JP2018533770A - 保護素子を有する光学アセンブリおよびそのような光学アセンブリを有する光学装置 - Google Patents
保護素子を有する光学アセンブリおよびそのような光学アセンブリを有する光学装置 Download PDFInfo
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Abstract
【選択図】図3
Description
Claims (19)
- 光学アセンブリ(32)であって、
特にEUV放射(4)を反射するための光学素子(13,14)と、
前記光学素子(13,14)の表面(31)を汚染物質(P)から保護する、薄膜(33a〜33d)と該薄膜(33a〜33d)が装着されたフレーム(34)とを含む保護素子(30)とを含み、
前記薄膜(33a〜33d)は、それぞれ前記光学素子(13,14)の前記表面(31)の一部の領域(T)を前記汚染物質(P)から保護する複数の薄膜セグメント(33a,33b,33c,33d)によって形成される光学アセンブリ。 - 請求項1に記載の光学アセンブリであって、前記フレーム(34)はそれぞれの前記薄膜セグメント(33a,33b,33c)をエッジで固定するための複数のウェブ(35,35a,35b)を有する光学アセンブリ。
- 請求項1または2に記載の光学アセンブリであって、前記光学素子(13,14)は前記表面(31)の少なくとも一部の領域を移動させるための少なくとも1つのアクチュエータ(19)を有する光学アセンブリ。
- 請求項1〜3の何れか一項に記載の光学アセンブリであって、前記光学素子は複数のミラーセグメントを有するセグメント化されたミラー、特に複数のファセット素子(13a〜13e,14a〜14d)を有するファセットミラー(13,14)である光学アセンブリ。
- 請求項4に記載の光学アセンブリであって、前記フレーム(34)の形状は前記ファセット素子(13a〜13e)の形状に適合される光学アセンブリ。
- 請求項4または5に記載の光学アセンブリであって、前記フレーム(34)のウェブ(35,35a,35b)は前記ファセット素子(13a〜13e)間の中間領域(36,37)に配置される光学アセンブリ。
- 請求項1〜6の何れか一項に記載の光学アセンブリであって、前記光学素子(13)の前記表面(31)と前記保護素子(34)との間の距離(A)は、10mm未満、好適には5mm未満、より好適には2mm未満である光学アセンブリ。
- 請求項1〜7の何れか一項に記載の光学アセンブリであって、少なくとも1つの薄膜セグメント(33a〜33d)の線膨張は、ファセット素子(13a〜13e)の線膨張(L,B)の整数倍にほぼ相当する光学アセンブリ。
- 請求項1〜8の何れか一項に記載の光学アセンブリであって、少なくとも1つの薄膜セグメント(33a〜33d)の長手方向の線膨張は、ファセット素子(13a〜13e)の長さ(L)と、隣接するファセット素子(13a〜13e)間の長手方向における距離(LZ)との合計の整数倍に相当し、前記少なくとも1つの薄膜セグメント(33a〜33d)の幅方向の線膨張は、ファセット素子の幅(B)と、隣接するファセット素子(13a〜13e)間の幅方向の距離(BZ)との合計の整数倍に相当する光学アセンブリ。
- 請求項1〜9の何れか一項に記載の光学アセンブリであって、前記薄膜セグメント(33a〜33c)はシリコン、特に多結晶シリコンから形成される光学アセンブリ。
- 請求項1〜10の何れか一項に記載の光学アセンブリであって、前記薄膜セグメント(33a〜33c)は前記光学素子(13)に面していない側面に汚染物質(P)の付着を低減させるコーティング(38)を有する光学アセンブリ。
- 請求項11に記載の光学アセンブリであって、前記コーティング(38)の材料は、酸化物、窒化物、炭化物およびホウカ物からなる群より選択される光学アセンブリ。
- 請求項11または12に記載の光学アセンブリであって、前記コーティング(38)の材料は、酸化チタン、酸化ジルコニウム、酸化イットリウム、酸化セリウム、酸化ニオブ、酸化ランタン、酸化バナジウム、酸化クロム、酸化マンガン、酸化アルミニウム、酸化コバルト、酸化モリブデンおよび酸化タングステンからなる群より選択される光学アセンブリ。
- 請求項1〜13の何れか一項に記載の光学アセンブリであって、前記薄膜セグメント(33a〜33c)はそれぞれ5nm〜500nmの厚さ(D)を有する光学アセンブリ。
- 請求項1〜14の何れか一項に記載の光学アセンブリであって、前記保護素子(30)は取り外し可能に装着される光学アセンブリ。
- 請求項1〜15の何れか一項に記載の光学アセンブリであって、前記光学素子(13)と該光学素子(13)に面する前記薄膜(33a〜33d)の面との間の空間(44)をパージガス(42)でパージするパージデバイス(41)を更に含む光学アセンブリ。
- 請求項1〜16に記載の少なくとも1つの光学アセンブリ(32)を含む、特にEUVリソグラフィシステム(1)用の光学装置。
- 請求項17に記載の光学装置であって、前記薄膜(33a〜33d)における前記光学素子(13)に面していない側面から汚染物質(P)を取り除く洗浄デバイス(39)を更に含む光学装置。
- 請求項17または18に記載の光学装置であって、照明系(10)を含み、該照明系(10)に前記光学アセンブリ(32)が配置され、前記光学アセンブリ(32)の前記光学素子は前記照明系(10)のファセットミラー(13,14)によって形成される光学装置。
Applications Claiming Priority (3)
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DE102015221209.2A DE102015221209A1 (de) | 2015-10-29 | 2015-10-29 | Optische Baugruppe mit einem Schutzelement und optische Anordnung damit |
DE102015221209.2 | 2015-10-29 | ||
PCT/EP2016/075845 WO2017072195A1 (en) | 2015-10-29 | 2016-10-26 | Optical assembly with a protective element and optical arrangement therewith |
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EP (1) | EP3368948B1 (ja) |
JP (1) | JP6805248B2 (ja) |
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JP2019015967A (ja) * | 2017-07-05 | 2019-01-31 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euv光学ユニットを有する計測システム |
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US11272606B2 (en) * | 2017-06-27 | 2022-03-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | EUV light source and apparatus for lithography |
DE102018110251B4 (de) * | 2018-04-27 | 2021-03-25 | Friedrich-Schiller-Universität Jena | Kontaminationsabweisender Spiegel und Verfahren zu dessen Herstellung |
DE102019117964A1 (de) | 2019-07-03 | 2020-07-23 | Asml Netherlands B.V. | Lithographieanlage mit einer Überwachungseinrichtung für ein Pellikel |
DE102019214269A1 (de) * | 2019-09-19 | 2021-03-25 | Carl Zeiss Smt Gmbh | Facettenspiegel für eine Beleuchtungsoptik einer Projektionsbelichtungsanlage |
DE102022121000B4 (de) | 2021-08-23 | 2024-03-07 | Carl Zeiss Smt Gmbh | Spiegelanordnung für eine EUV-Projektionsbelichtungsanlage mit einer Schutzvorrichtung zum Schutz der optischen Wirkfläche und EUV-Projektionsbelichtungsanlage |
DE102021211619A1 (de) | 2021-10-14 | 2023-04-20 | Carl Zeiss Smt Gmbh | EUV- Mehrfachspiegelanordnung |
DE102022209427A1 (de) * | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit federnd gelagerten Einzelspiegelelementen |
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TW201727277A (zh) | 2017-08-01 |
US11022893B2 (en) | 2021-06-01 |
US20180246413A1 (en) | 2018-08-30 |
WO2017072195A1 (en) | 2017-05-04 |
EP3368948A1 (en) | 2018-09-05 |
DE102015221209A1 (de) | 2017-05-04 |
TWI745312B (zh) | 2021-11-11 |
EP3368948B1 (en) | 2019-09-18 |
JP6805248B2 (ja) | 2020-12-23 |
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