JP2018142742A - Transport device, lithographic apparatus, and manufacturing method for article - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique advantageous for circumventing breakdown of a substrate.SOLUTION: A transport device for transporting a substrate to a stage has a holding section for holding the substrate, a detector for detecting a height of the substrate, a first transport section for transporting the substrate to the holding section, a second transport section for transporting the substrate from the holding section to the stage, and a control section for controlling the second transport section to transport the substrate to the stage by a path determined on the basis of detection results of the height of the substrate detected and obtained by the detector while transporting the substrate by the first transport section.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a conveying apparatus, a lithographic apparatus, and an article manufacturing method.

  Along with the high integration of semiconductor devices, circuit patterns are becoming multi-layered. In a substrate in which circuit patterns are multilayered, distortion accumulates due to the lamination of circuit patterns, and warping may occur. Further, a circuit pattern can be further formed on the warped substrate by the lithography apparatus.

  In Patent Document 1, in order to prevent the substrate from coming into contact with the cassette when the substrate is carried out of the cassette by the arm (conveying unit) or when the substrate is carried into the cassette, the amount of warpage of the substrate detected by the sensor is determined. A method for controlling the insertion height of the arm into the cassette is disclosed.

JP 2005-260010 A

  In a lithographic apparatus, even when a warped substrate is transported to a substrate stage, the substrate may come into contact with a member in the lithographic apparatus and be damaged depending on the size of the warp of the substrate. Therefore, in the lithography apparatus, it is preferable that the substrate is transported to the substrate stage so as to avoid the substrate from coming into contact with a member in the lithography apparatus after grasping the warp (shape) of the substrate.

  Accordingly, an object of the present invention is to provide an advantageous technique for avoiding damage to a substrate.

  In order to achieve the above object, a transport apparatus according to one aspect of the present invention is a transport apparatus that transports a substrate to a stage, and a holding unit that holds the substrate and a detection unit that detects the height of the substrate. A first transfer unit that transfers the substrate to the holding unit, a second transfer unit that transfers the substrate from the holding unit to the stage, and a state in which the substrate is transferred to the first transfer unit. A control unit that causes the second transport unit to transport the substrate to the stage along a path determined based on a detection result obtained by detecting the height of the substrate by the detection unit.

  According to the present invention, for example, an advantageous technique for avoiding damage to the substrate can be provided.

It is a figure which shows the structure of the formation part of an imprint apparatus. It is the figure which looked at the conveying apparatus from the top (Z direction). It is the figure which looked at the conveyance apparatus from the side (-Y direction). It is a figure for demonstrating arrangement | positioning of a detection part. It is a flowchart which shows the conveyance method of the board | substrate to a stage. It is a figure which shows the state holding the board | substrate by the 1st conveyance part. It is a figure which shows 1st distribution. It is a figure which shows 2nd distribution. It is a figure which shows the shape information of a board | substrate. It is a figure which shows the state holding each of two board | substrates from which a shape differs mutually. It is a figure for demonstrating arrangement | positioning of two detection parts.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the accompanying drawings. In addition, in each figure, the same reference number is attached | subjected about the same member thru | or element, and the overlapping description is abbreviate | omitted. The transport apparatus according to the present invention can be applied to a lithography apparatus that forms a pattern on a substrate, such as an imprint apparatus, an exposure apparatus, and a drawing apparatus. In the embodiment described below, an imprint apparatus that forms a pattern on an imprint material on a substrate using a mold will be described.

<First Embodiment>
An imprint apparatus according to a first embodiment of the present invention will be described. The imprint apparatus is used for manufacturing a semiconductor device or the like, and performs an imprint process for forming a pattern using a mold on an imprint material on a substrate. For example, the imprint apparatus supplies an imprint material on a substrate and brings the imprint material supplied on the substrate into contact with a mold. Then, in a state where the imprint material on the substrate is in contact with the mold, the imprint material is cured, and the mold is peeled off (released) from the cured imprint material. Thereby, a pattern can be formed in the imprint material on a board | substrate. The imprint apparatus according to this embodiment may include the forming unit 10 illustrated in FIG. 1 that forms a pattern on a substrate, and the transport device 20 illustrated in FIG. 2 that transports the substrate to the forming unit 10 (stage 12).

  FIG. 1 is a schematic diagram illustrating a configuration of a forming unit 10 of the imprint apparatus. The formation unit 10 includes, for example, an imprint head 11, a stage 12 (substrate stage), an irradiation unit 13, a supply unit 14, and a control unit 15, and uses the mold 1 for the imprint material 3 on the substrate. An imprint process for forming a pattern is performed. The control unit 15 includes, for example, a CPU and a memory, and controls imprint processing.

  The imprint head 11 holds the mold 1 by a vacuum suction force or the like, and at least moves the mold 1 in the Z direction (imprint direction) so that the mold 1 and the imprint material 3 on the substrate are brought into contact with each other or separated. To drive. The mold 1 held by the imprint head 11 is made of a material that can transmit light for curing the imprint material 3 such as quartz, and is transferred to the imprint material 3 on the substrate. It has the area | region where the power uneven | corrugated pattern was formed.

  The stage 12 is configured to hold the substrate 2 by a vacuum suction force or the like and to be movable in the XY direction (direction perpendicular to the stamping direction). The substrate 2 held by the stage 12 is, for example, a semiconductor substrate or a glass substrate, and is transferred onto the stage by a transfer device 20 described later. For example, the stage 12 has pins 12 a (for example, three pins 12 a) that can protrude from a surface (holding surface) that holds the substrate 2, and delivers the substrate 2 from the second transfer unit 21 b described later onto the stage. At this time, the pin 12a is protruded from the holding surface. And when the board | substrate 2 is delivered on the said pin 12a by the conveying apparatus 20 (2nd conveying part 21b), the stage 12 reduces the protrusion amount of the pin 12a from a holding surface. Accordingly, the substrate 2 is disposed on the holding surface of the stage 12 and is held by the stage 12.

  The irradiation unit 13 emits light (ultraviolet light) for curing the imprint material 3 through the mold 1 in a state where the mold 1 and the imprint material 3 on the substrate are in contact with each other. Irradiate. In the imprint apparatus according to the present embodiment, since the photocuring method is employed, the irradiation unit 13 that irradiates light is used. Can be provided. The supply unit 14 supplies (applies) the imprint material 3 on the substrate. In the imprint apparatus of this embodiment, an ultraviolet curable resin having a property of being cured by irradiation with light (ultraviolet rays) can be used as the imprint material 3.

  Next, the conveyance device 20 included in the imprint apparatus will be described with reference to FIGS. FIG. 2 is a schematic diagram when the transport device 20 is viewed from above (+ Z direction), and FIG. 3 is a schematic diagram when the transport device 20 (around the PA unit 22) is viewed from the side (−Y direction). FIG. The transport device 20 includes a transport unit 21 that transports the substrate 2 and a pre-alignment unit 22 (also referred to as an alignment device or a processing unit, hereinafter referred to as a PA unit 22) that performs processing for detecting the edge of the substrate 2. And a control unit 25. Then, the transport apparatus 20 transports the substrate 2 from the standby position C where the substrate loaded into the apparatus stands by the transport section 21 to the carry-in position A where the stage 12 is disposed via the PA section 22. After the substrate 2 is placed on the stage 12 at the carry-in position A, the stage 12 moves so that the substrate 2 is placed under the mold 1. Then, after the imprint process for the substrate 2 on the stage 12 is completed, the stage 12 moves to the unloading position B, and the substrate on the stage 12 is transferred from the unloading position B to the standby position by the transfer unit 21. At the standby position C, a plurality of substrates 2 are accommodated in the cassette for each lot.

  Here, the transport unit 21 of the present embodiment includes, for example, a first transport unit 21 a that transports the substrate 2 from the standby position C to the PA unit 22, and the substrate 2 from the PA unit 22 to the carry-in position A (on the stage 12). And a second transport unit 21b that transports the That is, the conveyance of the substrate 2 from the standby position C to the PA unit 22 and the conveyance of the substrate 2 from the PA unit 22 to the loading position A (on the stage 12) are performed by different conveyance units. However, the present invention is not limited to this, and the conveyance of the substrate 2 from the standby position C to the PA unit 22 and the conveyance of the substrate 2 from the PA unit 22 to the loading position A may be performed by a common conveyance unit. For example, both the conveyance of the substrate 2 from the standby position C to the PA unit 22 and the conveyance of the substrate 2 from the PA unit 22 to the carry-in position A without providing the second conveyance unit 21b in the conveyance device 20 You may carry out by the conveyance part 21a. Moreover, in this embodiment, although the control part 15 of the formation part 10 and the control part 25 of the conveying apparatus 20 become a separate structure, it is good also as an integral structure.

The first transport unit 21a transports the substrates 2 accommodated in the cassette at the standby position C one by one to the PA unit 22 (on the holding unit 22a). First conveying portion 21a, for example, comprise a hand 21a ₁ for holding a substrate 2, an arm 21a ₂ for driving the hand 21a _1. The hand 21 a ₁ of the first transport unit 21 a can be configured to hold a portion of the lower surface of the substrate 2 that is different from the portion (center portion) held by the holding portion 22 a of the PA portion 22.

The PA unit 22 includes, for example, a holding unit 22a (rotating unit) that holds and rotates the central portion of the substrate 2, and an edge detection unit 22b (second detection unit) that detects the edge of the substrate 2 held by the holding unit 22a. ). In the PA unit 22, processing for detecting the position of the edge of the substrate 2 (X direction in the present embodiment) is performed by the edge detection unit 22b while the substrate 2 is rotated by the holding unit 22a, so-called pre-alignment. By this pre-alignment, the position of the notch (orientation flat) of the substrate 2 in the circumferential direction and the center position of the substrate 2 with respect to the holding portion 22a can be obtained. Edge detector 22b for detecting an edge of the substrate 2, and the injection portion 22b ₁ for emitting light, a light transmission type sensor having a light receiving portion 22b ₂ for receiving the light emitted from the exit portion 22b ₁ (e.g. line Sensor) (see FIG. 4B). Such sensors are part of the light emitted from the exit portion 22b ₁ is arranged to be blocked by the substrate 2, the position of the edge board 2 by the intensity distribution of light incident on the light receiving portion 22b ₂ (the In the embodiment, the X direction) can be detected.

The substrate 2 on which the pre-alignment has been performed is transported from the PA unit 22 to the loading position A (on the stage 12) by the second transport unit 21b. The second transport unit 21b may include, for example, a hand 21b ₁ that holds the substrate 2 and a drive mechanism 21b ₂ that drives the hand 21b ₁ in the Z direction or the Y direction. Unlike the hand 21 a ₁ of the first transport unit 21 a, the hand 21 b ₁ of the second transport unit 21 b is configured to hold and suspend the outer peripheral part of the lower surface of the substrate 2. Further, when driving the hand 21b ₁ in the Z direction, the drive mechanism 21b ₂ expands and contracts the support shaft 21b ₃ supporting the hand 21b ₁ in the Z direction, and when driving the hand 21b ₁ in the Y direction. , the support shaft 21b ₃ (along a guide member extending in the Y direction) in the Y-direction moving. Here, in the transport device 20 of the present embodiment, the configurations of the first transport unit 21a and the second transport unit 21b are different from each other, but are not limited thereto. For example, the first transport unit 21a and the second transport unit The configuration of the part 21b may be the same.

  In the transport apparatus 20 configured as described above, when the substrate 2 on which a pattern is to be formed is warped, the substrate 2 is in the lithographic apparatus during the transport of the substrate 2 from the PA unit 22 to the stage 12. It may be damaged by contact with the member. Therefore, in the transport apparatus 20, it is preferable to control the transport of the substrate 2 to the stage 12 after grasping the shape of the substrate 2 in order to avoid contact of the substrate 2 with members in the lithography apparatus. Therefore, the transport apparatus 20 of the present embodiment includes a detection unit 24 that detects the height of the substrate 2, and controls the transport of the substrate 2 to the stage 12 based on the detection result of the detection unit 24. In the detection region 24a set on the path (on the first path) for transporting the substrate 2 to the PA unit 22 by the first transport unit 21a, the location of the substrate 2 that has fallen in the detection region 24a during the transport of the substrate 2 A detection unit 24 for detecting the height is included. Then, the transfer device 20 (control unit 25) generates the shape information of the substrate 2 from the detection result of the detection unit 24, and the substrate 2 is transferred from the PA unit 22 to the stage 12 by the second transfer unit 21b according to the shape information. A route (second route) is determined. Below, the structure and arrangement | positioning of the detection part 24 are demonstrated.

  FIG. 4 is a diagram for explaining the detection unit 24 and shows a configuration around the PA unit 22. 4A is a view of the periphery of the PA unit 22 viewed from the Z direction, and FIG. 4B is a view of the periphery of the PA unit 22 viewed from the −Y direction. For example, the detection unit 24 detects the height of the substrate 2 by measuring the distance from the detection unit 24 to the substrate 2. The detection unit 24 of the present embodiment emits light to the detection region 24a, such as a laser interferometer, and the height of the portion (in the Z direction) is reflected by the light reflected by the portion of the substrate 2 that is contained in the detection region 24a. A sensor for detecting the position). However, the present invention is not limited to this, and for example, a sensor that detects the height of the substrate 2 using a capacitance may be included.

  For example, the detection unit 24 can be arranged such that the detection region 24a is set in a part of the substrate held by the holding unit 22a. The detection unit 24 is preferably arranged such that the detection region 24a is set (positioned) in a region where the warpage of the substrate 2 is large in a state where the substrate 2 is held by the holding unit 22a. The region where the warpage of the substrate 2 is large is a portion (end portion of the substrate 2) closer to the rotation center of the substrate 2 than the portion (outer periphery) of the substrate 2 where the edge detection unit 22b detects the edge. The detection unit 24 is arranged so that the detection region 24a is set in the range inside the edge of the substrate 2 and within 10 mm from the edge, more preferably in the range inside the edge of the substrate 2 and within 5 mm from the edge. It is preferable. By arranging the detection unit 24 in this way, the control unit 25 determines the height distribution in the circumferential direction of the substrate 2 (of the substrate 2) from the detection result of the detection unit 24 obtained during the rotation of the substrate 2 in the pre-alignment. The height distribution in the circumferential direction of the end portion can be obtained.

  Further, the detection unit 24 can be arranged so that the substrate 2 (preferably the center of the substrate 2) passes through the detection region 24a during the transfer of the substrate 2 by the first transfer unit 21a. By arranging the detection unit 24 in this way, the control unit 25 determines the transport direction (X direction (radius) of the substrate 2 from the detection result of the detection unit 24 obtained during the transport of the substrate 2 by the first transport unit 21a. Direction)) height distribution can be obtained.

  Here, although the detection part 24 of this embodiment demonstrates the example arrange | positioned so that the board | substrate 2 may pass the detection area | region 24a during the conveyance of the board | substrate 2 by the 1st conveyance part 21a, it is not restricted to it. . For example, the substrate 2 may be disposed so as to pass through the detection region 24a while the substrate 2 is being transported by the second transport unit 21b. In FIG. 4, the detection unit 24 is arranged on the lower surface side of the substrate 2 so as to detect the height of the back surface (the surface on the −Z direction side) of the substrate 2. It may be arranged on the upper surface side of the substrate 2 so as to detect the height of the side surface.

  Next, a method for transporting the substrate 2 to the stage 12 will be described with reference to FIG. FIG. 5 is a flowchart showing a method for transporting the substrate 2 to the stage 12. Each step of the flowchart shown in FIG. 5 can be controlled by the control unit 25.

  In S10, the control unit 25 controls the first transport unit 21a so that the transport of the substrate 2 from the standby position C to the PA unit 22 is started. In S <b> 11, the control unit 25 acquires from the detection unit 24 the height of the first place (hereinafter referred to as the tip portion 2 a) that fits in the detection region 24 a of the detection unit 24 in the conveyance of the substrate 2 by the first conveyance unit 21 a. To do. In S12, the control unit 25 contacts the holding unit 22a when the first transfer unit 21a transfers the substrate 2 onto the holding unit 22a based on the height of the tip portion 2a of the substrate 2. It is determined whether or not this can be avoided. If it is determined that the substrate 2 can be prevented from contacting the holding portion 22a, the process proceeds to S13. Steps S11 and S12 can be performed before the tip 2a of the substrate 2 reaches the holding portion 22a. In S13, the control unit 25 transports the substrate 2 onto the holding unit 22a by the first transport unit 21a.

For example, the substrate 2 may have a warp (shape) that is convex upward. When transporting a substrate 2 having such a warp by the first transfer unit 21a, as shown in FIG. 6, that the height of the tip portion 2a of the substrate 2 is lower than the hand 21a ₁ of the first conveyor 21a is there. In this case, whether or not the control unit 25 can avoid the contact of the substrate 2 with the holding unit 22a by driving the first transport unit 21a and the holding unit 22a based on the height of the tip portion 2a of the substrate 2. Judging. The drive of the first conveyor 21a and the holding portion 22a, for example, increasing the hand 21a ₁ of the first conveyor 21a than usual, it can include such as by the holding surface of the holding portion 22a lower than normal. When the control unit 25 determines that the contact of the substrate 2 with the holding unit 22a can be avoided, the process proceeds to S13. In S13, the control unit 25 drives the first transport unit 21a and the holding unit 22a to prevent the substrate 2 from coming into contact with the holding unit 22a, so that the substrate to the PA unit 22 by the first transport unit 21a. 2 conveyance is controlled.

  On the other hand, since the driving of the first transport unit 21a and the holding unit 22a is also limited, the holding unit 22a may be driven depending on the warp size of the substrate 2 (the height of the tip portion 2a of the substrate 2). Contact of the substrate 2 with can occur. In this case, the control unit 25 determines in S12 that the substrate 2 cannot be prevented from contacting the holding unit 22a even by driving the first transport unit 21a or the holding unit 22a, and proceeds to S14. The conveyance of the substrate 2 to the PA unit 22 (holding unit 22a) is stopped. The substrate 2 whose transportation to the PA unit 22 is stopped is transported to the cassette arranged at the standby position C by the first transport unit 21a.

  In S15, as shown in FIG. 7A, the control unit 25 detects the detection unit obtained by the substrate 2 passing through the detection region 24a of the detection unit 24 during the transfer of the substrate 2 by the first transfer unit 21a. From the detection results of 24, a height distribution (first distribution) in the transport direction of the substrate 2 is obtained. For example, as shown in FIG. 7B, the first distribution can be represented by the relationship between the position in the transport direction (position in the X direction) and the height (position in the Z direction) in the substrate.

  In S16, the control unit 25 detects the edge of the substrate 2 by the edge detection unit 22b while rotating the substrate 2 by the holding unit 22a (performs pre-alignment). At this time, as shown in FIG. 8A, during the rotation of the substrate 2 by the holding unit 22a, the height of the portion of the substrate 2 that falls within the detection region 24a is detected by the detection unit 24. That is, detection by the detection unit 24 is performed during rotation of the substrate 2 for detecting the edge of the substrate 2. Therefore, in S17, the control unit 25 obtains the height distribution (second distribution) in the circumferential direction of the substrate from the detection result of the detection unit 24 obtained during the detection of the edge of the substrate 2. For example, as shown in FIG. 8B, the second distribution can be represented by the relationship between the angle in the circumferential direction (rotation angle) and the height in the substrate. In the present embodiment, the height distribution in the entire circumference in the circumferential direction of the substrate 2 is obtained, but it may not be the entire circumference.

  In S18, the control unit 25, based on the first distribution obtained in S15 and the second distribution obtained in S17, for example, as shown in FIG. 9, information (shape) indicating the shape (warp) of the substrate 2. Information). FIG. 9 is a diagram showing the shape information of the substrate 2, and the line 2b in the substrate represents a contour line. Here, in the present embodiment, when obtaining the shape information of the substrate 2, both the first distribution and the second distribution are used. However, the present invention is not limited to this. For example, only one of the first distribution and the second distribution is used. May be used. Further, when obtaining the shape information of the substrate 2, the detection result (edge information of the substrate 2) of the edge detection unit 22b may be further used. If the edge information of the substrate 2 is further used in this way, the shape information of the substrate 2 can be obtained with higher accuracy.

  In S <b> 19, the control unit 25 determines that the substrate 2 comes into contact with a member in the imprint apparatus when the second transport unit 21 b transports the substrate 2 onto the stage 12 based on the shape information of the substrate 2. It is determined whether or not avoidance is possible. If it is determined that the substrate 2 can be prevented from coming into contact with a member in the imprint apparatus, the process proceeds to S20. In S <b> 20, the control unit 25 transports the substrate 2 to the stage 12 by the second transport unit 21 b so as to avoid contact of the substrate 2 with a member in the imprint apparatus based on the shape information of the substrate 2. To control. For example, the control unit 25 determines a transport path (second path) for transporting the substrate 2 to the stage 12 so as to avoid the substrate 2 from contacting a member in the imprint apparatus. In S21, the control unit 25 transports the substrate 2 onto the stage 12 by the second transport unit 21b along the second path determined in S20.

For example, in the transport device 20, when the substrate 2 is transported, the position of the central portion of the substrate 2 and the position of the outer peripheral portion (outer edge portion) of the substrate may differ depending on the warp (shape) of the substrate 2. Figure 10 is a diagram viewed state holding each of the mutually two substrates having different shapes 2 (substrate 2 ', the substrate 2 ") by the hand 21b ₁ of the second conveying part 21b from the Y-direction. FIG. As shown in FIG. 10, in the state where the substrate 2 ′ is held by the hand 21b ₁ of the second transport unit 21b, the height of the central portion and the outer peripheral portion of the substrate is higher than the state where the substrate 2 ″ is held. Differ by L. Therefore, when the substrate 2 ′ is transported on the stage along the same route as the transport route for the substrate 2 ″ to the stage 12, the substrate 2 ′ contacts a member in the imprint apparatus such as the pin 12 a protruding from the stage 12. Therefore, the transport apparatus 20 of the present embodiment obtains the shape information of the substrate 2 from the detection result of the detection unit 24, and is held by the transport unit 21 (second transport unit 21b) based on the obtained shape information. In this way, the state (position) of the substrate is determined, so that the second path for transporting the substrate 2 onto the stage is determined so as to avoid the substrate 2 from contacting a member in the imprint apparatus. be able to.

  Here, in S20, the control unit 25 preferably determines the second route so that the substrate 2 becomes the shortest route that does not contact the members in the imprint apparatus. Further, the control unit 25 may control the protrusion amount of the pin 12a protruding from the stage 12 according to the shape information of the substrate 2 (for example, the protrusion amount may be reduced). Furthermore, in the transport apparatus 20, a correction unit that corrects the shape of the substrate 2 arranged on the stage may be provided. In this case, the control unit 25 may determine whether or not it is necessary to correct the warp of the substrate 2 by the correction unit after the substrate 2 is transferred onto the stage, according to the shape information of the substrate 2. .

  On the other hand, when the control unit 25 determines in S19 that the substrate 2 cannot be prevented from coming into contact with a member in the imprint apparatus, the process proceeds to S22 and the conveyance of the substrate 2 to the stage 12 is stopped. The substrate 2 whose transportation to the stage 12 is stopped is transported to the cassette arranged at the standby position C by the first transport unit 21a.

  As described above, the transport apparatus 20 of the present embodiment includes the detection unit 24 that detects the height of the substrate 2, and controls the transport of the substrate 2 to the stage 12 based on the detection result of the detection unit 24. Thereby, when the board | substrate 2 is conveyed on the stage from PA part 22, it can avoid that the board | substrate 2 contacts the member in an imprint apparatus, and is damaged.

Second Embodiment
In the second embodiment, an example in which a plurality of detection units 24 are provided will be described with reference to FIG. Here, an example in which two detection units (24-1, 24-2) are provided will be described, but three or more detection units 24 may be provided. FIG. 11 is a diagram for explaining the arrangement of the two detection units 24, and shows the configuration around the PA unit 22. FIG. 11A is a view of the periphery of the PA unit 22 viewed from the Z direction, and FIG. 11B is a view of the periphery of the PA unit 22 viewed from the −Y direction.

  As shown in FIG. 11, the plurality of detection units 24 are preferably arranged such that the positions of the detection regions 24 a are shifted from each other in the direction perpendicular to the conveyance direction of the substrate 2 by the first conveyance unit 21 a (Y direction). Further, it is preferable that the plurality of detection units 24 be arranged so that the distance between the rotation center of the substrate 2 (for example, the center of the substrate 2) by the holding unit 22a and the detection region 24a is different at the time of edge detection. By using the plurality of detection units 24 arranged in this way, the shape information of the substrate 2 can be obtained with higher accuracy from the detection result of each detection unit 24.

<Embodiment of Method for Manufacturing Article>
The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing an article such as a microdevice such as a semiconductor device or an element having a fine structure. The method for manufacturing an article according to the present embodiment includes a step of forming a pattern on the imprint material (resist) supplied to the substrate using the imprint apparatus (step of performing imprint processing on the substrate), and the step. Processing the substrate on which the pattern is formed. Other lithographic apparatus as described above may be used instead of the imprint apparatus. Further, the manufacturing method includes other well-known steps (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, and the like). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

  As mentioned above, although preferred embodiment of this invention was described, it cannot be overemphasized that this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

10: imprint apparatus, 11: imprint head, 12: stage, 20: transport apparatus, 21a: first transport section, 21b: second transport section, 22: pre-alignment section, 24: detection section, 25: control section

Claims (24)

A transfer device for transferring a substrate to a stage,
A holding unit for holding the substrate;
A detection unit for detecting the height of the substrate;
A first transport unit that transports the substrate to the holding unit;
A second transfer unit for transferring the substrate from the holding unit to the stage;
The stage is placed on the second transport unit along a path determined based on a detection result obtained by causing the detection unit to detect the height of the substrate while the substrate is transported to the first transport unit. A control unit to be conveyed to
A conveying apparatus comprising:   The transport apparatus according to claim 1, wherein the detection result includes a height distribution of the substrate in the transport direction of the substrate.   The said detection part has several detection parts arrange | positioned mutually shifted in the direction different from the conveyance direction of the said board | substrate conveyed by the said 1st conveyance part, The Claim 1 or 2 characterized by the above-mentioned. Conveying device.   The transport apparatus according to claim 1, wherein the control unit determines the path so as to avoid the substrate from coming into contact with the stage.   When the control unit determines whether the substrate contacts the holding unit based on the height of the substrate detected by the detection unit, and determines that the substrate contacts the holding unit The transport apparatus according to claim 1, wherein the transport of the substrate to the holding unit by the first transport unit is stopped. A transfer device for transferring a substrate to a stage,
A holding unit for holding and rotating the substrate;
A detection unit for detecting the height of the substrate;
A transport unit that transports the substrate from the holding unit to the stage;
In a state where the substrate is held and rotated by the holding unit, the height of the substrate is detected by the detection unit, and the substrate is moved to the transport unit by a path determined based on a first detection result obtained. A control unit to be transported to the stage;
A conveying apparatus comprising:   The transport apparatus according to claim 6, wherein the first detection result includes a distribution indicating a height distribution of the substrate in a circumferential direction of the substrate.   8. The transport according to claim 6, wherein the control unit changes a protrusion amount of a pin that protrudes from the stage when delivering the substrate to the stage based on the first detection result. 9. apparatus.   The said detection part has a some detection part from which the distance of the rotation area in which the said holding | maintenance part rotates the said board | substrate, and the detection area | region for detecting the height of the said board | substrate differs mutually. The conveying apparatus of any one of thru | or 8.   The transport apparatus according to claim 6, wherein the control unit determines the path so as to avoid the substrate from coming into contact with the stage. A second detector for detecting an edge of the substrate;
The second detection unit detects an edge of the substrate in a state where the substrate is rotated by the holding unit,
The transport apparatus according to claim 6, wherein the control unit determines the path based on an edge of the substrate and the first detection result. Having another transport unit for transporting the substrate to the holding unit;
The control unit is configured to detect the height of the substrate by the detection unit in a state where the substrate is conveyed to the other conveyance unit based on the second detection result and the first detection result obtained. 12. The transport apparatus according to claim 6, wherein a route is determined.   The transport apparatus according to claim 12, wherein the second detection result includes a height distribution of the substrate in the transport direction of the substrate.   The transport apparatus according to claim 1, wherein the control unit determines the path so that a path in a height direction of the substrate is changed. A transfer device for transferring a substrate to a stage,
A holding unit for holding the substrate;
A detection unit for detecting the height of the substrate;
A transport unit for transporting the substrate;
A control unit that causes the transport unit to transport the substrate to the stage in a path determined based on a detection result obtained by detecting the height of the substrate by the detection unit;
A conveying apparatus comprising:   The transport device according to claim 15, wherein the detection unit detects a height of the substrate in a state where the substrate is transported by the transport unit.   The transport device according to claim 15 or 16, wherein the detection unit detects the height of the substrate in a state where the substrate is held and rotated by the holding unit. A lithographic apparatus for forming a pattern on a substrate,
A conveying device according to any one of claims 1 to 17,
A substrate that is transported by the transport device, has a stage that holds and moves the substrate, and a forming unit that forms a pattern on the substrate held by the stage;
A lithographic apparatus comprising: A transport method for transporting a substrate to a stage,
A detection step of detecting the height of the substrate in a state where the substrate is transported to a holding unit that holds the substrate and obtaining a detection result;
A determination step of determining a path for transporting the substrate to the stage based on the detection result;
A transport step of transporting the substrate to the stage along the path determined in the determination step;
A conveying method characterized by comprising: A transport method for transporting a substrate to a stage,
A detection step of detecting the height of the substrate and obtaining a detection result in a state where the holding unit that holds and rotates the substrate holds and rotates the substrate;
A determination step of determining a path for transporting the substrate to the stage based on the detection result;
A transport step of transporting the substrate to the stage along the path determined in the determination step;
A conveying method characterized by comprising: A transport method for transporting a substrate to a stage,
A detection step of detecting the height of the substrate and obtaining a detection result;
A determination step of determining a path for transporting the substrate to the stage based on the detection result;
A transport step of transporting the substrate to the stage along the path determined in the determination step;
A conveying method characterized by comprising: A detection step of obtaining a detection result by detecting the height of the substrate while the substrate is being transported to a holding unit that holds the substrate;
A determination step of determining a path for transporting the substrate to a stage based on the detection result;
A transport step of transporting the substrate to the stage along the path determined in the determination step;
A forming step of forming a pattern on the substrate transferred to the stage in the transfer step;
A processing step of processing the substrate on which the pattern is formed in the forming step;
Obtaining an article including at least a part of the substrate processed in the processing step;
A method for producing an article comprising: A detection step of detecting a detection result by detecting the height of the substrate in a state where the holding unit that holds and rotates the substrate holds and rotates the substrate; and
A determination step of determining a path for transporting the substrate to a stage based on the detection result;
A transport step of transporting the substrate to the stage along the path determined in the determination step;
A forming step of forming a pattern on the substrate transferred to the stage in the transfer step;
A processing step of processing the substrate on which the pattern is formed in the forming step;
Obtaining an article including at least a part of the substrate processed in the processing step;
A method for producing an article comprising: A detection step of detecting the height of the substrate and obtaining a detection result;
A determination step of determining a path for transporting the substrate to a stage based on the detection result;
A transport step of transporting the substrate to the stage along the path determined in the determination step;
A forming step of forming a pattern on the substrate transferred to the stage in the transfer step;
A processing step of processing the substrate on which the pattern is formed in the forming step;
Obtaining an article including at least a part of the substrate processed in the processing step;
A method for producing an article comprising:

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