JP2007038620A - Disc-like blade and cutting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a disc-like blade exerting excellent cutting performance stably for processed products of hard and brittle materials and an easy-to-design cutting apparatus. <P>SOLUTION: A support plate 7a is passed through a through-hole bolt 14 having a through hole with the rotation axis lying on the central axis. The support plate 7a is formed by joining a piezoelectric ceramic 8a, serving as an ultrasonic oscillator, to an aluminum-made rigid plate 12a using an epoxy resin, and an insulation plate 13a made of a glass fiber composite material and being nearly equal in size to the outside diameter of the flange, is joined to the outside of the piezoelectric ceramic 8a. A metal disc-like blade 1 and then the support plate 7b are passed through the through-hole bolt. After the support 7a, the disc-like blade 1, and the support plate 7b are passed in order through the through-hole bolt 14, they are integrated mechanically with a joining nut 15. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a disk-shaped blade and a cutting device that can be advantageously used for cutting or grooving a workpiece formed of a brittle material such as glass or silicon.

  A cutting device with a disk-shaped blade is generally used for cutting or grooving a workpiece formed from a hard and brittle material such as glass, silicon, silicon nitride, rare earth magnet material or super hard metal. It is used.

  FIG. 1 is a front view showing a configuration example of a conventional cutting device 5 described in Patent Document 1, and FIG. 2 is a side view of the cutting device 5 of FIG. The cutting device 5 shown in FIGS. 1 and 2 includes a first flange 2a, a disk-shaped blade 1 and a second flange 2b attached to the rotary shaft 3 of the rotary drive device 6, and these flanges 2a and 2b. It is comprised from the nut 4 for clamp | tightening and fixing the braid | blade 1 by this. Then, the workpiece is cut or grooved while the rotary drive device 6 of the cutting device 5 is operated to rotate the disk-shaped blade 1.

  On the other hand, a method of cutting an object to be processed while applying ultrasonic vibration to a tool such as a tool of a machine tool is known. Such a cutting method is called ultrasonic cutting, and is described in detail in Non-Patent Document 1. Ultrasonic cutting has the advantages that the frictional resistance between the workpiece and the tool is reduced, so that the thermal distortion of the machined surface is reduced, the machining accuracy is increased, and the life of the cutting tool is extended. ing. Further, it is described in detail in Non-Patent Document 2 that the processing speed is doubled or more.

Patent Document 2 discloses a cutting device having a configuration in which an ultrasonic vibrator is attached to a rotating shaft that rotates a disk-shaped blade. This cutting device rotates at the outer edge of the blade while rotating the disk-shaped blade and applying the ultrasonic vibration generated by the ultrasonic vibrator to the disk-shaped blade via the rotating shaft. Cut the object. The disk-shaped blade of this cutting device is fixed to the tip of the rotating shaft while being tightened by a vibration transmission direction changer and a nut. The ultrasonic vibrator attached to the rotating shaft generates ultrasonic vibration that vibrates in the axial direction of the rotating shaft, and this ultrasonic vibration is supersonic that vibrates in the direction in which the diameter of the blade is expanded or contracted by the vibration transmission direction converter. It is converted into sonic vibration and applied to the blade. In order to convert the transmission direction of the ultrasonic vibration, the rotating shaft and the vibration transmission direction converter are designed in a predetermined shape by numerical calculation using a finite element method or the like.
JP-A-8-127003 JP 2000-210928 A Ultrasonic Handbook Editorial Committee, “Ultrasonic Handbook”, Maruzen Co., Ltd., August 1999, p679-684 Japan Electromechanical Industry Association, "Ultrasonic Engineering", Corona Co., Ltd., 1993, p218-229

  In the cutting apparatus described in Patent Document 2, when changing the vibration direction or frequency of the ultrasonic vibration applied to the blade, the numerical calculation is again performed by the finite element method or the like, and the rotation shaft or vibration transmission is performed. It is necessary to redesign the shape of the direction changer. Further, in this cutting apparatus, there is a high possibility that the magnitude of the ultrasonic vibration transmitted to the blade changes due to the strength of the tightening force of the blade by the vibration transmission direction changer and the nut. When the magnitude of ultrasonic vibration transmitted to the blade fluctuates, the magnitude of vibration in the direction of expanding or reducing the diameter of the blade changes, and the cutting performance of the blade changes.

An object of the present invention is to provide a disk-like blade with stable excellent cutting performance.
Another object of the present invention is to provide a cutting device that stably exhibits excellent cutting performance and is easy to design.

  In a cutting device having a disk-shaped blade with a through-hole fitted in the center of a rotating shaft, there are two support plates with ultrasonic transducers, which are arranged on both sides of the disk-shaped blade. is there.

  And it is set as the cutting device with which the disk-shaped braid | blade and the support plate were adhere | attached.

  The cutting device has a contact medium between the disk-shaped blade and the support plate.

  The cutting device has a flange holding a support plate.

  A cutting device is formed by connecting an ultrasonic oscillation circuit to a fixed-side rotary transformer.

  The disk-shaped blade provided with the support plate of the present invention does not transmit ultrasonic vibration to unnecessary members such as a rotating shaft because ultrasonic vibration is excited to the disk-shaped blade via the support plate. In addition, ultrasonic vibration can be efficiently and stably applied to the disk-shaped blade. For this reason, the disk-shaped blade of this invention and the cutting device provided with this blade show the outstanding cutting performance stably.

  The disc-shaped blade provided with the support plate of the present invention also cuts the electrical wiring because the support plate having the electrical wiring does not slip even if the disc-shaped blade slips during cutting of the workpiece. There is no fear.

  In the disk-like blade provided with the support plate of the present invention, the plastic plate having greatly different acoustic impedance is located on the support plate in contact with the flange, so that the vibration hardly leaks to the flange. In addition, the influence of the tightening pressure of the flange is small.

  The disk-shaped blade provided with the support plate of the present invention also does not damage the flange because the surface of the support plate support plate that contacts the flange is plastic.

  The disk-shaped blade provided with the support plate of the present invention can be further detached from the disk-shaped blade. As a result, even when the disk-shaped blade is worn out and changed to a disk-shaped blade, the support plate can be removed from the worn disk-shaped blade and attached to a new disk-shaped blade. As a result, only the disk-shaped blade is consumed, which helps to save resources and reduce manufacturing costs.

  The first embodiment of the present invention will be described with reference to the front view of FIG. 3 and the cross-sectional view of FIG. 4 taken along line AA of FIG.

  First, the support plate 7a was prepared as follows. To the rigid plate 12a made of aluminum alloy having an outer diameter of 90 mm, an inner diameter of 55 mm, an outer peripheral thickness of 1.5 mm, and a thickness of 0.5 mm at the portion to which the piezoelectric ceramic 8a is joined, an outer diameter of 70 mm, which is an ultrasonic vibrator, A piezoelectric ceramic 8a having an inner diameter of 55 mm and a thickness of 1.0 mm is joined with an epoxy resin. The rigid plate 12a is preferably an ultrasonic vibration material with a small vibration loss, and a metal such as an aluminum alloy or titanium and an inorganic material such as alumina or glass are suitable. Then, an insulating plate 13a made of a glass fiber composite material substantially equal to the outer diameter of the flange is joined to the outside of the piezoelectric ceramic 8a with an epoxy resin. The insulating plate 13a made of glass fiber composite material is in contact with the flange. However, since the acoustic impedance of the insulating plate 13a made of glass fiber composite material is greatly different from the flange, the ultrasonic vibration of the support plate 7a is propagated to the flange. There are few things. Therefore, the support plate 7a efficiently propagates the vibration to the disk-shaped blade 1, but greatly attenuates the vibration propagating to the flange side. In addition, the insulating plate 13a made of glass fiber composite material has an effect of not causing mechanical damage to the flange because the hardness, density, and the like are smaller than those of the flange in contact. Therefore, the material of the insulating plate is preferably a plastic material, and various plastic materials such as polyethylene, polypropylene, nylon, and polyimide are selected and used as appropriate. The support plate 7b was produced in the same manner as the support plate 7a.

  Next, the support plates 7a and 7b are bonded to the disk-shaped blade 1 having a diameter of 100 mm, an inner diameter of 55 mm, and a thickness of 0.1 mm using a hot-melt temporary fixing adhesive for precision processing manufactured by Nikka Seiko Co., Ltd. The support plates 7a and 7b and the disk-shaped blade 1 are formed as an integral vibrator. The adhesive used here is an aqua wax type that can be peeled off with warm water. By using an adhesive that can be easily peeled off by a solvent such as hot water or alcohol, when the disk-shaped blade 1 is worn or damaged and needs to be replaced, the disk-shaped blade 1 is removed. By adhering the new disk-shaped blade 1 to the support plates 7a and 7b used until now, the support plates 7a and 7b can be used as they are, so that the manufacturing cost can be reduced. The disk-shaped blade 1 is obtained by fixing abrasive grains on a metal surface. Examples of the material of the disk-shaped metal substrate include aluminum, iron, stainless steel, and super hard metal.

  A structure in which the support plates 7a and 7b and the disc-shaped blade 1 are joined to each other by an adhesive is passed through a through-hole bolt 14 having an outer diameter of 55 mm and an inner diameter of 40 mm having a through-hole through which a rotation shaft having a diameter of 40 mm passes through the central axis. And these are mechanically integrated by the screw provided in the through-hole bolt 14 and the joining nut 15. This is called an integrated blade.

  Here, electrical wiring will be described with reference to the perspective view of FIG. The lead wire 19 joined to the piezoelectric ceramic by solder passes through the wiring holes 20 of the four through-hole bolts provided in the through-hole bolt 14 and is connected to the wiring holes 20 of the four through-hole bolts. And is connected to a metal pin. The four pipe-like bars 16 pass through the flange holes 21 provided in the flange shown in the perspective view of FIG. The connector 18 shown in the perspective view of FIG. 10 is electrically connected to the metal pin 17 attached to the pipe-shaped bar 16 and the other to the connection pin 17 of the rotary rotary transformer 9a shown in FIG. Connecting. The pin 17 is held by an insulating tube 22 for insulation.

  A configuration in which the support plate 7a, 7b and the disc-shaped blade 1 are joined by an adhesive through a through-hole bolt 14 and mechanically integrated by a joining nut 15 is held by a flange, and further attached to the rotary shaft 3 Will be described with reference to FIG. 6 which is a plan view of FIG. 5 and a cross-sectional view taken along line AA of FIG.

  The rotary transformer 9a on the rotation side is fixed to a flange 2b having a structure in which the sleeve 10 and the inner flange 2b are integrated with screws (not shown). Then, an integrated blade is inserted along the outer diameter surface of the sleeve 10. Next, the flange 2 a is inserted along the outer diameter surface of the sleeve 10. Furthermore, these are integrated by the flange nut 11.

  The shapes of the surfaces of the flanges 2a and 2b that contact the support plates 7a and 7b are an outer diameter of 85 mm and an inner diameter of 80 mm. Further, this portion has a ring shape, has an outer diameter of 85 mm, an inner diameter of 80 mm, and a length of about 3 mm. The material of the support plates 7a and 7b that are in contact with the flanges 2a and 2b made of titanium is a glass fiber composite material in which plastic and glass fiber are combined, and the acoustic impedance is greatly different from that of the glass fiber composite material. For this reason, it becomes difficult for vibration on the support plates 7a and 7b to be transmitted to the flanges 2a and 2b.

  A sleeve 10 to which an integrated blade is attached is attached to the rotary shaft 3 with a nut 4.

  Next, the operation method of the cutting apparatus using the disk-shaped blade 1 will be described with reference to the sectional view of FIG. First, the power of a motor (not shown) is turned on to rotate the rotary shaft 3. Next, an ultrasonic alternating voltage from an ultrasonic oscillation circuit (not shown) is applied to the ring-shaped piezoelectric ceramics 8a and 8b constituting the support plates 7a and 7b via the rotary transformers 9a and 9b. By applying the ultrasonic alternating voltage, the support plates 7a and 7b and the disk-shaped blade 1 are excited to expand in the radial direction. Next, cooling water is applied from the nozzle to the rotating disk-shaped blade 1 and the workpiece (not shown), and the subtracted object is cut or grooved.

  By applying to the piezoelectric ceramics 8a and 8b a voltage having a natural frequency that excites the radial spreading vibration mode of the disk-shaped blade 1, a voltage of about 10 microns is applied to the tip of the blade at a low voltage of 100V or less. Vibration displacement can be easily excited.

  When the thickness of the disk-shaped blade 1 is 2 mm or less, particularly 1 mm or less, the vibration of the piezoelectric ceramic is propagated to the tip of the blade by pressing the flanges 2 a and 2 b against the disk-shaped blade 1. It becomes difficult.

  Therefore, by using means for making the outer diameters of the support plates 7a and 7b of the present invention larger or equal to the outer diameters of the flanges 2a and 2b, the vibration of the piezoelectric ceramic can be propagated to the tip of the blade. With this configuration, it is possible to use blades of up to about 50 microns, which is the blade thickness that can be manufactured at present. It is believed that even thinner blades are applicable.

  According to the above configuration, since the conventional disk-shaped blade can be used as it is, it is not particularly necessary to make a special blade.

  In addition, since only the disk-shaped blade and the support plate vibrate mainly, vibrations do not propagate to other parts, so there is almost no unnecessary vibration loss. A disk-shaped blade can be excited. Therefore, since the rise in the temperature of the blade can be reduced, the machining accuracy can be improved.

  Further, since vibration hardly propagates to the rotating shaft, there is almost no risk of damage to the rotating shaft and the bearing that rotatably supports the rotating shaft.

  Further, when the disk-shaped blade is consumed, the disk-shaped blade can be removed from the support plate and replaced with a new disk-shaped blade. As a result, only the disk-shaped blade is consumed, and by applying ultrasonic vibration, the amount of blade consumption is significantly reduced compared to conventional cutting methods, saving resources and reducing manufacturing costs. Can do.

  As described above, since only a part of the blade and the flange can be vibrated, it is possible to provide a cutting device with high processing accuracy and high reliability.

  In the above embodiment, a metal blade is used. However, the same effect can be obtained with a resin blade.

  A second embodiment of the present invention will be described with reference to the front view of FIG. 11 and the cross-sectional view of FIG. 12 taken along the line AA of FIG.

  The support plate 7a is made of a titanium alloy rigid plate 12a and a piezoelectric ceramic 8a, which is an ultrasonic vibrator, bonded with an epoxy resin, and an insulating plate made of a nylon material that is substantially equal to the outer diameter of the flange outside the piezoelectric ceramic 8a. 13a is produced by joining with an epoxy resin. A protrusion 25 is integrally formed on the rigid plate 12a. The support plate 7b was produced in the same manner as the support plate 7a.

  The support plate 7a, the disk-shaped blade 1 and the support plate 7b are passed through the through-hole bolt 14 provided with the key groove 24, and these are mechanically integrated by the screw and the joint nut 15 provided on the through-hole bolt 14. . A contact medium such as grease is applied to the contact surfaces of the support plate 7a, the disk-shaped blade 1, and the support plate 7b.

  Four pipe-shaped rods 16 are connected to the through-hole bolts 14. And since the four pipe-shaped stick | rods 16 are inserted in the four flange holes provided in the flange, the through-hole bolt 14 does not rotate with respect to a flange.

  The support plates 7a and 7b shown in the plan view of FIG. 13 and the cross-sectional view of FIG. 14 cut along the line AA in FIG. 13 include the plan view of FIG. Protrusions 25 that fit into the key grooves 24 provided in the through-hole bolts 14 shown in the sectional view are provided. Therefore, the support plates 7 a and 7 b do not rotate with respect to the through-hole bolt 14.

  On the other hand, since the disk-shaped blade 1 is not provided with a projection, the disk-shaped blade 1 can be slipped with respect to the through-hole bolt 14 when an excessive load is applied.

  When an excessive load is applied to the disk-shaped blade 1, only the disk-shaped blade 1 can be slipped, and therefore, between the support plates 7a and 7b bonded with the piezoelectric ceramic and the flange 2b bonded with the rotary transformer. Since there is no rotation, there is no possibility that the lead wire joined to the piezoelectric ceramic is cut.

About the operating method of the cutting device using said disk shaped blade 1, it is the same as that of what was demonstrated in 1st Embodiment.

  A third embodiment of the present invention will be described with reference to the front view of FIG. 17 and the cross-sectional view of FIG. 18 taken along line AA of FIG.

  By providing the sleeve 10 with the key groove 24 and providing the protrusions 25 fitted to the key groove 24 on the support plates 7a and 7b, the support plates 7a and 7b can be prevented from slipping with respect to the sleeve 10. In addition, since the disk-shaped blade 1 is not provided with a protrusion, the disk-shaped blade 1 can be slipped when an overload is applied to the disk-shaped blade 1.

  The structure of the support plate shown using the front view of FIG. 19 and sectional drawing of FIG. 20 cut | disconnected by the AA line of FIG. 19 is shown. The support plate 7a is made of a titanium alloy rigid plate 12a and a piezoelectric ceramic 8a, which is an ultrasonic vibrator, bonded with an epoxy resin, and an insulating plate made of a nylon material that is substantially equal to the outer diameter of the flange outside the piezoelectric ceramic 8a. 13a is produced by joining with an epoxy resin. The support plate 7b was produced in the same manner as the support plate 7a.

  A contact medium such as grease is applied to the contact surfaces of the support plate 7a, the disk-shaped blade 1, and the support plate 7b. Alternatively, as used in the first embodiment, the support plates 7a and 7b and the disk-shaped blade 1 are bonded using a hot-melt temporary fixing adhesive for precision processing manufactured by Nikka Seiko Co., Ltd. 7a and 7b and the disk-shaped blade 1 can also be made into an integral vibrating body.

  With such a configuration, the through hole bolt and the joining nut are not necessary. Such a configuration is particularly suitable for a cutting operation with a small load.

  The flange 2b and the sleeve 10 having the keyway are integrally formed on the flange, and the rotary rotary transformer is fixed with screws (not shown). Then, the protrusion 25 of the support plate 7a is inserted in alignment with the key groove of the sleeve 10. Next, the disk-shaped blade 1 is inserted, and the protrusion 25 of the support plate 7 b is inserted again in alignment with the key groove 24 of the sleeve 10. Then, the flange is inserted into the sleeve 10 and fixed to the sleeve 10 with a screw and a flange nut 11 provided on the sleeve 10.

About the operating method of the cutting device using said disk shaped blade 1, it is the same as that of what was demonstrated in 1st Embodiment.

  The disk-shaped blade and cutting device of the present invention can be advantageously used for cutting or grooving a workpiece formed from a brittle material such as glass or silicon.

It is a front view which shows the structural example of the conventional cutting device. It is a side view of the cutting device of FIG. It is a front view which shows the disk shaped blade of 1st Embodiment of this invention, a support plate, etc. FIG. It is sectional drawing cut | disconnected by the AA line of FIG. It is the front view which attached the disk shaped blade of 1st Embodiment of this invention, a support plate, etc. to the rotating shaft. It is sectional drawing cut | disconnected by the AA line of FIG. It is a perspective view which shows a through-hole bolt and a pipe-shaped stick | rod. It is a perspective view which shows the flange with a through-hole. It is a front view which shows the pin connected with the rotary transformer. It is a perspective view which shows a connector. It is a front view which shows the disk shaped blade and support plate of 2nd Embodiment of this invention. It is sectional drawing cut | disconnected by the AA line of FIG. It is a front view which shows the detail of a support plate. It is a side view which shows the cross section in the AA of FIG. It is a front view which shows a through-hole bolt. It is sectional drawing cut | disconnected by the AA line of FIG. It is the front view which attached the disk shaped blade of the 3rd Embodiment of this invention, the support plate, etc. to the rotating shaft. It is sectional drawing cut | disconnected by the AA line of FIG. It is a front view which shows the detail of the disk shaped blade used in FIG. 17, and a support plate. It is sectional drawing cut | disconnected by the AA line of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Blade 2 Flange 3 Rotating shaft 4 Nut 5 Cutting device 6 Rotation drive device 7 Support plate 8 Piezoceramic 9 Rotary transformer 10 Sleeve 11 Flange nut 12 Rigid plate 13 Insulating plate 14 Through-hole bolt 15 Joint nut 16 Pipe-shaped rod 17 Pin 18 Connector 19 Lead wire 20 Through hole bolt wiring hole 21 Flange hole 22 Insulating tube 23 Metal terminal 24 Key groove 25 Projection

Claims (5)

  In a cutting device having a disk-shaped blade with a through-hole fitted in the center of the rotating shaft, there are two support plates with ultrasonic transducers, and they are arranged on both sides of the disk-shaped blade. Features.   2. The cutting device according to claim 1, wherein the disk-shaped blade and the support plate are bonded.   The cutting apparatus according to claim 1, wherein a contact medium is provided between the disk-shaped blade and the support plate. The cutting device according to claim 1, 2, or 3, wherein the flange holds the support plate. The cutting apparatus according to claim 1, wherein the ultrasonic oscillation circuit is connected to a fixed-side rotary transformer.

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