JP2018119210A5 - - Google Patents

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Publication number
JP2018119210A5
JP2018119210A5 JP2018005991A JP2018005991A JP2018119210A5 JP 2018119210 A5 JP2018119210 A5 JP 2018119210A5 JP 2018005991 A JP2018005991 A JP 2018005991A JP 2018005991 A JP2018005991 A JP 2018005991A JP 2018119210 A5 JP2018119210 A5 JP 2018119210A5
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JP
Japan
Prior art keywords
rib
ribs
decompression container
quadrangle
decompression
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018005991A
Other languages
English (en)
Japanese (ja)
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JP2018119210A (ja
JP7133928B2 (ja
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Publication of JP2018119210A publication Critical patent/JP2018119210A/ja
Publication of JP2018119210A5 publication Critical patent/JP2018119210A5/ja
Application granted granted Critical
Publication of JP7133928B2 publication Critical patent/JP7133928B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018005991A 2017-01-20 2018-01-17 減圧容器、処理装置、処理システム及びフラットパネルディスプレイの製造方法 Active JP7133928B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017009001 2017-01-20
JP2017009001 2017-01-20

Publications (3)

Publication Number Publication Date
JP2018119210A JP2018119210A (ja) 2018-08-02
JP2018119210A5 true JP2018119210A5 (enExample) 2021-03-04
JP7133928B2 JP7133928B2 (ja) 2022-09-09

Family

ID=62907398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018005991A Active JP7133928B2 (ja) 2017-01-20 2018-01-17 減圧容器、処理装置、処理システム及びフラットパネルディスプレイの製造方法

Country Status (4)

Country Link
US (1) US20180213656A1 (enExample)
JP (1) JP7133928B2 (enExample)
KR (1) KR102082039B1 (enExample)
CN (2) CN108330448B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180213656A1 (en) * 2017-01-20 2018-07-26 Canon Kabushiki Kaisha Decompression container, processing apparatus, processing system, and method of producing flat panel display
JP7567850B2 (ja) * 2021-12-15 2024-10-16 カシオ計算機株式会社 電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6486444B1 (en) * 1999-06-03 2002-11-26 Applied Materials, Inc. Load-lock with external staging area
JP4796946B2 (ja) * 2006-11-30 2011-10-19 信越化学工業株式会社 ペリクル収納容器
US8677925B2 (en) * 2007-12-14 2014-03-25 Ulvac, Inc. Chamber and film forming apparatus
JP2010243015A (ja) * 2009-04-03 2010-10-28 Hitachi Appliances Inc 減圧貯蔵容器及びこれを備えた冷蔵庫
KR101274130B1 (ko) * 2011-08-22 2013-06-13 주식회사 테라세미콘 Ｃｉｇｓ층 형성장치
KR101396603B1 (ko) * 2013-02-26 2014-05-20 주식회사 테라세미콘 기판 처리 장치
US20180213656A1 (en) * 2017-01-20 2018-07-26 Canon Kabushiki Kaisha Decompression container, processing apparatus, processing system, and method of producing flat panel display

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