JP2019042918A - Dividing device of brittle material substrate and dividing method of the same - Google Patents

Abstract

To provide a dividing device of a brittle material substrate which can prevent surface defects or complete division of the brittle material substrate by transporting the brittle material substrate by using a fixed table and a moving table, which enable suction and air floating, before a division process of the brittle material substrate is performed, and to provide a division method of the brittle material substrate.SOLUTION: A division device of a brittle material substrate according to the invention includes: an upper member (100) having fixed tables (110) and movable tables (120) which are located between the fixed tables (110) and can move; a lower member (300) having a support plate (310) and a lifting part (320) coupled to a lower part of the support plate (310); and an intermediate member (200) having a longitudinal moving part (230) which moves in a longitudinal direction at an upper part of the support plate (310).SELECTED DRAWING: Figure 1

Description

  The present invention relates to an apparatus and method for dividing a brittle material substrate, and more particularly, to prevent surface defects or complete separation of the brittle material substrate that may occur during transportation before performing the dividing process of the brittle material substrate. The present invention relates to an apparatus and method for dividing a brittle material substrate that can be used.

  In general, in the case of a brittle material substrate such as a glass substrate, a scribe line is formed on a substrate along a planned dividing line in order to divide the substrate, and then the substrate is divided through a breaking process.

  As a method of forming a scribe line on a substrate, there are machining with a cutter wheel or the like and non-contact processing with irradiation of a laser beam.

  In addition, after a scribe line is formed on a substrate along a planned dividing line, a dividing step is advanced to completely divide the substrate, but a roller or a pusher is used as a method of dividing the substrate. There are a contact method in which impact is applied to the substrate using a etc. method and a non-contact method in which the substrate is heated and then cooled using laser or steam etc.

  By the way, in the contact-type dividing step, there is a problem that surface defects occur or errors are generated and a category that can not be applied is large by applying physical impact to the substrate.

  Further, in the conventional non-contact type dividing step, expansion and contraction due to thermal change of the substrate are used, but there is a problem that the effect is small with a material having a small tensile force due to thermal change.

Korean Patent Publication No. 2014-0018504

  Therefore, the present invention has been proposed to solve the above-mentioned needs, and its object is to provide a fixed table and a movable table capable of adsorption and air floating before performing the process of dividing a brittle material substrate. An apparatus and method for dividing a brittle material substrate capable of preventing surface defects or complete separation of the brittle material substrate by transporting the brittle material substrate using the above.

  In order to achieve the above object, the apparatus for dividing a brittle material substrate according to the present invention is provided between a plurality of fixed tables (110) and the fixed tables (110), and is movable and movable. A lower member (300) having an upper member (100), a support plate (310), and a lift (320) coupled to the lower portion of the support plate (310), and an upper portion of the support plate (310) It includes an intermediate member (200) having a longitudinally moving longitudinal movement (230).

  Further, in the apparatus for dividing a brittle material substrate according to the present invention, the longitudinal movement portion (230) is supported by a plurality of supports (211) positioned in the longitudinal direction on both sides of the support plate (310). Rail (210), a moving member (251) moving along the rail (210), a T-shaped bracket (250) connected to the moving member (251), and the lower member (300) Both ends of the first drive unit (221) located along the longitudinal direction at the central portion of the drive unit and driving the moving member (251), and one side upper portion of the first drive unit (221) in opposite directions The mobile table (120) further includes a U-shaped bracket (240) connected via a bent bar-shaped bracket (220), wherein a lower portion of the movable table (120) is an upper surface of the T-shaped bracket (250) and the U-shaped Each is connected to the upper surface of the bracket (240).

  Further, in the apparatus for dividing a brittle material substrate according to the present invention, the bar-type bracket (220) whose both ends are bent in opposite directions is driven by the first driving part (221).

  In the apparatus for dividing a brittle material substrate according to the present invention, the fixed table (110) and the movable table (120) further include a plurality of through holes through which air is ejected or absorbed.

  In the apparatus for dividing brittle material substrates according to the present invention, the fixed table (110) and the movable table (120) may be made of ceramic upper plates (111, 112, 113, 121, 122), and stones. It consists of a lower block (130) of material.

  Further, in the apparatus for dividing a brittle material substrate according to the present invention, the elevating part (320) includes a plurality of inclined plates (322) and inclined rails (323) positioned on the inclined surfaces of the inclined plates (322). A second drive unit positioned between the plurality of inclined rail moving members (324) moving along the inclined rails (323) and the inclined plate (322) and driving the inclined rail moving members (324) (321) and a lifting cap (325) connected to the tilting rail moving member (324), wherein the lifting cap (325) is driven by the second drive unit (321), the tilting rail The moving member (324) moves up and down.

  In addition, in order to achieve the above object, the method of dividing a brittle material substrate according to the present invention comprises: a first step (S100) of seating the brittle material substrate (400) on the upper member (100); A second step (S200) of moving the first brittle material substrate (410) onto the dividing portion (500) by moving the moving table (120) of the (100) forward, and moving the table (100) of the upper member (100) 120) retracts and moves in a third step (S300), and the divided part (500) moves away from the upper member (100) to move the first brittle material substrate (410) and the second brittle material substrate (420). And the fourth step (S400) in which the scribe line between

  Further, in the method for dividing a brittle material substrate according to the present invention, in the first step (S100), air is adsorbed in the plurality of through holes of the movable table (120), and the plurality of fixed tables (110) are obtained. In the through holes, air is jetted, and the brittle material substrate (400) is spaced apart from the fixed table (110) at a predetermined distance in a state of being fixed to the movable table (120).

  Further, in the method of dividing a brittle material substrate according to the present invention, when the first brittle material substrate (410) is moved onto the dividing portion (500) in the second step (S200), the fixing table is used. The air ejection is ended in the plurality of through holes of (110), and the air is adsorbed, and the movable table (120) is fixed in a state where the brittle material substrate (400) is fixed to the fixed table (110). Falls.

  In the method of dividing a brittle material substrate according to the present invention, the scribe line between the first brittle material substrate (410) and the second brittle material substrate (420) is divided in the fourth step (S400). Then, the moving table (120) which has moved backward while being lowered is raised.

  According to the present invention, before carrying out the step of dividing the brittle material substrate, surface defects or completeness of the brittle material substrate can be achieved by transporting the brittle material substrate using the fixed table and movable table capable of adsorption and air floating. There is an effect that division can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows the whole structure of the parting apparatus of the brittle material board | substrate which concerns on one Example of this invention. It is a disassembled perspective view which shows a mode that the upper member was decomposed | disassembled by the parting apparatus of the brittle material board | substrate which concerns on one Example of this invention. It is a perspective view which shows an intermediate member with the parting apparatus of the brittle material board | substrate which concerns on this invention based on one Example of this invention. It is a disassembled perspective view which shows a mode that the lower member was decomposed | disassembled by the parting apparatus of the brittle material board | substrate which concerns on one Example of this invention. It is a figure which shows the 1st step of the dividing method of the brittle material board | substrate which concerns on one Example of this invention. It is a figure which shows the 2nd step of the dividing method of the brittle material board | substrate which concerns on one Example of this invention. It is a figure which shows the 3rd step of the dividing method of the brittle material board | substrate which concerns on one Example of this invention. It is a figure which shows the 4th step of the dividing method of the brittle material board | substrate which concerns on one Example of this invention. It is a figure which shows the 5th step of the dividing method of the brittle material board | substrate which concerns on one Example of this invention.

  While the invention is susceptible to various transformations and having various embodiments, specific embodiments are illustrated in the drawings and will be described in detail in the detailed description. However, this is not intended to limit the invention to the particular embodiments, but should be understood to include all transformations, equivalents or alternatives falling within the spirit and scope of the invention. .

  Although the terms first, second, etc. may be used to describe various components, the components should not be limited by the terms. The terms are only used for the purpose of distinguishing one component from another component.

  The terms used in the present specification are merely used to describe particular embodiments, and are not intended to limit the present invention. The singular expression also includes the plural, unless the context clearly indicates otherwise. As used herein, the terms "comprise" or "have" are intended to indicate that the features, numbers, steps, operations, components, parts or combinations thereof described herein are present. It is to be understood that the presence or absence of one or more other features or numbers, steps, acts, components, parts or combinations thereof is not precluded in advance.

  Further, in the description of the present invention, when it is determined that the specific description for the related known art may unnecessarily obscure the gist of the present invention, the detailed description will be omitted.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the related drawings.

  FIG. 1 is a perspective view showing the entire configuration of a brittle material substrate dividing apparatus according to an embodiment of the present invention.

  Referring to FIG. 1, the apparatus (1000) for dividing a brittle material substrate according to an embodiment of the present invention includes an upper member (100), an intermediate member (200), and a lower member (300).

  That is, the upper member (100), the intermediate member (200), and the lower member (300) are sequentially coupled to form the separating apparatus (1000) of the brittle material substrate.

  The upper member (100) is located between the plurality of fixed tables (110) and such fixed tables (110) and has a movable movement table (120).

  In addition, the intermediate member (200) has a longitudinally moving portion (230) moving longitudinally in the upper portion of the support plate (310).

  On the other hand, the lower member (300) has a support plate (310) and a lift (320) coupled to the lower portion of such a support plate (310).

  The upper member (100), the intermediate member (200) and the lower member (300) will be described in more detail with reference to the figures (FIGS. 2 to 4).

  FIG. 2 is an exploded perspective view showing the upper member disassembled by the apparatus for dividing a brittle material substrate according to an embodiment of the present invention.

  Referring to FIG. 2, in the apparatus for dividing a brittle material substrate 1000 according to an embodiment of the present invention, the upper member 100 is positioned above the intermediate member 200, and a plurality of fixed tables 110 are provided. And a movable movable table (120) located between these fixed tables (110).

  For example, the first moving table (121) is located between the fifth fixed table (115) and the first fixed table (111), and the second moving table (122) is the fourth fixed table (114). And the first fixed table (111).

  In this embodiment, in consideration of the size of the brittle material substrate (400), the upper member (100) is formed using two movable tables (120) and five fixed tables (110). However, the present invention is not limited to this, and the appropriate fixed table (110) and moving table (120) are formed in accordance with the size of the brittle material substrate (400). v

  Further, in the apparatus for dividing a brittle material substrate (1000) according to an embodiment of the present invention, the fixed table (110) and the movable table (120) may have a plurality of through holes (140) through which air is ejected or absorbed. Further includes

  In the present embodiment, a plurality of through holes through which air is jetted or absorbed are indicated by reference numeral 140 and are shown in FIG. 2, but the present invention is not limited thereto. That is, a plurality of through holes are formed at a plurality of predetermined positions of the fixed table (110) and the movable table (120). As a result, the fixed table (110) and the movable table (120) perform ejection or adsorption of air through the plurality of through holes as needed.

  That is, the fixed table (110) and the movable table (120) are formed therein with an air pressure unit (not shown) capable of performing ejection or adsorption of air.

  Meanwhile, in the apparatus for dividing brittle material substrate (1000) according to the present invention, the fixed table (110) and the movable table (120) are upper plates (111, 112, 113, 121, 122) of ceramic material, It consists of a lower block (130) of stone material.

  The reason why the fixed table (110) and the upper plate (111, 112, 113, 121, 122) of the movable table (120) are made of ceramic material is the brittle material substrate (400) and the fixed table (110). ) Or the movement table (120) to correct tissue hardness difference and the like.

  Further, the reason why the fixed table (110) and the lower block (130) of the movable table (120) are made of stone material is the fixed table (110) during horizontal transport of the brittle material substrate (400) and the movable table (120). The lower block (130) is formed of a non-deformed stone material, since the height level of the) must be constant.

  FIG. 3 is a perspective view of an intermediate member in the apparatus for separating brittle material substrates according to the present invention according to an embodiment of the present invention.

  Referring to FIG. 3, in the apparatus for separating brittle material substrate (1000) according to the present invention, the longitudinal movement portion (230) of the intermediate member (200) is along the longitudinal direction on both sides of the support plate (310). A rail (210) supported by a plurality of supports (211) positioned, a moving member (251) moving along the rail (210), and a T-shaped bracket (250) connected to the moving member (251) And a first drive portion (221) located along the longitudinal direction at the central portion of the lower member (300) and driving the moving member (251), and one upper portion of the first drive portion (221) It further includes a U-shaped bracket (240) to be connected.

  Here, the lower part of the moving table (120) is connected to the upper surface of the T-shaped bracket (250) and the upper surface of the U-shaped bracket (240).

  In addition, the bar-type bracket (220) whose both ends are bent in the opposite direction is driven by the first drive part (221).

  More specifically, the longitudinal moving portion (230) of the intermediate member (200) operates to move the moving table (120) of the upper member (100) in the longitudinal direction. Therefore, the moving table (120) is connected to the upper surface of the T-shaped bracket (250) of the longitudinal moving unit (230) and the upper surface of the U-shaped bracket (240).

  Such a T-shaped bracket (250) is a bracket for connecting the moving table (120) and the moving member (251) moving along the rail (210) formed along the longitudinal direction. Further, the U-shaped bracket (240) is a bracket for connecting the moving table (120) with one end of a bar-shaped bracket (220) whose both ends driven by the first drive part (221) are bent in opposite directions. It is.

  The rails (210) are respectively formed in an area where the first moving table (121) is located and an area where the second moving table (122) is located, and the plurality of rails (210) formed in this manner are predetermined Have a width of Such a predetermined width is determined by the width of the first fixed table (111). Also, the rails (210) are formed along the longitudinal direction, and are supported by a plurality of supports (211) positioned along the longitudinal direction on both sides of the support plate (310). Similarly, the width between the plurality of support plates (310) is determined by the width of the first fixed table (111).

  The first driving unit 221 is located on the support plate 310, but is located between the plurality of supports 211. Such a first drive unit (221) may be constituted by a servomotor for advancing and retracting the moving member (251).

  As described above, the bar-type bracket (220) is driven by the first driving unit (221). At this time, the U-shaped bracket (240) connected to one surface of the bar bracket (220) is driven together with the bar bracket (220) when the first driving unit (221) is driven.

  In addition, when the first drive unit (221) is driven, the moving member (251) moves in the longitudinal direction along the rail (210). At this time, the T-shaped bracket (250) connected to the upper surface of the moving member (251) is driven together with the moving member (251) when the first driving unit (221) is driven.

  On the other hand, a movable table (120) is connected to the upper surface of the U-shaped bracket (240) and the upper surface of the T-shaped bracket (250).

  With such a structure, when the first drive unit 221 is driven, the movable table 120 performs forward and backward movement along the longitudinal direction.

  FIG. 4 is an exploded perspective view showing the lower member disassembled by the apparatus for dividing a brittle material substrate according to the present invention.

  Referring to FIG. 4, in the apparatus for dividing a brittle material substrate 1000 according to the present invention, a lift unit 320 is coupled to a lower portion of a support plate 310.

  The elevator unit (320) includes a plurality of inclined plates (322), a plurality of inclined rails (323), a plurality of inclined rail moving members (324), a second drive unit (321), and an elevator cap It has (325).

  The plurality of inclined plates (323) are formed on a base plate (not shown) at a predetermined distance from one another.

  The inclined rail (323) is located along the inclined surface of the inclined plate (322).

  At this time, the plurality of inclined rail moving members (324) move along the inclined rails (323), and such inclined rail moving members (324) are driven by the second drive unit (321). .

  Such a second drive unit (321) is located between the inclined plates (322).

  The lifting cap (325) is connected to the inclined rail moving member (324), and the lifting cap (325) is moved up and down by the inclined rail moving member (324) when the second drive unit (321) is driven. .

  That is, the moving table 120 performs the up-and-down operation by the up-and-down operation of the elevating unit 320.

  As described above, the moving table (120) performs the advancing or retracting operation along the longitudinal direction by the longitudinal moving unit (230). In addition, the moving table (120) performs the raising and lowering or lowering operation along the height direction by the raising and lowering unit (320).

  Next, a method of dividing a brittle material substrate according to an embodiment of the present invention will be described with reference to FIGS.

  FIG. 5 is a view showing a first step of the method of dividing a brittle material substrate according to an embodiment of the present invention, and FIG. 6 is a step of a second step of the method of dividing a brittle material substrate according to an embodiment of the present invention. FIG.

  Referring to FIGS. 5 and 6, after preparing the dividing device (1000) of the brittle material substrate for dividing the brittle material substrate, the brittle material on the upper member (100) of the dividing device (1000) of the brittle material substrate Seat the substrate (400).

  Here, the brittle material substrate (400) is in a state where about 80% of cracks in the substrate (for example, between the first brittle substrate (410) and the second brittle substrate (420)) are formed. It is a brittle material. When the brittle material substrate (400) is transported to the dividing portion (500) before the dividing step is performed, complete division between substrates may occur. At this time, since a chipping defect in which the cross section of the brittle material is scratched may occur, complete division should not occur when the brittle material substrate 400 is transported.

  In order to seat the brittle material substrate (400) on the upper member (100), air is adsorbed in the plurality of through holes of the movable table (120), and the air is absorbed in the plurality of through holes of the fixed table (110). Is to be jetted (air floating is disclosed), and the brittle material substrate (400) must be separated from the fixed table (110) at a predetermined distance with the brittle material substrate (400) fixed to the movable table (120).

  At this time, the distance by which the brittle material substrate (400) is separated from the fixing table (110) is preferably, for example, 1 μm to 2 μm. However, the separation distance between the brittle material substrate (400) and the fixing table (110) is not limited to this, and the separation distance is within the range where the brittle material substrate (400) is not scratched by the fixing table. be able to. In addition, when the separation distance between the brittle material substrate (400) and the fixing table (110) is large, complete breaking of the brittle material substrate (400) may occur.

  Therefore, the brittle material substrate (400) is fixed to the movable table (120), and moves so as to maintain the level with the fixed table (110) within a range not to be scratched by the fixed table (110). Become.

  Next, FIG. 7 is a view showing a third step of the method of dividing a brittle material substrate according to an embodiment of the present invention.

  Referring to FIG. 7, the moving table (120) of the upper member (100) is advanced to move the first brittle material substrate (410) onto the dividing portion (500).

  That is, when the first brittle material substrate (410) is moved onto the dividing portion (500), the air ejection is ended in the plurality of through holes of the fixed table (110), and the air is adsorbed.

  Thereby, the movable table (120) is lowered with the brittle material substrate (400) fixed to the fixed table (110).

  More specifically, air is adsorbed from the plurality of through holes of the movable table (120), and the movable table (120) is elongated in a state where the air is ejected from the plurality of through holes of the fixed table (110). The forward movement is completed along the longitudinal direction by the direction moving unit (230). That is, the first brittle material substrate (410) is moved onto the dividing portion (500).

  As described above, when the first brittle material substrate (410) is moved onto the dividing portion (500) and the forward movement of the movable table (120) is completed, air is ejected from the plurality of through holes of the fixed table (110). Air is adsorbed as it is terminated.

  As a result, in a state where the brittle material substrate (400) is fixed to the fixed table (110), the moving table (120) is lowered by the lowering operation of the elevating part (320).

  When the moving table (120) completes the forward movement, the air ejection (air floating) of the fixed table (110) is ended and air is adsorbed. When the air adsorption of the fixed table (110) is performed, the air adsorption of the moving table (120) is ended. At this time, after the air adsorption of one of the fixed table (110) and the moving table (120) is performed, the air adsorption of the other one table is ended. That is, it does not occur when the air adsorption of the fixed table (110) or the movable table (120) is simultaneously terminated when the brittle material substrate (400) is transported to the dividing portion (500).

  FIG. 8 is a view showing a fourth step of the method for dividing a brittle material substrate according to an embodiment of the present invention.

  Referring to FIG. 8, the moving table (120) of the upper member (100) moves backward.

  That is, with the brittle material substrate (400) fixed to the fixed table (110), the movable table (120) lowered by the longitudinal movement unit (230) performs a retracting operation along the longitudinal direction Become.

  At this time, when the moving table (120) is retracted, one end of the moving table (120) is retracted so as to be aligned with one end of the fixed table (110). That is, the moving table 120 is retracted by the distance advanced.

  Finally, FIG. 9 is a view showing a fifth step of the method of dividing a brittle material substrate according to an embodiment of the present invention.

  Referring to FIG. 9, the dividing portion 500 moves away from the upper member 100 to divide the scribe line between the first brittle material substrate 410 and the second brittle material substrate 420.

  Here, when the scribe line between the first brittle material substrate (410) and the second brittle material substrate (420) is divided, the movable table (120) which has moved backward in the lowered state rises.

  More specifically, when the retracting operation of the movable table (120) is completed in the previous step, the dividing portion (500) of the brittle material substrate dividing device (1000) is fixed to the fixed table (100) of the upper member (100). 110) and separated from the moving table (120) to completely divide the first brittle material substrate (410) and the second brittle material substrate (420).

  In the lowered state, the retreated moving table (120) ascends to provide a preparatory step for placing the brittle material substrate (400) on the upper member (100) of the brittle material substrate dividing device (1000). Thereafter, by repeatedly performing the first to fifth steps described above, each brittle material substrate (400: 410, 420...) Is completely divided.

  The above description is merely an exemplification of the technical concept of the present invention, and one skilled in the art to which the present invention belongs will not deviate from the essential characteristics of the present invention. Various modifications and variations are possible in the scope. Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but are for illustration, and the scope of the technical spirit of the present invention is limited by such embodiments. It is not something to be done. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be construed as being included in the scope of the present invention.

100 top member
110 fixed table
111, 112, 113, 121, 122 top plate
120 moving table
130 lower block
200 Intermediate member
210 rails
220 bar bracket
221 first drive unit
230 Longitudinal moving part
240 U-shaped bracket
250 T-shaped bracket
251 Moving member
300 lower part
310 support plate
320 Lifting part
321 2nd drive part
322 Multiple inclined plates
323 inclined rails
324 Inclined Rail Moving Member
400 brittle material substrate
500 divisions
1000 Fragmentation device for brittle material substrate

Claims (10)

A plurality of fixed tables (110) and an upper member (100) located between the fixed tables (110) and having a movable transfer table (120);
A support plate (310) and a lower member (300) having a lift (320) coupled to a lower portion of the support plate (310);
An apparatus for dividing a brittle material substrate, comprising: an intermediate member (200) having a longitudinally moving part (230) moving longitudinally in the upper part of the support plate (310). The longitudinal movement unit (230) is
Rails (210) supported by a plurality of supports (211) located along the longitudinal direction on both sides of the support plate (310);
A moving member (251) moving along the rail (210), and a T-shaped bracket (250) connected to the moving member (251);
A first drive unit (221) located along the longitudinal direction at a central portion of the lower member (300) and driving the moving member (251);
The U-shaped bracket 240 is connected to one side upper portion of the first driving unit 221 through a bar-shaped bracket 220 bent at opposite ends.
The apparatus for dividing a brittle material substrate according to claim 1, wherein a lower portion of the moving table (120) is connected to an upper surface of the T-shaped bracket (250) and an upper surface of the U-shaped bracket (240).   The apparatus for dividing a brittle material substrate according to claim 2, wherein the bar-type bracket (220) whose both ends are bent in opposite directions is driven by the first driving part (221).   The apparatus for dividing a brittle material substrate according to claim 1, wherein the fixed table (110) and the movable table (120) further include a plurality of through holes through which air is ejected or absorbed.   The apparatus according to claim 1, wherein the fixed table (110) and the movable table (120) comprise a ceramic upper plate (111, 112, 113, 121, 122) and a stone lower block (130). Breaker of brittle material substrate. The elevating unit (320) is
With multiple inclined plates (322),
An inclined rail (323) located on the inclined surface of the inclined plate (322);
A plurality of inclined rail moving members (324) moving along the inclined rails (323);
A second drive unit (321) located between the inclined plates (322) and driving the inclined rail moving member (324);
The apparatus further comprises a lifting cap (325) connected to the inclined rail moving member (324),
The apparatus for dividing a brittle material substrate according to claim 1, wherein the lifting cap (325) moves up and down by the inclined rail moving member (324) when driving the second driving unit (321). A first step (S100) of seating the brittle material substrate (400) on the upper member (100);
A second step (S200) of moving the moving table (120) of the upper member (100) forward to move the first brittle material substrate (410) onto the dividing part (500);
A third step (S300) in which the moving table (120) of the upper member (100) moves backward;
A fourth step (S4) in which the dividing portion (500) moves away from the upper member (100) to divide the scribe line between the first brittle material substrate (410) and the second brittle material substrate (420); Separating method of brittle material substrate including S400). At the first step (S100),
Air is adsorbed in the plurality of through holes of the movable table (120), the air is ejected in the plurality of through holes of the fixed table (110), and the brittle material substrate (400) is placed on the movable table (120). The method according to claim 7, wherein the fixed material (110) is spaced apart from the fixed table (110) by a predetermined distance. At the second step (S200),
When the first brittle material substrate (410) is moved onto the dividing portion (500), the air ejection is ended in the plurality of through holes of the fixed table (110), and the air is adsorbed. The method according to claim 7, wherein the movable table (120) is lowered while the brittle material substrate (400) is fixed to the fixed table (110). At the fourth stage (S400),
When the scribe line between the first brittle material substrate (410) and the second brittle material substrate (420) is divided, the movable table (120) which has been moved backward in the lowered state is raised. The method for dividing a brittle material substrate according to the above.