JP2019006510A - Transport device - Google Patents

Abstract

To allow a substrate in a predetermined posture to be transported and a substrate being transported in a posture other than the predetermined posture to stop.SOLUTION: A transport device 10 includes: a transport unit 50 for transporting a substrate 200 to which a plurality of components 210 are fixed; and a rod 112 movable between a first position at which the rod touches the substrate 200 being transported by the transport unit 50 to stop the substrate 200 and a second position at which the rod does not touch the substrate 200, the rod being configured not to touch the component 210 if the substrate 200 is being transported in a normal posture and to touch a heat radiator 210B if the substrate 200 is being transported in an abnormal posture so as to stop the substrate 200.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a transport apparatus.

  Patent Document 1 discloses a technique related to a belt cleaning operation for cleaning a conveyance belt used for a conveyance conveyor for substrate conveyance. In this prior art, the stopper pin of the substrate stopper is raised and applied to the substrate to position the substrate on the mounting stage.

Japanese Unexamined Patent Publication No. 2015-12107

  In a substrate production line, for some reason, an operator may take out a substrate once in the middle of the production line and then return it to the production line. When the substrate is returned, the substrate may be returned in a posture different from the original posture (predetermined posture) (for example, a posture in which the substrate is rotated 180 degrees). When the substrate is returned and transported in a posture different from the original posture, for example, there is a possibility that a problem such as inaccurate inspection of the substrate by the inspection apparatus may occur. Therefore, it is necessary to stop the substrate transported in a posture other than a predetermined posture.

  An object of the present invention is to transport a substrate in a predetermined posture and stop the substrate transported in a posture other than the predetermined posture.

  According to the first aspect of the present invention, there is provided a transport unit that transports a substrate on which one or more components are fixed, a first position that stops the substrate when it contacts the substrate transported by the transport unit, and does not contact the substrate. Move between two positions, and at the second position, if the board is transported in a predetermined posture, it will not hit the component, and if the board is transported in a position other than the specified position And a stop unit that stops the substrate when it hits the component.

  According to a second aspect of the present invention, when the substrate is viewed in a direction orthogonal to the plate surface, a change portion having a function of changing the position of the stop portion in a direction intersecting the transport direction of the substrate is provided. It is a conveyance apparatus as described in.

  The invention according to claim 3 is the transfer device according to claim 2, wherein the changing portion has a function of changing the position of the stop portion in a direction intersecting the plate surface of the substrate.

  According to a fourth aspect of the present invention, the changing unit includes a biaxial shaft including a first member that moves in a direction that intersects the transport direction of the substrate, and a second member that moves in a direction that intersects the plate surface of the substrate. 4. The transfer device according to claim 3, wherein one of the first member and the second member holds the stop, and the other holds one.

  According to a fifth aspect of the present invention, the stop portion is a member having a longitudinal direction in a direction intersecting the plate surface of the substrate, and the member is at the first position and the second position along the longitudinal direction. It is a conveying apparatus of any one of Claims 1-4 which moves.

  In the invention of claim 6, the stop portion is a rod provided in a cylinder tube constituting a cylinder, and the position of the rod stored in the cylinder tube is the first position, and the cylinder The conveying device according to claim 5, wherein the position of the rod protruding from the tube is the second position.

  The invention according to claim 7 is the position according to any one of claims 1 to 6, wherein the second position is a position where the stop portion hits the specific part fixed to the substrate with an anchor. It is a transfer device.

  In the invention according to claim 8, the second position is a position where the stop portion hits the specific part whose tip is located farthest from the plate surface of the substrate. It is a conveying apparatus given in any 1 paragraph.

  The invention according to claim 9 is the transport apparatus according to claim 8, wherein the second position is a position farther from the plate surface than a tip portion of a component other than the specific component.

  According to the first aspect of the present invention, the substrate in a predetermined posture is transported, and the substrate transported in a posture other than the predetermined posture can be stopped.

  According to the second aspect of the present invention, even in the case of a plurality of types of substrates having different fixed positions in the direction crossing the substrate transport direction of the specific component, the substrate in a predetermined posture is transported and determined in advance. The substrate transported in a posture other than the given posture can be stopped.

  According to the third aspect of the present invention, even in the case of a plurality of types of substrates having different distances from the plate surface of the tip portion of the specific component, the substrate in a predetermined posture is transported, and the predetermined posture The substrate transported in a posture other than can be stopped.

  According to the invention described in claim 4, compared to the case where two uniaxial robots are used, the mechanism stops in both the direction intersecting the substrate transport direction and the direction intersecting the substrate surface of the substrate with a simple mechanism. The position of the part can be changed.

  According to the fifth aspect of the present invention, it is possible to reduce the movement trajectory of the stop portion as compared with the case where the stop portion rotates and moves to the first position and the second position.

  According to the invention described in claim 6, by using the cylinder, the rod as the stop portion can be easily moved to the first position and the second position along the longitudinal direction.

  According to the seventh aspect of the present invention, it is possible to suppress the detachment of the component when hitting the stop portion, compared to the case where the stop portion hits a component that is not fixed to the substrate by the anchor.

  According to the invention described in claim 8, it is possible to suppress the stop portion from hitting a component other than the specific component as compared with a case where the stop portion hits a component whose tip is close to the plate surface of the substrate. Can do.

  According to the ninth aspect of the present invention, compared to the case where the second position is closer to the plate surface than the tip of the component other than the specific component, the component other than the specific component is used regardless of the posture of the board. It is possible to further suppress the hitting of the stop portion.

It is the perspective view which looked at the conveyance apparatus of one Embodiment of this invention from the conveyance direction downstream. It is the perspective view which looked at the conveyance apparatus shown in FIG. 1 from the conveyance direction upstream. It is a block diagram of the conveying apparatus shown in FIG. It is the top view seen from the upper side which shows typically the principal part of the conveying apparatus when the board | substrate of a normal posture is conveyed. It is the top view seen from the upper side which shows typically the principal part of the conveying apparatus in case the board | substrate of an abnormal posture is conveyed. It is the side view seen from the apparatus width direction which shows the principal part of a conveying machine typically, (A) is a side view in the state where a rod is in the 1st position, (B) is the rod in the 2nd position It is a side view of a state. It is the top view corresponding to FIG. 4 seen from the upper side which shows typically the principal part of the stop apparatus of a comparative example. It is the side view corresponding to FIG. 6 seen from the apparatus width direction which shows the principal part of the stop apparatus of a comparative example typically.

<Embodiment>
A transport apparatus according to an embodiment of the present invention will be described. Note that two orthogonal directions in the horizontal direction are defined as an X direction and a Y direction, and a vertical direction is defined as a Z direction. The X direction is indicated by an arrow X, the Y direction is indicated by an arrow Y, and the Z direction is indicated by an arrow Z.

(overall structure)
First, the overall configuration of the transport apparatus will be described.

  As shown in FIGS. 1, 2, and 3, the transfer device 10 constitutes a part of a substrate manufacturing line 11 in which a plurality of manufacturing facilities are connected by a transfer conveyor. The transport apparatus 10 includes a transport unit 50 that transports the substrate 200, a stop device 100 that stops the substrate 200, and a control unit 70 (see FIG. 3) that controls the transport unit 50 and the stop device 100. .

  As shown in FIGS. 1 and 2, the transport direction of the substrate 200 transported by the transport unit 50 is indicated by an arrow F. The transport direction F coincides with the Y direction. The X direction perpendicular to the transport direction (Y direction) and the vertical direction is the apparatus width direction. In the present embodiment, the direction orthogonal to the upper surface 202 of the substrate 200 conveyed by the conveyance unit 50 (the thickness direction of the substrate 200 and the normal direction of the substrate 200) coincides with the vertical direction.

  As shown in FIG. 1, in the present embodiment, an inspection apparatus 20 that inspects the substrate 200 is provided on the downstream side of the conveyance apparatus 10 in the conveyance direction of the stop device 100. Although illustration is omitted, the control unit 70 (see FIG. 3) also controls the inspection apparatus 20.

(substrate)
Next, the substrate 200 will be described. The direction such as up and down of the substrate 200 is the direction in which the substrate 200 is being transported.

  As shown in FIGS. 1 and 2, the substrate 200 has a rectangular shape in which the transport direction (Y direction) is longer than the apparatus width direction (X direction) when viewed from above (see also FIG. 4).

  The board 200 is a so-called printed board, and is a manufacturing apparatus on the upstream side of the transport apparatus 10 (inspection apparatus 20) of the present embodiment in the manufacturing line 11, and a plurality of components 210 are fixed to the upper surface 202. The components 210 fixed to the substrate 200 are electronic components such as an IC chip and a capacitor, and a radiator 210B. Although not shown in the present embodiment, the component 210 is also fixed to the lower surface 203 (see FIG. 6) of the substrate 200.

  In addition, in the board | substrates 200 other than FIG.1 and FIG.2, only the heat radiator 210B is illustrated and illustration of the other components 210 is abbreviate | omitted.

  As shown in FIGS. 1 and 2, the radiator 210B is provided in close contact with the upper surface of an electronic component 210A (for example, CPU) that generates a large amount of heat (see also FIG. 6). The radiator 210B (electronic component 210A) is fixed to one side of the substrate 200 in the device width direction (X direction) in plan view (see also FIG. 4). Note that the upper end portion 212B of the radiator 210B is located farthest from the upper surface (plate surface) 202 of the substrate 200 among all the components 210 fixed to the upper surface 202 of the substrate 200.

  As shown in FIGS. 1, 2, and 4, the radiator 210 </ b> B of the present embodiment has a plurality of cooling fins 214 </ b> B and 215 </ b> B. A linear anchor 220 is fitted between the cooling fin 214B and the cooling fin 215B, and the end of the anchor 220 is fixed to the substrate 200 with a wire clip 222. That is, the heat radiator 210 </ b> B is fixed to the substrate 200 by the anchor 220 and the wire clip 222.

  As shown in FIGS. 1, 2, and 4, a posture in which the short side portion 204 of the substrate 200 is transported on the front side in the transport direction and the short side portion 206 is on the rear side in the transport direction is a transport portion described later. Among the postures that can be transported at 50, the “normal posture” is an example of a predetermined posture. Then, as shown in FIG. 5, a posture in which the short side portion 204 of the substrate 200 is conveyed on the rear side in the conveyance direction and the short side portion 206 is located on the front side in the conveyance direction (posture rotated 180 ° from the “normal posture”). Is an “abnormal posture” as an example of a posture other than a predetermined posture among postures that can be transported by the transport unit 50 described later.

(Transport section)
Next, the conveyance unit 50 will be described.

  As shown in FIG.1 and FIG.2, the conveyance part 50 is a belt conveyor, Comprising: The drive roll 52, the driven roll 54 (refer FIG. 1), the drive roll 52, and the driven roll 54 (refer FIG. 1) are used. The endless belt 56 is wound around and a plurality of guide rolls 58 (see FIG. 1) for guiding the endless belt 56 that circulates. Further, guide frames 60 that guide the substrate 200 conveyed by the endless belt 56 are provided on both sides in the apparatus width direction.

  The guide frame 60 allows the substrate 200 to be transported in a normal posture in which the short side portion 204 is on the front side in the transport direction and the short side portion 206 is on the rear side in the transport direction, and the short side portion 204 is short on the rear side in the transport direction. It can be transported in two postures: an abnormal posture in which the side portion 206 is transported forward in the transport direction.

  The drive roll 52 rotates by being driven to rotate by a drive device (not shown), and the endless belt 56 circulates while being guided by the guide roll 58.

  When the substrate 200 transported from a device (not shown) on the upstream side of the transport device 10 reaches the transport unit 50, the substrate 200 is automatically placed on the endless belt 56 and transported downstream.

(Inspection equipment)
Next, the inspection apparatus 20 will be described.

  As shown in FIG. 1, the inspection apparatus 20 includes a lower unit 22 disposed on a lower side of a substrate 200 to be inspected (a lower side of the transport unit 50), and an upper side of the substrate 200 to be inspected (a transport unit 50). The upper unit 24 is disposed on the upper side of the upper side. The inspection apparatus 20 is an apparatus that performs electrical inspection of the substrate 200 by applying probe pins or the like (not shown) to the substrate 200 conveyed by the conveyance unit 50. During the inspection of the substrate 200 by the inspection apparatus 20, the transport unit 50 stops the transport (the rotation of the endless belt 56 is stopped).

(Stop device)
Next, the stop device 100 will be described.

  As shown in FIG. 2, the stop device 100 includes a cylinder 110 in which a rod 112 as an example of a stop unit protrudes downward, and a robot as an example of a change unit that changes the vertical direction of the cylinder 110 and the position in the device width direction. 120.

  The cylinder 110 is an apparatus (for example, an air cylinder) having a mechanism in which a vertical rod 112 provided in a cylindrical cylinder tube 11 protrudes downward from the cylinder tube 11.

  The robot 120 as an example of the changing unit includes a first stage 130 provided with a first table 132 that moves in the apparatus width direction as an example of the first member, and a first stage 130 that moves in the vertical direction as an example of the second member. And a second stage 140 provided with a two table 142.

  The first stage 130 is fixed to a frame not shown. The second stage 140 is fixed to the first table 132 of the first stage 130. The cylinder 110 is fixed to the second table 142 of the second stage 140. The cylinder 110 is fixed so that the rod 112 protrudes in the vertical direction.

  The robot 120 and the cylinder 110 are controlled by the control unit 70 (see FIG. 3). The controller 70 sets (changes) the position of the cylinder 110 in the apparatus width direction and the vertical direction by moving the first table 132 and the second table 142.

  The vertical position of the cylinder 110 is set by the robot 120 as follows. As shown in FIG. 6A, in a state where the rod 112 protrudes downward from the cylinder tube 111 (see FIG. 2) of the cylinder 110, the tip end portion 114 of the rod 112 is positioned below the lower surface 203 of the substrate 200. In the state where the rod 112 is stored in the cylinder 110, the tip end portion 114 of the rod 112 is set to be positioned above the upper surface 202 of the substrate 200 and below the tip end portion 212B of the radiator 210B. Yes.

  The position of the cylinder 110 in the apparatus width direction is set by the robot 120 as follows. The rod 112 in the state where it is stored in the cylinder 110 does not hit the radiator 210B in the substrate 200 conveyed in the “normal posture” shown in FIG. 4, but is conveyed in the “abnormal posture” shown in FIG. In 200, it is set to a position corresponding to the heat radiator 210B.

  In the present embodiment, the distal end portion 114 of the rod 112 stored in the cylinder 110 is above the distal end portions on the upper side of all the components 210 other than the radiator 210B fixed to the upper surface 202 of the substrate 200. positioned.

  Note that the state where the rod 112 protrudes from the cylinder tube 111 (see FIG. 2) of the cylinder 110 of FIG. 6A and the tip end portion 114 is located below the lower surface 203 of the substrate 200 is the first position. The second position is a state where the tip portion 114 stored in the cylinder 110 of (B) is located above the upper surface 202 of the substrate 200 and below the tip portion 212B of the radiator 210B. In other words, the rod 12 is a member having a longitudinal direction in a direction orthogonal to the upper surface 202 of the substrate 200, moves in the longitudinal direction, and is switched between the first position and the second position.

(Function and effect)
Next, the operation and effect of this embodiment will be described.

  As described above, the transport apparatus 10 constitutes a part of a substrate manufacturing line 11 in which a plurality of manufacturing facilities are connected by a transport conveyor. If no problem occurs on the upstream side of the transfer device 10 in the production line 11, the substrate 200 only flows in the transfer direction and no operator is involved.

  In this case, as shown in FIGS. 1, 2, and 4, the substrate 200 is transported in a “normal posture” in which the short side portion 204 is on the front side in the transport direction and the short side portion 206 is on the rear side in the transport direction.

  When the inspection apparatus 20 can inspect the substrate 200, the control unit 70 controls the stop device 100 to be in the second position (FIG. 6B) in which the rod 112 is stored, and the substrate 200 is transferred in the transport direction. It is conveyed to the inspection apparatus 20 on the downstream side. In this second position, since the rod 112 does not hit all the components 210 including the radiator 210B, the substrate 200 is transported downstream in the transport direction.

  When the inspection of the substrate 200 by the inspection device 20 is not possible due to waiting for the turn or the like, the stop device 100 is controlled to the first position where the rod 112 protrudes downward (FIG. 6A). As a result, the short side portion 204 of the substrate 200 hits the rod 112 and stops. When the inspection of the substrate 200 with the inspection device 20 becomes possible, the substrate 200 is transported to the inspection device 20 on the downstream side in the transport direction, with the rod 112 being in the second position.

  On the other hand, when a problem occurs on the upstream side of the transfer device 10 in the production line 11, the operator may take the substrate 200 out of the production line 11 and take a countermeasure, and then return the substrate 200 to the production line 11.

  At this time, the substrate 200 may not be returned to the original normal posture but may be returned to the abnormal posture rotated by 180 ° as shown in FIG.

  However, as shown in FIG. 6B, at the second position where the rod 112 is stored, the substrate 200 hits the radiator 210B and stops. Therefore, a defect caused by the substrate 200 in an abnormal posture being conveyed to the inspection apparatus 20, for example, the inspection of the substrate 200 is not performed correctly, or the components 210 such as the radiator 210B hit the components of the inspection apparatus 20. It is possible to suppress the occurrence of breakage due to this.

  Further, the radiator 210 </ b> B is fixed to the substrate 200 with an anchor 220. Therefore, compared with the case where the rod 112 hits the component 210 that is not fixed to the substrate 200 by the anchor 220, the detachment of the radiator 210B due to the rod 112 hitting is suppressed.

  The radiator 210 </ b> B is a component in which the upper end portion 212 </ b> B is farthest from the upper surface 202. Therefore, compared to the case where the rod 112 hits the component 210 whose tip is close to the upper surface 202 of the substrate 200, the rod 112 is prevented from hitting other components 210 other than the radiator 210B.

  Furthermore, the tip end portion 114 of the rod 112 is positioned above the tip end portions of all the components 210 other than the radiator 210B. Therefore, compared to the case where the second position of the rod 112 is closer to the upper surface 202 than the tip of the component 210 other than the radiator 210B, the rod 112 is attached to the component 210 other than the radiator 210B regardless of the posture of the substrate 200. Is further suppressed.

  In addition, when the board | substrate 200 to manufacture differs, the fixing position of the inner width direction of the heat radiator 210B may differ. Therefore, the control unit 70 uses the robot 120 to change the position of the cylinder 110 in the apparatus width direction according to the type of the substrate 200 to be manufactured. Moreover, when the board | substrate 200 to manufacture differs, the magnitude | size (distance from the upper surface 202 of the front-end | tip part 212B) of the heat radiator 210B may differ. Therefore, the control unit 70 uses the robot 120 to change the vertical position of the cylinder 110 according to the type of the substrate 200 to be manufactured. Therefore, the stopping device 100 can exhibit a function for a plurality of types of substrates 200.

  The robot 120 is a biaxial robot having a first stage 130 provided with a first table 132 that moves in the apparatus width direction and a second stage 140 provided with a second table 142. Therefore, for example, the structure is simple and control is easy as compared with the case of using two uniaxial robots.

  Further, the rod 112 whose longitudinal direction is perpendicular to the upper surface 202 of the substrate 200 moves to the first position and the second position along the longitudinal direction. Therefore, compared with the case where the rod 112 rotates and moves to the first position and the second position, for example, the movement trajectory of the rod 112 is small, and the space can be saved. Further, by using the cylinder 110, the rod 112 can be easily moved in the longitudinal direction.

  Here, the stop device 800 of the comparative example shown in FIGS. 7 and 8 will be described.

  The stop device 800 of the comparative example includes a cylinder 810 from which a rod 812 protrudes, and a block 820. The cylinder 810 and the block 820 are each fixed to a frame.

  As shown in FIG. 8, in a state where the rod 812 protrudes upward from the cylinder 810, the tip portion 814 of the rod 812 is positioned above the upper surface 202 of the substrate 200, and the rod 812 hits the short side portion 204. In a state where the rod 812 is stored in the cylinder 810, the tip end portion 814 of the rod 812 is positioned below the lower surface 203 of the substrate 200, and the rod 812 does not hit the short side portion 204.

  The block 820 is set such that the lower end portion 822 is positioned above the upper surface 202 of the substrate 200 and below the end portion 212B of the radiator 210B.

  When the rod 812 is stored, the substrate 200 in the normal state is transported downstream in the transport direction. In a state where the rod 812 protrudes upward, the short side portion 204 of the substrate 200 hits the rod 812 and stops.

  In addition, the position of the block 820 in the apparatus width direction is conveyed in the “abnormal posture” (see FIG. 5) without hitting the radiator 210 </ b> B in the substrate 200 being conveyed in the “normal posture” shown in FIG. 7. In the board | substrate 200, it sets to the position which hits the heat radiator 210B (refer the dashed-two dotted line of FIG. 7).

  Therefore, in the case of the substrate 200 in the normal posture, the block 820 does not hit all the components 210 including the heat radiator 210B, so the substrate 200 is transported downstream in the transport direction. However, in the case of an abnormal posture (see FIG. 5), the block 820 hits the radiator 210B (two-dot chain line in FIG. 7), and the substrate 200 stops.

  However, the stopping device 800 of the comparative example needs to fix the cylinder 810 and the block 820 up and down separately, and it is necessary to secure fixing places on the upper side and the lower side of the transport unit 50, respectively. The entire device becomes larger.

  On the other hand, in the stopping device 100 of the present embodiment, the fixed place is one of the upper side, so that the entire device is made compact.

<Others>
In addition, this invention is not limited to the said embodiment.

  For example, in the above embodiment, the rod 112 protruding from the cylinder tube 111 (see FIG. 2) of the cylinder 110 is the first position, and the rod 112 stored in the cylinder 110 is the second position. However, the rod (pin) 112 may be directly fixed to the second table 142 of the second stage 140 of the robot 120. In this case, the rod (pin) 112 is set to the first position by lowering the second table 142, and the rod (pin) 112 is set to the second position by raising the second table 142.

  Further, the cylinder 110 may be fixed to a fixing member such as a frame without the robot 120. In this case, the cylinder 110 may be detachable from a fixing member such as a frame, and the fixing position of the cylinder 110 may be changed according to the type of the substrate 200.

  Alternatively, the plurality of cylinders 110 may be fixed to the robot 120 and a fixing member such as a frame, and the plurality of rods 112 may be protruded to stop the substrate 200, for example.

  Further, for example, in the above embodiment, the substrate 200 has been transported in a posture in which the plate thickness direction is the vertical direction, but the present invention is not limited to this. The substrate 200 may be transported obliquely with the plate thickness direction having an angle with the vertical direction.

  For example, in the said embodiment, although the board | substrate 200 was a rectangle seeing from the plate | board thickness direction, it is not limited to this. The substrate 200 may be square when viewed from the thickness direction. Thus, when the substrate 200 is square, the abnormal posture of the substrate 200 may be conveyed not only in a normal posture rotated 180 ° but also in a normal posture rotated 90 °. Therefore, the second position of the rod 112 is set so as to hit the radiator 210B or other component 210 even in an abnormal posture rotated by 90 °.

  In the above case, two cylinders 110 are provided, and in the normal posture, they do not hit the two retracted rods 112, but in the abnormal posture rotated 180 ° from the normal posture, they hit one of the retracted rods 112, In an abnormal posture rotated by 90 ° from the normal posture, the other rod 112 in the retracted state may be hit.

  Further, for example, in the above-described embodiment, the stopping device 100 of the transport device 10 is provided on the upper side of the transport unit 50 so that the rod 112 hits the radiator 210 </ b> B on the upper surface 202 of the substrate 200. However, when the radiator 210 </ b> B is fixed to the lower surface 203 of the substrate 200, the stop device 100 of the transport device 10 may be provided below the transport unit 50. The stop device 100 may be provided both above and below the transport unit 50.

  Further, for example, in the above-described embodiment, the stopping device 100 of the transfer device 10 is set so that the rod 112 at the second position hits the radiator 210B on the upper surface 202 of the substrate 200. However, the radiator 210B is not limited to this. It may be set so that the rod 112 at the second position hits a component 210 other than the connector, for example, a connector fixed to the substrate 200 with an anchor. The component 210 that the rod 112 in the second position hits is not limited, but is preferably the component 210 that is fixed to the substrate 200 by the anchor 220 and the component 210 that is farthest from the upper surface 202 in the position of the tip. .

  Further, for example, in the above-described embodiment, the stop device 100 of the transport device 10 is arranged on the upstream side of the inspection device 20, but is not limited thereto. For example, the component 210 may be provided on the upstream side of a mounting device and a point flow soldering device for fixing the component 210 to the other surface on the substrate 200 on which the component 210 is mounted on one surface of the upper surface 202 or the lower surface 203.

  Furthermore, it cannot be overemphasized that it can implement with a various aspect in the range which does not deviate from the summary of this invention.

DESCRIPTION OF SYMBOLS 10 Conveyance apparatus 50 Conveyance part 100 Stop apparatus 110 Cylinder 111 Cylinder tube 112 Rod (an example of a stop part)
120 Robot (an example of a change unit)
132 First table (example of first member)
142 Second table (example of second member)
200 Substrate 202 Upper surface (plate surface)
203 Bottom surface (plate surface)
210 parts 210B radiator (an example of specific parts)
212B Tip 220 Anchor

Claims (9)

A transport unit for transporting a substrate on which one or more components are fixed;
The substrate moves between a first position where the substrate is transported by the transport unit and stops the substrate, and a second position where the substrate does not contact the substrate. At the second position, the substrate is in a predetermined posture. A stop unit that does not hit the component when it is being transported in the case of stopping the substrate by hitting a specific component when the substrate is being transported in a position other than the posture;
Conveying device equipped with.   The transport apparatus according to claim 1, further comprising: a changing unit having a function of changing the position of the stop unit in a direction intersecting the transport direction of the substrate when the substrate is viewed in a direction orthogonal to the plate surface. The changing unit has a function of changing the position of the stop unit in a direction intersecting the plate surface of the substrate.
The transport apparatus according to claim 2. The change unit is
A first member that moves in a direction that intersects the transport direction of the substrate;
A second member that moves in a direction intersecting the plate surface of the substrate;
A two-axis robot having
One of the first member and the second member holds the stop, and the other holds one.
The transport apparatus according to claim 3. The stopping portion is a member having a longitudinal direction in a direction intersecting the plate surface of the substrate, and the member moves to the first position and the second position along the longitudinal direction.
The conveyance apparatus of any one of Claims 1-4. The stop is a rod provided in a cylinder tube constituting the cylinder,
The position of the rod stored in the cylinder tube is the first position,
The position of the rod in a state of protruding from the cylinder tube is the second position.
The transport apparatus according to claim 5. The second position is a position where the stop hits the specific part fixed to the substrate with an anchor.
The conveyance apparatus of any one of Claims 1-6. The second position is a position at which the stop portion hits the specific part whose tip is farthest from the plate surface of the substrate.
The conveyance apparatus of any one of Claims 1-7. The second position is a position farther from the plate surface than the tip part of a part other than the specific part.
The transport apparatus according to claim 8.