JP2019060834A5 - - Google Patents

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Publication number
JP2019060834A5
JP2019060834A5 JP2017230427A JP2017230427A JP2019060834A5 JP 2019060834 A5 JP2019060834 A5 JP 2019060834A5 JP 2017230427 A JP2017230427 A JP 2017230427A JP 2017230427 A JP2017230427 A JP 2017230427A JP 2019060834 A5 JP2019060834 A5 JP 2019060834A5
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JP
Japan
Prior art keywords
displacement
tilting
force
capacitance element
axis direction
Prior art date
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Application number
JP2017230427A
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English (en)
Japanese (ja)
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JP2019060834A (ja
JP6804091B2 (ja
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Priority to JP2017230427A priority Critical patent/JP6804091B2/ja
Priority claimed from JP2017230427A external-priority patent/JP6804091B2/ja
Publication of JP2019060834A publication Critical patent/JP2019060834A/ja
Publication of JP2019060834A5 publication Critical patent/JP2019060834A5/ja
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Publication of JP6804091B2 publication Critical patent/JP6804091B2/ja
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JP2017230427A 2017-11-30 2017-11-30 力覚センサ Active JP6804091B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017230427A JP6804091B2 (ja) 2017-11-30 2017-11-30 力覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017230427A JP6804091B2 (ja) 2017-11-30 2017-11-30 力覚センサ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2017185184A Division JP6257017B1 (ja) 2017-09-26 2017-09-26 力覚センサ

Publications (3)

Publication Number Publication Date
JP2019060834A JP2019060834A (ja) 2019-04-18
JP2019060834A5 true JP2019060834A5 (OSRAM) 2020-10-22
JP6804091B2 JP6804091B2 (ja) 2020-12-23

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ID=66177257

Family Applications (1)

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JP2017230427A Active JP6804091B2 (ja) 2017-11-30 2017-11-30 力覚センサ

Country Status (1)

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JP (1) JP6804091B2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111157155B (zh) * 2020-01-16 2025-02-11 电子科技大学 三维固体力传感器用基体和传感器及其标定方法
CN115683438B (zh) * 2022-11-02 2024-06-25 重庆大学 L型结构的三维接触力测量方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4387691B2 (ja) * 2003-04-28 2009-12-16 株式会社ワコー 力検出装置
WO2013014803A1 (ja) * 2011-07-27 2013-01-31 株式会社トライフォース・マネジメント 力覚センサ
JP5714648B2 (ja) * 2012-11-16 2015-05-07 株式会社豊田中央研究所 力学量ｍｅｍｓセンサ及び力学量ｍｅｍｓセンサシステム
JP6053247B1 (ja) * 2015-01-26 2016-12-27 株式会社ワコーテック 力覚センサ
JP5853121B1 (ja) * 2015-09-24 2016-02-09 株式会社ワコー 力覚センサ
WO2017212618A1 (ja) * 2016-06-09 2017-12-14 株式会社 トライフォース・マネジメント 力覚センサ
JP6214072B1 (ja) * 2016-08-09 2017-10-18 株式会社トライフォース・マネジメント 力覚センサ
JP6257017B1 (ja) * 2017-09-26 2018-01-10 株式会社トライフォース・マネジメント 力覚センサ

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