JP2018519547A - 膜アセンブリを製造するための方法 - Google Patents
膜アセンブリを製造するための方法 Download PDFInfo
- Publication number
- JP2018519547A JP2018519547A JP2017565898A JP2017565898A JP2018519547A JP 2018519547 A JP2018519547 A JP 2018519547A JP 2017565898 A JP2017565898 A JP 2017565898A JP 2017565898 A JP2017565898 A JP 2017565898A JP 2018519547 A JP2018519547 A JP 2018519547A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- planar substrate
- membrane
- membrane assembly
- stack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 186
- 238000000034 method Methods 0.000 title claims abstract description 129
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 167
- 239000000463 material Substances 0.000 claims abstract description 126
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims abstract description 6
- 238000000059 patterning Methods 0.000 claims description 50
- 238000005530 etching Methods 0.000 claims description 22
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 12
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 229910052707 ruthenium Inorganic materials 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 4
- -1 ruthenium nitride Chemical class 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims description 3
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims description 3
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- TWFZGCMQGLPBSX-UHFFFAOYSA-N carbendazim Chemical compound C1=CC=C2NC(NC(=O)OC)=NC2=C1 TWFZGCMQGLPBSX-UHFFFAOYSA-N 0.000 claims description 2
- 229920006037 cross link polymer Polymers 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 284
- 230000005855 radiation Effects 0.000 description 94
- 239000010408 film Substances 0.000 description 67
- 239000004922 lacquer Substances 0.000 description 44
- 230000008569 process Effects 0.000 description 35
- 239000007789 gas Substances 0.000 description 21
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 19
- 230000001681 protective effect Effects 0.000 description 18
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 238000005286 illumination Methods 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 239000002245 particle Substances 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 239000000356 contaminant Substances 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 8
- 238000001312 dry etching Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 238000001459 lithography Methods 0.000 description 5
- 238000011068 loading method Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000000446 fuel Substances 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 3
- 210000001747 pupil Anatomy 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/80—Etching
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02592—Microstructure amorphous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02595—Microstructure polycrystalline
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
【選択図】図31
Description
[0001] 本願は、2015年7月17日出願の欧州出願第15177332.2号の優先権を主張し、その全体が参照により本明細書に組み込まれる。
−放射ビームB(例えば、EUV放射)を条件付けるように構成された、照明システム(又はイルミネータ)IL、
−パターニングデバイス(例えば、マスク又はレチクル)MAを支持するように構築され、パターニングデバイスを正確に位置決めするように構成された第1のポジショナPMに接続された、支持構造(例えば、マスクテーブル)MT、
−基板(例えば、レジストコートウェーハ)Wを保持するように構築され、基板を正確に位置決めするように構成された第2のポジショナPWに接続された、基板テーブル(例えば、ウェーハテーブル)WT、及び、
−パターニングデバイスMAによって放射ビームBに付与されたパターンを、基板Wのターゲット部分C(例えば、1つ以上のダイを含む)上に投影するように構成された、投影システム(例えば、反射型投影システム)PS、
を備える。
Claims (27)
- EUVリソグラフィ用の膜アセンブリを製造するための方法であって、
平面基板及び少なくとも1つの膜層を備えるスタックを提供することであって、前記平面基板は、内部領域及び前記内部領域周辺の境界領域を備えることと、
前記膜アセンブリが、前記少なくとも1つの膜層から形成される膜と、前記膜を保持し前記平面基板の前記境界領域から形成される境界と、を備えるように、前記平面基板の前記内部領域を選択的に除去することと、を含み、
前記スタックには、前記平面基板の前記内部領域を選択的に除去するステップ中に前記境界領域を機械的に保護するように構成された機械的保護材料が提供される、方法。 - 前記平面基板の前記内部領域を選択的に除去する前記ステップは、前記平面基板の前記内部領域を選択的に除去するように化学エッチング剤を使用することを含み、
前記機械的保護材料は、前記化学エッチング剤への化学的耐性がある、請求項1に記載の方法。 - 前記平面基板の前記内部領域を選択的に除去した後、前記機械的保護材料を除去すること、を含む、請求項1又は2に記載の方法。
- 前記機械的保護材料は、少なくとも1μmの厚みを有する、請求項1から3のいずれか一項に記載の方法。
- 前記機械的保護材料は、多くとも5μmの厚みを有する、請求項1から4のいずれか一項に記載の方法。
- 前記機械的保護材料は、架橋ポリマーである、請求項1から5のいずれか一項に記載の方法。
- 前記機械的保護材料は、ポリ(p−キシリレン)ポリマーである、請求項1から6のいずれか一項に記載の方法。
- 前記機械的保護材料は、Parylene又はProTEK(登録商標)タイプの材料である、請求項1から7のいずれか一項に記載の方法。
- 前記平面基板の前記内部領域を選択的に除去する前記ステップは、
マスク材料を前記スタックの下部表面に堆積させることと、
前記平面基板の前記境界領域に対応する前記スタックの前記下部表面に堆積された前記マスク材料からマスク層が形成されるように、前記マスク材料を選択的に除去することと、
前記平面基板の前記内部領域を異方的にエッチングすることと、
を含む、請求項1から8のいずれか一項に記載の方法。 - 前記平面基板は、100nmを超える厚みを有する酸化層及び非酸化層を備え、
前記酸化層は、前記非酸化層と前記少なくとも1つの膜層との間にある、請求項1から9のいずれか一項に記載の方法。 - 前記少なくとも1つの膜層は、化学気相蒸着によって前記平面基板に印加される、請求項1から10のいずれか一項に記載の方法。
- 前記少なくとも1つの膜層は、少なくとも1つの多結晶シリコン層を備える、請求項1から11のいずれか一項に記載の方法。
- 前記少なくとも1つの多結晶シリコン層は、少なくとも1つの非晶質シリコン層を結晶化することによって形成される、請求項12に記載の方法。
- 前記膜アセンブリは、パターニングデバイス又は動的ガスロック用である、請求項1から13のいずれか一項に記載の方法。
- EUVリソグラフィのための膜アセンブリであって、
多結晶シリコン又は単結晶シリコンを含む少なくとも1つの膜層から形成される膜と、
前記膜を保持する境界と、を備え、
前記膜は、上部キャッピング層及び下部キャッピング層によってキャッピングされ、
前記上部キャッピング層及び前記下部キャッピング層の各々は、Ru、Zr、Mo、酸化シリコン、酸化ジルコニウム、酸化アルミニウム、窒化ホウ素、酸化ルテニウム、窒化ルテニウム、窒化ジルコニウム、酸化モリブデン、又は窒化モリブデン、又はケイ化モリブデンのうちの少なくとも1つを含み、
前記境界は、内部領域及び前記内部領域周辺の境界領域を含む平面基板から形成され、
前記境界は、前記平面基板の前記内部領域を選択的に除去することによって形成され、
前記平面基板は、前記境界が酸化層及び非酸化層を含むような、前記酸化層及び前記非酸化層を備え、
前記酸化層は、前記非酸化層と前記少なくとも1つの膜層との間にあり、
前記境界は、マスク層を備え、
前記平面基板の前記境界領域は、前記マスク層と前記少なくとも1つの膜層との間にある、膜アセンブリ。 - 前記マスク層は、窒化シリコンを含む、請求項15に記載の膜アセンブリ。
- 前記酸化層は、二酸化シリコンを含む、請求項15又は16に記載の膜アセンブリ。
- 前記膜層は、35nmから150nmの範囲内の厚みを有する、請求項15から17のいずれか一項に記載の膜アセンブリ。
- 前記上部キャッピング層及び前記下部キャッピング層の各々は、2.5nm未満又はこれに等しい厚みを有する、請求項15から18のいずれか一項に記載の膜アセンブリ。
- 前記膜層、前記上部キャッピング層及び前記下部キャッピング層を組み合わせた厚みは、50nm未満又はこれに等しい、請求項15から19のいずれか一項に記載の膜アセンブリ。
- 前記酸化層は、200nmから500nmの範囲内の厚みを有する、請求項15から20のいずれか一項に記載の膜アセンブリ。
- 前記非酸化層は、500μmから1mmの範囲内の厚みを有する、請求項15から21のいずれか一項に記載の膜アセンブリ。
- 前記マスク層は、100nmから200nmの範囲内の厚みを有する、請求項15から22のいずれか一項に記載の膜アセンブリ。
- 前記酸化層と前記膜層との間に下部犠牲層を備える、請求項15から23のいずれか一項に記載の膜アセンブリ。
- 前記下部犠牲層は、非晶質シリコンを含む、請求項24に記載の膜アセンブリ。
- 前記下部犠牲層は、10nmから50nmの範囲内の厚みを有する、請求項24又は25に記載の膜アセンブリ。
- 前記膜アセンブリは、パターニングデバイス又は動的ガスロック用である、請求項15から26のいずれか一項に記載の膜アセンブリ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15177332.2 | 2015-07-17 | ||
EP15177332 | 2015-07-17 | ||
PCT/EP2016/065703 WO2017012846A1 (en) | 2015-07-17 | 2016-07-04 | Method for manufacturing a membrane assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018519547A true JP2018519547A (ja) | 2018-07-19 |
JP6898867B2 JP6898867B2 (ja) | 2021-07-07 |
Family
ID=53673834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017565898A Active JP6898867B2 (ja) | 2015-07-17 | 2016-07-04 | 膜アセンブリを製造するための方法 |
Country Status (9)
Country | Link |
---|---|
US (4) | US10712657B2 (ja) |
EP (1) | EP3326032A1 (ja) |
JP (1) | JP6898867B2 (ja) |
KR (1) | KR20180030673A (ja) |
CN (2) | CN116819885A (ja) |
CA (2) | CA3225142A1 (ja) |
NL (1) | NL2017093A (ja) |
TW (4) | TWI797867B (ja) |
WO (1) | WO2017012846A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020160345A (ja) * | 2019-03-27 | 2020-10-01 | 三井化学株式会社 | ペリクル自立膜の製造方法、ペリクルの製造方法、および半導体装置の製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6898867B2 (ja) | 2015-07-17 | 2021-07-07 | エーエスエムエル ネザーランズ ビー.ブイ. | 膜アセンブリを製造するための方法 |
CN115202162A (zh) * | 2015-12-14 | 2022-10-18 | Asml荷兰有限公司 | 用于制造隔膜组件的方法 |
CN108604058A (zh) | 2015-12-14 | 2018-09-28 | Asml荷兰有限公司 | 隔膜组件 |
US10908496B2 (en) | 2016-04-25 | 2021-02-02 | Asml Netherlands B.V. | Membrane for EUV lithography |
JP7186183B2 (ja) * | 2017-06-15 | 2022-12-08 | エーエスエムエル ネザーランズ ビー.ブイ. | ペリクル及びペリクルアセンブリ |
KR101900720B1 (ko) * | 2017-11-10 | 2018-09-20 | 주식회사 에스앤에스텍 | 극자외선 리소그래피용 펠리클 및 그의 제조방법 |
CN112041743A (zh) * | 2018-05-04 | 2020-12-04 | Asml荷兰有限公司 | 用于euv光刻术的表膜 |
KR20210065113A (ko) * | 2018-09-28 | 2021-06-03 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 시스템 및 방법 |
KR20200059061A (ko) | 2018-11-20 | 2020-05-28 | 삼성전자주식회사 | 극자외선 리소그래피용 펠리클 및 그 제조방법 |
EP3798728A1 (en) * | 2019-09-26 | 2021-03-31 | S&S Tech Co., Ltd. | Pellicle for euv lithography and method for manufacturing the same |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002508583A (ja) * | 1998-03-25 | 2002-03-19 | インスティトゥート フュア ミクロエレクトロニク シュツットガルト スティフツング デス エッフェントリッヘン レヒツ | 広範囲メンブランマスクを製造する方法 |
JP2004111713A (ja) * | 2002-09-19 | 2004-04-08 | Semiconductor Leading Edge Technologies Inc | 露光用マスク、露光方法、半導体装置の製造方法および露光用マスクの製造方法 |
JP2008518773A (ja) * | 2004-11-08 | 2008-06-05 | ブルーワー サイエンス アイ エヌ シー. | 微細電子部品製造時に基板の外側エッジをコーティングする装置 |
KR20090032876A (ko) * | 2007-09-28 | 2009-04-01 | 주식회사 하이닉스반도체 | 리소그래피 장치 및 이를 이용한 반도체 소자의 형성 방법 |
JP2010256434A (ja) * | 2009-04-22 | 2010-11-11 | Shin-Etsu Chemical Co Ltd | リソグラフィ用ペリクルおよびその製造方法 |
JP2014211474A (ja) * | 2013-04-17 | 2014-11-13 | 凸版印刷株式会社 | ペリクル及びペリクルの製造方法 |
US20140370423A1 (en) * | 2013-06-13 | 2014-12-18 | International Business Machines Corporation | Extreme ultraviolet (euv) radiation pellicle formation method |
JP5686394B1 (ja) * | 2014-04-11 | 2015-03-18 | レーザーテック株式会社 | ペリクル検査装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5916554Y2 (ja) | 1979-12-08 | 1984-05-15 | 山田油機製造株式会社 | 撹拌機能を持つたポンプ等の吸入管 |
US6622872B1 (en) | 1997-11-07 | 2003-09-23 | California Institute Of Technology | Micromachined membrane particle filter using parylene reinforcement |
US7349223B2 (en) * | 2000-05-23 | 2008-03-25 | Nanonexus, Inc. | Enhanced compliant probe card systems having improved planarity |
US6623893B1 (en) | 2001-01-26 | 2003-09-23 | Advanced Micro Devices, Inc. | Pellicle for use in EUV lithography and a method of making such a pellicle |
CN100551548C (zh) | 2004-11-08 | 2009-10-21 | 布鲁尔科技公司 | 挡板,包含挡板的组合物体,以及将一成分涂到基板上的方法 |
JP5674314B2 (ja) * | 2007-02-28 | 2015-02-25 | インテグリス・インコーポレーテッド | レチクルsmifポッド又は基板コンテナ及びそのパージ方法 |
EP2051139B1 (en) | 2007-10-18 | 2010-11-24 | Shin-Etsu Chemical Co., Ltd. | Pellicle and method for manufacturing the same |
DE102008011501A1 (de) * | 2008-02-25 | 2009-08-27 | Carl Zeiss Smt Ag | Verfahren zum Betreiben eines Beleuchtungssystems einer mikrolithographischen Projektionsbelichtungsanlage |
JP4928494B2 (ja) * | 2008-05-02 | 2012-05-09 | 信越化学工業株式会社 | ペリクルおよびペリクルの製造方法 |
KR101572269B1 (ko) | 2009-09-14 | 2015-12-04 | 에스케이하이닉스 주식회사 | 극자외선 마스크를 보호하는 펠리클 제조 방법 |
EP2531281A1 (en) | 2010-02-03 | 2012-12-12 | Koninklijke Philips Electronics N.V. | Membrane for oxygen generation |
CN103443863B (zh) * | 2011-03-23 | 2017-03-08 | 卡尔蔡司Smt有限责任公司 | Euv反射镜布置、包括euv反射镜布置的光学系统以及操作包括euv反射镜布置的光学系统的方法 |
WO2014020003A1 (en) | 2012-08-03 | 2014-02-06 | Asml Netherlands B.V. | Lithographic apparatus and method of manufacturing a device |
US10139725B2 (en) * | 2013-03-27 | 2018-11-27 | Asml Netherlands B.V. | Lithographic apparatus |
US9140975B2 (en) * | 2013-12-13 | 2015-09-22 | Globalfoundries Inc. | EUV pellicle frame with holes and method of forming |
CN110501769B (zh) | 2014-07-04 | 2021-11-23 | Asml荷兰有限公司 | 用于光刻设备内的膜和包括这种膜的光刻设备 |
JP6898867B2 (ja) * | 2015-07-17 | 2021-07-07 | エーエスエムエル ネザーランズ ビー.ブイ. | 膜アセンブリを製造するための方法 |
NL2017370A (en) * | 2015-09-02 | 2017-03-08 | Asml Netherlands Bv | A method for manufacturing a membrane assembly |
-
2016
- 2016-07-04 JP JP2017565898A patent/JP6898867B2/ja active Active
- 2016-07-04 CN CN202310632992.9A patent/CN116819885A/zh active Pending
- 2016-07-04 CN CN202111094353.9A patent/CN113777894A/zh active Pending
- 2016-07-04 EP EP16734399.5A patent/EP3326032A1/en active Pending
- 2016-07-04 WO PCT/EP2016/065703 patent/WO2017012846A1/en active Application Filing
- 2016-07-04 US US15/743,275 patent/US10712657B2/en active Active
- 2016-07-04 CA CA3225142A patent/CA3225142A1/en active Pending
- 2016-07-04 CA CA2992804A patent/CA2992804A1/en active Pending
- 2016-07-04 KR KR1020187004729A patent/KR20180030673A/ko active IP Right Grant
- 2016-07-04 NL NL2017093A patent/NL2017093A/en unknown
- 2016-07-13 TW TW110145163A patent/TWI797867B/zh active
- 2016-07-13 TW TW112107528A patent/TW202331410A/zh unknown
- 2016-07-13 TW TW105122102A patent/TWI706217B/zh active
- 2016-07-13 TW TW109129365A patent/TWI750786B/zh active
-
2020
- 2020-06-10 US US16/897,535 patent/US11061320B2/en active Active
-
2021
- 2021-06-15 US US17/347,734 patent/US11624980B2/en active Active
-
2023
- 2023-03-13 US US18/120,886 patent/US11971656B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002508583A (ja) * | 1998-03-25 | 2002-03-19 | インスティトゥート フュア ミクロエレクトロニク シュツットガルト スティフツング デス エッフェントリッヘン レヒツ | 広範囲メンブランマスクを製造する方法 |
JP2004111713A (ja) * | 2002-09-19 | 2004-04-08 | Semiconductor Leading Edge Technologies Inc | 露光用マスク、露光方法、半導体装置の製造方法および露光用マスクの製造方法 |
JP2008518773A (ja) * | 2004-11-08 | 2008-06-05 | ブルーワー サイエンス アイ エヌ シー. | 微細電子部品製造時に基板の外側エッジをコーティングする装置 |
KR20090032876A (ko) * | 2007-09-28 | 2009-04-01 | 주식회사 하이닉스반도체 | 리소그래피 장치 및 이를 이용한 반도체 소자의 형성 방법 |
JP2010256434A (ja) * | 2009-04-22 | 2010-11-11 | Shin-Etsu Chemical Co Ltd | リソグラフィ用ペリクルおよびその製造方法 |
JP2014211474A (ja) * | 2013-04-17 | 2014-11-13 | 凸版印刷株式会社 | ペリクル及びペリクルの製造方法 |
US20140370423A1 (en) * | 2013-06-13 | 2014-12-18 | International Business Machines Corporation | Extreme ultraviolet (euv) radiation pellicle formation method |
JP5686394B1 (ja) * | 2014-04-11 | 2015-03-18 | レーザーテック株式会社 | ペリクル検査装置 |
JP2015204339A (ja) * | 2014-04-11 | 2015-11-16 | レーザーテック株式会社 | ペリクル検査装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020160345A (ja) * | 2019-03-27 | 2020-10-01 | 三井化学株式会社 | ペリクル自立膜の製造方法、ペリクルの製造方法、および半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2017012846A1 (en) | 2017-01-26 |
CN113777894A (zh) | 2021-12-10 |
US20210311385A1 (en) | 2021-10-07 |
US20230213851A1 (en) | 2023-07-06 |
CA2992804A1 (en) | 2017-01-26 |
US11971656B2 (en) | 2024-04-30 |
KR20180030673A (ko) | 2018-03-23 |
TW202109179A (zh) | 2021-03-01 |
JP6898867B2 (ja) | 2021-07-07 |
CA3225142A1 (en) | 2017-01-26 |
TW202210935A (zh) | 2022-03-16 |
CN116819885A (zh) | 2023-09-29 |
NL2017093A (en) | 2017-01-19 |
US20180203345A1 (en) | 2018-07-19 |
TWI797867B (zh) | 2023-04-01 |
EP3326032A1 (en) | 2018-05-30 |
TW201712427A (zh) | 2017-04-01 |
US20200301269A1 (en) | 2020-09-24 |
US11061320B2 (en) | 2021-07-13 |
CN107850831A (zh) | 2018-03-27 |
TWI706217B (zh) | 2020-10-01 |
TW202331410A (zh) | 2023-08-01 |
US10712657B2 (en) | 2020-07-14 |
TWI750786B (zh) | 2021-12-21 |
US11624980B2 (en) | 2023-04-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11061320B2 (en) | Method for manufacturing a membrane assembly | |
EP3391151B1 (en) | A method of manufacturing a membrane assembly for euv lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method | |
NL2017370A (en) | A method for manufacturing a membrane assembly | |
EP3371655B1 (en) | A method for manufacturing a membrane assembly and the membrane assembly | |
NL2025186B1 (en) | Pellicle for euv lithography | |
CN107850831B (zh) | 用于制造隔膜组件的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180220 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190701 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200325 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200409 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200706 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20201126 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210319 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20210319 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20210401 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20210402 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210609 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210611 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6898867 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |