JP2018083155A - Vacuum degreasing and washing apparatus and washing method therefor - Google Patents

Vacuum degreasing and washing apparatus and washing method therefor Download PDF

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JP2018083155A
JP2018083155A JP2016227599A JP2016227599A JP2018083155A JP 2018083155 A JP2018083155 A JP 2018083155A JP 2016227599 A JP2016227599 A JP 2016227599A JP 2016227599 A JP2016227599 A JP 2016227599A JP 2018083155 A JP2018083155 A JP 2018083155A
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JP6373331B2 (en
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喜孝 日下
Yoshitaka Kusaka
喜孝 日下
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Abstract

PROBLEM TO BE SOLVED: To replace greases on a portion of a complex shape having upward, downward and bottomed deep holes and a complex shape having a closed part by making supply of washing liquid with respect to such complex shapes possible.SOLUTION: A vacuum degreasing and washing apparatus 1 includes: a washing chamber 2 which has an air-tight sealed structure and can heat the interior; a washing liquid tank 3 which warms and retains washing liquid; a nozzle 7 which injects pre-warmed washing liquid to the interior of the washing chamber 2; an opening/closing valve V4 for sending out inactive gas to the washing chamber 2; a vacuum pump 9 which turns the interior of the washing chamber 2 into a vacuum state; and a controller 10. A pressure reduction process of preliminarily heating washing liquid to a temperature just below a predetermined temperature at which the washing liquid is boiled at a prescribed degree of vacuum, reducing pressure of the washing chamber 2 up to the predetermined vacuum state and heating an interior temperature to a predetermined temperature or more is executed and a pressure recovery process of blowing out the heated washing liquid to the interior of the washing chamber in which the pressure reduction process is completed and elevating the interior pressure in the washing chamber by means of washing liquid and inactive gas is executed. Further, the pressure reduction process and the pressure recovery process are repeated two times or more.SELECTED DRAWING: Figure 1

Description

本発明は、機械部品等の脱脂洗浄に使用される真空脱脂洗浄装置、及びその洗浄方法に関するものである。 The present invention relates to a vacuum degreasing and cleaning apparatus used for degreasing and cleaning machine parts and the like, and a cleaning method therefor.

機械部品等を脱脂洗浄する技術として、被処理物を洗浄液中に浸漬することにより洗浄する方法や、洗浄液の蒸気により洗浄する方法が知られている。このように技術として、例えば、特許文献1に示されるものがある。また、洗浄室を負圧にして洗浄液の蒸気とシャワーによる洗浄をし、最後に真空排気して乾燥させる技術として、例えば特許文献2に示されるものがある。また、洗浄液の蒸気とシャワーによる洗浄をする際に、洗浄室に滞留した洗浄液を循環させて再度シャワー洗浄に使用する技術が、例えば特許文献3に記載されている。 As a technique for degreasing and cleaning machine parts and the like, there are known a method of cleaning an object to be processed by immersing it in a cleaning liquid and a method of cleaning with a vapor of the cleaning liquid. Thus, there exists a technique shown by patent document 1 as a technique, for example. Further, as a technique for making the cleaning chamber have a negative pressure, cleaning with the cleaning liquid vapor and showering, and finally evacuating and drying, there is one disclosed in Patent Document 2, for example. Further, for example, Patent Document 3 discloses a technique in which cleaning liquid staying in a cleaning chamber is circulated and used again for shower cleaning when cleaning with steam and shower.

特開平2−198678号公報JP-A-2-198678 特開平3−101881号公報JP-A-3-101881 特開平11−47705号公報Japanese Patent Laid-Open No. 11-47705

蒸気による洗浄は、被処理物に蒸気が付着して凝縮液化するものであるから、被処理物には、凹形状の上向き下向き、底付き深穴がある複雑な形状の被処理物でも凹凸部に蒸気が入り込むことができる。しかしながら、凹形状、深穴部に溜まった油分は洗浄液と被洗浄油がほぼ同等の比重を有する為、洗浄液との置換ができず洗浄が困難であった。又、複雑な形状の中でも特に、被処理物に平面形状同士が密着する箇所やボルトが取り付けられたネジ部等の閉塞部(細部)があると、当該箇所は外部と疎通がない為、洗浄液の供給が行われず洗浄液との置換(洗浄)が行われなくなることになって洗浄が極めて困難であった。
本発明は、凹形状の上向き下向き、底付き深穴がある複雑な形状、閉塞部を持つ複雑な形状に対して、洗浄液の供給を可能としこれらの部位の油脂類を洗浄液と置換することにより付着した油分の除去を可能にするものである。
Since cleaning with steam causes vapor to adhere to the object to be processed and condensate, the object to be processed may be a concave or convex part with a concave shape facing upwards and downwards, with a deep hole with a bottom. Steam can get into. However, the oil accumulated in the concave shape and deep hole portion has almost the same specific gravity as the cleaning liquid and the oil to be cleaned, so that it cannot be replaced with the cleaning liquid and is difficult to clean. In addition, especially in complicated shapes, if there is a place where the planar shape is in close contact with the object to be processed or a closed part (detail) such as a screw part to which a bolt is attached, the place does not communicate with the outside. Cleaning is extremely difficult because no replacement is performed with the cleaning liquid and no replacement (cleaning) is performed.
The present invention enables supply of a cleaning liquid to a concave shape having an upward and downward direction, a complicated shape having a deep hole with a bottom, and a complicated shape having a closed portion, and by replacing the oils and fats at these parts with the cleaning liquid. It makes it possible to remove the adhered oil.

本発明の洗浄方法は、気密、密閉構造を持つ洗浄室の室内を所定の真空状態に減圧する減圧工程と、
洗浄液のシャワー及び不活性ガスにより洗浄室の室内圧力を高める復圧工程と、
前記減圧工程及び復圧工程を順に二回以上繰り返すことを特徴する。
The cleaning method of the present invention includes a pressure reducing step for reducing the pressure in a cleaning chamber having an airtight and sealed structure to a predetermined vacuum state,
A return pressure step of increasing the pressure in the cleaning chamber with a shower of cleaning liquid and an inert gas;
The decompression step and the decompression step are repeated twice or more in order.

また、本発明の真空脱脂洗浄装置は、気密、密閉構造を持ち、室内を加熱可能な洗浄室と、
洗浄液を加温して保有する洗浄液槽と、
前記洗浄室の室内に前記加温された洗浄液を噴射するノズルと、
前記洗浄室の室内を真空状態にする真空ポンプと、
不活性ガスを前記洗浄室に送出する開閉弁と、
コントローラとを有し、
前記コントローラは、
前記洗浄室を前記真空ポンプにより所定の真空状態に減圧し、かつ当該真空度において洗浄液が沸騰する温度以上に室内温度を加熱するよう洗浄室を制御する減圧工程と
洗浄液を前記真空度において予め沸騰する温度の直下の温度に加熱するよう前記洗浄液槽を制御する工程と、
前記ノズルを制御して加熱された洗浄液を減圧工程が終了した洗浄室の室内に噴出させ、洗浄液及び不活性ガスにより洗浄室の室内圧力を高める復圧工程と、
前記減圧工程及び復圧工程を二回以上繰り返すことを特徴とする。
Further, the vacuum degreasing cleaning apparatus of the present invention has an airtight and sealed structure, and a cleaning chamber capable of heating the interior,
A cleaning solution tank that holds the cleaning solution by heating;
A nozzle for injecting the heated cleaning liquid into the cleaning chamber;
A vacuum pump that evacuates the cleaning chamber;
An on-off valve for delivering an inert gas to the cleaning chamber;
A controller,
The controller is
The cleaning chamber is depressurized to a predetermined vacuum state by the vacuum pump, and the depressurization step for controlling the cleaning chamber so as to heat the room temperature to a temperature higher than the temperature at which the cleaning liquid boils at the vacuum degree and the cleaning liquid boil at the vacuum degree in advance. Controlling the cleaning liquid tank to heat to a temperature immediately below the temperature to be
A pressure-reducing step in which the cleaning liquid heated by controlling the nozzle is ejected into the chamber of the cleaning chamber after the depressurization step, and the pressure in the cleaning chamber is increased by the cleaning liquid and the inert gas;
The decompression step and the decompression step are repeated twice or more.

本発明によれば、減圧の工程により油脂は圧力差で閉塞部から引き出され、被処理物の外部表面において表面に滞留した洗浄液と置換され、その後復圧の工程により洗浄液は被処理物の閉塞部内に引き込まれ閉塞部内部の油脂を希釈し、減圧の工程と復圧の工程を繰り返すことにより、凹形状の上向き下向き、底付き深穴がある複雑な形状、閉塞部を持つ複雑な形状に付着した油脂を除去することができる。 According to the present invention, the oil and fat is drawn out from the blockage portion due to the pressure difference by the pressure reduction process and replaced with the cleaning liquid staying on the surface on the outer surface of the object to be processed, and then the cleaning liquid is blocked by the pressure recovery process. By diluting the oil and fat inside the closed part by being drawn into the part and repeating the decompression process and the return pressure process, it becomes a complicated shape with a concave shape facing upwards, a deep hole with a bottom, and a complicated shape with a closed part. The attached oil and fat can be removed.

本発明の実施の形態による真空脱脂洗浄装置の構成図である。It is a block diagram of the vacuum degreasing cleaning apparatus by embodiment of this invention. 真空脱脂洗浄装置の洗浄方法を説明するための図である。It is a figure for demonstrating the cleaning method of a vacuum degreasing cleaning apparatus.

近年、工業洗浄で使用される洗浄液としては、炭化水素系洗浄液、水系洗浄液、有機溶剤系洗浄液等がある。洗浄力の高さや環境への配慮から、炭化水素系洗浄液が広く利用されている。炭化水素系洗浄液は、炭素と水素のみからなる化合物であり、蒸留再生によるリサイクルが可能である。 In recent years, cleaning liquids used in industrial cleaning include hydrocarbon-based cleaning liquids, water-based cleaning liquids, organic solvent-based cleaning liquids, and the like. Hydrocarbon cleaning liquids are widely used because of their high detergency and environmental considerations. The hydrocarbon-based cleaning liquid is a compound composed only of carbon and hydrogen, and can be recycled by distillation regeneration.

一般的に、炭化水素系洗浄装置において被処理物に付着した油脂を除去するに当たり加温され減圧状態が維持される槽内で炭化水素系洗浄液を使用しシャワー、蒸気、浸漬等にて被洗浄品に付着した油脂類を洗浄液と置換する。次に槽内の減圧を行うと、被処理物に残留した置換された洗浄液は減圧により沸点を超え蒸発し被処理物は乾燥状態になり洗浄が完了する。 In general, using hydrocarbon-based cleaning liquid in a tank that is heated and maintained under reduced pressure when removing oil and fat adhering to the object to be processed in a hydrocarbon-based cleaning device, it is cleaned by shower, steam, immersion, etc. Replaces oils and fats adhering to the product with a cleaning solution. Next, when the pressure in the tank is reduced, the substituted cleaning liquid remaining in the object to be processed exceeds the boiling point due to the reduced pressure, evaporates, the object to be processed becomes dry, and the cleaning is completed.

本発明においては、脱脂洗浄にあたり被処理物に付着した油脂(例えば重質油)よりも沸点の低い炭化水素系洗浄液を用い、炭化水素系洗浄液の沸騰条件を上回る環境下(温度および圧力)におかれた槽内に沸騰条件直下の炭化水素洗浄液を導入する事により、瞬時に洗浄室内を飽和蒸気状態にして、これを維持する。炭化水素系洗浄液としては、軽質分(=沸点の低い物質)を含む軽質炭化水素系洗浄液を用いることが望ましい。以下、炭化水素系洗浄液を単に「洗浄液」と称することにする。 In the present invention, a hydrocarbon-based cleaning liquid having a boiling point lower than that of oil (eg, heavy oil) adhering to an object to be degreased and cleaned is used in an environment (temperature and pressure) exceeding the boiling condition of the hydrocarbon-based cleaning liquid. By introducing a hydrocarbon cleaning liquid just under boiling conditions into the tank placed in the tank, the cleaning chamber is instantly saturated and maintained. As the hydrocarbon cleaning liquid, it is desirable to use a light hydrocarbon cleaning liquid containing a light component (= substance having a low boiling point). Hereinafter, the hydrocarbon-based cleaning liquid is simply referred to as “cleaning liquid”.

また、本発明では、シャワー、蒸気、浸漬等にて被洗浄品に付着した油脂を洗浄液と置換した後、洗浄室内において減圧、復圧のサイクルを繰り返す。減圧化においては、被処理物の閉塞部に存在する油脂を被処理物表面に引き出し、蒸気化される洗浄液及び不活性ガスを洗浄室に供給することにより事により洗浄室内の圧力を復圧し、洗浄液の疎通がない閉塞部内に洗浄液を引き込ませる。これを繰り返すことにより、閉塞部内に付着した油分を洗浄液に置換してゆく。そして、洗浄液を加温、減圧により蒸発させ処理品より油分を除去する。 Further, in the present invention, after the oil and fat adhering to the object to be cleaned is replaced with the cleaning liquid by shower, steam, immersion, or the like, the cycle of decompression and re-pressure is repeated in the cleaning chamber. In depressurization, the oil and fat existing in the closed portion of the object to be processed is drawn to the surface of the object to be processed, and the pressure in the cleaning chamber is restored by supplying the cleaning liquid and the inert gas that are vaporized to the cleaning chamber. The cleaning liquid is drawn into a closed portion where there is no communication of the cleaning liquid. By repeating this, the oil adhering in the closed portion is replaced with the cleaning liquid. Then, the cleaning liquid is heated and evaporated under reduced pressure to remove oil from the processed product.

本発明による実施形態の真空脱脂洗浄装置1を説明する。図1において、真空脱脂洗浄装置1は、気密、密閉構造の洗浄室2、洗浄液槽3、再生装置4、汚液槽5、蒸気発生器6、各種ポンプ、各種開閉弁及びこれらを制御するコントローラ10を有する。 A vacuum degreasing and cleaning apparatus 1 according to an embodiment of the present invention will be described. In FIG. 1, a vacuum degreasing and cleaning apparatus 1 includes an airtight and sealed structure cleaning chamber 2, a cleaning liquid tank 3, a regenerator 4, a septic tank 5, a steam generator 6, various pumps, various on-off valves, and a controller for controlling these. 10

洗浄室2は洗浄液シャワーの開閉弁V3、洗浄液蒸気の開閉弁V5が配置され、また洗浄室2の底部に滞留した洗浄液を排出するための開閉弁V6、V7および、洗浄室2の室内を排気する開閉弁V2を有している。開閉弁V3を通過した洗浄液は、洗浄室2の室内各所に配置されたノズル7から噴射される。また、洗浄室2には室内に滞留した洗浄剤を加熱し加温蒸気の発生を促す熱媒体油による間接加熱を行う加熱管H1が配置されている。洗浄室2は、さらに、圧力検知器S1、真空度計A1、液面検知器R1−R3を備えている。不活性ガスとして、窒素ガスを用いた。 The cleaning chamber 2 is provided with an on-off valve V3 for cleaning liquid shower and an on-off valve V5 for cleaning liquid vapor. On-off valves V6 and V7 for discharging the cleaning liquid staying at the bottom of the cleaning chamber 2 and the chamber of the cleaning chamber 2 are exhausted. An on-off valve V2 is provided. The cleaning liquid that has passed through the on-off valve V <b> 3 is sprayed from nozzles 7 that are disposed at various locations in the cleaning chamber 2. Further, the cleaning chamber 2 is provided with a heating pipe H1 that performs indirect heating with a heat medium oil that heats the cleaning agent staying in the chamber and promotes the generation of heated steam. The cleaning chamber 2 further includes a pressure detector S1, a vacuum gauge A1, and liquid level detectors R1-R3. Nitrogen gas was used as the inert gas.

洗浄液槽3は開閉弁V9を有しており、再生装置4により再生された洗浄液を保留し、槽内に熱媒体油による間接加熱管H2が配備されている。汚液槽5は、洗浄室から開閉弁V6を介して排出された洗浄液を一時保留し、真空脱脂洗浄装置1による洗浄とは非同期にポンプP1により必要に応じて再生装置4へ送る。蒸気発生器6は、開閉弁V8からの洗浄液を蒸気化して開閉弁V5を介して洗浄室2室内へ送る。ポンプP2は、開閉弁V7若しくは開閉弁V9からの洗浄液を、開閉弁V3及び開閉弁V8に到る管路へ送る。 The cleaning liquid tank 3 has an on-off valve V9, holds the cleaning liquid regenerated by the regenerating device 4, and an indirect heating pipe H2 made of heat medium oil is provided in the tank. The septic tank 5 temporarily holds the cleaning liquid discharged from the cleaning chamber via the on-off valve V6, and sends it to the regenerator 4 as needed by the pump P1 asynchronously with the cleaning by the vacuum degreasing cleaning apparatus 1. The steam generator 6 vaporizes the cleaning liquid from the on-off valve V8 and sends it into the cleaning chamber 2 through the on-off valve V5. The pump P2 sends the cleaning liquid from the on-off valve V7 or the on-off valve V9 to the pipelines that reach the on-off valve V3 and the on-off valve V8.

コンデンサ8は、排気開閉弁V2を介して洗浄室2からの排気を受け取り、排気中に含まれる洗浄液を凝縮液化して開閉弁V1を介して洗浄液槽3へ戻す(図中、この戻す管路は省略した)。真空ポンプ9は、コンデンサ8の下流に配置され、洗浄液が凝縮された残りの排気を、大気に放出する。 The condenser 8 receives the exhaust from the cleaning chamber 2 via the exhaust on-off valve V2, condenses the cleaning liquid contained in the exhaust, and returns it to the cleaning liquid tank 3 via the on-off valve V1 (in this figure, this return line) Was omitted). The vacuum pump 9 is disposed downstream of the condenser 8 and discharges the remaining exhaust gas condensed with the cleaning liquid to the atmosphere.

真空脱脂洗浄装置1を用いた洗浄方法を図1及び2を用いて説明する。
説明に当たっては、形状の上向き下向き、底付き深穴等の複雑形状、平面形状の密着部、ボルト取り付け部等の閉塞部を持つ機械部品の一例として、被処理物Wとして、円筒状の基体w1にボルト孔bnが設けられ、ボルトw2が締結状に螺入された被処理物Wを図2に示した。被処理物Wは、基体w1及び基体w1から露出したボルトw2の頭部表面及びボルト孔bn内に油脂(斜めの線分で示した)が付着しているとする。
A cleaning method using the vacuum degreasing cleaning apparatus 1 will be described with reference to FIGS.
In the description, as an example of a machine part having a closed portion such as a complicated shape such as a deep hole with a bottom, a deep hole with a bottom, a close contact portion with a flat shape, a bolt attachment portion, or the like, a cylindrical base body w1 is used. 2 shows a workpiece W in which a bolt hole bn is provided and a bolt w2 is screwed into a fastening shape. It is assumed that the workpiece W has oil and fat (indicated by oblique line segments) attached to the base surface of the base w1 and the head surface of the bolt w2 exposed from the base w1 and the bolt hole bn.

専用治具又は汎用治具に被処理物Wをセットして洗浄室2の室内に搬入して、洗浄液に浸漬しないような状態で設定し、洗浄室を密閉する。その後、コントローラ10により、洗浄のプロセスが開始される。 The workpiece W is set in a dedicated jig or a general-purpose jig and is carried into the chamber of the cleaning chamber 2 and set so as not to be immersed in the cleaning liquid, and the cleaning chamber is sealed. Thereafter, the controller 10 starts the cleaning process.

まず、通常の洗浄が開始される(STEP1)。通常の洗浄は、浸漬、シャワー、蒸気いずれによる洗浄でも良いが、特許文献3に示されたシャワーによる洗浄の場合を説明する。洗浄室2内は、排気開閉弁V2を経由して真空ポンプ9により排気され減圧を行う。開閉弁V9は開いた状態とする。洗浄室2内の真空度計A1にて洗浄室2内の所定真空度到達を確認後、洗浄液槽3内で加熱管H2により加温された洗浄液はポンプP2の起動により開閉弁V3を経由し、ノズル7から高圧シャワー状態で噴射される。洗浄室2の底部の開閉弁V6、V7は閉の状態にあり、洗浄室2にはシャワー噴射された洗浄液が滞留すると同時に、加熱管H1により再加熱され加温蒸気が充満する。 First, normal cleaning is started (STEP 1). Normal cleaning may be performed by immersion, shower, or steam, but the case of cleaning by shower shown in Patent Document 3 will be described. The inside of the cleaning chamber 2 is evacuated by the vacuum pump 9 via the exhaust opening / closing valve V2 and decompressed. The on-off valve V9 is opened. After confirming that the predetermined vacuum level in the cleaning chamber 2 has been reached by the vacuum gauge A1 in the cleaning chamber 2, the cleaning liquid heated by the heating pipe H2 in the cleaning liquid tank 3 passes through the on-off valve V3 when the pump P2 is started. Injected from the nozzle 7 in a high-pressure shower state. The on-off valves V6 and V7 at the bottom of the cleaning chamber 2 are in a closed state, and the cleaning liquid sprayed by the shower stays in the cleaning chamber 2, and at the same time, is reheated by the heating pipe H1 and is filled with heated steam.

液面検出器R1−R3により所定レベルまでの液面の上昇を確認した上で、開閉弁V9を閉として洗浄液槽3からの洗浄液の供給を停止し、開閉弁V7を開とすることにより洗浄室2の低部に滞留した洗浄液がノズル7から噴射される。これを指定時間、継続して通常の洗浄を終了する。ポンプP2を停止し、開閉弁V6を開、開閉弁V3を閉、不活性ガス開閉弁V4を開とし不活性ガスを洗浄室2に導入することにより洗浄室2内に滞留している洗浄液を汚液槽5に回収する。被処理物Wは、基体w1及び基体w1から露出したボルトw2の頭部表面に付着した油脂がとれた状態である。シャワーによる洗浄に代えて、若しくは追加して、蒸気による洗浄をしても良い。この場合、蒸気発生器6によって洗浄液を蒸気化する。 After confirming that the liquid level has risen to a predetermined level by the liquid level detectors R1-R3, the on-off valve V9 is closed, the supply of the cleaning liquid from the cleaning liquid tank 3 is stopped, and the on-off valve V7 is opened for cleaning. The cleaning liquid staying in the lower part of the chamber 2 is ejected from the nozzle 7. This is continued for a specified time, and normal cleaning ends. The pump P2 is stopped, the on-off valve V6 is opened, the on-off valve V3 is closed, the inert gas on-off valve V4 is opened, and the inert gas is introduced into the cleaning chamber 2, thereby cleaning the cleaning liquid remaining in the cleaning chamber 2. Collect in the septic tank 5. The to-be-processed object W is the state from which the fats and oils adhering to the base | substrate w1 and the head surface of the volt | bolt w2 exposed from the base | substrate w1 were removed. Instead of or in addition to cleaning with a shower, cleaning with steam may be performed. In this case, the cleaning liquid is vaporized by the steam generator 6.

次に、凹形状の上向き下向き、底付き深穴、或いは閉塞部を対象とした洗浄工程を実施する。この洗浄工程は、減圧と復圧の二工程を順に一つのセットとして、これを繰り返すことにより実施される。 Next, a cleaning process is performed for the concave shape upward and downward, the bottomed deep hole, or the closed portion. This cleaning process is performed by repeating the two steps of decompression and decompression as one set in order.

減圧の工程(STEP2)では、開閉弁V2を開、開閉弁V3、V4、V5、V6、V7を閉じて、洗浄室2の室内の圧力を減圧して所定の真空状態(高真空)にする。これより、洗浄液が沸騰する温度を下げる。さらに、その真空度において洗浄液が沸騰する沸点温度を上回る温度に室内を調整する。洗浄室2の室内を減圧する事により細部の為従来疎通のない閉塞部も減圧され、圧力差が生じ気体が引き出される。と同時に内部にあった被洗浄の対象である油脂も被処理物Wの表面に引き出される。被処理物Wは、基体w1及び基体w1から露出したボルトw2の頭部表面に油脂が引き出された状態である。開閉弁V2を閉じ真空ポンプ9を停止する。 In the decompression step (STEP 2), the on-off valve V2 is opened, the on-off valves V3, V4, V5, V6, V7 are closed, and the pressure in the cleaning chamber 2 is reduced to a predetermined vacuum state (high vacuum). . This lowers the temperature at which the cleaning liquid boils. Furthermore, the room is adjusted to a temperature exceeding the boiling point temperature at which the cleaning liquid boils at that degree of vacuum. By depressurizing the interior of the cleaning chamber 2, the closed portion that has not been conventionally communicated is also depressurized due to the details, and a pressure difference is generated to draw out the gas. At the same time, the oil that is the object to be cleaned inside is also drawn out to the surface of the workpiece W. The to-be-processed object W is the state by which the fats and oils were pulled out by the base | substrate w1 and the head surface of the volt | bolt w2 exposed from the base | substrate w1. The on-off valve V2 is closed and the vacuum pump 9 is stopped.

次の復圧の工程(STEP3)の前の適当な時期に予め、洗浄液槽3では、STEP3の減圧により洗浄室2に設定された真空度において洗浄液が沸騰する沸点直下の温度に加熱管H2により洗浄液を加温しておく。 At an appropriate time before the next re-pressure step (STEP 3), in the cleaning liquid tank 3, the heating pipe H2 is used to bring the cleaning liquid to a temperature just below the boiling point where the cleaning liquid boils in the vacuum degree set in the cleaning chamber 2 by reducing the pressure of STEP 3. Warm the cleaning solution.

そして、復圧の工程(STEP3)では、洗浄液を開閉弁V9、ポンプP2を介して、開閉弁V3を開きノズル7からシャワー噴射する。その後、時間をずらして開閉弁V4を開き不活性ガスを供給する。時間をずらすのは、洗浄液の蒸気化をまずは促すためである。先の減圧の工程(STEP2)の操作により、室内は減圧され加熱されているため、沸点直下に加温された洗浄液は高減圧(真空)下の室内に導入と同時に沸騰して蒸気となり室内は瞬時に飽和蒸気状態になる。この飽和蒸気は被処理物Wの表面で冷却され液化し、減圧工程(STEP2)において引き出された油脂を希釈洗浄し被処理物Wの表面に滞留する。 In the return pressure step (STEP 3), the cleaning liquid is sprayed from the nozzle 7 by opening the on-off valve V3 via the on-off valve V9 and the pump P2. Thereafter, the on-off valve V4 is opened and the inert gas is supplied at different times. The reason for shifting the time is to first promote the vaporization of the cleaning liquid. Since the interior of the chamber is depressurized and heated by the operation of the previous depressurization step (STEP 2), the cleaning liquid heated immediately below the boiling point is boiled at the same time as being introduced into the chamber under a high depressurization (vacuum) and becomes steam. Instantly becomes saturated vapor. This saturated vapor is cooled and liquefied on the surface of the workpiece W, and the oil and fat extracted in the decompression step (STEP 2) is diluted and washed and stays on the surface of the workpiece W.

その後に、洗浄室2内に供給される洗浄液のシャワーにとともに開閉弁V4から不活性ガスを供給することにより、洗浄室2内の圧力が洗浄液の蒸気及び不活性ガスにより高まり、復圧される。洗浄室2内に供給される洗浄液のうち、液体状の洗浄液は被処理物Wの表面に滞留した油脂を洗い流す。洗浄室2内を復圧する事により室内の雰囲気と被処理物Wの閉塞部の間に差圧が生じ、被処理物Wの表面に滞留した洗浄液は閉塞部内に引き込まれる。これにより被処理物Wの閉塞部に付着した油脂は引き込まれた洗浄液により希釈される。被処理物Wの基体w1の表面に付着した油脂及び基体w1から露出したボルトw2の頭部表面に付着した油脂は、洗浄液により洗いながされる。 After that, by supplying an inert gas from the on-off valve V4 together with a shower of the cleaning liquid supplied into the cleaning chamber 2, the pressure in the cleaning chamber 2 is increased by the vapor of the cleaning liquid and the inert gas, and the pressure is restored. . Of the cleaning liquid supplied into the cleaning chamber 2, the liquid cleaning liquid cleans away the oil and fat remaining on the surface of the workpiece W. By returning the pressure in the cleaning chamber 2, a differential pressure is generated between the indoor atmosphere and the closed portion of the workpiece W, and the cleaning liquid staying on the surface of the workpiece W is drawn into the closed portion. Thereby, the oil and fat adhering to the closed portion of the workpiece W is diluted with the drawn cleaning liquid. The oil and fat adhering to the surface of the substrate w1 of the workpiece W and the oil and fat adhering to the head surface of the bolt w2 exposed from the substrate w1 are washed away by the cleaning liquid.

次に減圧の工程(STEP2)に戻り、洗浄室2内の再減圧を行う。これにより先の復圧の工程(STEP3)において引き込まれた洗浄液によって希釈された油脂を圧力差で被処理物Wの外部表面に引き出す。閉塞部の汚油が十分引き出されたら、次に、復圧の工程(STEP3)を実施する。この工程では、再度シャワー、蒸気で洗浄液飽和状態を再発させ洗浄品表面に供給し引き出された油脂を洗浄(置換)する。そして、蒸気及び不活性ガスを再供給する事で洗浄室2内を復圧する。洗浄室2の室内の圧力が高まることにより、洗浄液は再度洗浄品細部に引き込まれ閉塞部の油脂を更に希釈させる。 Next, returning to the pressure reduction step (STEP 2), the pressure inside the cleaning chamber 2 is reduced again. As a result, the oil and fat diluted with the cleaning liquid drawn in the previous pressure-recovery step (STEP 3) is drawn out to the outer surface of the workpiece W by a pressure difference. When the oil in the closed portion is sufficiently drawn out, next, the return pressure step (STEP 3) is performed. In this process, the washing liquid saturation state is regenerated again by showering and steam, and the oil and fat drawn out by being supplied to the surface of the cleaning product is cleaned (replaced). Then, the pressure in the cleaning chamber 2 is restored by resupplying the steam and the inert gas. As the pressure in the cleaning chamber 2 increases, the cleaning liquid is again drawn into the details of the cleaning product and further dilutes the oil and fat in the closed portion.

この工程を任意の回数(ループ回数N、Nは二以上の自然数)繰り返す事により洗浄品細部に付着した油脂は洗浄液に置換し洗浄が完了する。次に、乾燥の工程(STEP4)において、洗浄室2の底部に滞留した洗浄液を汚液槽5に移した後、洗浄室2内を高真空にする。この操作により低沸点の洗浄液は沸騰蒸発し被処理物に付着した洗浄液は蒸発し乾燥する。蒸発した洗浄液は洗浄室2と真空ポンプ9間に設置されたコンデンサ8で再液化し、洗浄液槽3に回収する。 By repeating this process an arbitrary number of times (the number of loops N, N is a natural number of 2 or more), the oils and fats adhering to the details of the cleaning product are replaced with the cleaning liquid, and the cleaning is completed. Next, in the drying step (STEP 4), after the cleaning liquid staying at the bottom of the cleaning chamber 2 is transferred to the septic tank 5, the inside of the cleaning chamber 2 is evacuated. By this operation, the low boiling point cleaning liquid evaporates and the cleaning liquid adhering to the workpiece is evaporated and dried. The evaporated cleaning liquid is liquefied again by the condenser 8 installed between the cleaning chamber 2 and the vacuum pump 9 and collected in the cleaning liquid tank 3.

減圧の工程(STEP2)と復圧の工程(STEP3)を繰り返すループ回数Nは、機械部品の形状、付着した油脂等の条件を考慮して予め決めておくのが良い。本実施例によれば、減圧の工程(STEP2)と復圧の工程(STEP3)を繰り返す度に、油脂は圧力差で閉塞部から引き出され、被処理物の外部表面において表面に滞留した洗浄液と置換され、その後復圧により洗浄液は被処理物の閉塞部内に引き込まれ閉塞部内部の油脂を希釈してゆくことができる。 The number N of loops for repeating the decompression step (STEP 2) and the return pressure step (STEP 3) is preferably determined in advance in consideration of conditions such as the shape of machine parts and attached oil and fat. According to the present embodiment, each time the decompression step (STEP 2) and the decompression step (STEP 3) are repeated, the oil and fat is drawn out from the blockage portion due to the pressure difference, and the cleaning liquid staying on the surface on the outer surface of the workpiece After the replacement, the cleaning liquid is drawn into the closed portion of the object to be processed by the return pressure, and the oil and fat inside the closed portion can be diluted.

上記実施例において、復圧の工程(STEP3)で使用する洗浄液は、洗浄室2の底部に溜まる場合、復圧の工程(STEP3)の最中に、被処理物が浸漬しない程度当該所定レベルを超え無いように開閉弁V6を開き汚液槽5に移す。又は、特許文献3に示したように、開閉弁V9を閉として洗浄液槽3からの洗浄液の供給を停止し、開閉弁V7を開とすることにより洗浄室2の低部に滞留した洗浄液をノズル7から噴射するエンドレスシャワー状態にしても良い。 In the above embodiment, when the cleaning liquid used in the return pressure step (STEP 3) accumulates at the bottom of the cleaning chamber 2, the predetermined level is set so that the workpiece is not immersed during the return pressure step (STEP 3). The on-off valve V6 is opened so as not to exceed, and is transferred to the septic tank 5. Alternatively, as shown in Patent Document 3, the on-off valve V9 is closed, the supply of the cleaning liquid from the cleaning liquid tank 3 is stopped, and the on-off valve V7 is opened to remove the cleaning liquid retained in the lower part of the cleaning chamber 2 You may be in the endless shower state which injects from 7.

上記実施例において、復圧の工程(STEP3)では、洗浄液による洗浄と、洗浄液(の蒸気)及び不活性ガスによる復圧とを並行して実施したが、洗浄液をノズル7からシャワー噴射し、洗浄液の蒸気で満しつつ気化しなかった洗浄液で洗浄を行い、その後ノズル7からの洗浄液の噴射を停止して、開閉弁V5を開放して不活性ガスにより洗浄室2の圧力を高めても良い。 In the above embodiment, in the return pressure step (STEP 3), the cleaning with the cleaning liquid and the return pressure with the cleaning liquid (vapour) and inert gas were performed in parallel. It is possible to perform cleaning with a cleaning liquid that has been filled with steam but has not been vaporized, and then stop the injection of the cleaning liquid from the nozzle 7, open the on-off valve V5, and increase the pressure in the cleaning chamber 2 with an inert gas. .

1 真空脱脂洗浄装置
2 洗浄室
3 洗浄液槽
4 再生装置
5 汚液槽
6 蒸気発生器
7 ノズル
8 コンデンサ
9 真空ポンプ
10 コントローラ
A1 真空度計
bn ボルト孔
R1〜3 液面検知器
H1、2 加熱管
N 不活性ガス
V1〜9 開閉弁
W 被処理物
w1 基体
w2 ボルト
DESCRIPTION OF SYMBOLS 1 Vacuum degreasing cleaning apparatus 2 Cleaning chamber 3 Cleaning liquid tank 4 Regenerating apparatus 5 Soil tank 6 Steam generator 7 Nozzle 8 Capacitor 9 Vacuum pump 10 Controller A1 Vacuum gauge bn Bolt hole R1-3 Liquid level detector H1, Heating pipe N Inert gas V1-9 On-off valve W Processed object w1 Base w2 Bolt

本発明の洗浄方法は、気密、密閉構造を持つ洗浄室の室内を所定の真空状態に減圧し、かつ当該真空度において洗浄液が沸騰する温度以上に室内温度を加熱する減圧工程と、
予め洗浄液を前記真空度において沸騰する温度の直下の温度に加熱する工程と、
前記加熱された洗浄液を減圧工程が終了した洗浄室の室内に噴出して瞬時に沸騰させ、
洗浄液及び不活性ガスにより洗浄室の室内圧力を高める復圧工程と、
前記減圧工程及び復圧工程を二回以上繰り返すことを特徴する

The cleaning method of the present invention includes a pressure reducing step for reducing the pressure in a cleaning chamber having an airtight and sealed structure to a predetermined vacuum state, and heating the chamber temperature to a temperature equal to or higher than a temperature at which the cleaning liquid boils at the degree of vacuum.
Preliminarily heating the cleaning liquid to a temperature immediately below the boiling temperature at the degree of vacuum;
The heated cleaning liquid is instantaneously boiled by being spouted into the cleaning chamber where the depressurization step is completed,
A return pressure step for increasing the pressure in the cleaning chamber with the cleaning liquid and the inert gas;
The depressurization step and the decompression step are repeated twice or more .

Claims (4)

気密、密閉構造を持つ洗浄室の室内を所定の真空状態に減圧する減圧工程と、
洗浄液のシャワー及び不活性ガスにより洗浄室の室内圧力を高める復圧工程と、
前記減圧工程及び復圧工程を順に二回以上繰り返すことを特徴する洗浄方法。
A depressurization step for depressurizing the interior of the cleaning chamber having an airtight and sealed structure to a predetermined vacuum state;
A return pressure step of increasing the pressure in the cleaning chamber with a shower of cleaning liquid and an inert gas;
A cleaning method, wherein the pressure reduction step and the pressure reduction step are repeated twice or more in order.
気密、密閉構造を持つ洗浄室の室内を所定の真空状態に減圧し、かつ当該真空度において洗浄液が沸騰する温度以上に室内温度を加熱する減圧工程と、
予め洗浄液を前記真空度において沸騰する温度の直下の温度に加熱する工程と、
前記加熱された洗浄液を減圧工程が終了した洗浄室の室内に噴出して瞬時に沸騰させ、
洗浄液及び不活性ガスにより洗浄室の室内圧力を高める復圧工程と、
前記減圧工程及び復圧工程を二回以上繰り返すことを特徴する洗浄方法。
A depressurization step of reducing the pressure in the cleaning chamber having an airtight and sealed structure to a predetermined vacuum state and heating the chamber temperature to a temperature equal to or higher than a temperature at which the cleaning liquid boils at the degree of vacuum.
Preliminarily heating the cleaning liquid to a temperature immediately below the boiling temperature at the degree of vacuum;
The heated cleaning liquid is instantaneously boiled by being spouted into the cleaning chamber where the depressurization step is completed,
A return pressure step for increasing the pressure in the cleaning chamber with the cleaning liquid and the inert gas;
A cleaning method, wherein the decompression step and the decompression step are repeated twice or more.
請求項1又は2の洗浄方法において、前記洗浄液は軽質炭化水素系洗浄液であり、被処理物に付着した重質油を洗浄するものであることを特徴とする洗浄方法。 3. The cleaning method according to claim 1, wherein the cleaning liquid is a light hydrocarbon-based cleaning liquid, and is for cleaning heavy oil adhering to an object to be processed. 気密、密閉構造を持ち、室内を加熱可能な洗浄室と、
洗浄液を加温して保有する洗浄液槽と、
前記洗浄室の室内に前記加温された洗浄液を噴射するノズルと、
前記洗浄室の室内を真空状態にする真空ポンプと、
不活性ガスを前記洗浄室に送出する開閉弁と、
コントローラとを有し、
前記コントローラは、
前記洗浄室を前記真空ポンプにより所定の真空状態に減圧し、かつ当該真空度において洗浄液が沸騰する温度以上に室内温度を加熱するよう洗浄室を制御する減圧工程と
洗浄液を前記真空度において予め沸騰する温度の直下の温度に加熱するよう前記洗浄液槽を制御する工程と、
前記ノズルを制御して加熱された洗浄液を減圧工程が終了した洗浄室の室内に噴出させ、洗浄液及び不活性ガスにより洗浄室の室内圧力を高める復圧工程と、
前記減圧工程及び復圧工程を二回以上繰り返すことを特徴とする真空脱脂洗浄装置。

A cleaning room that has an airtight and sealed structure and can be heated.
A cleaning solution tank that holds the cleaning solution by heating;
A nozzle for injecting the heated cleaning liquid into the cleaning chamber;
A vacuum pump that evacuates the cleaning chamber;
An on-off valve for delivering an inert gas to the cleaning chamber;
A controller,
The controller is
The cleaning chamber is depressurized to a predetermined vacuum state by the vacuum pump, and the depressurization step for controlling the cleaning chamber so as to heat the room temperature to a temperature higher than the temperature at which the cleaning liquid boils at the vacuum degree and the cleaning liquid boil at the vacuum degree in advance. Controlling the cleaning liquid tank to heat to a temperature immediately below the temperature to be
A pressure-reducing step in which the cleaning liquid heated by controlling the nozzle is ejected into the chamber of the cleaning chamber after the depressurization step, and the pressure in the cleaning chamber is increased by the cleaning liquid and the inert gas;
A vacuum degreasing and cleaning apparatus, wherein the depressurization step and the decompression step are repeated twice or more.

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JPH1060676A (en) * 1996-08-19 1998-03-03 Act Five Kk Cleaner and cleaning method
JP2000237703A (en) * 1999-02-18 2000-09-05 Akuatekku:Kk Vacuum washing/drying method and device
US20030121171A1 (en) * 2001-12-27 2003-07-03 Cheng-Ming Chou Method and apparatus for performing multiple cleaning and vacuum drying operations in enclosed vessels
JP2014042899A (en) * 2012-08-28 2014-03-13 Miura Co Ltd Cleaning apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0098811A1 (en) * 1982-07-02 1984-01-18 S.R.L. Sirea Method of decontaminating electro-mechanic apparatus from polychlorobiphenyl
JPH06220672A (en) * 1992-10-30 1994-08-09 Nippon Heizu:Kk Vacuum degreasing and cleaning method and vacuum cleaning machine
JPH1060676A (en) * 1996-08-19 1998-03-03 Act Five Kk Cleaner and cleaning method
JP2000237703A (en) * 1999-02-18 2000-09-05 Akuatekku:Kk Vacuum washing/drying method and device
US20030121171A1 (en) * 2001-12-27 2003-07-03 Cheng-Ming Chou Method and apparatus for performing multiple cleaning and vacuum drying operations in enclosed vessels
JP2014042899A (en) * 2012-08-28 2014-03-13 Miura Co Ltd Cleaning apparatus

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