JP2018173343A - 力検出装置およびロボット - Google Patents

力検出装置およびロボット Download PDF

Info

Publication number
JP2018173343A
JP2018173343A JP2017071716A JP2017071716A JP2018173343A JP 2018173343 A JP2018173343 A JP 2018173343A JP 2017071716 A JP2017071716 A JP 2017071716A JP 2017071716 A JP2017071716 A JP 2017071716A JP 2018173343 A JP2018173343 A JP 2018173343A
Authority
JP
Japan
Prior art keywords
force detection
detection device
plate
sensor device
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2017071716A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018173343A5 (enExample
Inventor
松沢　明
Akira Matsuzawa
明 松沢
河合　宏紀
Hiroki Kawai
宏紀 河合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2017071716A priority Critical patent/JP2018173343A/ja
Priority to CN201810255085.6A priority patent/CN108731854A/zh
Priority to US15/939,819 priority patent/US20180283965A1/en
Publication of JP2018173343A publication Critical patent/JP2018173343A/ja
Publication of JP2018173343A5 publication Critical patent/JP2018173343A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/27—Arm part
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/46—Sensing device

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
JP2017071716A 2017-03-31 2017-03-31 力検出装置およびロボット Withdrawn JP2018173343A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017071716A JP2018173343A (ja) 2017-03-31 2017-03-31 力検出装置およびロボット
CN201810255085.6A CN108731854A (zh) 2017-03-31 2018-03-26 力检测装置以及机器人
US15/939,819 US20180283965A1 (en) 2017-03-31 2018-03-29 Force Detection Device And Robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017071716A JP2018173343A (ja) 2017-03-31 2017-03-31 力検出装置およびロボット

Publications (2)

Publication Number Publication Date
JP2018173343A true JP2018173343A (ja) 2018-11-08
JP2018173343A5 JP2018173343A5 (enExample) 2020-04-09

Family

ID=63669182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017071716A Withdrawn JP2018173343A (ja) 2017-03-31 2017-03-31 力検出装置およびロボット

Country Status (3)

Country Link
US (1) US20180283965A1 (enExample)
JP (1) JP2018173343A (enExample)
CN (1) CN108731854A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024033965A1 (enExample) * 2022-08-08 2024-02-15

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10444101B2 (en) * 2017-03-06 2019-10-15 Seiko Epson Corporation Sensor device, force detection device, and robot
JP7338407B2 (ja) * 2019-10-31 2023-09-05 セイコーエプソン株式会社 ロボット
CN111129858A (zh) * 2019-12-28 2020-05-08 深圳市优必选科技股份有限公司 一种磁吸式连接系统、模型搭建方法及机器人
CA3170311A1 (en) * 2020-03-04 2021-09-10 Biocore LLC Automated turf testing apparatus and system for using same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110307097A1 (en) * 2009-02-27 2011-12-15 Commissariat A L'energie Atomique Et Aux Energies Alternatives Protective skin for robots
JP2015175811A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 力検出装置、およびロボット
JP2016161310A (ja) * 2015-02-27 2016-09-05 セイコーエプソン株式会社 力検出装置およびロボット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012137714A1 (ja) * 2011-04-04 2012-10-11 ローム株式会社 半導体装置および半導体装置の製造方法
JP5895615B2 (ja) * 2012-03-09 2016-03-30 セイコーエプソン株式会社 センサーモジュール、力検出装置及びロボット
US20140157892A1 (en) * 2012-12-11 2014-06-12 Seiko Epson Corporation Mems element, electronic device, altimeter, electronic apparatus, and moving object
JP6136349B2 (ja) * 2013-02-22 2017-05-31 セイコーエプソン株式会社 電子デバイス、電子機器及び移動体
WO2014196367A1 (ja) * 2013-06-05 2014-12-11 日本写真印刷株式会社 圧力検出装置および入力装置
US9705069B2 (en) * 2013-10-31 2017-07-11 Seiko Epson Corporation Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus
CN106461486B (zh) * 2014-07-04 2019-06-28 株式会社村田制作所 压电传感器及压电元件
CN105865670B (zh) * 2015-02-09 2020-09-25 精工爱普生株式会社 力检测装置以及机器人
JP2019027920A (ja) * 2017-07-31 2019-02-21 セイコーエプソン株式会社 力検出装置およびロボット

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110307097A1 (en) * 2009-02-27 2011-12-15 Commissariat A L'energie Atomique Et Aux Energies Alternatives Protective skin for robots
JP2015175811A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 力検出装置、およびロボット
JP2016161310A (ja) * 2015-02-27 2016-09-05 セイコーエプソン株式会社 力検出装置およびロボット

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024033965A1 (enExample) * 2022-08-08 2024-02-15
WO2024033965A1 (ja) * 2022-08-08 2024-02-15 ファナック株式会社 トルクセンサのシール構造およびロボット
JP7751117B2 (ja) 2022-08-08 2025-10-07 ファナック株式会社 トルクセンサのシール構造およびロボット

Also Published As

Publication number Publication date
CN108731854A (zh) 2018-11-02
US20180283965A1 (en) 2018-10-04

Similar Documents

Publication Publication Date Title
JP2018173344A (ja) センサーデバイス、力検出装置およびロボット
CN104596681B (zh) 传感器设备、力检测装置、机器人、电子部件输送装置、电子部件检查装置及部件加工装置
JP5895615B2 (ja) センサーモジュール、力検出装置及びロボット
CN104880265B (zh) 力检测装置、以及机械臂
JP5887911B2 (ja) センサーモジュール、力検出装置、ロボット
JP7022363B2 (ja) 力検出装置およびロボットシステム
JP2018173343A (ja) 力検出装置およびロボット
CN109318245B (zh) 力检测装置及机器人
US10661456B2 (en) Force detection apparatus and robot
CN108120530A (zh) 力传感器及机器人
US10444101B2 (en) Sensor device, force detection device, and robot
CN110208575B (zh) 传感器设备、力检测装置及机器人
CN110208574B (zh) 传感器器件、力检测装置以及机器人
CN110319960B (zh) 传感器元件、传感器器件、力检测装置以及机器人
JP2019152462A (ja) センサーデバイス、力検出装置およびロボット
JP6384575B2 (ja) センサーデバイス、力検出装置、およびロボット
JP2015175811A (ja) 力検出装置、およびロボット
JP6996309B2 (ja) センサーデバイス、力検出装置およびロボット
JP6274296B2 (ja) 力検出装置およびロボット
JP2021092491A (ja) 力検出装置、およびロボット

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200220

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200220

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20201118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201124

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20201222