JP2018501636A - 転写印刷方法 - Google Patents
転写印刷方法 Download PDFInfo
- Publication number
- JP2018501636A JP2018501636A JP2017522813A JP2017522813A JP2018501636A JP 2018501636 A JP2018501636 A JP 2018501636A JP 2017522813 A JP2017522813 A JP 2017522813A JP 2017522813 A JP2017522813 A JP 2017522813A JP 2018501636 A JP2018501636 A JP 2018501636A
- Authority
- JP
- Japan
- Prior art keywords
- die
- wafer
- receiving
- moving member
- receiving surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 122
- 238000010023 transfer printing Methods 0.000 title claims abstract description 18
- 230000008569 process Effects 0.000 claims description 72
- 239000000463 material Substances 0.000 claims description 15
- 230000004044 response Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 86
- 238000012546 transfer Methods 0.000 description 10
- 238000002161 passivation Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000009849 deactivation Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73267—Layer and HDI connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92244—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a build-up interconnect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06524—Electrical connections formed on device or on substrate, e.g. a deposited or grown layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06593—Mounting aids permanently on device; arrangements for alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Robotics (AREA)
Abstract
Description
本願は、「TRANSFER PROCESSING OF INTEGRATED CIRCUITS」の名称で、James Fiorenzaを発明者名として表示し、2014年10月28日に出願した米国特許仮出願第62/069,650号の優先権を主張し、その開示は、その全体を参照することにより本明細書に組み入られる。
1)寄生電流の削減
2)小さいフットプリント
3)並列/高速処理能力、及び/又は
4)小さなダイでの層転写処理を使って形成する能力。
・ ヒ化ガリウム(「GaAs」)素子
・ 高電子移動度トランジスタ(「HEMT」)
・ 金属半導体電界効果トランジスタ(「MESFET」)
・ ヘテロ接合バイポーラトランジスタ(「HBT」、以下参照)
・ リン化インジウムHBT又はHEMT(「InP−HEMT」)、及び
・ 窒化ガリウムHEMT。
Claims (20)
- 転写印刷方法であって、
受容表面を有する第1のウエハを提供することと、
ダイ移動部材を使用して第2のウエハから第2のダイを取り出すことと、
前記第2のダイを前記第1のウエハの前記受容表面に位置付けることと、を含み
前記第1のウエハは、前記ダイ移動部材の移動を少なくとも部分的に制御して前記第2のダイを前記受容表面に位置付けるように構成された整合構造を有する、転写印刷方法。 - 前記受容表面は受容平面を形成し、前記整合構造は前記受容表面から延長した少なくとも1つの壁を備え、前記少なくとも1つの壁の少なくとも一部は前記受容平面に対して非直交的である、請求項1に記載の方法。
- 前記ダイが前記受容表面に接触するまで、前記ダイを少なくとも1つの壁に沿って摺動すること、を更に含む、請求項2に記載の方法。
- 前記少なくとも1つの壁は、前記受容表面を少なくとも部分的に画定する複数の壁を備え、前記方法は、前記第2のダイが前記受容表面に接触するまで、前記第2のダイを前記複数の壁のうちの1つ以上に沿って摺動させることを更に含む、請求項2に記載の方法。
- 前記ダイ移動部材は下方に移動して前記第2のダイを前記受容表面に位置付けるように構成され、前記ダイ移動部材は、A)前記整合構造に応答して下方向に垂直に、かつB)下方向、の両方に移動するように構成された細長部分を備える、請求項1に記載の方法。
- 前記ダイ移動部材は、約1MPa未満のヤング係数を有する可撓性材料から少なくとも部分的に形成されたスタンプを備える、請求項1に記載の方法。
- 前記整合構造は、前記ダイ移動部材の移動を少なくとも部分的に制御するように構成された磁気構造を備える、請求項1に記載の方法。
- 前記整合構造は、前記ダイ移動部材の移動を少なくとも部分的に制御するように構成された静電気構造を備える、請求項1に記載の方法。
- 前記第1のウエハは第1のダイを有し、前記方法は、前記第2のダイを不活性化し、前記第2のダイを前記第1のダイに電気的に接続することを更に含む、請求項1に記載の方法。
- 転写印刷方法であって、
複数の受容表面を有する第1のウエハを提供することと、
少なくとも1つのダイ移動部材を使用して、複数の第2のダイを第2のウエハから取り出すことと、
前記少なくとも1つの移動部材により、前記複数の第2のダイを前記複数の受容表面に1回で位置付けることであって、それぞれの受容表面は、前記第2のダイのうちの少なくとも1つを有する、位置付けることと、を含み、
前記第1のウエハは、前記ダイ移動部材の移動を少なくとも部分的に制御して、前記第2のダイを前記複数の受容表面に位置付けるように構成された整合構造を有する、転写印刷方法。 - 前記第1のウエハは第1のプロセスで形成される複数の第1のダイを備え、前記複数の第2のダイは第2のプロセスで形成され、前記第1と第2のプロセスは異なるプロセスである、請求項10に記載の方法。
- 前記複数の受容表面は受容平面を形成し、前記整合構造は、受容表面のうちの少なくとも1つから延長した少なくとも1つの壁を備え、前記少なくとも1つの壁の少なくとも一部は前記受容平面に対して非直交的である、請求項10に記載の方法。
- 前記少なくとも1つの第2のダイが前記受容表面に接触するまで、前記第2のダイのうちの少なくとも1つを、前記少なくとも1つの壁に沿って摺動させることを更に含む、請求項12に記載の方法。
- 前記ダイ移動部材は、下方に移動して前記複数の第2のダイを前記複数の受容表面に位置付けるように構成され、前記少なくとも1つのダイ移動部材のそれぞれは、A)前記整合構造に応答して下方向に垂直に、かつB)下方向、の両方に移動するように構成された細長部分を備える、請求項10に記載の方法。
- 前記整合構造は、前記少なくとも1つのダイ移動部材の移動を少なくとも部分的に制御するように構成された磁気構造を備える、請求項10に記載の方法。
- 前記整合構造は、前記少なくとも1つのダイ移動部材の移動を少なくとも部分的に制御するように構成された静電気構造を備える、請求項10に記載の方法。
- 転写印刷方法であって、
受容表面を有する第1のウエハを提供することと、
第2のダイを有する第2のウエハを提供することと、
前記第2のダイを前記第2のウエハから前記第1のウエハに移動する手段を制御することと、
前記制御手段を使用して、前記第2のダイを前記第1のウエハの前記受容表面に位置付けることと、を含み、
前記第1のウエハは、ダイ移動手段の移動を少なくとも部分的に制御して、前記第2のダイを前記受容表面に位置付ける手段を有する、転写印刷方法。 - 前記制御手段は、前記第1のウエハの一部である整合構造を備える、請求項17に記載の転写印刷方法。
- 前記制御手段は、前記第2のダイ又は前記移動手段と磁気的あるいは静電気的に相互作用するための手段を備える、請求項17に記載の転写印刷方法。
- 前記移動手段は、可撓性ダイ移動部材を備える、請求項17に記載の転写印刷方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462069650P | 2014-10-28 | 2014-10-28 | |
US62/069,650 | 2014-10-28 | ||
PCT/US2015/057495 WO2016069546A1 (en) | 2014-10-28 | 2015-10-27 | Transfer printing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018501636A true JP2018501636A (ja) | 2018-01-18 |
JP6626504B2 JP6626504B2 (ja) | 2019-12-25 |
Family
ID=55792561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017522813A Active JP6626504B2 (ja) | 2014-10-28 | 2015-10-27 | 転写印刷方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10522389B2 (ja) |
JP (1) | JP6626504B2 (ja) |
CN (1) | CN107078085B (ja) |
DE (1) | DE112015004894B4 (ja) |
WO (1) | WO2016069546A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10522389B2 (en) | 2014-10-28 | 2019-12-31 | Analog Devices, Inc. | Transfer printing method |
JP2021521625A (ja) * | 2018-03-14 | 2021-08-26 | 京東方科技集團股▲ふん▼有限公司Boe Technology Group Co.,Ltd. | 複数のマイクロ発光ダイオードをターゲット基板に転写する方法、アレイ基板及びその表示装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11230471B2 (en) * | 2016-02-05 | 2022-01-25 | X-Celeprint Limited | Micro-transfer-printed compound sensor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001205909A (ja) * | 1999-12-31 | 2001-07-31 | Internatl Business Mach Corp <Ibm> | 基板の表面にパターンを印刷するスタンプ装置 |
JP2005520213A (ja) * | 2002-05-30 | 2005-07-07 | インターナショナル・ビジネス・マシーンズ・コーポレーション | パターニング方法 |
JP2007027693A (ja) * | 2005-06-02 | 2007-02-01 | Board Of Trustees Of The Univ Of Illinois | エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5446960A (en) | 1994-02-15 | 1995-09-05 | International Business Machines Corporation | Alignment apparatus and method for placing modules on a circuit board |
EP0784542B1 (en) | 1995-08-04 | 2001-11-28 | International Business Machines Corporation | Stamp for a lithographic process |
EP1526411A1 (en) | 2003-10-24 | 2005-04-27 | Obducat AB | Apparatus and method for aligning surface |
US7799699B2 (en) | 2004-06-04 | 2010-09-21 | The Board Of Trustees Of The University Of Illinois | Printable semiconductor structures and related methods of making and assembling |
KR101610885B1 (ko) | 2007-01-17 | 2016-04-08 | 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 | 프린팅기반 어셈블리에 의해 제조되는 광학 시스템 |
WO2010059781A1 (en) | 2008-11-19 | 2010-05-27 | Semprius, Inc. | Printing semiconductor elements by shear-assisted elastomeric stamp transfer |
US9875974B2 (en) | 2013-03-08 | 2018-01-23 | The Board Of Trustees Of The University Of Illinois | Processing techniques for silicon-based transient devices |
CN104051337B (zh) * | 2014-04-24 | 2017-02-15 | 上海珏芯光电科技有限公司 | 立体堆叠集成电路系统芯片封装的制造方法与测试方法 |
JP6626504B2 (ja) | 2014-10-28 | 2019-12-25 | アナログ ディヴァイスィズ インク | 転写印刷方法 |
-
2015
- 2015-10-27 JP JP2017522813A patent/JP6626504B2/ja active Active
- 2015-10-27 DE DE112015004894.4T patent/DE112015004894B4/de active Active
- 2015-10-27 WO PCT/US2015/057495 patent/WO2016069546A1/en active Application Filing
- 2015-10-27 CN CN201580058384.5A patent/CN107078085B/zh active Active
- 2015-10-27 US US14/923,828 patent/US10522389B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001205909A (ja) * | 1999-12-31 | 2001-07-31 | Internatl Business Mach Corp <Ibm> | 基板の表面にパターンを印刷するスタンプ装置 |
JP2005520213A (ja) * | 2002-05-30 | 2005-07-07 | インターナショナル・ビジネス・マシーンズ・コーポレーション | パターニング方法 |
JP2007027693A (ja) * | 2005-06-02 | 2007-02-01 | Board Of Trustees Of The Univ Of Illinois | エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10522389B2 (en) | 2014-10-28 | 2019-12-31 | Analog Devices, Inc. | Transfer printing method |
JP2021521625A (ja) * | 2018-03-14 | 2021-08-26 | 京東方科技集團股▲ふん▼有限公司Boe Technology Group Co.,Ltd. | 複数のマイクロ発光ダイオードをターゲット基板に転写する方法、アレイ基板及びその表示装置 |
US11387212B2 (en) | 2018-03-14 | 2022-07-12 | Boe Technology Group Co., Ltd. | Method of transferring a plurality of micro light emitting diodes to a target substrate, array substrate and display apparatus thereof |
JP7140315B2 (ja) | 2018-03-14 | 2022-09-21 | 京東方科技集團股▲ふん▼有限公司 | 複数のマイクロ発光ダイオードをターゲット基板に転写する方法 |
Also Published As
Publication number | Publication date |
---|---|
US20160118281A1 (en) | 2016-04-28 |
DE112015004894T5 (de) | 2017-07-20 |
JP6626504B2 (ja) | 2019-12-25 |
DE112015004894B4 (de) | 2022-11-03 |
CN107078085B (zh) | 2020-12-08 |
US10522389B2 (en) | 2019-12-31 |
WO2016069546A1 (en) | 2016-05-06 |
CN107078085A (zh) | 2017-08-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6453437B2 (ja) | マイクロ転写印刷のための装置および方法 | |
US8633554B2 (en) | MEMS device etch stop | |
TWI495049B (zh) | 微電子裝置及其積體電路之製造方法 | |
US8963278B2 (en) | Three-dimensional integrated circuit device using a wafer scale membrane | |
US8969200B2 (en) | Apparatus and method for integration of through substrate vias | |
US9006896B2 (en) | Chip package and method for forming the same | |
US20150145144A1 (en) | Use of a conformal coating elastic cushion to reduce through silicon vias (tsv) stress in 3-dimensional integration | |
CN106601753A (zh) | 半导体器件及其形成方法 | |
US8643070B2 (en) | Chip package and method for forming the same | |
US10553489B2 (en) | Partitioned wafer and semiconductor die | |
JP6626504B2 (ja) | 転写印刷方法 | |
US10654707B2 (en) | Method of stiction prevention by patterned anti-stiction layer | |
US11767219B2 (en) | Semiconductor structure including scribe line structures and method for fabricating the same | |
CN102544101B (zh) | 晶片封装体及其制作方法 | |
US20180158967A1 (en) | Electrical and optical via connections on a same chip | |
US9868630B2 (en) | Package structure and manufacturing method thereof | |
US20190123035A1 (en) | Method of performing die-based heterogeneous integration and devices including integrated dies | |
US20200198964A1 (en) | Packaging method and packaging structure | |
EP3330800A1 (en) | A photomask manufacturing method | |
KR102656505B1 (ko) | 마이크로 전사 인쇄를 이용한 다이-대-웨이퍼 본딩 | |
US20120322259A1 (en) | Defect free deep trench method for semiconductor chip | |
TWI693191B (zh) | 用於微機電系統裝置的基底結構和製造半導體結構的方法 | |
US20180068872A1 (en) | Carrier Substrate For Semiconductor Structures Suitable For A Transfer By Transfer Print And Manufacturing Of The Semiconductor Structures On The Carrier Substrate | |
KR20230009368A (ko) | 기판 시스템들 간에 정렬 마크를 전달하기 위한 방법 및 시스템 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20170726 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20170816 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180705 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190603 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190531 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190816 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191105 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191129 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6626504 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |