JP2018509643A - ゲート構造を含む光変調素子 - Google Patents
ゲート構造を含む光変調素子 Download PDFInfo
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- JP2018509643A JP2018509643A JP2017536574A JP2017536574A JP2018509643A JP 2018509643 A JP2018509643 A JP 2018509643A JP 2017536574 A JP2017536574 A JP 2017536574A JP 2017536574 A JP2017536574 A JP 2017536574A JP 2018509643 A JP2018509643 A JP 2018509643A
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- 230000008859 change Effects 0.000 claims abstract description 70
- 229910052751 metal Inorganic materials 0.000 claims abstract description 65
- 239000002184 metal Substances 0.000 claims abstract description 65
- 230000003287 optical effect Effects 0.000 claims description 16
- 239000007769 metal material Substances 0.000 claims description 8
- 239000002073 nanorod Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- -1 transition metal nitride Chemical class 0.000 claims description 4
- 229910052723 transition metal Inorganic materials 0.000 claims description 3
- 239000000382 optic material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 239000010948 rhodium Substances 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910018871 CoO 2 Inorganic materials 0.000 description 1
- 229910016697 EuO Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(II) oxide Inorganic materials [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- VASIZKWUTCETSD-UHFFFAOYSA-N manganese(II) oxide Inorganic materials [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
- G02F1/0018—Electro-optical materials
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/30—Metamaterials
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/10—Function characteristic plasmon
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/11—Function characteristic involving infrared radiation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/50—Phase-only modulation
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
Claims (22)
- プラズモニック・ナノアンテナ層と、
金属層と、
前記プラズモニック・ナノアンテナ層と前記金属層との間に配置され、外部信号によって誘電率が変わる誘電率変化層と、
前記プラズモニック・ナノアンテナ層と前記金属層との間に配置される誘電体層と、を含む光変調素子。 - 前記誘電率変化層の誘電率変化を起こす信号を印加する信号印加手段をさらに含むことを特徴とする請求項1に記載の光変調素子。
- 前記信号印加手段は、
前記プラズモニック・ナノアンテナ層と前記金属層との間に電圧を印加する電圧源であることを特徴とする請求項2に記載の光変調素子。 - 前記誘電率変化層は、
電気信号によって誘電率が変わる電気光学物質を含むことを特徴とする請求項3に記載の光変調素子。 - 前記誘電率変化層は、透明伝導性物質を含むことを特徴とする請求項4に記載の光変調素子。
- 前記誘電率変化層は、転移金属窒化物を含むことを特徴とする請求項4に記載の光変調素子。
- 前記誘電率変化層は、
前記プラズモニック・ナノアンテナ層と前記金属層との間に印加される電圧により、キャリア濃度が変わる活性領域を含むことを特徴とする請求項4に記載の光変調素子。 - 前記活性領域は、前記誘電体層と隣接した領域に形成されることを特徴とする請求項7に記載の光変調素子。
- 前記誘電率変化層の誘電定数の実数部は、所定波長帯域で0の値を示すことを特徴とする請求項7に記載の光変調素子。
- 前記所定波長帯域は、前記活性領域のキャリア濃度によって異なるように示されることを特徴とする請求項9に記載の光変調素子。
- 前記電圧源が、前記金属層と前記プラズモニック・ナノアンテナ層との間に印加する電圧範囲は、
前記電圧範囲内で、前記プラズモニック・ナノアンテナ層の共振波長帯域と前記所定波長帯域とが一致するように調節することができる範囲であることを特徴とする請求項9に記載の光変調素子。 - 前記プラズモニック・ナノアンテナ層は、
第1方向に沿って離隔配置された複数のナノアンテナラインを含み、
前記複数のナノアンテナラインそれぞれは、前記第1方向と異なる第2方向に沿って連結された複数のナノアンテナを含むことを特徴とする請求項4に記載の光変調素子。 - 前記複数のナノアンテナは、
長手方向が前記第1方向であるナノロッドと、長手方向が前記第2方向であるナノロッドとが互いに交差する十字形状を有することを特徴とする請求項12に記載の光変調素子。 - 前記複数のナノアンテナは、
円形、楕円形、多角形、X形状または星形であることを特徴とする請求項12に記載の光変調素子。 - 前記電圧源は、
前記複数のナノアンテナラインそれぞれと前記金属層との間に、独立して電圧を印加するように構成されたことを特徴とする請求項12に記載の光変調素子。 - 前記金属層と、前記複数のナノアンテナラインとの間にそれぞれ印加される電圧値が、前記第1方向に沿って所定の規則性を示すことを特徴とする請求項15に記載の光変調素子。
- 前記金属層上に、前記誘電率変化層が配置され、
前記誘電率変化層上に、前記誘電体層が配置されることを特徴とする請求項1に記載の光変調素子。 - 前記金属層上に、前記誘電体層が配置され、
前記誘電体層上に、前記誘電率変化層が配置されることを特徴とする請求項1に記載の光変調素子。 - 前記誘電率変化層は、前記プラズモニック・ナノアンテナ層と同じ形態にパターンされたことを特徴とする請求項18に記載の光変調素子。
- 前記プラズモニック・ナノアンテナ層は、
ナノパターンの貫通ホールが形成された金属物質を含むことを特徴とする請求項1に記載の光変調素子。 - 請求項1に記載の光変調素子を含む光学装置。
- 複数のナノアンテナが二次元配列されたアレイを含むプラズモニック・ナノアンテナ層と、
金属層と、
前記プラズモニック・ナノアンテナ層と前記金属層との間に配置され、前記複数のナノアンテナに対応する複数の活性領域が二次元配列されたアレイを含み、前記複数の活性領域それぞれは、印加された電圧により、キャリア濃度が変わる誘電率変化層と、
前記プラズモニック・ナノアンテナ層と金属層の間に配置された誘電体層と、を含む光変調素子。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562111583P | 2015-02-03 | 2015-02-03 | |
US62/111,583 | 2015-02-03 | ||
KR1020150107515A KR102374119B1 (ko) | 2015-02-03 | 2015-07-29 | 게이트 구조를 포함하는 광 변조 소자 |
KR10-2015-0107515 | 2015-07-29 | ||
US15/010,967 US9632216B2 (en) | 2015-02-03 | 2016-01-29 | Optical modulating device having gate structure |
US15/010,967 | 2016-01-29 | ||
PCT/US2016/016475 WO2016126896A1 (en) | 2015-02-03 | 2016-02-03 | Optical modulating device having gate structure |
Publications (2)
Publication Number | Publication Date |
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JP2018509643A true JP2018509643A (ja) | 2018-04-05 |
JP6849597B2 JP6849597B2 (ja) | 2021-03-24 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2017536574A Active JP6849597B2 (ja) | 2015-02-03 | 2016-02-03 | ゲート構造を含む光変調素子 |
Country Status (4)
Country | Link |
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EP (1) | EP3254154B1 (ja) |
JP (1) | JP6849597B2 (ja) |
KR (1) | KR102374119B1 (ja) |
CN (1) | CN107209436B (ja) |
Cited By (3)
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JP2021520513A (ja) * | 2018-04-02 | 2021-08-19 | エルファー エルエルシー | 金属光学メタ表面の製造 |
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