JP2018510508A - オプトエレクトロニクス半導体チップ、オプトエレクトロニクス半導体部品及びオプトエレクトロニクス半導体チップの生産方法 - Google Patents
オプトエレクトロニクス半導体チップ、オプトエレクトロニクス半導体部品及びオプトエレクトロニクス半導体チップの生産方法 Download PDFInfo
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Abstract
Description
3 キャリア
4 導電層
5 変換素子
6 補助キャリア
7 保護層
8 ミラー層
10 第1層
11 活性層
12 第2層
20 第1接触面
21 第2接触面
30 キャリアの上面
31 キャリアの底面
32 キャリアの側面
40 第1接触素子
41 第2接触素子
45 接続素子
50 ポッティング材
60 チューブ
100 オプトエレクトロニクス半導体チップ
101 電流分布構造
121 電流分布構造
200 接続キャリア
400 接続領域
401 第1接点ブロック
411 第2接点ブロック
500 発光ダイオード
501 被覆体
600 補助キャリア
601 プラットフォーム
1000 オプトエレクトロニクス半導体装置
Claims (20)
- キャリア(3)及び、前記キャリア(3)の上面(30)上に配置され、正常動作時に、電磁放射を出射又は吸収する半導体積層体(1)を有する本体と、
前記半導体積層体(1)上に配置され、前記キャリア(3)から離れた、前記半導体積層体(1)を電気的に接続可能にする2つの接触面(20、21)と、
前記接触面(20、21)に設けられ、導電的に接続される2つの接触素子(40、41)とを備え、
前記キャリア(3)は、前記上面(30)の横方向に延在する側面(32)及び前記上面(30)と反対側の底面(31)を有し、
前記接触素子(40、41)は、前記接触面(20、21)から、前記本体の端部上において前記キャリア(3)の側面(32)上へ導かれた導体トラックとして設けられる、
オプトエレクトロニクス半導体チップ(100)。 - 前記接触素子(40、41)は、それぞれ一片の導体トラックの形状を有し、
前記接触素子(40、41)は、前記接触面(20、21)から前記側面(32)まで連続して、前記本体上に形状に合わせて設置され、
前記キャリア(3)は、前記半導体積層体(1)のための成長基板であり、
前記接触素子(40、41)は、前記キャリア(3)の対応する前記側面(32)上に直接設置される、
請求項1に記載のオプトエレクトロニクス半導体チップ(100)。 - 前記接触素子(40、41)は、前記キャリア(3)の2つの互いに逆向きの側面(32)上に導かれ、
前記キャリア(3)の残りの全ての前記側面(32)には、導体トラック及び放射を透過させないコーティングは設けられない、
請求項1又は請求項2に記載のオプトエレクトロニクス半導体チップ(100)。 - 前記接触素子(40、41)は、前記キャリア(3)の同じ側面(32)上に導かれ、
全ての前記側面(32)及び前記底面(31)はミラー層(8)により完全にミラー化され、
前記ミラー層(8)は、動作中の前記半導体積層体(1)より出射された放射に対し、少なくとも90%の反射率を有する、
請求項1又は請求項2に記載のオプトエレクトロニクス半導体チップ(100)。 - 前記キャリア又は前記本体の少なくともの一方の側面がミラー層(8)によって覆われ、
前記ミラー層(8)はパターニングされ、前記パターニングにより、前記キャリア又は前記本体の対応する側面からの出射挙動が調整され、
変換素子(5)は、パターニングされた前記ミラー層に設けられる、
請求項1に記載のオプトエレクトロニクス半導体チップ(100)。 - 前記半導体チップ(100)は、前記キャリア(3)がサファイアキャリアであり、前記半導体積層体(1)が前記サファイアキャリア上に成長される、サファイアボリュームエミッタであり、
前記半導体積層体(1)は、前記キャリア(3)と対向した第1導電型の第1層(10)、前記キャリア(3)から離れた第2導電型の第2層(12)、及び前記第1層(10)と前記第2層(12)との間に設置された活性層(11)を有し、
第2接触面(21)は、前記第2層(12)上に配置され、
前記第2層(12)は、前記第2接触面(21)により電気的に接続可能であり、
第1接触面(20)は、前記半導体積層体(1)の凹部内において前記第1層(10)上に配置され、前記凹部内において前記第2層(12)及び前記活性層(11)が除去され、前記第1層(10)が露出し、
前記第1層(10)は、前記第1接触面(20)により電気的に接続可能であり、
前記接触素子(40、41)は、前記キャリア(3)の対応する前記側面(32)上に直接設置され、前記キャリア(3)と接触素子(40、41)との間にその他の層は設置されない、
請求項1〜請求項5のいずれかに記載のオプトエレクトロニクス半導体チップ(100)。 - 前記半導体チップ(100)は、6つの境界面を有する角柱の幾何学的基本形状を有し、
動作中、前記半導体チップ(100)全ての前記境界面を介して放射が出射され、
動作中放射を出射することができる、前記半導体チップ(100)の前記総表面積の割合は、少なくとも99%である、
請求項1〜請求項6のいずれかに記載のオプトエレクトロニクス半導体チップ(100)。 - 前記接触素子(40、41)は、前記キャリア(3)の前記底面(31)に導かれ、
前記底面(31)の領域において、前記接触素子(40、41)は、前記半導体チップ(100)を接続キャリア(200)上に実装し、電気的に接続することができる接続領域(400)を各々有し、
前記接続領域(400)において、前記対応する接触素子(40、41)は、橋部として、前記キャリア(3)から離れるように導かれ、
前記底面(31)から遠ざかる方向において、前記接続領域(400)は、前記キャリア(3)の前記底面(31)と同一平面上に終端される、
請求項1〜請求項7のいずれかに記載のオプトエレクトロニクス半導体チップ(100)。 - 前記半導体積層体(1)により出射された放射の少なくともの一部を別の波長範囲の放射へ変換する変換素子(5)が前記半導体積層体(1)に設けられ、
前記変換素子(5)は、最大で50μmの厚さを有する、
請求項1〜請求項8のいずれかに記載のオプトエレクトロニクス半導体チップ(100)。 - 前記底面(31)及び前記接続領域(400)を除いて、前記本体及び前記接触素子(40、41)は完全にポッティング材(50)により密閉され、
前記ポッティング材(50)は、前記半導体積層体(1)により出射された放射の一部を別の波長範囲の放射へ変換する、
少なくとも請求項8に記載のオプトエレクトロニクス半導体チップ(100)。 - 請求項1〜請求項10のいずれかに記載の半導体チップ(100)と、
前記キャリア(3)の2つの側面(32)に設けられた2つの導電接点ブロック(410、420)とを備え、
前記接点ブロック(401、411)は、前記接触素子(40、41)と導電的に接続され、
前記接点ブロック(401、411)により覆われない、前記本体の部分を全体的に又は部分的に覆う、被覆体(501)が前記本体の周囲に配置され、
前記発光ダイオード(500)が実装されていない状態において、前記発光ダイオード(500)の外面上の前記接点ブロック(401、411)は、覆われておらず、動作中、前記発光ダイオード(500)の外部電気コンタクトのための働きをする、
発光ダイオード(500)。 - 前記接点ブロック(401、411)は、前記2つの側面(32)を完全に覆い、前記2つの側面(32)の平面視において、前記2つの側面(32)より突出する、請求項11に記載の発光ダイオード(500)。
- 前記接点ブロック(401、411)は、前記キャリア(3)の2つの互いに逆向きの側面(32)に設けられ、
前記半導体チップ(100)は、前記被覆体(501)及び前記接点ブロック(401、411)により完全に囲まれ、
前記被覆体(501)は、前記発光ダイオード(500)の前記外面上において前記接点ブロック(401、411)と同一平面上に終端され、
前記接点ブロック(401、411)及び前記被覆体(501)により形成された、前記発光ダイオード(500)の前記外面は、製造公差の範囲内で平滑であり、
前記発光ダイオード(500)の前記外面は、円柱体、角柱、又は楕円体の外面の幾何形状を有する、
請求項11又は請求項12に記載の発光ダイオード(500)。 - 請求項1〜請求項13のいずれかに記載の半導体チップ(100)を少なくとも2つ有するオプトエレクトロニクス半導体装置(1000)であって、
一方の半導体チップ(100)の接触素子(40、41)は、他方の半導体チップ(100)の接触素子(40、41)と導電的に接続され、
前記半導体チップ(100)は、電気的に直列又は並列に接続される、
オプトエレクトロニクス半導体装置(1000)。 - 前記一方の半導体チップ(100)の接触素子(40、41)は、前記他方の半導体チップ(100)の接触素子(40、41)と直接機械的及び電気的に接続される、請求項14に記載のオプトエレクトロニクス半導体装置(1000)。
- 前記半導体装置(1000)は、少なくとも請求項11に記載の発光ダイオード(500)を少なくとも2つ有し、
隣接する発光ダイオード(500)の前記接点ブロック(401、411)は、互いに直接接する、
請求項14に記載のオプトエレクトロニクス半導体装置(1000)。 - オプトエレクトロニクス半導体チップ(100)の生産方法であって、
A)本体を設けるステップであって、前記本体は上面(30)、上面(30)と反対側の底面(31)、及び上面(30)の横方向に延在して上面(30)と前記底面(31)とを接続する側面(32)を有するキャリア(3)と、前記キャリア(3)の上面(30)に塗布され、正常動作時に、電磁放射を出射又は吸収する半導体積層体(1)とを有する、ステップと、
B)前記本体を、前記半導体積層体(1)が前記補助キャリア(6)から離れるように補助キャリア(6)に設けるステップと、
C)前記キャリア(3)から離れた少なくとも前記半導体積層体(1)上の接触面(20、21)においては前記保護層(7)が設けられないままであるように保護層(7)を前記本体に設けるステップであって、前記半導体積層体(1)は、前記接触面(20、21)により電気的に接続可能である、ステップと、
D)導電層(4)を、前記キャリア(3)の前記側面(32)、前記接触面(20、21)、及び前記保護層(7)に設けるステップと、
E)前記本体の端部上において、前記接触面(20、21)から前記キャリア(3)の側面(32)上へ前記本体上に形状に合わせて設置された導体トラックの形状を有する接触素子(40、41)が得られるように、前記保護層(7)を、その上の前記導電層(4)とともに取り外されるステップ、とを含む、
方法。 - ステップC)において、前記保護層(7)は、まずフォトレジストとして前記本体及び前記補助キャリア(6)に設けられ、
その後、続いて前記接触素子(40、41)により覆われる、前記本体及び/又は前記補助キャリア(6)の領域にフォトレジストが設けられないように、前記フォトレジストがパターニングされる、
請求項17に記載の方法。 - ステップE)の後、前記接触素子(40、41)が設けられた前記本体が、変換フィルム又はポッティング組成物である変換素子(5)によって覆われ、
ステップE)の後、前記補助キャリア(6)が、前記本体から取り外される、
請求項17又は請求項18に記載の方法。 - 少なくとも請求項17の前記方法ステップを含む発光ダイオード(500)の生産方法であって、
ステップE)の後、接点ブロック(401、411)が、前記キャリア(3)の2つの側面(32)に設けられ、
その後、前記接点ブロック(401、411)により覆われない前記半導体チップ(100)の全ての領域が被覆体(501)により囲まれる、
方法。
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PCT/EP2016/056819 WO2016156329A1 (de) | 2015-03-30 | 2016-03-29 | Optoelektronischer halbleiterchip, optoelektronisches halbleiterbauelement und verfahren zur herstellung eines optoelektronischen halbleiterchips |
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DE102015109852A1 (de) | 2015-06-19 | 2016-12-22 | Osram Opto Semiconductors Gmbh | Leuchtdiode und Verfahren zur Herstellung einer Leuchtdiode |
DE102016104202A1 (de) | 2016-03-08 | 2017-09-14 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauteil |
DE102016106571A1 (de) | 2016-04-11 | 2017-10-12 | Osram Opto Semiconductors Gmbh | Lichtemittierender Halbleiterchip, lichtemittierendes Bauelement und Verfahren zur Herstellung eines lichtemittierenden Bauelements |
DE102016106570A1 (de) | 2016-04-11 | 2017-10-12 | Osram Opto Semiconductors Gmbh | Lichtemittierender Halbleiterchip, lichtemittierendes Bauelement und Verfahren zur Herstellung eines lichtemittierenden Bauelements |
DE102016111059A1 (de) | 2016-06-16 | 2017-12-21 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von optoelektronischen Halbleiterbauelementen und optoelektronischen Modulen sowie optoelektronisches Halbleiterbauelement und optoelektronisches Modul |
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