JP6888776B2 - Ultrasonic processing equipment - Google Patents

Description

The present invention is an ultrasonic horn, which is a resonator for efficiently transmitting vibration energy, and an ultrasonic horn, which is attached to the ultrasonic horn, comes into direct contact with a work piece, and finally works with ultrasonic vibration. The present invention relates to an ultrasonic processing apparatus having a sound wave head.

For industrial use of ultrasonic waves, communication applications such as fish finder, ultrasonic flaw detector, ultrasonic diagnostic device, etc. that perform various measurements using ultrasonic waves, ultrasonic cleaning, ultrasonic processing, etc. There are dynamic applications that utilize the physical effects of ultrasonic vibrations. In particular, ultrasonic processing is attracting attention in industrial use, and devices and processing technologies such as ultrasonic cutting, ultrasonic grinding, ultrasonic bonding, ultrasonic welder, and ultrasonic imprint are widely used.

In an ultrasonic processing device, the electrical energy of a sine wave generated by an ultrasonic generator is converted into mechanical vibration energy by an ultrasonic vibrator and transmitted to a workpiece via a resonator called an ultrasonic horn. .. In ultrasonic cutting, by fixing a cutting tool to the tip of the ultrasonic horn, the cutting edge contacts and detaches from the workpiece at high speed and intermittently, and at the moment when the vibration energy stored at the time of detachment is transferred to contact. It is shockedly released to the work piece with a large acceleration. By repeating such a machining cycle, the cutting resistance can be reduced and the temperature rise during cutting can be suppressed. There is also ultrasonic grinding in which a grinding fluid and abrasive grains are inserted between a hard and brittle material such as glass and a tool, and ultrasonic vibration is used to promote collision of the abrasive grains with a work piece to remove the abrasive grains. Ultrasonic bonding is used to bond two metal materials together. By ultrasonic vibration, the oxide film between the bonding surfaces is removed, and the metal crystal grains approach the interatomic distance where a strong attractive force acts. Metallurgical bond. In the ultrasonic welder, strong frictional heat is generated on the joint surface by simultaneously applying vibration energy and a load to the two thermoplastic material substrates to melt and join the workpieces. The frictional heat generated during the application of ultrasonic vibration is different from the heat propagated from the heater, and is instantly extinguished at the same time as the ultrasonic vibration is stopped. Taking advantage of this feature, an ultrasonic imprint has been proposed in which ultrasonic vibration is applied while pressing the fine convex structure of the mold against the surface of the workpiece to generate local frictional heat to promote thermal deformation. Ultrasonic imprinting has been reported to be effective as a method for patterning the surfaces of various engineering plastics and glass as a third imprinting technique that does not use ultraviolet rays or heaters. On the other hand, in imprinting, the template or mold comes into contact with the molding material, so it needs to be removable from the imprinting device for cleaning or replacement.

The configuration of the ultrasonic processing equipment consists of an ultrasonic oscillator that generates an electric signal with a frequency in the ultrasonic region, an ultrasonic vibrator that converts high-frequency electrical energy into mechanical vibration energy, a booster that amplifies the amplitude, and resonance. It is divided into an ultrasonic horn as a body and an ultrasonic head that comes into direct contact with the work piece and finally works by ultrasonic vibration.

In a general ultrasonic processing apparatus, the ultrasonic head is often fixed to the ultrasonic horn by silver waxing because the ultrasonic vibration is very strong. However, in order to peel off the silver-brazed ultrasonic head, it is necessary to heat it to 600 ° C. or higher, and it is difficult to reproduce a clean surface.

Therefore, Patent Document 1 discloses a means for pressing and fixing the ultrasonic horn against the ultrasonic vibrator by the pressure generated by the actuator. In this method, the behavior of the ultrasonic horn cannot follow the ultrasonic vibrator as the frequency rises, and if the pressure is increased to improve the fixing force, the oscillation of the ultrasonic vibrator itself may be hindered.

Patent Documents 2 and 3 disclose an apparatus for fixing an electronic component or the like to a head portion of ultrasonic bonding by vacuum suction. However, the heavier the weight of the object to be attracted to the ultrasonic head, the weaker the suction force, so a strong fixing force cannot be expected.

Patent Document 4 and Patent Document 5 disclose a method of screwing an ultrasonic tool to an ultrasonic horn via a tool holder. In these methods, the screws may loosen due to ultrasonic vibration. Further, it has been clarified by Non-Patent Document 1 that the waveform of ultrasonic vibration is transmitted in a distorted shape due to the difference in the rigidity of the components.

Furthermore, a method in which the mounting convex portion on the ultrasonic nozzle side is deformed and inserted by applying an external force to the mounting concave portion provided on the ultrasonic horn so that its diameter is widened, and then tightened and fixed by the elastic force of the material of the ultrasonic horn. Is disclosed in Patent Document 6. However, when a metal ultrasonic horn with a low elastic modulus is used, it cannot be expected that the mounting recess once deformed by an external force will completely return to its original shape after desorption. It is thought that the elastic modulus will deteriorate.

On the other hand, as an example of combining ultrasonic vibration and shrink fit fastening, a method of applying ultrasonic vibration after inserting a shaft into a rotor by shrink fitting is described in Patent Document 7, where a cutting tool is shrink fit and fastened while ultrasonically vibrating. The method is disclosed in Patent Documents 8 and 9. In these methods, ultrasonic vibration is used to facilitate attachment / detachment at the time of shrink fitting, so that the fitted shaft or tool inevitably shifts due to ultrasonic vibration.

Further, Patent Document 10 discloses a configuration in which an ultrasonic horn having a sword portion and a drive shaft of a machine tool are fitted by shrink fitting or cold fitting. This proposes a configuration for firmly fixing the ultrasonic horn to the drive shaft of a machine tool that rotates at high speed, and is not intended for applications in which the ultrasonic head is frequently attached and detached.

Patent Document 11 discloses a method of fastening a tool by shrink fitting into a recess of an ultrasonic horn, but as shown in Non-Patent Document 1, a fitting structure of an ultrasonic horn and an ultrasonic head is attached. If there is only one in the center of the surface (contact surface), the mounting surfaces that are not involved in the fitting will hit each other, and the frictional heat generated by this will cause the vibration waveform to be disturbed due to temperature rise and swing delay. cause.

JP-A-2010-69492 Japanese Unexamined Patent Publication No. 2003-459916 Japanese Unexamined Patent Publication No. 2004-319599 Jikkenhei 07-3947 Gazette Japanese Unexamined Patent Publication No. 2000-61786 Japanese Unexamined Patent Publication No. 2003-209142 Japanese Unexamined Patent Publication No. 2016-007112 Japanese Unexamined Patent Publication No. 2009-241226 JP-A-2007-09847 Japanese Unexamined Patent Publication No. 2003-071683 Japanese Unexamined Patent Publication No. 2004-009206

H. Mekaru et al. , Microsys. Technol. , Dоi: 10.1007 / s00542-016-3028-7

By the way, in Non-Patent Document 1, the ultrasonic head is attached with double-sided tape, adhesive is applied, screwed, and an dovetail structure composed of a single dovetail groove portion and a hozo portion is provided at the center of the attachment surface (contact surface). The result of fixing to the ultrasonic horn by four kinds of fixing methods of cold fitting provided and comparing the loss of vibration energy is disclosed.

According to the previous experiment disclosed in Non-Patent Document 1, the oxygen-free copper head of the ultrasonic processing apparatus is provided with a single dovetail structure at the center of the double-sided tape attachment, adhesive application, screwing, and attachment surface (contact surface). When the loss of vibration energy was compared by fixing to a titanium ultrasonic horn using four types of fixing methods of cold fitting, the fixing method by cold fitting with a single dovetail structure in the center of the mounting surface was found. It was clarified that the heat generation was the second largest after the fixing method by attaching double-sided tape, and the amplitude of the transmitted ultrasonic vibration was also the largest.

The reason for this is that since there is only one dovetail structure in the center of the mounting surface, the end of the mounting surface becomes a free end, and a gap is created at the end of the mounting surface. Is considered to be the cause. The dovetail structure here is a structure that brings about engagement between the coupling members by the dovetail groove portion and the hozo portion, and in the present specification, the case where a plurality of dovetail structures are arranged in the mounting surface is used. It is called a double ant structure, and to distinguish it from this, it is called a single ant structure as a term meaning that only a single ant structure is arranged.

In view of the above problems, the present invention has an ultrasonic horn, which is a resonator for efficiently transmitting vibration energy, and an ultrasonic horn, which is attached to the ultrasonic horn and comes into direct contact with the workpiece, and finally ultrasonic waves. In an ultrasonic processing device having an ultrasonic head that works by vibration, the ultrasonic head can be attached to and detached from the ultrasonic horn, and a gap generated at the end of the mounting surface between the ultrasonic horn and the ultrasonic head. The purpose is to provide an ultrasonic processing device that can suppress deformation and frictional heat generation due to hitting each other and can improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head. To do.

According to the invention of claim 1, an ultrasonic horn, which is a resonator for efficiently transmitting vibration energy, and an ultrasonic horn, which is attached to the ultrasonic horn and is in direct contact with a work piece, are finally super. In an ultrasonic processing apparatus having an ultrasonic head that works by ultrasonic vibration, the ultrasonic horn and the ultrasonic head have mounting surfaces formed on their respective surfaces, and the ultrasonic horn or the ultrasonic head A plurality of dovetail grooves are arranged on one of the mounting surfaces of the ultrasonic head, and a plurality of hozo portions corresponding to the plurality of dovetail grooves are arranged on the other mounting surface. The plurality of dovetail grooves and the plurality of hozo portions are formed so that the mounting surfaces of the ultrasonic horn and the ultrasonic head are in contact with each other and engaged with each other. The plurality of hozo portions are formed so that they can be attached to and detached from each other by at least one of expansion of the dovetail groove portion by shrink fitting at the time of insertion and removal and contraction of the hozo portion due to cold fitting. A featured ultrasonic processing apparatus is provided.

That is, in the invention according to claim 1, mounting surfaces are arranged on the respective surfaces of the ultrasonic horn and the ultrasonic head, and a plurality of dovetail grooves are provided on the mounting surface of either the ultrasonic horn or the ultrasonic head. A plurality of hozo portions corresponding to a plurality of dovetail grooves are arranged on the other mounting surface, and the plurality of dovetail grooves and the plurality of hoso portions allow the mounting surfaces of the ultrasonic horn and the ultrasonic head to be attached to each other. By forming the ultrasonic horn and the ultrasonic head so that they are in contact with each other, the ultrasonic head can be attached to and detached from the ultrasonic horn, and a gap generated at the end of the mounting surface is formed. By narrowing and suppressing deformation and generation of frictional heat due to striking between the gaps, it is possible to improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head.

According to the second aspect of the invention, the plurality of dovetail groove portions are a central dovetail groove portion arranged in the central portion of the mounting surface and at least one outer dovetail groove portion arranged outside the central portion of the mounting surface. The first aspect of the present invention includes a groove portion, and the plurality of hozo portions include a central hozo portion corresponding to the central dovetail groove portion and at least one outer hozo portion corresponding to the outer dovetail groove portion. The described ultrasonic processing apparatus is provided.

According to the invention of claim 3, the central trapezoidal groove portion has an opening as an upper bottom portion and a lower bottom portion longer than the upper bottom portion in a cross-sectional view, and is a set connecting the upper bottom portion and the lower bottom portion. The opposite side portion of the above is a trapezoidal shape such that both are inclined side portions, and the central hozo portion is a trapezoidal shape corresponding to the central dovetail groove portion in a cross-sectional view, and the outer dovetail groove portion is In cross-sectional view, the opening is the upper bottom, the lower bottom is longer than the upper bottom, and it is distal to the central part of the mounting surface in the pair of opposite sides connecting the upper bottom and the lower bottom. The claim is characterized in that the opposite side portion has a trapezoidal shape such that the opposite side portion has an inclined side portion, and the outer hozo portion has a trapezoidal shape corresponding to the outer dovetail groove portion in a cross-sectional view. The ultrasonic processing apparatus according to Item 2 is provided.

According to the invention of claim 4, the plurality of dovetail groove portions and the plurality of hozo portions have a clearance in a direction parallel to the mounting surface between the outer dovetail groove portion and the outer hozo portion. The ultrasonic processing apparatus according to claim 3, wherein the ultrasonic processing apparatus is formed so as to be larger than a clearance in a direction parallel to the mounting surface between the central dovetail groove portion and the central hozo portion. Will be done.

According to the invention of claim 5, the outer dovetail groove portion and the outer hozo portion are attached between the outer dovetail groove portion and the outer hozo portion as the distance from the central portion of the mounting surface increases. The ultrasonic processing apparatus according to claim 4, wherein the ultrasonic processing apparatus is formed so as to have a large clearance in a direction parallel to the surface.

According to the invention of claim 6, the outer dovetail groove portion and the outer dovetail groove portion have a hypotenuse portion of the outer dovetail groove portion as the temperature of the ultrasonic horn and the ultrasonic head returns to room temperature after insertion. The hypotenuse portion on the distal side with respect to the central portion of the mounting surface is formed so as to be in contact with the corresponding hypotenuse portion on the distal side with respect to the central portion of the mounting surface, which is the corresponding hypotenuse portion of the outer hozo portion. The ultrasonic processing apparatus according to claim 5, wherein the ultrasonic processing apparatus is provided.

According to the invention of claim 7, the outer dovetail groove portion has an opening as an upper bottom portion and a lower bottom portion longer than the upper bottom portion in a cross-sectional view, and is a set connecting the upper bottom portion and the lower bottom portion. Of the opposite sides of the mounting surface, the opposite side on the distal side with respect to the central part of the mounting surface is an inclined side portion, and the opposite side portion on the proximal side with respect to the central part of the mounting surface is the upper bottom part and the lower bottom part. 6. The claim 6 is characterized in that the outer hozo portion has a trapezoidal shape such that it has an orthogonal side portion orthogonal to the above, and the outer hozo portion has a trapezoidal shape corresponding to the outer dovetail groove portion in a cross-sectional view. The ultrasonic processing apparatus described in the above is provided.

According to the invention described in each claim, an ultrasonic horn, which is a resonator for efficiently transmitting vibration energy, and an ultrasonic horn, which is attached to the ultrasonic horn and comes into direct contact with a work piece, and finally an ultrasonic wave. In an ultrasonic processing apparatus having an ultrasonic head that works by vibration, the gap between the gaps is narrowed while allowing the ultrasonic head to be attached and detached from the ultrasonic horn, and the gap between the gaps is tapped. By suppressing deformation and frictional heat generation due to fitting, it is possible to improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head, which is a common effect.

It is a figure explaining one Embodiment of the fixed structure of the ultrasonic head and the ultrasonic horn by the dovetail structure, (a) the single dovetail structure and (b) the double dovetail structure. It is a figure explaining the embodiment of this invention. It is a layout drawing of the measuring device in the principle confirmation experiment of this invention. It is a side view and the bottom view of the ultrasonic horn and the ultrasonic head used in the principle confirmation experiment of this invention. The figure which shows the distribution of the amplitude in the bottom surface of the ultrasonic head in the ideal fitting state measured by the laser Doppler vibrometer and the fitting state which was fitted by the single ant structure and the double ant structure in the principle confirmation experiment of this invention. Is. In the principle confirmation experiment of the present invention, an ultrasonic horn and an ultrasonic head measured by infrared thermography in (a) a single dovetail structure and (b) a double dovetail structure when the application time of ultrasonic vibration has passed 10 minutes. It is a figure which shows the side surface temperature of the fitting part of, and the bottom surface temperature of an ultrasonic head. In the principle confirmation experiment of the present invention, the temperature change and the maximum temperature at the center of the side surface of the fitting portion of the ultrasonic horn and the ultrasonic head in (a) single-ant structure and (b) double-ant structure measured by infrared thermography. It is a figure which shows the change of. It is a figure which shows the temperature change and the change of the maximum temperature of the central part of the bottom surface of an ultrasonic head in (a) a single dovetail structure and (b) a double dovetail structure measured by infrared thermography in the principle confirmation experiment of the present invention.

FIG. 1 shows a fixed structure of an ultrasonic horn 1 and an ultrasonic head 3 by a dovetail structure 2 composed of a dovetail groove portion and a hozo portion, which is a prior art (a) fixed structure of a single dovetail structure. It is a figure explaining one Embodiment with (b) a compound ant structure of this invention.

As can be understood from FIG. 1A, the fixed structure of the single dovetail structure is a fixed structure in which only one dovetail structure is arranged in the central portion of the mounting surface (central portion of the contact surface). As described above, according to the prior experiment disclosed in Non-Patent Document 1, the oxygen-free copper head of the ultrasonic processing apparatus is attached to the double-sided tape, adhesively applied, screwed, and single at the center of the mounting surface (contact surface). When the loss of vibration energy was compared by fixing to a titanium ultrasonic horn by four types of fixing methods of cold fitting with a dovetail structure consisting of a dovetail groove and a hozo part, it was found that the cold fit in a single dovetail structure was used. It was clarified that the fixing method by the method generates the largest amount of heat after the fixing method by attaching the double-sided tape, and the amplitude of the transmitted ultrasonic vibration also increases the most. The reason for this is that since there is only one dovetail structure in the center of the mounting surface, the mounting surface end (contact surface end) becomes a free end, and between the base of the dovetail structure and the mounting surface end, FIG. The cause is considered to be the occurrence of the gap δ shown in (a).

Therefore, in the present invention, as shown in FIG. 1 (b), the fixed structure of the ultrasonic head and the ultrasonic horn is made into a double dovetail structure, that is, by arranging a plurality of dovetails on the mounting surface. By narrowing the gap δ'generated between the base of the structure and the end of the mounting surface and suppressing deformation and frictional heat generation due to the striking between the gaps, the ultrasonic head can be attached and detached from the ultrasonic horn. While making it possible, it is possible to improve the transmission efficiency of vibration energy from the ultrasonic horn to the ultrasonic head. In the embodiment shown in FIG. 1B, the dovetail groove portion is arranged in the ultrasonic horn and the hozo portion is arranged in the ultrasonic head, but in practice, the hozo portion is arranged in the ultrasonic horn. However, a dovetail groove may be arranged in the ultrasonic head to cool the ultrasonic horn or heat the ultrasonic head. Further, FIG. 1B shows an embodiment of a double dovetail structure in which the dovetail structure is arranged at the center of the mounting surface and on both sides thereof, but the mounting surface is not limited to this. The arrangement of a plurality of dovetail structures can be arranged according to the design specifications and the like.

Further, a plurality of dovetail structures are arranged on the mounting surface, and the ultrasonic horn and the ultrasonic head can be attached to and detached from each other by at least one of shrink fitting and cold fitting at the time of insertion and removal to the plurality of dovetail structures. In the configuration to be performed, it is necessary to consider the influence of expansion and contraction of the entire ultrasonic horn and the entire ultrasonic head, in addition to the expansion due to shrink fitting of individual dovetail structures or the contraction due to cold fitting. In some cases.

FIG. 2A shows an embodiment in which a plurality of concave groove portions are arranged on the ultrasonic horn arranged on the upper side in the drawing, and a plurality of convex hozo portions are arranged on the ultrasonic head arranged on the lower side. Shows the morphology. In the embodiment shown in FIG. 2A, all the dovetail grooves arranged on the mounting surface have an opening as an upper bottom portion and a lower bottom portion longer than the upper bottom portion in a cross-sectional view. The pair of opposite sides connecting the bottom and the bottom has a trapezoidal shape so that both sides have an inclined side (that is, a reverse tapered side wall), and all the hozo parts are cross-sectionally viewed. Therefore, it is assumed that the trapezoidal shape corresponds to the dovetail groove. Considering the central part of the mounting surface (contact surface) as a reference, the dovetail structure arranged at the central part of the mounting surface (central part of the contact surface) is affected by the expansion of the entire ultrasonic horn or the contraction of the entire ultrasonic head. Although it is difficult, the effect may not be negligible in the dovetail structure arranged at the end of the mounting surface (end of the contact surface).

In general, the dovetail structure arranged nth from the center, which is closer to the end of the mounting surface, has an dovetail structure that is n-1th from the center of the mounting surface. The position shift in the parallel direction (horizontal direction) becomes large. As a result, the physical interference width of the reverse tapered side wall portion proximal to the central portion of the mounting surface of the dovetail structure is larger than the interference width (ζ n-1) of the dovetail structure arranged at the n-1th position. When the interference width (ζ n) of the n-th arranged dovetail structure becomes larger (ζ n-1 ≦ ζ n), and the more the dovetail structure arrangement is increased, the more difficult it is to fit by shrink fitting or cold fitting. There is.

Therefore, in one embodiment of the present invention, the plurality of dovetail groove portions include a central dovetail groove portion arranged in the central portion of the mounting surface and at least one outer dovetail groove portion arranged outside the central portion of the mounting surface. The plurality of hozo portions shall include a central hozo portion corresponding to the central dovetail groove portion and at least one outer hozo portion corresponding to the outer dovetail groove portion, and the central dovetail groove portion shall include an opening in a cross-sectional view. The upper bottom portion, the lower bottom portion is longer than the upper bottom portion, and the pair of opposite side portions connecting the upper bottom portion and the lower bottom portion are both inclined side portions (that is, reverse tapered side wall portions). It has a trapezoidal shape, and the central hozo portion has a trapezoidal shape corresponding to the central dovetail groove portion in a cross-sectional view. On the other hand, the outer dovetail groove is attached in a pair of opposite sides connecting the upper bottom and the lower bottom, with the opening as the upper bottom and the lower bottom longer than the upper bottom in cross-sectional view. The opposite side portion distal to the central portion of the surface (that is, the side wall portion distal to the central portion of the mounting surface of the trapezoidal structure) is the inclined side portion (that is, the reverse tapered side wall portion). The opposite side portion proximal to the central portion of the mounting surface (that is, the side wall portion proximal to the central portion of the mounting surface of the trapezoidal structure) is an orthogonal side orthogonal to the upper bottom portion and the lower bottom portion. It has a trapezoidal shape such that it is a portion (vertical side surface), and the outer hozo portion has a trapezoidal shape corresponding to the outer dovetail groove portion in a cross-sectional view.

Such an embodiment of the present invention will be described with reference to FIG. As shown in FIG. 2B, at the diamond-shaped physical interference points 4 and 5 generated by the expansion or contraction of the entire ultrasonic horn shown in FIG. 2A or the contraction or expansion of the entire ultrasonic head. , The ant structure on the proximal side to the central part of the mounting surface of the vertical line passing through the acute-angled apex of the lower side of the rhombus has been deleted. The groove portion 6 and the hozo portion 7 are arranged.

In the embodiment shown in FIG. 2B, since the physical interference points 4 and 5 are removed in advance, they are affected by the expansion or contraction of the entire ultrasonic horn or the contraction or expansion of the entire ultrasonic head. Instead, a plurality of hozo portions arranged on the mounting surface can be smoothly inserted into the dovetail groove portion. In the present embodiment shown in FIG. 2B, all the opposite side portions of the outer dovetail groove portion proximal to the central portion of the mounting surface and all the corresponding opposite side portions of the outer hozo portion are the upper bottom portion. It is considered to be an orthogonal side portion (vertical side surface) orthogonal to the lower bottom portion, but the present invention is not limited to this, and a plurality of hozo portions arranged on the mounting surface are smoothly inserted into the dovetail groove portion. If it is possible, for example, the opposite side of a part of the outer dovetail groove portion proximal to the central part of the mounting surface and the corresponding opposite side part of the outer hozo part are the upper bottom part. It is an orthogonal side portion (vertical side surface) orthogonal to the lower bottom portion, and the opposite side portion of the outer dovetail groove portion on the proximal side with respect to the center portion of the other mounting surface and the corresponding opposite side portion of the outer hozo portion have an inclination. Various arrangements such as an oblique side portion may be made.

Further, in the embodiment shown in FIG. 2B, even when many dovetail structures are arranged on the mounting surface, a plurality of dovetail grooves can be more reliably engaged with the corresponding hoso portions. The dovetail groove and the plurality of hozo portions are clearances in a direction parallel to the mounting surface between the outer dovetail groove portion and the outer hozo portion (that is, the clearance between the outer dovetail groove portion and the outer hozo portion, and are attached. The clearance in the direction parallel to the surface is the clearance in the direction parallel to the mounting surface between the central dovetail groove and the central hozo (that is, the clearance between the central dovetail groove and the central hozo). It is formed so as to be larger than the clearance in the direction parallel to the mounting surface), and the outer dovetail groove portion and the outer hozo portion are formed so as to increase the separation distance from the central portion of the mounting surface. It is formed so that the clearance in the direction parallel to the mounting surface between the two is large.

Further, in the embodiment shown in FIG. 2B, the outer dovetail groove portion and the outer dovetail groove portion and the outer dovetail groove portion and the outer dovetail groove portion and in order to be able to further effectively improve the transmission efficiency of the vibration energy from the ultrasonic horn to the ultrasonic head. As the temperature of the ultrasonic horn and the ultrasonic head returns to room temperature after the outer hozo portion is inserted into the outer dovetail groove portion, the oblique side portion of the outer dovetail groove portion and the corresponding oblique side portion of the outer dovetail portion come into contact with each other. It is formed to do. By forming the outer dovetail groove portion and the outer hozo portion in this way, a plurality of hozo portions arranged on the mounting surface are not affected by the expansion or contraction of the entire ultrasonic horn or the contraction or expansion of the entire ultrasonic head. However, as the temperature of the ultrasonic horn and the ultrasonic head returns to room temperature after being inserted into the dovetail groove without any delay, the hozo is on the opposite tapered side of the side opposite to the orthogonal side (vertical side surface). The portion and the dovetail groove come into contact with each other, and the shrinkage of the dovetail groove portion, the expansion of the hozo portion, or both of them cause slippage between the surfaces of the diagonal side portion having a reverse taper shape, and the mounting surface of the ultrasonic horn is the ultrasonic head. It is firmly pressed against the mounting surface, enabling the ultrasonic horn and the ultrasonic head to fit tightly, further effectively improving the efficiency of transmitting vibration energy from the ultrasonic horn to the ultrasonic head. It makes it possible to plan.

At that time, the voids η represented by reference numerals 8 and 9 generated as a result of the contraction or expansion of the entire ultrasonic horn or the entire ultrasonic head differ in size in proportion to the distance from the central portion of the mounting surface. Generally, in the dovetail structure arranged nth from the center, which is closer to the end of the mounting surface, as compared with the void ηn-1 in the dovetail structure arranged n-1th from the central part of the mounting surface. Since the gap ηn is large, ηn-1 ≦ ηn.

In the embodiments shown in FIGS. 2A and 2B, the dovetail groove portion is arranged in the ultrasonic horn and the hozo portion is arranged in the ultrasonic head, but in practice, the hozo portion is arranged in the ultrasonic horn. May be configured such that a dovetail groove is arranged in the ultrasonic head to cool the ultrasonic horn or heat the ultrasonic head. Also, although specific embodiments have been illustrated and described herein, it is understood that various other changes and modifications may be made without departing from the spirit and scope of the claimed subject matter. Should. Further, although various viewpoints of the claimed subject matter have been described herein, such viewpoints need not be used in combination. Therefore, each claim attached is intended to cover all such changes and modifications within the scope of the claimed subject matter.

[Example 1: Temperature change due to transmission amplitude of ultrasonic vibration and frictional heat]
The principle confirmation experiment of the present invention using the chilled fit will be described with reference to FIG. In this experiment, a medium-sized ultrasonic processing machine UМ-500DA (manufactured by JEOL Ltd.) having a frequency and a maximum amplitude of 16 kHz and 10 nm, respectively, was used. This device can control the amplitude of ultrasonic vibration by adjusting the output ratio of ultrasonic vibration in the range of 0 to 100%. The vibration direction of the ultrasonic wave with respect to the mounting surface of the ultrasonic horn 10 and the ultrasonic head 11 is a direction orthogonal to the mounting surface (direction perpendicular to the mounting surface).

In order to compare the transmission efficiency of vibration energy, three types of ultrasonic horns 15 and ultrasonic heads 16 shown in FIG. 4 were prepared. The ultrasonic horn has a cylindrical shape with a maximum diameter of 38 mm, a minimum diameter of 24 mm, and a length of 191 or 181 mm, and is connected to the ultrasonic transducer of the ultrasonic processing machine by an M10 bolt. The material of the ultrasonic horn, internal damping factor (0.002) is small, the value of the modulus of longitudinal elasticity / density (E / [rho) selects a relatively large titanium (24.4 × ¹⁰ 7 cm).

On the other hand, the shape of the ultrasonic head is a cylindrical shape having a diameter of 38 mm and a thickness of 10 mm, and the material thereof is oxygen-free copper. Modulus / density of oxygen-free copper is 13.1 × 10 7 ^cm, but has a lower value than the titanium, internal damping rate 0.0045 (see internal damping of the copper single crystal) Since the value is close to the internal damping factor of titanium, it was selected. Oxygen-free copper also has the advantage of being more suitable for cold pressure welding than ordinary copper.

The ultrasonic horn with a dovetail structure shown in FIGS. 4 (b) and 4 (c) is machined with a single dovetail groove having an opening width of 5 mm, a bottom width of 15 mm, and a depth of 5 mm, which has a reverse tapered side wall at the center of the mounting surface. Has been done. Further, in the double dovetail structure shown in FIG. 4 (c), wedge-shaped dovetail groove portions cut off from one half of the single dovetail structure are arranged one by one at positions about 9 mm to the left and right from the center of the mounting surface. In order to correspond to these shapes, the ultrasonic head also has a dovetail portion having a reverse taper shape on at least one side, and a clearance of 3 to 8 μm is provided so that the dovetail portion (ant type structure) has an dovetail groove portion (antite structure). It was manufactured so that it was slightly larger than the groove structure).

For the fitting of the ultrasonic horn and the ultrasonic head, the difference in the coefficient of linear thermal expansion (titanium: 8.4 × ^10-6 / K, oxygen-free copper: 1.7 × ^10-5 / K) is used. The oxygen-free copper ultrasonic head was immersed in liquid nitrogen and cooled to about 77 K to contract the hozo portion, and the ultrasonic head was inserted into the dovetail groove portion of the titanium ultrasonic horn. Then, by returning the ultrasonic head to room temperature naturally, the ultrasonic head was firmly fitted to the ultrasonic horn. Further, as shown in FIG. 4A, a titanium ultrasonic horn / ultrasonic head integrated type is also prepared as an ideal fitting state in which there is no joint between the ultrasonic horn and the ultrasonic head. ..

In order to compare the transmission efficiency of vibration energy, as shown in FIG. 3, the mounting surface between the ultrasonic horn 10 and the ultrasonic head 11 is observed by infrared thermography R300 (manufactured by Nippon Avionics) indicated by reference numeral 12. did. Further, in order to grasp the influence of the frictional heat generated on the mounting surface between the ultrasonic horn 10 and the ultrasonic head 11 on the bottom surface of the ultrasonic head and the ultrasonic processing, the gold vapor deposition mirror 13 is used. Therefore, the temperature distribution on the bottom surface of the ultrasonic head 11 was observed by infrared thermography 12. Further, a He-Ne gas laser incident from the horizontal direction is vertically reflected by a gold vapor deposition mirror to irradiate the bottom surface of the ultrasonic head 11 made of oxygen-free copper, and then the reflected light follows an optical path in the opposite direction. It was arranged so as to be detected by a laser Doppler vibrometer AT0023 + AT3700 (manufactured by Graftech) indicated by reference numeral 14, and the vibration frequency and amplitude at the bottom surface of the ultrasonic head were measured. As shown in FIG. 4, the measurement points are the central portion of the mounting surface (position 1), the intermediate portion (position 2) 9 mm away from the center in the parallel direction (horizontal direction) with respect to the mounting surface, and the mounting surface. There are three locations at the ends (position 3) 18 mm away from the center in the parallel direction (horizontal direction).

FIG. 5 shows the relationship between the elapsed time and the amplitude of the ultrasonic vibration measured on the bottom surface of the ultrasonic head. The measurement results at the central portion, the intermediate portion, and the end portion of the mounting surface are shown in FIGS. 5 (a), 5 (b), and 5 (c), respectively.

The output of the ultrasonic transmitter is unified to a maximum output of 180W that can oscillate an ultrasonic horn made of titanium with an integrated ultrasonic head. Since the frequency of the applied ultrasonic vibration is 16 kHz, the period is calculated to be 62.5 μs. The actual measured values are 58 μs for the ultrasonic head integrated titanium ultrasonic horn (ideal mating state) and 61 μs for the ultrasonic horn and ultrasonic head fitted with the dovetail structure. The frequency is slightly higher.

On the other hand, the amplitude is ± about 2 μm in the central part, and there is almost no difference, but in the middle part, the double dovetail structure maintains the same amplitude of ± 2 μm as in the ideal mating state, whereas the single dovetail structure Then it has increased to ± 4 μm. This tendency is more remarkable at the end of the mounting surface, and the amplitude of ultrasonic vibration at the end of the mounting surface is ± 2 μm in the ideal fitting state, ± 4 μm in the double dovetail structure, and ± about ± in the single dovetail structure. It has increased significantly to 8 μm. In the double dovetail structure, the distance to the base of the inverted tapered side surface of the dovetail structure in which the end of the mounting surface and one side surface are vertical sides is 8 mm, whereas the end of the mounting surface and the dovetail structure of the single dovetail structure The distance to the base of the reverse taper shape side surface is 16.5 mm, which is about twice as long.

Here, considering a cantilever beam in which the base of the inverted tapered side surface of the dovetail structure is considered as a fixed end, the displacement of the mounting surface end (contact surface end), which is a free end, is proportional to the length of the beam. Therefore, it can be understood that the difference in amplitude between the single-beam structure and the double-beam structure at the end of the mounting surface is doubled. If the amplitude at the end of the mounting surface is suppressed to be smaller, the solution is to move the position of the dovetail structure closer to the end of the mounting surface and shorten the length of the cantilever.

The increase in amplitude at the end of the mounting surface leads to an increase in temperature due to frictional heat. That is, the vibration energy is lost as heat energy. FIG. 6 shows the thermal observed by infrared thermography with the emissivity set to 1 after applying black dye spray (manufactured by Tobi Kagaku) to the fitting side wall of the ultrasonic horn and the ultrasonic head and the bottom of the ultrasonic head. It is an image diagram. The temperature at the center of the screen indicated by a cross in the figure and the maximum temperature in the screen are read, the application time of ultrasonic vibration and the temperature change on the side surface of the mating part are shown in FIG. 7, and the temperature change on the bottom surface of the ultrasonic head is shown in FIG. Each is shown in FIG.

There is not much difference between the temperature in the center of the screen and the maximum temperature in the screen. The longer the application time of ultrasonic vibration is, the more remarkable the temperature rise due to the generation of frictional heat is at both the measurement points on the side surface of the fitting portion and the bottom surface of the ultrasonic head. The maximum application time of ultrasonic vibration in this experiment was 10 minutes, but in the single dovetail structure, heat was generated up to 99.1 ° C on the side surface of the fitting portion and 79.0 ° C on the bottom surface of the ultrasonic head. However, the maximum temperature in the double dovetail structure was 66.9 ° C. on the side surface and 62.8 ° C. on the bottom surface, and this result means that the temperature rise of 32% on the side surface and 21% on the bottom surface was suppressed. Therefore, it was found that the pluralization of the dovetail structure suppresses the generation of frictional heat due to flapping at the end of the mounting surface and is effective in improving the in-plane distribution of ultrasonic vibration.

According to the present invention, in various ultrasonic processing devices using ultrasonic vibration such as ultrasonic cutting, ultrasonic bonding, ultrasonic welder, and ultrasonic imprint, the work piece is in direct contact with the work piece, and finally ultra-ultrasonic. By making the ultrasonic head that works by ultrasonic vibration removable from the ultrasonic horn, it is possible to limit the replacement work due to wear and change of use to the ultrasonic head only, and to divert an expensive ultrasonic horn. Further, according to the present invention, it is possible to perform bonding and molding optimized according to the pattern shape, bonding between substrates according to the material, etc., and it is extremely in wiring in semiconductor manufacturing and flow path formation in chemical / biochip. It is useful.

1 Ultrasonic horn 2 Dovetail structure 3 Ultrasonic head 4 Physical interference point 5 Physical interference point 6 Dovetail groove part 7 Hozo part

Claims (7)

An ultrasonic horn, which is a resonator for efficiently transmitting vibration energy,
In an ultrasonic processing apparatus having an ultrasonic head attached to the ultrasonic horn, which comes into direct contact with an workpiece and finally works by ultrasonic vibration.
The ultrasonic horn and the ultrasonic head have mounting surfaces formed on their respective surfaces, and a plurality of dovetail grooves are arranged on the mounting surface of either the ultrasonic horn or the ultrasonic head. A plurality of hozo portions corresponding to the plurality of dovetail portions are arranged on the other mounting surface, and the ultrasonic horn and the ultrasonic head are formed by the plurality of dovetail groove portions and the plurality of hozo portions. The mounting surfaces of the horn and the ultrasonic head are formed so as to be in contact with each other and engaged with each other.
The plurality of dovetail grooves and the plurality of hoso portions are formed so that they can be attached to and detached from each other by at least one of expansion of the dovetail groove portion due to shrink fitting at the time of insertion and removal and contraction of the hozo portion due to cold fitting. Has been
An ultrasonic processing device characterized by this. The plurality of dovetail grooves include a central dovetail groove portion arranged in the central portion of the mounting surface and at least one outer dovetail groove portion arranged outside the central portion of the mounting surface.
The plurality of hozo portions include a central hozo portion corresponding to the central dovetail groove portion and at least one outer hozo portion corresponding to the outer dovetail groove portion.
The ultrasonic processing apparatus according to claim 1. In a cross-sectional view, the central dovetail groove portion has an opening as an upper bottom portion, a lower bottom portion longer than the upper bottom portion, and a pair of opposite side portions connecting the upper bottom portion and the lower bottom portion are hypotenuses having an inclination. It has a trapezoidal shape that can be regarded as a portion, and the central hozo portion has a trapezoidal shape corresponding to the central dovetail groove portion when viewed in cross section.
The outer dovetail groove portion has an opening as an upper bottom portion and a lower bottom portion longer than the upper bottom portion in a cross-sectional view, and is a central portion of a mounting surface in a set of opposite sides connecting the upper bottom portion and the lower bottom portion. It has a trapezoidal shape such that the opposite side portion on the distal side is a hypotenuse portion having an inclination, and the outer hozo portion has a trapezoidal shape corresponding to the outer dovetail groove portion when viewed in cross section.
The ultrasonic processing apparatus according to claim 2. The plurality of dovetail groove portions and the plurality of hozo portions have a clearance in a direction parallel to the mounting surface between the outer dovetail groove portion and the outer hozo portion, and the clearance between the central dovetail groove portion and the central hozo portion. The ultrasonic processing apparatus according to claim 3, wherein the ultrasonic processing apparatus is formed so as to be larger than a clearance in a direction parallel to the mounting surface of the above. The greater the distance between the outer dovetail groove portion and the outer hozo portion from the central portion of the mounting surface, the greater the clearance in the direction parallel to the mounting surface between the outer dovetail groove portion and the outer hozo portion. The ultrasonic processing apparatus according to claim 4, wherein the ultrasonic processing apparatus is formed in such a manner. The outer dovetail groove and the outer hozo are hypotenuses of the outer dovetail groove and far from the center of the mounting surface as the temperatures of the ultrasonic horn and the ultrasonic head return to room temperature after insertion. The fifth aspect of the present invention is characterized in that the hypotenuse portion on the position side and the corresponding hypotenuse portion on the outer hozo portion are formed so as to be in contact with the corresponding hypotenuse portion on the distal side with respect to the central portion of the mounting surface. The ultrasonic processing apparatus described in. The outer dovetail groove portion has an opening as an upper bottom portion and a lower bottom portion longer than the upper bottom portion in a cross-sectional view, and is a central portion of a mounting surface in a set of opposite sides connecting the upper bottom portion and the lower bottom portion. The opposite side of the distal side is a hypotenuse with an inclination, and the opposite side of the proximal side with respect to the central part of the mounting surface is an orthogonal side portion orthogonal to the upper bottom and the lower bottom. The ultrasonic processing apparatus according to claim 6, wherein the outer hozo portion has a trapezoidal shape corresponding to the outer dovetail groove portion in a cross-sectional view.

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