JP2018089634A - Ultrasonic working device - Google Patents
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本発明は、振動エネルギーを効率良く伝達させるための共鳴体である超音波ホーンと、該超音波ホーンに取り付けられて、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドとを有する超音波加工装置に関する。 The present invention relates to an ultrasonic horn that is a resonator for efficiently transmitting vibration energy, and an ultrasonic horn that is attached to the ultrasonic horn and that directly contacts a workpiece and finally works by ultrasonic vibration. The present invention relates to an ultrasonic processing apparatus having a sonic head.
超音波の産業利用には、魚群探知機や超音波探傷機、超音波診断装置等、超音波の波動を利用して各種測定を行う通信的応用と、超音波洗浄、超音波加工等、超音波振動の物理的作用を利用する動力的応用がある。特に工業的な利用では超音波加工が注目されており、超音波切削、超音波研削、超音波ボンディング、超音波ウエルダー、超音波インプリント等の装置や加工技術が広く利用されている。 For industrial use of ultrasonic waves, fish detectors, ultrasonic flaw detectors, ultrasonic diagnostic equipment, etc., communication applications that perform various measurements using ultrasonic waves, ultrasonic cleaning, ultrasonic processing, etc. There are power applications that make use of the physical action of sonic vibrations. In particular, ultrasonic machining is attracting attention for industrial use, and apparatuses and machining techniques such as ultrasonic cutting, ultrasonic grinding, ultrasonic bonding, ultrasonic welder, and ultrasonic imprint are widely used.
超音波加工装置では、超音波発生器によって生成した正弦波の電気的エネルギーを超音波振動子によって機械的な振動エネルギーに変換し、超音波ホーンと呼ばれる共鳴体を介して被加工物に伝達する。超音波切削では、超音波ホーンの先端に切削工具を固定することによって、刃先の被加工物への接触と離脱を高速且つ断続的に行い、離脱時に蓄えた振動エネルギーを接触に移り変わった瞬間に大きな加速度を伴って衝撃的に被加工物に放出するものである。このような加工サイクルを繰り返すことによって、切削抵抗を低減し、切削時の温度上昇も抑制できる特徴を持つ。また、ガラス等の硬脆材料と工具の間に研削液と砥粒を挿入し、超音波振動によって砥粒の被加工物への衝突を促し除去加工を行う超音波研削もある。超音波ボンディングは、２つの金属材料同士の接合に利用されており、超音波振動で接合面間の酸化被膜が取り除かれ、金属の結晶粒同士が強力な引力が働く原子間距離まで近づくことによって冶金結合する。超音波ウエルダーでは、２つの熱可塑性材料基板に振動エネルギーと荷重を同時に加えることにより、接合面において強力な摩擦熱を発生させ、被加工物を溶融し接合する。超音波振動印加中に発生する摩擦熱は、ヒーターから伝播した熱とは異なり、超音波振動の停止と同時に瞬時に消滅する。この特徴を活かして、モールドの微細凸構造を被加工物表面に押し当てながら超音波振動を印加し、局所的な摩擦熱を発生させて熱変形を促す超音波インプリントが提案されている。超音波インプリントは、紫外線やヒーターを使わない第三のインプリント技術として、様々なエンジニアリングプラスチックやガラスの表面をパターニングする方法としての有効性が報告されている。一方、インプリントでは、テンプレートやモールドは成形材料に接触するため、洗浄や取り替えのためにインプリント装置から脱着できる必要がある。 In an ultrasonic processing apparatus, electrical energy of a sine wave generated by an ultrasonic generator is converted into mechanical vibration energy by an ultrasonic vibrator and transmitted to a workpiece through a resonator called an ultrasonic horn. . In ultrasonic cutting, a cutting tool is fixed to the tip of an ultrasonic horn, so that the cutting edge contacts and disengages from the workpiece at high speed and intermittently. It is released to the workpiece in an impact with a large acceleration. By repeating such a machining cycle, the cutting resistance is reduced and the temperature rise during cutting can be suppressed. In addition, there is ultrasonic grinding in which a grinding liquid and abrasive grains are inserted between a hard and brittle material such as glass and a tool, and the abrasive grains are urged to collide with a workpiece by ultrasonic vibration to perform removal processing. Ultrasonic bonding is used for bonding two metal materials. By removing the oxide film between the bonding surfaces by ultrasonic vibration, the metal crystal grains approach each other to an interatomic distance where a strong attractive force works. Join metallurgical. In an ultrasonic welder, vibration energy and a load are simultaneously applied to two thermoplastic material substrates to generate strong frictional heat on the joining surfaces, thereby melting and joining the workpieces. Unlike the heat propagated from the heater, the frictional heat generated during application of the ultrasonic vibration disappears instantaneously at the same time as the ultrasonic vibration is stopped. Taking advantage of this feature, an ultrasonic imprint has been proposed in which ultrasonic vibration is applied while pressing the fine convex structure of the mold against the surface of the workpiece, thereby generating local frictional heat to promote thermal deformation. Ultrasonic imprinting has been reported as a third imprinting technique that does not use ultraviolet rays or a heater, and is effective as a method for patterning the surface of various engineering plastics and glass. On the other hand, in imprinting, the template and the mold come into contact with the molding material, so that they must be removable from the imprinting device for cleaning and replacement.
超音波加工装置の構成は、超音波領域の周波数を有する電気信号を発生させる超音波発振器、高周波の電気的エネルギーを機械的な振動エネルギーに変換する超音波振動子、振幅を増幅させるブースター、共鳴体としての超音波ホーン、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドに分けられる。 The structure of the ultrasonic processing device consists of an ultrasonic oscillator that generates an electrical signal having a frequency in the ultrasonic region, an ultrasonic vibrator that converts high-frequency electrical energy into mechanical vibration energy, a booster that amplifies the amplitude, and resonance. It is divided into an ultrasonic horn as a body and an ultrasonic head that directly contacts a workpiece and finally works by ultrasonic vibration.
一般的な超音波加工装置においては、超音波振動が非常に強力であるために、超音波ヘッドを銀蝋付けによって超音波ホーンに固定することが多い。しかし、銀蝋付けされた超音波ヘッドを剥離するためには６００℃以上に加熱しなければならず、清浄な表面を再現することは難しい。 In a general ultrasonic processing apparatus, since the ultrasonic vibration is very strong, the ultrasonic head is often fixed to the ultrasonic horn by silver brazing. However, in order to peel the silver brazed ultrasonic head, it must be heated to 600 ° C. or higher, and it is difficult to reproduce a clean surface.
そこで、アクチュエーターで発生させた圧力によって超音波ホーンを超音波振動子に押し付けて固定する手段が特許文献１によって開示されている。この手法では周波数の上昇とともに超音波ホーンの挙動が超音波振動子に追随できなくなり、固定力向上のために圧力を増加させると超音波振動子自身の発振を妨げる虞がある。 Therefore, Patent Document 1 discloses a means for pressing and fixing an ultrasonic horn against an ultrasonic transducer with a pressure generated by an actuator. With this method, the behavior of the ultrasonic horn cannot follow the ultrasonic transducer as the frequency increases, and if the pressure is increased to improve the fixing force, the oscillation of the ultrasonic transducer itself may be hindered.
超音波ボンディングのヘッド部に真空吸着によって電子部品等を固定する装置が特許文献２、３に開示されている。しかし、超音波ヘッドに吸着させる物体の重量が大きいほど吸着力は弱まるため、強固な固定力は期待できない。 Patent Documents 2 and 3 disclose apparatuses for fixing electronic components and the like to the head part of ultrasonic bonding by vacuum suction. However, as the weight of the object to be attracted to the ultrasonic head is larger, the attracting force is weakened, so that a strong fixing force cannot be expected.
工具ホルダーを介して超音波ホーンに超音波工具をネジ締結する手法が特許文献４、特許文献５で開示されている。これらの手法は超音波振動によってネジが緩む可能性がある。また、構成部品の剛性率の違いによって、超音波振動の波形が歪な形状で伝達されることが非特許文献１により明らかになっている。 Patent Documents 4 and 5 disclose a method for screwing an ultrasonic tool to an ultrasonic horn via a tool holder. In these methods, the screw may be loosened by ultrasonic vibration. Further, Non-Patent Document 1 reveals that the waveform of ultrasonic vibration is transmitted in a distorted shape due to the difference in the rigidity of the component parts.
さらに、超音波ノズル側の取り付け凸部を超音波ホーンに設けた取り付け凹部に外力を加えてその径が広がるように変形させて挿入し、超音波ホーンの材料の弾性力により締め付けて固定する手法が特許文献６で開示されている。しかし、弾性率の低い金属製の超音波ホーンを使用した場合、一度外力によって変形した取り付け凹部が脱離後に完全に元の形状に戻ることは期待できないため、脱着作業を繰り返すと急激にその締付力は劣化してゆくと考えられる。 In addition, the method is to insert the mounting convex part on the ultrasonic nozzle side into the mounting concave part provided on the ultrasonic horn by applying an external force so that its diameter expands and inserts it, and tightens it with the elastic force of the ultrasonic horn material. Is disclosed in Patent Document 6. However, if a metal ultrasonic horn with a low elastic modulus is used, it cannot be expected that the mounting recess once deformed by an external force will return completely to its original shape after detachment. The applied force is considered to deteriorate.
一方、超音波振動と焼き嵌め締結を組み合わせた事例として、焼き嵌めでロータに軸を挿入した後に超音波振動を加える手法が特許文献７に、超音波振動させながら切削加工工具を焼き嵌め締結する方法が特許文献８と９に開示されている。これらの手法では、焼き嵌め時の脱着を容易にするために超音波振動を援用しているため、必然的に嵌め込まれた軸や工具は超音波振動によって位置ずれを起こしてしまう。 On the other hand, as an example of a combination of ultrasonic vibration and shrink fitting, a technique of applying ultrasonic vibration after inserting a shaft into a rotor by shrink fitting is disclosed in Patent Document 7 in which a cutting tool is shrink fitted and tightened while ultrasonic vibration is applied. Methods are disclosed in US Pat. In these methods, since ultrasonic vibration is used to facilitate desorption at the time of shrink fitting, the shaft and the tool that are inevitably inserted are displaced due to the ultrasonic vibration.
また、刀部を擁する超音波ホーンと工作機械の駆動軸を焼き嵌めまたは冷やし嵌めで嵌め合わせる構成が特許文献１０に開示されている。これは超音波ホーンを高速で回転する工作機械の駆動軸に強固に固定するための構成を提案しており、超音波ヘッドを頻繁に脱着する用途としては想定していない。 Further, Patent Document 10 discloses a configuration in which an ultrasonic horn having a sword portion and a drive shaft of a machine tool are fitted together by shrink fitting or cold fitting. This proposes a configuration for firmly fixing the ultrasonic horn to the drive shaft of a machine tool that rotates at a high speed, and is not assumed as an application for frequently detaching the ultrasonic head.
特許文献１１では、超音波ホーンの凹部に焼き嵌めで工具を締結する方法が開示されているが、非特許文献１でも示されているとおり、超音波ホーンと超音波ヘッドの嵌め合い構造が取り付け面（接触面）の中央に一つしか存在しない場合は、嵌合に関与していない取り付け面間で叩き合いが発生し、そのために発生する摩擦熱によって温度上昇と振り遅れによる振動波形の乱れを引き起こす。 In patent document 11, although the method of fastening a tool to the recessed part of an ultrasonic horn by shrink fitting is disclosed, as shown also in nonpatent literature 1, the fitting structure of an ultrasonic horn and an ultrasonic head is attached. If there is only one at the center of the surface (contact surface), the mounting surfaces that are not involved in the mating will hit each other, and the frictional heat generated thereby will disturb the vibration waveform due to temperature rise and swing delay. cause.
ところで、非特許文献１では、超音波ヘッドを、両面テープ貼付、接着剤塗布、ネジ止め、取り付け面（接触面）の中央部に単一のアリ溝部とホゾ部とから構成されるアリ構造を備えた冷やし嵌めの４種類の固定方法で超音波ホーンに固定し、振動エネルギーの損失比較を行った結果が開示されている。 By the way, in Non-Patent Document 1, an ultrasonic head has an ant structure composed of a single dovetail groove portion and a tenon portion at the center of a double-sided tape affixing, adhesive application, screwing, and mounting surface (contact surface). The result of having carried out the comparison of the loss of vibration energy by fixing to an ultrasonic horn by the four types of fixing methods of cold fitting provided is disclosed.
非特許文献１に開示した先行実験によると、超音波加工装置の無酸素銅製ヘッドを両面テープ貼付、接着剤塗布、ネジ止め、取り付け面（接触面）の中央部に単一のアリ構造を備えた冷やし嵌めの４種類の固定方法で、チタン製超音波ホーンに固定して振動エネルギーの損失比較を行ったところ、取り付け面の中央部に単一のアリ構造を備えた冷やし嵌めによる固定方法は、両面テープ貼付による固定方法に次いで発熱が大きく、伝播した超音波振動の振幅も最も増大することが明らかになった。 According to a prior experiment disclosed in Non-Patent Document 1, an oxygen-free copper head of an ultrasonic processing apparatus has a single dovetail structure at the center of a double-sided tape, adhesive application, screwing, and mounting surface (contact surface). When the loss of vibration energy was compared by fixing it to a titanium ultrasonic horn with four types of fixing methods of cold fitting, the fixing method by cold fitting with a single ant structure at the center of the mounting surface was It was revealed that the heat generation was the second largest after the fixing method by double-sided tape sticking, and the amplitude of the transmitted ultrasonic vibration was the largest.
この理由として、アリ構造が取り付け面の中央部に一つしかないために取り付け面端部が自由端となり、取り付け面端部に間隙が生じ、このことに起因して、超音波振動によって叩き合いが生じることが原因と考えられる。なお、ここでのアリ構造とは、アリ溝部とホゾ部とにより結合部材間の係合をもたらす構造であり、本明細書中においては、アリ構造が取り付け面内に複数個配置された場合を複アリ構造と称し、これと区別するために単一のアリ構造のみが配置されていることを意味する用語として単アリ構造と称することとする。 The reason for this is that since there is only one ant structure at the center of the mounting surface, the end of the mounting surface becomes a free end, and a gap is created at the end of the mounting surface. It is thought that this is caused by Here, the term “ant structure” refers to a structure that brings about engagement between the coupling members by the dovetail groove portion and the tenon portion, and in this specification, a case where a plurality of dovetail structures are arranged on the mounting surface. The term “double ant structure” is used, and the term “single ant structure” is used as a term that means that only a single ant structure is arranged in order to distinguish this structure.
本発明は上記のような課題に鑑み、振動エネルギーを効率良く伝達させるための共鳴体である超音波ホーンと、超音波ホーンに取り付けられて、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドとを有する超音波加工装置において、超音波ヘッドの超音波ホーンからの脱着が可能で、なお且つ、超音波ホーンと超音波ヘッドとの取り付け面端部に生じる間隙の叩き合いによる変形や摩擦熱の発生を抑制することでき、超音波ホーンから超音波ヘッドへの振動エネルギーの伝達効率の改善を図ることを可能としうる超音波加工装置を提供することを目的とする。 In view of the problems as described above, the present invention is an ultrasonic horn that is a resonator for efficiently transmitting vibration energy, and is attached to the ultrasonic horn so as to be in direct contact with the workpiece, and finally the ultrasonic wave. In an ultrasonic processing apparatus having an ultrasonic head that works by vibration, the ultrasonic head can be detached from the ultrasonic horn, and a gap generated at the end of the attachment surface between the ultrasonic horn and the ultrasonic head It is an object to provide an ultrasonic processing apparatus that can suppress deformation and frictional heat generation caused by striking each other and improve the transmission efficiency of vibration energy from an ultrasonic horn to an ultrasonic head. To do.
請求項１に記載の発明によれば、振動エネルギーを効率良く伝達させるための共鳴体である超音波ホーンと、前記超音波ホーンに取り付けられて、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドとを有する超音波加工装置において、前記超音波ホーンと前記超音波ヘッドとは、それぞれの表面に形成された取り付け面を有し、前記超音波ホーンまたは前記超音波ヘッドのいずれか一方の取り付け面に複数のアリ溝部が配置され、他方の取り付け面に前記複数のアリ溝部に対応する複数のホゾ部が配置され、前記超音波ホーンと前記超音波ヘッドとは、前記複数のアリ溝部と前記複数のホゾ部とにより、前記超音波ホーンと前記超音波ヘッドとのそれぞれの取付け面が互いに接触して係合されるように形成され、前記複数のアリ溝部と前記複数のホゾ部とは、挿抜時の焼き嵌めによるアリ溝部の膨脹および冷やし嵌めによるホゾ部の収縮の少なくともいずれか一方により、互いに対する取り付け及び取り外しがなされうるように形成されている、ことを特徴とする超音波加工装置が提供される。 According to the first aspect of the present invention, an ultrasonic horn that is a resonator for efficiently transmitting vibration energy, and the ultrasonic horn is attached to the ultrasonic horn so as to be in direct contact with the workpiece, and finally super In an ultrasonic processing apparatus having an ultrasonic head that performs work by ultrasonic vibration, the ultrasonic horn and the ultrasonic head have attachment surfaces formed on respective surfaces, and the ultrasonic horn or the ultrasonic head A plurality of dovetail portions are arranged on any one mounting surface of the sonic head, and a plurality of ridge portions corresponding to the plurality of dovetail portions are arranged on the other mounting surface, and the ultrasonic horn and the ultrasonic head are The plurality of dovetail groove portions and the plurality of ridge portions are formed so that respective attachment surfaces of the ultrasonic horn and the ultrasonic head are brought into contact with each other and engaged with each other. The dovetail groove portion and the plurality of relief portions are formed so that they can be attached to and detached from each other by at least one of expansion of the dovetail portion due to shrink fitting during shrinkage insertion and contraction of the relief portion due to cold fitting. An ultrasonic processing device is provided.
すなわち、請求項１に記載の発明では、超音波ホーンと超音波ヘッドとのそれぞれの表面に取り付け面を配置し、超音波ホーンまたは超音波ヘッドのいずれか一方の取り付け面に複数のアリ溝部を配置し、他方の取り付け面に複数のアリ溝部に対応する複数のホゾ部を配置し、複数のアリ溝部と複数のホゾ部とにより、超音波ホーンと超音波ヘッドとのそれぞれの取付け面が互いに接触して係合されるように、超音波ホーンと超音波ヘッドとを形成することで、超音波ヘッドの超音波ホーンからの脱着を可能としつつ、なお且つ、取り付け面端部に生じる間隙を狭め、該間隙間の叩き合いによる変形や摩擦熱の発生を抑制することによって、超音波ホーンから超音波ヘッドへの振動エネルギーの伝達効率の改善を図ることを可能とする。 That is, in the first aspect of the invention, the mounting surfaces are arranged on the surfaces of the ultrasonic horn and the ultrasonic head, and a plurality of dovetail grooves are formed on either the mounting surface of the ultrasonic horn or the ultrasonic head. And a plurality of dovetail portions corresponding to the plurality of dovetail groove portions are arranged on the other attachment surface, and the plurality of dovetail groove portions and the plurality of dowel portions make the respective attachment surfaces of the ultrasonic horn and the ultrasonic head mutually By forming the ultrasonic horn and the ultrasonic head so as to be brought into contact with each other, it is possible to detach the ultrasonic head from the ultrasonic horn, and also to create a gap generated at the end of the mounting surface. By narrowing and suppressing the generation of deformation and frictional heat caused by striking between the gaps, it is possible to improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head.
請求項２に記載の発明によれば、前記複数のアリ溝部は、前記取り付け面の中央部に配置される中央アリ溝部と、前記取り付け面の中央部の外側に配置される少なくとも一つの外側アリ溝部とを含み、前記複数のホゾ部は、前記中央アリ溝部に対応する中央ホゾ部と、前記外側アリ溝部に対応する少なくとも一つの外側ホゾ部とを含む、ことを特徴とする請求項１に記載の超音波加工装置が提供される。 According to a second aspect of the present invention, the plurality of dovetail groove portions includes a central dovetail groove portion disposed at a center portion of the attachment surface and at least one outer dovetail disposed outside the center portion of the attachment surface. The groove portion, and the plurality of ridge portions include a central ridge portion corresponding to the central ant groove portion and at least one outer ridge portion corresponding to the outer ant groove portion. The described ultrasonic processing apparatus is provided.
請求項３に記載の発明によれば、前記中央アリ溝部は、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部が、ともに傾斜を有した斜辺部とされるような台形形状であり、前記中央ホゾ部は、断面視して、前記中央アリ溝部に対応する台形形状であり、前記外側アリ溝部は、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部の内の、取り付け面中央部に対して遠位側の対辺部が傾斜を有した斜辺部とされるような台形形状であり、前記外側ホゾ部は、断面視して、前記外側アリ溝部に対応する台形形状である、ことを特徴とする請求項２に記載の超音波加工装置が提供される。 According to the invention of claim 3, the central dovetail groove portion is a pair of connecting the upper bottom portion and the lower bottom portion, with the opening being the upper bottom portion and the lower bottom portion being longer than the upper bottom portion in a cross-sectional view. The opposite side portions are trapezoidal shapes that are both inclined side portions having an inclination, and the central tenon portion has a trapezoidal shape corresponding to the central dovetail groove portion in a cross-sectional view, and the outer dovetail groove portion is In cross-sectional view, the opening is the upper base, the lower base is longer than the upper base, and is distal to the center of the mounting surface within the pair of opposite sides connecting the upper base and the lower base. The trapezoidal shape is such that the opposite side portion is an inclined side portion having an inclination, and the outer side portion is a trapezoidal shape corresponding to the outer ant groove portion in a cross-sectional view. Item 2. An ultrasonic processing apparatus according to Item 2 is provided.
請求項４に記載の発明によれば、前記複数のアリ溝部及び前記複数のホゾ部は、前記外側アリ溝部と前記外側ホゾ部との間の前記取り付け面に対して平行方向におけるクリアランスが、前記中央アリ溝部と前記中央ホゾ部との間の前記取り付け面に対して平行方向におけるクリアランスよりも大きくなるように形成されている、ことを特徴とする請求項３に記載の超音波加工装置が提供される。 According to the invention described in claim 4, the plurality of dovetail grooves and the plurality of reliefs have a clearance in a direction parallel to the attachment surface between the outer dovetail and the outside reliefs, The ultrasonic processing apparatus according to claim 3, wherein the ultrasonic machining apparatus is formed so as to be larger than a clearance in a direction parallel to the attachment surface between the central dovetail groove portion and the central ridge portion. Is done.
請求項５に記載の発明によれば、前記外側アリ溝部及び前記外側ホゾ部は、前記取り付け面中央部からの離間距離が大きくなるほど、前記外側アリ溝部と前記外側ホゾ部との間の前記取り付け面に対して平行方向におけるクリアランスが大きくなるように形成されている、ことを特徴とする請求項４に記載の超音波加工装置が提供される。 According to the fifth aspect of the present invention, the attachment between the outer dovetail groove part and the outer tenon part of the outer dovetail groove part and the outer tenon part increases as the distance from the center part of the attachment surface increases. The ultrasonic processing apparatus according to claim 4, wherein a clearance in a direction parallel to the surface is increased.
請求項６に記載の発明によれば、前記外側アリ溝部及び前記外側ホゾ部は、挿入後に前記超音波ホーン及び前記超音波ヘッドの温度が室温に戻るのに伴い、前記外側アリ溝部の斜辺部であって取り付け面中央部に対して遠位側の斜辺部と前記外側ホゾ部の対応斜辺部であって取り付け面中央部に対して遠位側の対応斜辺部とが接触するように形成されている、ことを特徴とする請求項５に記載の超音波加工装置が提供される。 According to the invention described in claim 6, the outer dovetail portion and the outer side tense portion of the outer dovetail portion of the outer dovetail portion as the temperatures of the ultrasonic horn and the ultrasonic head return to room temperature after insertion. The oblique side portion on the distal side with respect to the center portion of the attachment surface and the corresponding oblique side portion of the outer side portion, and the corresponding oblique side portion on the distal side with respect to the central portion of the attachment surface are in contact with each other. An ultrasonic processing apparatus according to claim 5 is provided.
請求項７に記載の発明によれば、前記外側アリ溝部は、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部の内の、取り付け面中央部に対して遠位側の対辺部が傾斜を有した斜辺部とされ、取り付け面中央部に対して近位側の対辺部が、上底部と下底部とに対して直交する直交辺部とされるような台形形状であり、前記外側ホゾ部は、断面視して、前記外側アリ溝部に対応する台形形状である、ことを特徴とする請求項６に記載の超音波加工装置が提供される。 According to the seventh aspect of the present invention, the outer dovetail groove portion is a pair of connecting the upper bottom portion and the lower bottom portion, with the opening portion being the upper bottom portion and the lower bottom portion being longer than the upper bottom portion in a cross-sectional view. Of the opposite side of the mounting surface, the opposite side of the mounting surface is inclined to the inclined side, and the opposite side of the mounting surface is the upper side and the lower bottom. The trapezoidal shape is an orthogonal side portion that is orthogonal to each other, and the outer tenon portion has a trapezoidal shape corresponding to the outer dovetail groove portion in a cross-sectional view. Is provided.
各請求項に記載の発明によれば、振動エネルギーを効率良く伝達させるための共鳴体である超音波ホーンと、超音波ホーンに取り付けられて、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドとを有する超音波加工装置において、超音波ヘッドの超音波ホーンからの脱着を可能としつつ、なお且つ、取り付け面端部に生じる間隙を狭め、該間隙間の叩き合いによる変形や摩擦熱の発生を抑制することによって、超音波ホーンから超音波ヘッドへの振動エネルギーの伝達効率の改善を図ることを可能とする、という共通の効果を奏する。 According to the invention described in each claim, the ultrasonic horn which is a resonance body for efficiently transmitting vibration energy, and the ultrasonic horn is attached to the ultrasonic horn so as to directly contact the workpiece, and finally the ultrasonic wave. In an ultrasonic processing apparatus having an ultrasonic head that works by vibration, the ultrasonic head can be detached from the ultrasonic horn, and the gap generated at the end of the mounting surface is narrowed and the gap between the gaps is struck. By suppressing deformation due to mating and generation of frictional heat, it is possible to improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head.
図１は、アリ溝部とホゾ部とから構成されるアリ構造２による超音波ホーン１と超音波ヘッド３との固定構造であって、従来技術となる（ａ）単アリ構造の固定構造と、本発明の（ｂ）複アリ構造との一実施形態を説明する図である。 FIG. 1 is a fixing structure of an ultrasonic horn 1 and an ultrasonic head 3 by an ant structure 2 composed of an ant groove part and a horn part, and is a conventional technique (a) a fixing structure of a single ant structure, It is a figure explaining one Embodiment with (b) multiple ant structure of this invention.
図１（ａ）から理解されうる如く、単アリ構造の固定構造は、取り付け面中央部（接触面中央部）に一つのみのアリ構造が配置される固定構造である。上述したように、非特許文献１に開示した先行実験によると、超音波加工装置の無酸素銅製ヘッドを両面テープ貼付、接着剤塗布、ネジ止め、取り付け面（接触面）の中央部に単一のアリ溝部とホゾ部とから構成されるアリ構造を備えた冷やし嵌めの４種類の固定方法でチタン製超音波ホーンに固定して振動エネルギーの損失比較を行ったところ、単アリ構造における冷やし嵌めによる固定方法は、両面テープ貼付による固定方法に次いで発熱が大きく、伝播した超音波振動の振幅も最も増大することが明らかになった。この理由として、アリ構造が取り付け面中央部に一つしかないために取り付け面端部（接触面端部）が自由端となり、アリ構造の付け根部と取り付け面端部との間に、図１（ａ）に示される間隙δが生じることが原因と考えられる。 As can be understood from FIG. 1 (a), the fixing structure of the single ant structure is a fixing structure in which only one ant structure is arranged at the center portion of the mounting surface (center portion of the contact surface). As described above, according to the previous experiment disclosed in Non-Patent Document 1, the oxygen-free copper head of the ultrasonic processing apparatus is attached to the center of the double-faced tape, adhesive application, screwing, and attachment surface (contact surface). The loss of vibration energy was compared by fixing it to a titanium ultrasonic horn using four types of fixing methods, including a dovetail structure composed of a dovetail portion and a dovetail portion. It became clear that the fixing method by the method generates heat more than the fixing method by sticking double-sided tape, and the amplitude of the transmitted ultrasonic vibration increases the most. The reason for this is that since there is only one dovetail structure at the center of the attachment surface, the end of the attachment surface (contact surface end) becomes a free end, and between the root of the dovetail structure and the attachment surface end, FIG. The cause is considered to be the gap δ shown in (a).
そこで、本発明は、図１（ｂ）に示されるように、超音波ヘッドと超音波ホーンとの固定構造を複アリ構造とすることで、すなわち、取り付け面に複数の配置することで、アリ構造の付け根部と取り付け面端部との間に生じる間隙δ’を狭め、該間隙間の叩き合いによる変形や摩擦熱の発生を抑制することによって、超音波ヘッドの超音波ホーンからの脱着を可能としつつ、なお且つ、超音波ホーンから超音波ヘッドへの振動エネルギーの伝達効率の改善を図ることを可能とする。尚、図１（ｂ）に示される実施形態においては、超音波ホーンにアリ溝部を配置し、超音波ヘッドにホゾ部を配置しているが、実用上は、超音波ホーンにホゾ部を配置し、超音波ヘッドにアリ溝部を配置し、超音波ホーンを冷却、もしくは超音波ヘッドを加熱するものとして構成してもよい。また、図１（ｂ）には、取り付け面の中央部とその両側にアリ構造が配置される複アリ構造の一実施形態が示されているが、これに限定されることはなく、取り付け面に対する複数のアリ構造の配置は、設計仕様などに応じてアレンジされうる。 Therefore, as shown in FIG. 1 (b), the present invention has a structure in which the fixing structure of the ultrasonic head and the ultrasonic horn is a double dovetail structure, that is, by arranging a plurality of pieces on the mounting surface. By narrowing the gap δ 'generated between the base of the structure and the end of the mounting surface and suppressing the deformation and frictional heat generated by striking the gap, the ultrasonic head can be detached from the ultrasonic horn. In addition, it is possible to improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head. In the embodiment shown in FIG. 1B, the dovetail portion is arranged in the ultrasonic horn and the horn portion is arranged in the ultrasonic head. However, in practice, the horn portion is arranged in the ultrasonic horn. The dovetail portion may be disposed in the ultrasonic head, and the ultrasonic horn may be cooled or the ultrasonic head may be heated. Moreover, although one Embodiment of the double ant structure by which an ant structure is arrange | positioned at the center part of the attachment surface and its both sides is shown by FIG.1 (b), it is not limited to this, An attachment surface The arrangement of a plurality of ant structures with respect to can be arranged according to design specifications and the like.
また、取り付け面に複数のアリ構造を配置し、該複数のアリ構造部に対する挿抜時の焼き嵌めおよび冷やし嵌めの少なくともいずれか一方により、超音波ホーンと超音波ヘッドとの互いに対する取り付け及び取り外しを行うようにする構成においては、個々のアリ構造の焼き嵌めによる膨張、もしくは冷やし嵌めによる収縮の他に、超音波ホーン全体や超音波ヘッド全体の膨張や収縮の影響を考慮することも必要となる場合がある。 Also, a plurality of dovetail structures are arranged on the mounting surface, and the ultrasonic horn and the ultrasonic head are attached to and detached from each other by at least one of shrink fitting and cold fitting when inserting / removing the plurality of dovetail structures. In the configuration to be performed, it is necessary to consider the effects of expansion and contraction of the entire ultrasonic horn and the entire ultrasonic head, in addition to expansion by shrink fitting of individual ant structures or contraction by cold fitting. There is a case.
図２（ａ）は、図中で上側に配置された超音波ホーンに凹み状の複数のアリ溝部を、下側に配置された超音波ヘッドに凸状の複数のホゾ部を配置した一実施形態を示す。図２（ａ）で示される実施形態においては、取り付け面に配置される全てのアリ溝部が、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部が、ともに傾斜を有した斜辺部（すなわち、逆テーパー状側壁部）とされるような台形形状とされ、また、全てのホゾ部が、断面視して、アリ溝部に対応する台形形状であるものとされる。取り付け面（接触面）の中央部を基準に考えると、取り付け面中央部（接触面中央部）に配置されたアリ構造は超音波ホーン全体の膨張、もしくは超音波ヘッド全体の収縮の影響を受けにくいが、取り付け面端部（接触面端部）に配置されたアリ構造では、その影響は無視できない場合がある。 FIG. 2A shows an embodiment in which a plurality of concave dovetail portions are arranged in an ultrasonic horn arranged on the upper side in the drawing, and a plurality of convex tenon portions are arranged on an ultrasonic head arranged on the lower side. The form is shown. In the embodiment shown in FIG. 2 (a), all dovetail portions arranged on the mounting surface have an opening as the upper bottom portion and the lower bottom portion is longer than the upper bottom portion in the cross-sectional view. The pair of opposite sides connecting the bottom and the bottom is trapezoidal so that both sides are slanted sides (that is, reverse tapered side walls), and all the horns are cross-sectional views. Thus, the trapezoidal shape corresponds to the dovetail portion. Considering the center of the mounting surface (contact surface) as a reference, the ant structure placed in the center of the mounting surface (contact center) is affected by the expansion of the entire ultrasonic horn or the contraction of the entire ultrasonic head. Although it is difficult, the influence may not be negligible in the ant structure arranged at the end portion of the attachment surface (end portion of the contact surface).
一般的に、取り付け面中央部からｎ−１番目に配置されたアリ構造に比べて、より取り付け面端部側になる中央部からｎ番目に配置されたアリ構造の方が、取り付け面に対して平行方向（水平方向）の位置ズレが大きくなる。その結果、アリ構造の取り付け面中央部に対して近位側の逆テーパー状側壁部の物理的干渉幅は、ｎ−１番目に配置されたアリ構造の干渉幅（ζｎ−１）よりも、ｎ番目に配置されたアリ構造の干渉幅（ζｎ）の方が大きくなり（ζｎ−１≦ζｎ）、アリ構造の配列を増やせば増やすほど、焼き嵌めや冷やし嵌めによる嵌合は困難となる場合がある。 In general, the ant structure arranged nth from the central part that is closer to the end of the attachment surface is closer to the attachment surface than the ant structure arranged n-1st from the center part of the attachment surface. Therefore, the positional deviation in the parallel direction (horizontal direction) increases. As a result, the physical interference width of the reverse-tapered side wall portion on the proximal side with respect to the center portion of the mounting surface of the ant structure is larger than the interference width (ζn-1) of the ant structure arranged at the (n−1) th. When the interference width (ζn) of the n-th arranged ant structure is larger (ζn−1 ≦ ζn), and the more the ant structure arrangement is increased, the more difficult the fitting by shrink fitting or cold fitting is There is.
そこで、本発明の一実施形態においては、複数のアリ溝部は、取り付け面の中央部に配置される中央アリ溝部と、取り付け面の中央部の外側に配置される少なくとも一つの外側アリ溝部とを含むものとし、複数のホゾ部は、中央アリ溝部に対応する中央ホゾ部と、外側アリ溝部に対応する少なくとも一つの外側ホゾ部とを含むものとし、中央アリ溝部は、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部が、ともに傾斜を有した斜辺部（すなわち、逆テーパー状側壁部）とされるような台形形状であり、また、中央ホゾ部は、断面視して、中央アリ溝部に対応する台形形状であるものとされる。その一方で、外側アリ溝部は、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部の内の、取り付け面中央部に対して遠位側の対辺部（すなわち、アリ構造の取り付け面中央部に対して遠位側の側壁部）が、傾斜を有した斜辺部（すなわち、逆テーパー状側壁部）とされ、取り付け面中央部に対して近位側の対辺部（すなわち、アリ構造の取り付け面中央部に対して近位側の側壁部）が、上底部と下底部とに対して直交する直交辺部（垂直側面）とされるような台形形状であり、また、外側ホゾ部は、断面視して、外側アリ溝部に対応する台形形状であるものとされる。 Therefore, in one embodiment of the present invention, the plurality of dovetail grooves includes a central dovetail groove disposed at the center of the attachment surface and at least one outer dovetail groove disposed outside the center of the attachment surface. The plurality of tenon portions includes a central tenon portion corresponding to the central dovetail groove portion and at least one outer tenon portion corresponding to the outer dovetail groove portion. It is assumed that the lower base is longer than the upper base, and the pair of opposite sides connecting the upper base and the lower base are both inclined sides (that is, reverse tapered side walls) having an inclination. In addition, the central tenon portion has a trapezoidal shape corresponding to the central dovetail groove portion in a cross-sectional view. On the other hand, the outer dovetail part is attached in the pair of opposite side parts connecting the upper base part and the lower base part, with the opening part being the upper base part and the lower base part being longer than the upper base part in a sectional view. The opposite side portion (ie, the side wall portion distal to the center portion of the mounting surface of the dovetail structure) on the distal side with respect to the center portion of the surface is an inclined side portion (ie, reverse tapered side wall portion) having an inclination. The side opposite to the center of the mounting surface (ie, the side wall portion proximal to the center of the mounting surface of the dovetail structure) is perpendicular to the upper and lower bases. The trapezoidal shape is a portion (vertical side surface), and the outer side portion is a trapezoidal shape corresponding to the outer dovetail groove in a cross-sectional view.
図２を参照しながら、このような本発明の一実施形態について説明する。図２（ａ）で示した超音波ホーン全体の膨張もしくは収縮、あるいは超音波ヘッド全体の収縮もしくは膨張により発生する菱形の物理的干渉箇所４、５において、図２（ｂ）に示したように、菱形下辺の鋭角頂点を通る垂直線の取り付け面中央部に対して近位側のアリ構造を削除した、取り付け面中央部に対して近位側の片側面のみが垂直側面となっているアリ溝部６とホゾ部７とを配置する。 Such an embodiment of the present invention will be described with reference to FIG. As shown in FIG. 2 (b) at the diamond-shaped physical interference points 4 and 5 generated by the expansion or contraction of the entire ultrasonic horn shown in FIG. 2 (a) or the contraction or expansion of the entire ultrasonic head. The ant structure on the proximal side with respect to the central part of the mounting surface of the vertical line passing through the acute vertex of the rhombus lower side is deleted, and only one side on the proximal side with respect to the central part of the mounting surface is a vertical side. The groove part 6 and the side part 7 are arranged.
図２（ｂ）に示される実施形態においては、物理的干渉箇所４、５が予め取り除かれているため、超音波ホーン全体の膨張もしくは収縮、あるいは超音波ヘッド全体の収縮もしくは膨張の影響を受けず、取り付け面に複数個配置されたホゾ部が、アリ溝部に滞りなく挿入されることを可能とする。尚、図２（ｂ）に示される本実施形態においては、取り付け面中央部に対して近位側の外側アリ溝部の全ての対辺部および外側ホゾ部の全ての対応対辺部が、上底部と下底部とに対して直交する直交辺部（垂直側面）とされているが、これに限定されることはなく、取り付け面に複数個配置されたホゾ部が、アリ溝部に滞りなく挿入されることが可能であるものとされるのであれば、例えば、取り付け面中央部に対して近位側の外側アリ溝部の一部の対辺部および外側ホゾ部の一部の対応対辺部が上底部と下底部とに対して直交する直交辺部（垂直側面）とされ、その他の取り付け面中央部に対して近位側の外側アリ溝部の対辺部および外側ホゾ部の対応対辺部が傾斜を有した斜辺部とされるなどの種々のアレンジがなされてもよい。 In the embodiment shown in FIG. 2B, since the physical interference points 4 and 5 are removed in advance, the ultrasonic horn is affected by the expansion or contraction of the entire ultrasonic horn or the entire ultrasonic head. Therefore, it is possible to insert a plurality of relief portions arranged on the mounting surface without any delay in the dovetail portion. In the present embodiment shown in FIG. 2B, all the opposite side portions of the outer side dovetail portion on the proximal side with respect to the center portion of the mounting surface and all corresponding opposite side portions of the outer side portion are the upper bottom portion. Although it is set as the orthogonal side part (vertical side surface) orthogonal to the lower bottom part, it is not limited to this, The tenon part arranged in multiple numbers on the attachment surface is inserted without stagnation in the dovetail part If it is possible, for example, a part of the opposite side of the outer dovetail part proximal to the center of the mounting surface and a part of the opposite side of the outer side part are the upper bottom part. An orthogonal side portion (vertical side surface) orthogonal to the lower bottom portion is formed, and the opposite side portion of the outer side dovetail portion on the proximal side and the corresponding opposite side portion of the outer side portion have an inclination with respect to the other mounting surface center portion Various arrangements such as a hypotenuse may be made.
また、図２（ｂ）に示される実施形態においては、多くのアリ構造が取り付け面に配置された場合においても、より確実にアリ溝部と対応ホゾ部との係合をもたらしうるように、複数のアリ溝部及び複数のホゾ部は、外側アリ溝部と外側ホゾ部との間の取り付け面に対して平行方向におけるクリアランス（すなわち、外側アリ溝部と外側ホゾ部との間のクリアランスであって、取り付け面に対して平行方向におけるクリアランス）が、中央アリ溝部と中央ホゾ部との間の取り付け面に対して平行方向におけるクリアランス（すなわち、中央アリ溝部と中央ホゾ部との間のクリアランスであって、取り付け面に対して平行方向におけるクリアランス）よりも大きくなるように形成され、さらに、外側アリ溝部及び外側ホゾ部は、取り付け面中央部からの離間距離が大きくなるほど、外側アリ溝部と外側ホゾ部との間の取り付け面に対して平行方向におけるクリアランスが大きくなるように形成されている。 Further, in the embodiment shown in FIG. 2 (b), even when many dovetail structures are arranged on the mounting surface, a plurality of dovetails can be more reliably engaged with the corresponding dovetail portions so that the dovetail portions can be engaged with each other more reliably. The dovetail groove portion and the plurality of ridge portions are clearances in a direction parallel to the attachment surface between the outer ant groove portion and the outer horn portion (that is, the clearance between the outer ant groove portion and the outer horn portion, and attached) The clearance in the direction parallel to the surface) is the clearance in the direction parallel to the mounting surface between the central dovetail groove portion and the central dovetail portion (that is, the clearance between the central dovetail groove portion and the central dovetail portion), The clearance in the direction parallel to the mounting surface), and the outer dovetail portion and the outer side portion are the center of the mounting surface. Distance from the larger, are formed so as clearance increases in the direction parallel to the mounting surface between the outer ant groove and the outer tenon portion.
さらに、図２（ｂ）に示される実施形態においては、超音波ホーンから超音波ヘッドへの振動エネルギーの伝達効率の、更なる効果的な改善を図りうるようにするために、外側アリ溝部及び外側ホゾ部が、外側アリ溝部に対する外側ホゾ部の挿入後、超音波ホーン及び超音波ヘッドの温度が室温に戻るのに伴い、外側アリ溝部の斜辺部と外側ホゾ部の対応斜辺部とが接触するように形成されている。このように外側アリ溝部及び外側ホゾ部を形成することで、超音波ホーン全体の膨張もしくは収縮、あるいは超音波ヘッド全体の収縮もしくは膨張の影響を受けず、取り付け面に複数個配置されたホゾ部が、アリ溝部に滞りなく挿入された後に、超音波ホーン及び超音波ヘッドの温度が室温に戻るのに伴い、直交辺部（垂直側面）とは反対側の逆テーパー状の斜辺部にてホゾ部とアリ溝部とが接触し、アリ溝部の収縮もしくはホゾ部の膨張、もしくはその両方の効果により、逆テーパー形状の斜辺部表面間で滑りが生じ、超音波ホーンの取り付け面が超音波ヘッドの取り付け面に強固に押し付けられ、超音波ホーンと超音波ヘッド間が強固に嵌合することを可能とし、超音波ホーンから超音波ヘッドへの振動エネルギーの伝達効率の、更なる効果的な改善を図りうることを可能とする。 Furthermore, in the embodiment shown in FIG. 2 (b), in order to further effectively improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head, the outer dovetail portion and After insertion of the outer ridge portion into the outer ridge groove portion, the outer ridge portion contacts the oblique side portion of the outer ridge groove portion and the corresponding oblique side portion of the outer ridge portion as the temperature of the ultrasonic horn and the ultrasonic head returns to room temperature. It is formed to do. By forming the outer dovetail part and the outer side part in this way, a plurality of side parts arranged on the mounting surface are not affected by the expansion or contraction of the entire ultrasonic horn or the contraction or expansion of the entire ultrasonic head. However, as the temperature of the ultrasonic horn and the ultrasonic head returns to room temperature after the insertion into the dovetail portion without any delay, the vertical taper on the opposite side of the orthogonal side (vertical side surface) has an oblique side. Due to the contraction of the dovetail portion and / or the expansion of the dovetail portion, or the effect of both, slippage occurs between the surfaces of the hypotenuse hypotenuse and the mounting surface of the ultrasonic horn is It is firmly pressed against the mounting surface, allowing the ultrasonic horn and the ultrasonic head to fit firmly, further improving the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head. It makes it possible to be achieving results improvement.
その際、超音波ホーン全体もしくは超音波ヘッド全体の収縮あるいは膨張の結果生じた、符号８、９で示された空隙ηは取り付け面中央部からの離間距離に比例して大きさが異なる。一般的に、取り付け面中央部部からｎ−１番目に配置されたアリ構造内の空隙ηｎ−１に比べて、より取り付け面端部側になる中央からｎ番目に配置されたアリ構造内の空隙ηｎが大きいため、ηｎ−１≦ηｎとなる。 At this time, the gap η indicated by reference numerals 8 and 9 generated as a result of contraction or expansion of the entire ultrasonic horn or the entire ultrasonic head differs in proportion to the distance from the center of the mounting surface. In general, in the ant structure arranged at the nth from the center on the end side of the attachment surface, compared to the gap ηn-1 in the ant structure arranged at the (n-1) th from the center portion of the attachment surface. Since the gap ηn is large, ηn-1 ≦ ηn.
尚、図２（ａ）、（ｂ）に示される実施形態においては、超音波ホーンにアリ溝部配置、超音波ヘッドにホゾ部を配置しているが、実用上は、超音波ホーンにホゾ部を、超音波ヘッドにアリ溝部を配置し、超音波ホーンを冷却、もしくは超音波ヘッドを加熱するものとして構成してもよい。また、本明細書においては、特定の実施形態が図示かつ記述されたが、権利請求された主題の精神及び有効範囲から逸脱せずに、他の種々の変更及び改変が為され得ることを理解すべきである。更に、本明細書においては、権利請求された主題の種々の見地が記述されたが、斯かる見地は、組み合わせて利用される必要はない。故に、添付の各請求項は、権利請求された主題の有効範囲内である斯かる変更及び改変の全てを網羅することが意図される。 In the embodiment shown in FIGS. 2A and 2B, the dovetail portion is arranged in the ultrasonic horn and the horn portion is arranged in the ultrasonic head. However, practically, the horn portion is arranged in the ultrasonic horn. Alternatively, the dovetail portion may be disposed in the ultrasonic head, and the ultrasonic horn may be cooled or the ultrasonic head may be heated. Also, while specific embodiments have been illustrated and described herein, it will be appreciated that various other changes and modifications can be made without departing from the spirit and scope of the claimed subject matter. Should. Furthermore, although various aspects of the claimed subject matter have been described herein, such aspects need not be used in combination. Accordingly, the appended claims are intended to cover all such changes and modifications that are within the scope of the claimed subject matter.
［実施例１：超音波振動の伝達振幅と摩擦熱による温度変化］
図３を参照しながら、冷やし嵌めを用いた本発明の原理確認実験について説明する。本実験では、周波数と最大振幅がそれぞれ１６ｋＨｚと１０ｎｍの中型超音波加工機ＵМ―５００ＤＡ（日本電子工業製）を用いた。本装置は超音波振動の出力割合を０〜１００％の範囲で調整することによって、超音波振動の振幅を制御することができる。超音波ホーン１０と超音波ヘッド１１との取り付け面に対する超音波波動の振動方向は、該取り付け面に対して直交する方向(垂直な方向）とする。
[Example 1: Transmission amplitude of ultrasonic vibration and temperature change due to frictional heat]
The principle confirmation experiment of the present invention using a cold fit will be described with reference to FIG. In this experiment, a medium ultrasonic processing machine UМ-500DA (manufactured by JEOL Ltd.) having a frequency and a maximum amplitude of 16 kHz and 10 nm, respectively, was used. This apparatus can control the amplitude of the ultrasonic vibration by adjusting the output ratio of the ultrasonic vibration in the range of 0 to 100%. The vibration direction of the ultrasonic wave with respect to the attachment surface of the ultrasonic horn 10 and the ultrasonic head 11 is a direction (perpendicular direction) orthogonal to the attachment surface.
振動エネルギーの伝達効率を比較するため、図４に示した３種類の超音波ホーン１５と超音波ヘッド１６を用意した。超音波ホーンは、最大直径が３８ｍｍ、最小直径が２４ｍｍ、長さが１９１もしくは１８１ｍｍの円筒形状をしており、Ｍ１０のボルトによって超音波加工機の超音波振動子に接続される。超音波ホーンの材質は、内部減衰率（０．００２）が小さく、縦弾性係数／密度（Ｅ／ρ）の値が比較的大きいチタン（２４．４×１０７ｃｍ）を選択した。 In order to compare the transmission efficiency of vibration energy, the three types of ultrasonic horn 15 and ultrasonic head 16 shown in FIG. 4 were prepared. The ultrasonic horn has a cylindrical shape with a maximum diameter of 38 mm, a minimum diameter of 24 mm, and a length of 191 or 181 mm. The ultrasonic horn is connected to the ultrasonic vibrator of the ultrasonic processing machine by M10 bolts. As the material of the ultrasonic horn, titanium (24.4 × 10 7 cm) having a small internal attenuation factor (0.002) and a relatively large value of longitudinal elastic modulus / density (E / ρ) was selected.
一方、超音波ヘッドの形状は、直径３８ｍｍで厚みが１０ｍｍの円筒形状をしており、その材質は無酸素銅である。無酸素銅の縦弾性係数／密度は１３．１×１０７ｃｍであり、チタンに比べて低い値となっているが、内部減衰率が０．００４５（銅単結晶の内部減衰率を参照）とチタンの内部減衰率に近い値となっているので選択した。また、無酸素銅は、通常の銅よりも冷間圧接に適している利点もある。 On the other hand, the ultrasonic head has a cylindrical shape with a diameter of 38 mm and a thickness of 10 mm, and the material thereof is oxygen-free copper. The longitudinal elastic modulus / density of oxygen-free copper is 13.1 × 10 7 cm, which is lower than that of titanium, but the internal damping rate is 0.0045 (see the internal damping rate of copper single crystal) And selected because it is close to the internal attenuation rate of titanium. Further, oxygen-free copper has an advantage that it is more suitable for cold welding than ordinary copper.
図４（ｂ）と４（ｃ）に示したアリ構造付の超音波ホーンには、取り付け面中央部に逆テーパー側壁を有する開口幅５ｍｍ、底幅１５ｍｍ、深さ５ｍｍの単アリ溝が加工されている。さらに図４（ｃ）に示した複アリ構造には、上記の単アリ構造の片側半分を切り落とした楔形のアリ溝部を取り付け面中心から左右約９ｍｍの位置に一つずつ配置した。これらの形状に対応するように、超音波ヘッドにも少なくとも片側が逆テーパー形状となっているホゾ部を形成し、３〜８μｍのクリアランスを設けてホゾ部（アリ型構造）がアリ溝部（アリ溝構造）よりも若干大きくなるように製作した。 The ultrasonic horn with an ant structure shown in FIGS. 4 (b) and 4 (c) has a single dovetail groove with an opening width of 5 mm, a bottom width of 15 mm, and a depth of 5 mm having a reverse tapered side wall at the center of the mounting surface. Has been. Further, in the double dovetail structure shown in FIG. 4C, wedge-shaped dovetails obtained by cutting off one half of the single dovetail structure are arranged one by one at a position about 9 mm on the left and right from the center of the mounting surface. Corresponding to these shapes, the ultrasonic head is also formed with a tenon portion having at least one reverse taper shape on the ultrasonic head, a clearance of 3 to 8 μm is provided, and the tenon portion (ant-shaped structure) is formed in the dovetail portion (ant shape). It was made to be slightly larger than the groove structure.
超音波ホーンと超音波ヘッドの嵌合には、熱線膨張係数の違い（チタン：８．４×１０−６／Ｋ、無酸素銅：１．７×１０−５／Ｋ）を利用して、無酸素銅製超音波ヘッドを液体窒素に漬けて約７７Ｋまで冷却することでホゾ部を収縮させ、チタン製超音波ホーンのアリ溝部に挿入した。その後、超音波ヘッドを室温まで自然に戻すことによって、超音波ヘッドを超音波ホーンに強固に嵌合した。また、図４（ａ）に示したように、超音波ホーンと超音波ヘッド間に繋ぎ目が存在しない理想的な嵌合状態として、チタン製の超音波ホーン・超音波ヘッド一体型も用意した。 For the fitting of the ultrasonic horn and the ultrasonic head, the difference in thermal expansion coefficient (titanium: 8.4 × 10 −6 / K, oxygen-free copper: 1.7 × 10 −5 / K) is used. An oxy-nosed copper ultrasonic head was immersed in liquid nitrogen and cooled to about 77 K, so that the relief portion was contracted and inserted into a dovetail portion of a titanium ultrasonic horn. Then, the ultrasonic head was firmly fitted to the ultrasonic horn by naturally returning the ultrasonic head to room temperature. As shown in FIG. 4 (a), a titanium-made ultrasonic horn / ultrasonic head integrated type is also prepared as an ideal fitting state where there is no joint between the ultrasonic horn and the ultrasonic head. .
振動エネルギーの伝達効率を比較するために、図３に示すように、超音波ホーン１０と超音波ヘッド１１との間の取り付け面を、符号１２で示される赤外線サーモグラフィーＲ３００（日本アビオニクス製）によって観察した。また、超音波ホーン１０と超音波ヘッド１１との間の取り付け面で発生した摩擦熱が超音波ヘッド底部表面に伝導し、超音波加工に与える影響を把握するために、金蒸着ミラー１３を用いることで超音波ヘッド１１の底面の温度分布を赤外線サーモグラフィー１２で観察した。さらに、水平方向から入射したＨｅ−Ｎｅガスレーザーを金蒸着ミラーによって垂直方向に反射させ、無酸素銅製の超音波ヘッド１１の底面に照射した後、反射した光が逆向きの光路を辿って、符号１４で示されたレーザードップラー振動計ＡＴ００２３＋ＡＴ３７００（グラフテック製）によって検出されるように配置し、超音波ヘッド底面での振動周波数と振幅を計測した。計測ポイントは、図４に示したように、取り付け面中央部（位置１）、取り付け面に対して平行方向（水平方向）に中心から９ｍｍ離れた中間部（位置２）、取り付け面に対して平行方向（水平方向）に中心から１８ｍｍ離れた端部（位置３）の３箇所である。 In order to compare the transmission efficiency of vibration energy, as shown in FIG. 3, the mounting surface between the ultrasonic horn 10 and the ultrasonic head 11 is observed by an infrared thermography R300 (manufactured by Nippon Avionics) indicated by reference numeral 12 did. Further, the gold vapor deposition mirror 13 is used in order to grasp the influence of frictional heat generated on the mounting surface between the ultrasonic horn 10 and the ultrasonic head 11 to the ultrasonic head bottom surface and affect the ultrasonic processing. Thus, the temperature distribution on the bottom surface of the ultrasonic head 11 was observed with the infrared thermography 12. Further, the He—Ne gas laser incident from the horizontal direction is reflected in the vertical direction by the gold vapor deposition mirror and irradiated on the bottom surface of the oxygen-free copper ultrasonic head 11, and then the reflected light follows the reverse optical path, It arrange | positioned so that it might detect with the laser Doppler vibrometer AT0023 + AT3700 (made by Graphtec) shown by the code | symbol 14, and measured the vibration frequency and amplitude in the ultrasonic head bottom face. As shown in FIG. 4, the measurement point is centered on the mounting surface (position 1), parallel to the mounting surface (horizontal direction), 9 mm away from the center (position 2), and mounted on the mounting surface. There are three locations at the end (position 3) that is 18 mm away from the center in the parallel direction (horizontal direction).
図５は、超音波ヘッド底面で計測された超音波振動の経過時間と振幅の関係を示している。取り付け面中央部、中間部、端部での計測結果を図５（ａ）、５（ｂ）、５（ｃ）にそれぞれ示した。 FIG. 5 shows the relationship between the elapsed time and amplitude of the ultrasonic vibration measured on the bottom surface of the ultrasonic head. The measurement results at the center, middle and end of the attachment surface are shown in FIGS. 5 (a), 5 (b) and 5 (c), respectively.
超音波発信器の出力は、超音波ヘッド一体型チタン製超音波ホーンが発振可能な最大出力１８０Ｗに統一した。印加した超音波振動の周波数は１６ｋＨｚなので、周期は６２．５μｓと算出される。実際の計測値は、超音波ヘッド一体型チタン製超音波ホーン（理想嵌合状態）で５８μｓ、アリ構造で嵌合した超音波ホーンと超音波ヘッドでは６１μｓとなっており、一体型の場合の周波数の方が若干高くなっている。 The output of the ultrasonic transmitter was unified to a maximum output of 180 W that can be oscillated by the ultrasonic head-integrated titanium ultrasonic horn. Since the frequency of the applied ultrasonic vibration is 16 kHz, the period is calculated as 62.5 μs. The actual measurement value is 58 μs for the ultrasonic head-integrated titanium ultrasonic horn (ideal fitting state), and 61 μs for the ultrasonic horn and the ultrasonic head fitted with an ant structure. The frequency is slightly higher.
一方、振幅は、中央部では±約２μｍとなっており差異はほとんど無いが、中間部では複アリ構造が理想嵌合状態と同じ振幅±２μｍを維持しているのに対して、単アリ構造では±４μｍまで増大している。この傾向は、取り付け面端部でより顕著となっており、取り付け面端部での超音波振動の振幅は、理想嵌合状態が±２μｍ、複アリ構造が±４μｍ、単アリ構造では±約８μｍと大幅に増大している。複アリ構造において、取り付け面端部と片側面が垂直側面となったアリ構造の逆テーパー形状側面の根元までの距離が８ｍｍであるのに対して、単アリ構造の取り付け面端部とアリ構造の逆テーパー形状側面の根元までの距離は１６．５ｍｍと約２倍の長さがある。 On the other hand, the amplitude is about ± 2 μm at the center, and there is almost no difference, but the double ant structure maintains the same amplitude ± 2 μm as the ideal fitting state in the middle part, whereas the single ant structure Then, it is increased to ± 4 μm. This tendency is more prominent at the end of the mounting surface, and the amplitude of ultrasonic vibration at the end of the mounting surface is ± 2 μm in the ideal fitting state, ± 4 μm in the double ant structure, and ± about in the single ant structure. It greatly increases to 8 μm. In the double dovetail structure, the distance to the root of the reverse tapered side surface of the dovetail structure in which the end face and the one side of the dovetail are vertical sides is 8 mm, whereas the end face of the dovetail structure and the dovetail structure of the single dovetail structure The distance to the base of the side surface of the reverse tapered shape is 16.5 mm, which is about twice as long.
ここで、アリ構造の逆テーパー形状側面の根元を固定端と考えた片持ち梁を考えると、自由端である取り付け面端部（接触面端部）の変位は梁の長さに比例することから、単アリ構造と複アリ構造の取り付け面端部での振幅の差が２倍であることも理解できる。取り付け面端部での振幅をより小さく抑えるならば、アリ構造の位置を、より取り付け面端部側に近づけ、片持ち梁の長さを短くすれば解決する。 Here, considering a cantilever beam where the root of the reverse tapered side surface of the ant structure is considered as a fixed end, the displacement of the end of the mounting surface (contact surface end), which is the free end, is proportional to the length of the beam From this, it can also be understood that the difference in amplitude at the end of the mounting surface between the single ant structure and the multiple ant structure is double. If the amplitude at the end of the mounting surface is suppressed to a smaller value, the problem can be solved by moving the position of the ant structure closer to the end of the mounting surface and shortening the length of the cantilever.
取り付け面端部での振幅の増大は、摩擦熱による温度上昇につながる。つまり、振動エネルギーは熱エネルギーとして損失するのである。図６は、超音波ホーンと超音波ヘッドの嵌合側壁と超音波ヘッド底部に黒染スプレー（東美化学製）を塗布した後、放射率を１に設定して赤外線サーモグラフィーで観察した熱的イメージ図である。図中において十字で示された画面中央部の温度と、画面内の最高温度を読み取り、超音波振動の印加時間と嵌合箇所側面の温度変化を図７に、超音波ヘッド底面の温度変化を図８に、それぞれ示した。 An increase in amplitude at the end of the mounting surface leads to a temperature increase due to frictional heat. That is, vibration energy is lost as thermal energy. FIG. 6 is a thermal image obtained by applying black dye spray (manufactured by Tomi Chemical Co., Ltd.) to the fitting side wall of the ultrasonic horn and the ultrasonic head and to the bottom of the ultrasonic head, and then observing by infrared thermography with the emissivity set to 1. It is an image figure. In the figure, the temperature at the center of the screen indicated by a cross and the maximum temperature in the screen are read. The application time of ultrasonic vibration and the temperature change at the side of the fitting location are shown in FIG. These are shown in FIG.
画面中央部の温度と画面内最高温度にはそれほど大きな差異は認められない。嵌合箇所側面と超音波ヘッド底面のいずれの測定箇所でも、超音波振動の印加時間が長くなればなるほど摩擦熱発生による温度上昇は顕著となる。本実験での超音波振動の最長印加時間は１０分であったが、単アリ構造では嵌合箇所側面で最高９９．１℃、超音波ヘッド底面で７９．０℃まで発熱した。しかし、複アリ構造での最高温度は側面で６６．９℃、底面で６２．８℃であり、この結果は側面で３２％、底面で２１％の温度上昇が抑制されたことを意味する。したがって、アリ構造の複数化が取り付け面端部でのばたつきによる摩擦熱の発生を抑制し、超音波振動の面内分布の改善に効果があることが判明した。 There is no significant difference between the temperature at the center of the screen and the maximum temperature in the screen. At any measurement location on the side of the fitting location and the bottom surface of the ultrasonic head, the temperature rise due to the generation of frictional heat becomes more prominent as the application time of ultrasonic vibration becomes longer. The maximum application time of ultrasonic vibration in this experiment was 10 minutes, but in the single ant structure, heat was generated up to 99.1 ° C. at the side of the fitting site and 79.0 ° C. at the bottom of the ultrasonic head. However, the maximum temperature in the double ant structure is 66.9 ° C. on the side surface and 62.8 ° C. on the bottom surface, and this result means that the temperature increase of 32% on the side surface and 21% on the bottom surface is suppressed. Therefore, it has been found that the use of multiple ant structures suppresses the generation of frictional heat due to flapping at the end of the mounting surface, and is effective in improving the in-plane distribution of ultrasonic vibration.
本発明によれば、超音波切削、超音波ボンディング、超音波ウエルダー、超音波インプリント等の超音波振動を利用した様々な超音波加工装置において、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドを超音波ホーンから脱着可能にすることによって、摩耗や用途変更に伴う交換作業を超音波ヘッドのみに留め、高価な超音波ホーンの流用を可能にできる。また、本発明によれば、パターン形状に合わせて最適化した接合や成形、材料に合わせた基板間の接合等が可能となり、半導体製造での配線や化学・バイオチップでの流路形成において極めて有用である。 According to the present invention, in various ultrasonic processing apparatuses using ultrasonic vibration such as ultrasonic cutting, ultrasonic bonding, ultrasonic welder, and ultrasonic imprint, the workpiece is directly contacted and finally ultrasonic is applied. By making the ultrasonic head that works by ultrasonic vibration detachable from the ultrasonic horn, replacement work accompanying wear or application change can be kept only in the ultrasonic head, and an expensive ultrasonic horn can be diverted. In addition, according to the present invention, it is possible to perform bonding and molding optimized for the pattern shape, bonding between substrates according to the material, etc., which is extremely useful for wiring in semiconductor manufacturing and channel formation in chemical / biochips. Useful.
１ 超音波ホーン
２ アリ構造
３ 超音波ヘッド
４ 物理的干渉箇所
５ 物理的干渉箇所
６ アリ溝部
７ ホゾ部
DESCRIPTION OF SYMBOLS 1 Ultrasonic horn 2 Dovetail structure 3 Ultrasonic head 4 Physical interference part 5 Physical interference part 6 Dovetail part 7 Side part
Claims (7)
前記超音波ホーンに取り付けられて、被加工物に直接接触し、最終的に超音波振動で仕事をする超音波ヘッドと、を有する超音波加工装置において、
前記超音波ホーンと前記超音波ヘッドとは、それぞれの表面に形成された取り付け面を有し、前記超音波ホーンまたは前記超音波ヘッドのいずれか一方の取り付け面に複数のアリ溝部が配置され、他方の取り付け面に前記複数のアリ溝部に対応する複数のホゾ部が配置され、前記超音波ホーンと前記超音波ヘッドとは、前記複数のアリ溝部と前記複数のホゾ部とにより、前記超音波ホーンと前記超音波ヘッドとのそれぞれの取付け面が互いに接触して係合されるように形成され、
前記複数のアリ溝部と前記複数のホゾ部とは、挿抜時の焼き嵌めによるアリ溝部の膨脹および冷やし嵌めによるホゾ部の収縮の少なくともいずれか一方により、互いに対する取り付け及び取り外しがなされうるように形成されている、
ことを特徴とする超音波加工装置。 An ultrasonic horn that is a resonator for efficiently transmitting vibration energy;
In an ultrasonic processing apparatus having an ultrasonic head attached to the ultrasonic horn and in direct contact with a workpiece and finally performing work by ultrasonic vibration,
The ultrasonic horn and the ultrasonic head have attachment surfaces formed on the respective surfaces, and a plurality of dovetail portions are arranged on either the attachment surface of the ultrasonic horn or the ultrasonic head, A plurality of relief portions corresponding to the plurality of dovetail groove portions are arranged on the other mounting surface, and the ultrasonic horn and the ultrasonic head are formed by the ultrasonic waves by the plurality of dovetail groove portions and the plurality of relief portions. Each mounting surface of the horn and the ultrasonic head is formed so as to contact and engage with each other,
The plurality of dovetail portions and the plurality of dovetail portions are formed so that they can be attached to and detached from each other by at least one of expansion of the dovetail portion due to shrink fitting during insertion / extraction and contraction of the dowel portion due to cold fitting Being
An ultrasonic processing apparatus characterized by that.
前記複数のホゾ部は、前記中央アリ溝部に対応する中央ホゾ部と、前記外側アリ溝部に対応する少なくとも一つの外側ホゾ部とを含む、
ことを特徴とする請求項１に記載の超音波加工装置。 The plurality of dovetail grooves includes a center dovetail groove disposed at a center portion of the attachment surface and at least one outer dovetail groove portion disposed outside the center portion of the attachment surface;
The plurality of tenon portions include a central tenon portion corresponding to the central dovetail groove portion and at least one outer tenon portion corresponding to the outer dovetail groove portion,
The ultrasonic processing apparatus according to claim 1.
前記外側アリ溝部は、断面視して、開口部を上底部とし、下底部が上底部より長いものとされ、上底部と下底部とを結ぶ一組の対辺部の内の、取り付け面中央部に対して遠位側の対辺部が傾斜を有した斜辺部とされるような台形形状であり、前記外側ホゾ部は、断面視して、前記外側アリ溝部に対応する台形形状である、
ことを特徴とする請求項２に記載の超音波加工装置。 The central dovetail groove section has an opening as an upper bottom portion, a lower bottom portion is longer than the upper bottom portion, and a pair of opposite sides connecting the upper bottom portion and the lower bottom portion are both inclined sides having an inclination. A trapezoidal shape as a part, and the central tenon part is a trapezoidal shape corresponding to the central dovetail groove part in a sectional view,
The outer dovetail groove portion has an opening as the upper bottom portion, the lower bottom portion is longer than the upper bottom portion, and a center portion of the mounting surface in a pair of opposite sides connecting the upper bottom portion and the lower bottom portion in a sectional view. In contrast, the outer side is a trapezoidal shape corresponding to the outer dovetail groove in a cross-sectional view.
The ultrasonic processing apparatus according to claim 2.
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