JP2018189517A5 - - Google Patents

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Publication number
JP2018189517A5
JP2018189517A5 JP2017092525A JP2017092525A JP2018189517A5 JP 2018189517 A5 JP2018189517 A5 JP 2018189517A5 JP 2017092525 A JP2017092525 A JP 2017092525A JP 2017092525 A JP2017092525 A JP 2017092525A JP 2018189517 A5 JP2018189517 A5 JP 2018189517A5
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JP
Japan
Prior art keywords
reflecting surface
light
reflecting
ellipse
measuring device
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Pending
Application number
JP2017092525A
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English (en)
Japanese (ja)
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JP2018189517A (ja
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Priority to JP2017092525A priority Critical patent/JP2018189517A/ja
Priority claimed from JP2017092525A external-priority patent/JP2018189517A/ja
Publication of JP2018189517A publication Critical patent/JP2018189517A/ja
Publication of JP2018189517A5 publication Critical patent/JP2018189517A5/ja
Pending legal-status Critical Current

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JP2017092525A 2017-05-08 2017-05-08 計測装置、および物品製造方法 Pending JP2018189517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017092525A JP2018189517A (ja) 2017-05-08 2017-05-08 計測装置、および物品製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017092525A JP2018189517A (ja) 2017-05-08 2017-05-08 計測装置、および物品製造方法

Publications (2)

Publication Number Publication Date
JP2018189517A JP2018189517A (ja) 2018-11-29
JP2018189517A5 true JP2018189517A5 (enExample) 2020-07-02

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ID=64479658

Family Applications (1)

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JP2017092525A Pending JP2018189517A (ja) 2017-05-08 2017-05-08 計測装置、および物品製造方法

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JP (1) JP2018189517A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3087011B1 (fr) * 2018-10-08 2022-12-30 Unity Semiconductor Dispositif d’inspection optique en champ sombre

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815858A (en) * 1987-10-09 1989-03-28 The United States Of America As Represented By The Secretary Of The Navy Reflectometers
JP4120050B2 (ja) * 1998-07-16 2008-07-16 株式会社ニコン 光学特性検出装置
JP3637393B2 (ja) * 2002-07-09 2005-04-13 独立行政法人産業技術総合研究所 入射角度可変の絶対反射率と絶対透過率測定光学系
US7548317B2 (en) * 2006-05-05 2009-06-16 Agc Flat Glass North America, Inc. Apparatus and method for angular colorimetry
JP5507177B2 (ja) * 2009-09-25 2014-05-28 株式会社堀場製作所 光検出装置
JP6185740B2 (ja) * 2013-04-17 2017-08-23 花王株式会社 光学特性測定装置
WO2017037948A1 (ja) * 2015-09-04 2017-03-09 オリンパス株式会社 反射特性測定システム

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