JP2019029426A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- Physics & Mathematics (AREA)
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Abstract
Description
2 素子供給部
4 ボンディング機構
6 半導体素子
6a 機能面
7 基板
7a 電極
8 バンプ
8a バンプ基部
8b はんだ
9 接着剤層
9a 活性化対象領域
9* 樹脂封止部
60 半導体装置
Claims (3)
- 外部接続用のバンプが形成された機能面に、フラックス成分を含有するフィルム状の接着剤層が前記バンプを覆った状態で設けられた接着剤層付きの半導体素子を準備する第1工程と、
前記バンプが接合される電極を有する基板の上方に、前記バンプおよび前記電極が向かい合う状態で前記接着剤層付きの半導体素子を位置させる第2工程と、
前記接着剤層を前記電極に押圧するとともに前記半導体素子に超音波振動を印加することにより前記バンプと前記電極に挟まれた部分の前記フラックス成分を活性化する第3工程と、
さらに、前記半導体素子を前記基板に前記超音波振動を印加しながら押圧して前記バンプと前記電極の間から前記フラックス成分を押し出し、前記バンプと前記電極とを接触させる第4工程と、
前記超音波振動の印加と前記押圧を継続して前記バンプを前記電極に接合する第5工程と、を含む、半導体装置の製造方法。 - 前記接着剤層は、樹脂からなる主剤と、熱可塑剤と、樹脂の硬化剤および硬化促進剤と、有機酸と、フィラーと、を含む、請求項1に記載の半導体装置の製造方法。
- 前記バンプもしくは前記電極の少なくとも一方の表面にはんだを有する、請求項1もしくは2のいずれかに記載の半導体装置の製造方法。
Priority Applications (2)
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JP2017145077A JP6956313B2 (ja) | 2017-07-27 | 2017-07-27 | 半導体装置の製造方法 |
US16/040,617 US10636762B2 (en) | 2017-07-27 | 2018-07-20 | Method of manufacturing semiconductor device |
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JP2017145077A JP6956313B2 (ja) | 2017-07-27 | 2017-07-27 | 半導体装置の製造方法 |
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JP2019029426A true JP2019029426A (ja) | 2019-02-21 |
JP6956313B2 JP6956313B2 (ja) | 2021-11-02 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003100805A (ja) * | 2001-09-27 | 2003-04-04 | Toshiba Corp | 半導体装置の製造方法 |
JP2005026579A (ja) * | 2003-07-04 | 2005-01-27 | Fujitsu Ltd | ハンダバンプ付き電子部品の実装方法およびこれに用いるフラックスフィル |
JP2012079880A (ja) * | 2010-09-30 | 2012-04-19 | Sumitomo Bakelite Co Ltd | 接着剤、多層回路基板、半導体用部品および半導体装置 |
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