JP2019036577A - 外部共振型レーザモジュール、分析装置、外部共振型レーザモジュールの駆動方法、プログラム - Google Patents
外部共振型レーザモジュール、分析装置、外部共振型レーザモジュールの駆動方法、プログラム Download PDFInfo
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- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
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- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
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- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
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- H01S5/00—Semiconductor lasers
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3401—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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Abstract
Description
[分析装置の構成]
[外部共振型レーザモジュールの構成]
[分析装置の制御]
[作用及び効果]
[変形例]
Claims (8)
- 量子カスケードレーザと、
前記量子カスケードレーザから出射された光を回折及び反射させる回折反射部を有し、前記回折反射部を揺動させることにより、前記光の一部を前記量子カスケードレーザに帰還させるMEMS回折格子と、
前記量子カスケードレーザの駆動を制御する制御部と、を備え、
前記制御部は、前記回折反射部が揺動する第1周波数よりも高い第2周波数のパルス光が前記量子カスケードレーザから出射され、且つ、前記回折反射部がm回(m:1以上の整数)往復する度に前記パルス光の位相が変化するように、前記量子カスケードレーザをパルス駆動させる、外部共振型レーザモジュール。 - 前記制御部は、前記回折反射部が前記m回往復する度に前記パルス光の位相が所定値ずつ変化するように、前記量子カスケードレーザをパルス駆動させる、請求項1に記載の外部共振型レーザモジュール。
- 前記所定値は、前記パルス光のパルス幅に等しい、請求項2に記載の外部共振型レーザモジュール。
- 前記制御部は、初期位相において、前記パルス光が立ち上がる時点と前記回折反射部が折り返す時点とが一致するように、前記量子カスケードレーザをパルス駆動させる、請求項1〜3のいずれか一項に記載の外部共振型レーザモジュール。
- 前記MEMS回折格子は、
前記回折反射部が設けられた可動部と、
前記可動部が揺動自在に連結された支持部と、
前記可動部を揺動させるアクチュエータ部と、を更に有している、請求項1〜4のいずれか一項に記載の外部共振型レーザモジュール。 - 請求項1〜5のいずれか一項に記載の外部共振型レーザモジュールと、
前記外部共振型レーザモジュールから出力され、分析対象を透過した光を検出する光検出器と、
前記光検出器の検出結果に基づいて吸収スペクトルを算出する演算部と、を備え、
前記演算部は、前記回折反射部の揺動における往路期間及び復路期間の一方において前記光検出器により取得された第1データを、前記往路期間と前記復路期間とが切り替わる時点を基準として時間に関して反転し、前記往路期間及び前記復路期間の他方において前記光検出器により取得された第2データに対して重ね合わせることにより得られた第3データに基づいて、前記吸収スペクトルを算出する、分析装置。 - 外部共振型レーザモジュールの駆動方法であって、
前記外部共振型レーザモジュールは、
量子カスケードレーザと、
前記量子カスケードレーザから出射された光を回折及び反射させる回折反射部を有し、前記回折反射部を揺動させることにより、前記光の一部を前記量子カスケードレーザに帰還させるMEMS回折格子と、を備え、
前記回折反射部が揺動する第1周波数よりも高い第2周波数のパルス光が前記量子カスケードレーザから出射され、且つ、前記回折反射部がm回(m:1以上の整数)往復する度に前記パルス光の位相が変化するように、前記量子カスケードレーザをパルス駆動させる、外部共振型レーザモジュールの駆動方法。 - 量子カスケードレーザと、前記量子カスケードレーザから出射された光を回折及び反射させる回折反射部を有し、前記回折反射部を揺動させることにより、前記光の一部を前記量子カスケードレーザに帰還させるMEMS回折格子と、を備える外部共振型レーザモジュールにおいて、前記量子カスケードレーザの駆動を制御するためのプログラムであって、
前記回折反射部が揺動する第1周波数よりも高い第2周波数のパルス光が前記量子カスケードレーザから出射され、且つ、前記回折反射部がm回(m:1以上の整数)往復する度に前記パルス光の位相が変化するように、前記量子カスケードレーザをパルス駆動させる制御部としてコンピュータを機能させる、プログラム。
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US16/051,547 US10574030B2 (en) | 2017-08-10 | 2018-08-01 | External resonance type laser module, analysis apparatus, method of driving external resonance type laser module, and non-transitory computer readable medium |
DE102018213312.3A DE102018213312A1 (de) | 2017-08-10 | 2018-08-08 | Lasermodul vom externen Resonanztyp, Analysevorrichtung, Verfahren zum Antreiben des Lasermoduls vom externen Resonanztyp und Programm |
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JP2020136608A (ja) * | 2019-02-25 | 2020-08-31 | 株式会社 東北テクノアーチ | スペクトル測定装置およびスペクトル測定方法 |
WO2022059268A1 (ja) * | 2020-09-15 | 2022-03-24 | 浜松ホトニクス株式会社 | 外部共振型レーザモジュール |
JP7287594B1 (ja) * | 2022-11-15 | 2023-06-06 | 三菱電機株式会社 | Qcl装置、外部共振型qclモジュール装置、分析装置及び光照射方法 |
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US11048053B2 (en) * | 2019-11-27 | 2021-06-29 | The Charles Stark Draper Laboratory, Inc. | Movable flexure and MEMS elements for improved optical coupling to photonic integrated circuits |
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US20190052058A1 (en) | 2019-02-14 |
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US10574030B2 (en) | 2020-02-25 |
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