JP2018189517A - 計測装置、および物品製造方法 - Google Patents

計測装置、および物品製造方法 Download PDF

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Publication number
JP2018189517A
JP2018189517A JP2017092525A JP2017092525A JP2018189517A JP 2018189517 A JP2018189517 A JP 2018189517A JP 2017092525 A JP2017092525 A JP 2017092525A JP 2017092525 A JP2017092525 A JP 2017092525A JP 2018189517 A JP2018189517 A JP 2018189517A
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JP
Japan
Prior art keywords
light
reflecting surface
measuring apparatus
mirror
unit
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Pending
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JP2017092525A
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Japanese (ja)
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JP2018189517A5 (enExample
Inventor
健史 太田
Takefumi Ota
健史 太田
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Canon Inc
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Canon Inc
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Priority to JP2017092525A priority Critical patent/JP2018189517A/ja
Publication of JP2018189517A publication Critical patent/JP2018189517A/ja
Publication of JP2018189517A5 publication Critical patent/JP2018189517A5/ja
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JP2017092525A 2017-05-08 2017-05-08 計測装置、および物品製造方法 Pending JP2018189517A (ja)

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JP2017092525A JP2018189517A (ja) 2017-05-08 2017-05-08 計測装置、および物品製造方法

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JP2017092525A JP2018189517A (ja) 2017-05-08 2017-05-08 計測装置、および物品製造方法

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JP2018189517A true JP2018189517A (ja) 2018-11-29
JP2018189517A5 JP2018189517A5 (enExample) 2020-07-02

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3087011A1 (fr) * 2018-10-08 2020-04-10 Unity Semiconductor Dispositif d’inspection optique en champ sombre
CN116754519A (zh) * 2023-08-04 2023-09-15 哈尔滨工业大学 偏振brdf特性测量装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815858A (en) * 1987-10-09 1989-03-28 The United States Of America As Represented By The Secretary Of The Navy Reflectometers
JP2000035363A (ja) * 1998-07-16 2000-02-02 Nikon Corp 光学特性検出装置
JP2004045065A (ja) * 2002-07-09 2004-02-12 National Institute Of Advanced Industrial & Technology 入射角度可変の絶対反射率と絶対透過率測定光学系
JP2011069719A (ja) * 2009-09-25 2011-04-07 Horiba Ltd 光検出装置及び光伝送装置
JP2014211322A (ja) * 2013-04-17 2014-11-13 花王株式会社 光学特性測定装置
JP2015200664A (ja) * 2006-05-05 2015-11-12 エージーシー・フラット・グラス・ノース・アメリカ， インコーポレイテッド 角度に対する色度測定（ａｎｇｕｌａｒｃｏｌｏｒｉｍｅｔｒｙ）のための装置及びその方法
WO2017037948A1 (ja) * 2015-09-04 2017-03-09 オリンパス株式会社 反射特性測定システム

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815858A (en) * 1987-10-09 1989-03-28 The United States Of America As Represented By The Secretary Of The Navy Reflectometers
JP2000035363A (ja) * 1998-07-16 2000-02-02 Nikon Corp 光学特性検出装置
JP2004045065A (ja) * 2002-07-09 2004-02-12 National Institute Of Advanced Industrial & Technology 入射角度可変の絶対反射率と絶対透過率測定光学系
JP2015200664A (ja) * 2006-05-05 2015-11-12 エージーシー・フラット・グラス・ノース・アメリカ， インコーポレイテッド 角度に対する色度測定（ａｎｇｕｌａｒｃｏｌｏｒｉｍｅｔｒｙ）のための装置及びその方法
JP2011069719A (ja) * 2009-09-25 2011-04-07 Horiba Ltd 光検出装置及び光伝送装置
JP2014211322A (ja) * 2013-04-17 2014-11-13 花王株式会社 光学特性測定装置
WO2017037948A1 (ja) * 2015-09-04 2017-03-09 オリンパス株式会社 反射特性測定システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3087011A1 (fr) * 2018-10-08 2020-04-10 Unity Semiconductor Dispositif d’inspection optique en champ sombre
WO2020074800A1 (fr) * 2018-10-08 2020-04-16 Unity Semiconductor Dispositif d'inspection optique en champ sombre
US11965834B2 (en) 2018-10-08 2024-04-23 Unity Semiconductor Dark-field optical inspection device
CN116754519A (zh) * 2023-08-04 2023-09-15 哈尔滨工业大学 偏振brdf特性测量装置及方法

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