JP2018173343A5 - - Google Patents
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- Publication number
- JP2018173343A5 JP2018173343A5 JP2017071716A JP2017071716A JP2018173343A5 JP 2018173343 A5 JP2018173343 A5 JP 2018173343A5 JP 2017071716 A JP2017071716 A JP 2017071716A JP 2017071716 A JP2017071716 A JP 2017071716A JP 2018173343 A5 JP2018173343 A5 JP 2018173343A5
- Authority
- JP
- Japan
- Prior art keywords
- plate
- detection device
- force detection
- piezoelectric
- sensor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 claims 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 229910000833 kovar Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017071716A JP2018173343A (ja) | 2017-03-31 | 2017-03-31 | 力検出装置およびロボット |
| CN201810255085.6A CN108731854A (zh) | 2017-03-31 | 2018-03-26 | 力检测装置以及机器人 |
| US15/939,819 US20180283965A1 (en) | 2017-03-31 | 2018-03-29 | Force Detection Device And Robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017071716A JP2018173343A (ja) | 2017-03-31 | 2017-03-31 | 力検出装置およびロボット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018173343A JP2018173343A (ja) | 2018-11-08 |
| JP2018173343A5 true JP2018173343A5 (enExample) | 2020-04-09 |
Family
ID=63669182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017071716A Withdrawn JP2018173343A (ja) | 2017-03-31 | 2017-03-31 | 力検出装置およびロボット |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20180283965A1 (enExample) |
| JP (1) | JP2018173343A (enExample) |
| CN (1) | CN108731854A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10444101B2 (en) * | 2017-03-06 | 2019-10-15 | Seiko Epson Corporation | Sensor device, force detection device, and robot |
| JP7338407B2 (ja) * | 2019-10-31 | 2023-09-05 | セイコーエプソン株式会社 | ロボット |
| CN111129858A (zh) * | 2019-12-28 | 2020-05-08 | 深圳市优必选科技股份有限公司 | 一种磁吸式连接系统、模型搭建方法及机器人 |
| US11154244B2 (en) * | 2020-03-04 | 2021-10-26 | Biocore LLC | Automated turf testing apparatus and system for using same |
| DE112022007264T5 (de) * | 2022-08-08 | 2025-03-27 | Fanuc Corporation | Dichtungsstruktur für einen Drehmomentsensor und Roboter |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2942658B1 (fr) * | 2009-02-27 | 2011-12-09 | Commissariat Energie Atomique | Peau protectrice pour robots |
| US9324677B2 (en) * | 2011-04-04 | 2016-04-26 | Rohm Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
| JP5895615B2 (ja) * | 2012-03-09 | 2016-03-30 | セイコーエプソン株式会社 | センサーモジュール、力検出装置及びロボット |
| US20140157892A1 (en) * | 2012-12-11 | 2014-06-12 | Seiko Epson Corporation | Mems element, electronic device, altimeter, electronic apparatus, and moving object |
| JP6136349B2 (ja) * | 2013-02-22 | 2017-05-31 | セイコーエプソン株式会社 | 電子デバイス、電子機器及び移動体 |
| KR101636223B1 (ko) * | 2013-06-05 | 2016-07-04 | 니혼샤신 인사츠 가부시키가이샤 | 압력 검출 장치 및 입력 장치 |
| JP2015175811A (ja) * | 2014-03-18 | 2015-10-05 | セイコーエプソン株式会社 | 力検出装置、およびロボット |
| US9705069B2 (en) * | 2013-10-31 | 2017-07-11 | Seiko Epson Corporation | Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus |
| WO2016002262A1 (ja) * | 2014-07-04 | 2016-01-07 | 株式会社村田製作所 | 圧電センサおよび圧電素子 |
| CN105865670B (zh) * | 2015-02-09 | 2020-09-25 | 精工爱普生株式会社 | 力检测装置以及机器人 |
| JP2016161310A (ja) * | 2015-02-27 | 2016-09-05 | セイコーエプソン株式会社 | 力検出装置およびロボット |
| JP2019027920A (ja) * | 2017-07-31 | 2019-02-21 | セイコーエプソン株式会社 | 力検出装置およびロボット |
-
2017
- 2017-03-31 JP JP2017071716A patent/JP2018173343A/ja not_active Withdrawn
-
2018
- 2018-03-26 CN CN201810255085.6A patent/CN108731854A/zh active Pending
- 2018-03-29 US US15/939,819 patent/US20180283965A1/en not_active Abandoned
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