011404A1 (en) 2002-07-19 2004-01-22 Ku Vincent W Valve design and configuration for fast delivery system
JP2004156720A (en) 2002-11-07 2004-06-03 Smc Corp Poppet valve with heater
JP2004270716A (en) 2003-03-05 2004-09-30 Ckd Corp Fluid control valve
JP2016180495A (en) 2015-03-25 2016-10-13 Ckd株式会社 Vacuum valve

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JP2019065957A (en) 2019-04-25
TWI761563B (en) 2022-04-21
TW201920869A (en) 2019-06-01

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