JP2018105854A - 電子式エンコーダ及び狭範囲誤差を低減させる方法 - Google Patents
電子式エンコーダ及び狭範囲誤差を低減させる方法 Download PDFInfo
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- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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Abstract
Description
検出部上の第1の位置におけるスケールパターンのスケール周期Psの等間隔の位相に配置されるN個の検知要素を含む第1の検知要素セットを使用して、第1の空間位相を測定するように検出部を動作させるステップと、
第1の位置に対して、K2及びMを整数として、K2*Ps+Ps/Mだけ、検出部上の測定軸方向に沿ってずらされた検出部上の第2の位置におけるスケールパターンのスケール周期Psの等間隔の位相に配置されるN個の検知要素を含む第2の検知要素セットを使用して、第2の空間位相を測定するように検出部を動作させるステップと、
第1及び第2の空間位相の組み合わせに基づいて、測定軸方向に沿ったスケールパターンと検出部との相対位置を決定するように信号処理部を動作させるステップと、を含む。
120 スライダアセンブリ
140 ベース
160 ピックオフアセンブリ
170 スケール
200 電子式エンコーダ
210 スケール
220、220’ 検出部
230、230’ 検知要素
241 前置増幅器
Claims (14)
- 測定軸方向に沿った2つの要素間の相対位置を測定するために使用可能である電子式エンコーダであって、
前記測定軸方向に沿って延在し、前記測定軸方向に沿ってスケール周期Psを有する周期的スケールパターンを含むスケールと、
前記周期的スケールパターンに近接して取り付けられ、前記測定軸方向に沿って前記周期的スケールパターンに対して移動するように構成される検出部と、
を含み、
前記検出部は、
前記測定軸方向に沿って配置され、前記検出部と前記周期的スケールパターンとの前記相対位置に対応する検出器信号を提供するように構成される複数の検知要素と、
前記検出部に動作可能に接続され、前記検出部から入力される検出器信号に基づいて、前記検出部と前記周期的スケールパターンとの前記相対位置を決定する信号処理部と、
を含み、
前記複数の検知要素は、少なくとも、第1の検知要素セットと第2の検知要素セットとを含み、
前記第1の検知要素セットは、前記スケール周期PsのN個の等間隔の位相に配置されるN個の検知要素を含み、
前記第2の検知要素セットは、前記スケール周期PsのN個の等間隔の位相に配置されるN個の検知要素を含み、
前記第2の検知要素セットは、前記測定軸方向に沿って前記第1の検知要素セットに対して、K2及びMを整数として、K2*Ps+Ps/Mに相当する距離だけずれた位置に配置され、
前記信号処理部は、前記第1の検知要素セットからの第1の検出器信号セットと、前記第2の検知要素セットからの第2の検出器信号セットとを独立して取得し、前記第1の検出器信号セット及び前記第2の検出器信号セットに基づいて、前記検出部と前記周期的スケールパターンとの前記相対位置を決定するように構成される、電子式エンコーダ。 - 前記信号処理部は、
前記第1の検出器信号セットに基づいて、前記第1の検知要素セットに対する前記周期的スケールパターンの第1の空間位相を決定し、
前記第2の検出器信号セットに基づいて、前記第2の検知要素セットに対する前記周期的スケールパターンの第2の空間位相を決定し、
前記第1の空間位相と前記第2の空間位相との和である合成空間位相に基づいて、前記検出部と前記周期的スケールパターンとの前記相対位置を決定するように構成されている、請求項1に記載の電子式エンコーダ。 - 複数のスケールトラックを含む電子式アブソリュート型エンコーダである、請求項1又は2に記載の電子式エンコーダ。
- 前記信号処理部は、前記第1の検知要素セット及び前記第2の検知要素セットの両方から多重化位置信号を受信するように構成される前置増幅器を含む、請求項1から3の何れか1項に記載の電子式エンコーダ。
- 前記第1の検知要素セットと前記信号処理部との間の第1の電子的接続部と、前記第2の検知要素セットと前記信号処理部との間の第2の電子的接続部とを更に含み、前記第1の電子的接続部と前記第2の電子的接続部とは、互いに対して対称である、請求項1から4の何れか1項に記載の電子式エンコーダ。
- 前記スケールと前記検出部とは、電磁誘導式トランスデューサ又は渦電流式トランスデューサのうちの1つを形成する、請求項1から5の何れか1項に記載の電子式エンコーダ。
- Mは4であり、Nは3であり、
前記複数の検知要素は更に、第3の検知要素セットと第4の検知要素セットとを含み、
前記第3の検知要素セットは、前記スケール周期PsのN個の等間隔の位相に配置された3つの検知要素を含み、前記測定軸方向に沿って、前記第2の検知要素セットに対して、K3を整数として、K3*Ps+Ps/4に相当する距離だけずれた位置に配置され、
前記第4の検知要素セットは、前記スケール周期Psの3つの等間隔の位相に配置された3つの検知要素を含み、前記測定軸方向に沿って、前記第3の検知要素セットに対して、K4を整数として、K4*Ps+Ps/4に相当する距離だけずれた位置に配置され、
前記信号処理部は、前記第3の検知要素セットからの第3の検出器信号セットと、前記第4の検知要素セットからの第4の検出器信号セットとを独立して取得し、前記第1の検出器信号セット、前記第2の検出器信号セット、前記第3の検出器信号セット及び前記第4の検出器信号セットに基づいて、前記検出部と前記周期的スケールパターンとの前記相対位置を決定するように構成される、請求項1から6の何れか1項に記載の電子式エンコーダ。 - Mは2、3又は4のうちの1つである、請求項1から6の何れか1項に記載の電子式エンコーダ。
- 前記第1の検知要素セットと前記第2の検知要素セットとは、少なくとも1つの検知要素を共有する、請求項1から6の何れか1項に記載の電子式エンコーダ。
- Mは3であり、Nは3である、請求項9に記載の電子式エンコーダ。
- 電子式エンコーダによって測定される測定軸方向に沿った検出部に対するスケールパターンの相対位置の測定値を求める際に狭範囲誤差を低減させる方法であって、前記検出部は、信号処理部を含み、前記方法は、
前記検出部上の第1の位置における前記スケールパターンのスケール周期Psの等間隔の位相に配置されるN個の検知要素を含む第1の検知要素セットを使用して、第1の空間位相を測定するように前記検出部を動作させるステップと、
前記第1の位置に対して、K2及びMを整数として、K2*Ps+Ps/Mだけ、前記検出部上の前記測定軸方向に沿ってずらされた前記検出部上の第2の位置における前記スケールパターンのスケール周期Psの等間隔の位相に配置されるN個の検知要素を含む第2の検知要素セットを使用して、第2の空間位相を測定するように前記検出部を動作させるステップと、
前記第1の空間位相と前記第2の空間位相との組み合わせに基づいて、前記測定軸方向に沿った前記スケールパターンと前記検出部との前記相対位置を決定するように前記信号処理部を動作させるステップと、
を含む、方法。 - 前記第1の空間位相は、前記測定軸方向に沿った位置に応じた第1の誤差成分を含み、
前記第2の空間位相は、前記測定軸方向に沿った位置に応じた前記第1の誤差成分と実質的に同じであるが符号が反対である第2の誤差成分を含み、
前記第1の空間位相と前記第2の空間位相との前記組み合わせは、前記相対位置の決定の際に、前記第1の誤差成分の寄与と前記第2の誤差成分の寄与とを実質的に相殺する、請求項11に記載の方法。 - 前記測定軸方向に沿った前記スケールパターンと前記検出部との前記相対位置を決定するように前記信号処理部を動作させるステップは、前記第1の空間位相と前記第2の空間位相とを合計するステップを含む、請求項11または12に記載の方法。
- Mは4であり、Nは3であり、
前記第2の位置に対して、K3を整数として、K3*Ps+Ps/4だけ、前記検出部上の前記測定軸方向に沿ってずらされた前記検出部上の第3の位置における前記スケールパターンのスケール周期Psの等間隔の位相に配置される3つの検知要素を含む第3の検知要素セットを使用して、第3の空間位相を測定するように前記検出部を動作させるステップと、
前記第3の位置に対して、K4を整数として、K4*Ps+Ps/4だけ、前記検出部上の前記測定軸方向に沿ってずらされた前記検出部上の第4の位置における前記スケールパターンのスケール周期Psの等間隔の位相に配置される3つの検知要素を含む第4の検知要素セットを使用して、第4の空間位相を測定するように前記検出部を動作させるステップと、
を更に含み、
前記測定軸方向に沿った前記スケールパターンと前記検出部との前記相対位置を決定するように前記信号処理部を動作させるステップは、前記第1の空間位相、前記第2の空間位相、前記第3の空間位相及び前記第4の空間位相の組み合わせに基づいている、請求項11から13の何れか1項に記載の方法。
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Cited By (8)
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US10520335B2 (en) * | 2016-08-24 | 2019-12-31 | Mitutoyo Corporation | Winding configuration for inductive position encoder |
US10775199B2 (en) * | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
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US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
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US10422666B2 (en) | 2019-09-24 |
CN108240825B (zh) | 2020-10-23 |
CN108240825A (zh) | 2018-07-03 |
DE102017223667A1 (de) | 2018-06-28 |
US20180180452A1 (en) | 2018-06-28 |
JP7126748B2 (ja) | 2022-08-29 |
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