JP5381927B2 - Washing and drying method and washing and drying apparatus - Google Patents

Description

  The present invention relates to a cleaning and drying method for removing dirt and drying in the same process by spraying a cleaning liquid exhibiting oleophobic property against dirt in a pressurized overheated liquid having an atmospheric pressure boiling point or higher to an article to be cleaned. And a washing and drying apparatus.

  As described in Patent Document 1 which is a non-known document in the prior application, the inventor has invented the following energy-saving small continuous cleaning apparatus. In the apparatus of this prior application, a liquid whose boiling point changes remarkably at atmospheric pressure and under pressure, and a liquid that exhibits oleophobicity to fats and oils, such as water, hydrous alcohol, hydrofluorocarbon (HFC), hydrofluoro A liquid such as ether (HFE) having a boiling point of atmospheric pressure (saturation temperature) of 40 ° C. or higher is pressurized and injected into a cleaning / drying chamber surrounding the component to be cleaned.

  Also, the sprayed pressurized overheated cleaning liquid is vaporized and expanded instantaneously or on the surface of the component to be cleaned, and oils and foreign substances on the surface of the component to be cleaned are removed by the action of the flow velocity and thermal energy due to the expansion. Since the molecules of the jetted cleaning liquid are oleophobic with respect to fats and oils, the collision force accompanying vaporization and expansion acts as a repulsive force (repulsive force), and the effect of wiping and removing fats and oils is exhibited.

  Further, the wiping and removing effect is enhanced by increasing the volume under the atmospheric pressure of the vapor of the cleaning liquid sprayed into the cleaning / drying chamber rather than the void volume formed in the cleaning / drying chamber.

  FIG. 4 is a schematic configuration diagram showing a configuration described in Patent Document 1 (a cleaning / drying apparatus as a comparative example for explaining the effects of the present invention). In FIG. 4, the parts to be cleaned 1 to which the oils and fats are attached are sent to the position of the cleaning and drying process by the conveyor 2. The cleaning / drying apparatus is provided with a liquid storage tank 5 for storing the cleaning liquid 4.

  The liquid storage tank 5 is a liquid whose boiling point changes remarkably between atmospheric pressure and pressurization, and is oleophobic for oils and fats, such as water, hydrous alcohol, hydrofluorocarbon (HFC), hydrofluoro A fluorine-based compound such as ether (HFE) that stores a liquid having a boiling point of atmospheric pressure, that is, a standard boiling point (saturation temperature) of 40 ° C. or higher.

  The cleaning liquid 4 is pumped from the liquid storage tank 5 to the spray nozzle 3 through the cleaning liquid pipe 7 by the pump 6. A heat exchanger 8 for heating is provided in the middle of pressure feeding, and the cleaning liquid is heated to a superheated liquid having an atmospheric pressure boiling point (saturation temperature) or higher, preferably to a state of a superheated liquid near the boiling point at the pressure.

  By injecting the pressurized overheated liquid from the injection nozzle 3 onto the part to be cleaned 1 under atmospheric pressure, cleaning and drying are performed in the same cleaning and drying process. In the cleaning / drying process, a cleaning / drying chamber 10 surrounding the part to be cleaned 1 is provided, and a steam recovery port 13 for discharging and recovering the steam of the cleaning liquid 4 is provided downstream of the sprayed cleaning liquid. It is designed so that the volume under the atmospheric pressure of the vapor of the cleaning liquid 4 injected into the cleaning / drying chamber is larger than the gap volume formed from the cleaning liquid injection hole to the vapor recovery port 13.

  The cleaning liquid 4 sprayed from the spray nozzle 3 and the dirt adhering to the part to be cleaned 1 are collected in the liquid storage tank 5. When the cleaning and drying process is repeated continuously, the dirt brought in by the part to be cleaned 1 accumulates in the liquid storage tank 5.

  Since the fats and oils accumulated in the liquid storage tank 5 are not dissolved in the cleaning liquid 4, if the fats and oils have a specific gravity smaller than that of the cleaning liquid, they float in the liquid storage tank 5, and the upper part of the fats and oils and the lower part of the cleaning liquid 4 and the liquid storage tank 5 also functions as an oil separation tank. The upper layer oils and fats are discharged from a drain discharge pipe 24 as a dirt discharge means to remove the introduced dirt.

Japanese Patent Application No. 2010-094897

  However, in the prior application (comparative example) consisting of the above-mentioned Patent Document 1, in the cleaning liquid 4 whose atmospheric pressure boiling point (saturation temperature) such as water or hydrous alcohol is higher than that of the fluorine-based compound, the vapor of the cleaning liquid 4 is condensed on the surface of the part to be cleaned. In the location where the condensate is formed, the effect of removing the oil and fat is reduced, and the cleaning liquid 4 remains, that is, the so-called poor drying is likely to occur.

  In addition, a fluorine-based compound having a lower atmospheric pressure boiling point (saturation temperature) than water has a high vapor pressure and is less likely to form a condensate than water. Therefore, even if the condensate is formed, the vapor of the cleaning liquid 4 must be reliably recovered because it easily evaporates under atmospheric pressure and does not lead to poor drying, but leads to the release of warming substances to the atmospheric environment. .

  As described above, in the above comparative example, not all the vapor of the cleaning liquid 4 injected from the injection nozzle is collected in the vapor recovery port 13, and the vapor of the cleaning liquid 4 is easily condensed. The effect decreases and the cleaning liquid 4 remains, that is, a so-called dry failure is likely to occur. Or the problem of discharge | release of the warming substance (fluorine type compound) to atmospheric environment generate | occur | produces.

  The present invention has been made paying attention to such problems existing in the prior art, and reuses a cleaning liquid in cleaning an article that removes dirt such as oil and fat adhering to the article to be cleaned. An object of the present invention is to provide a cleaning and drying method and a cleaning and drying apparatus that do not deteriorate the effect of removing dirt such as fats and oils and foreign matters, suppress the remaining of the cleaning liquid, or do not lead to the release of a warming substance to the atmospheric environment. .

In order to achieve the above object, the present invention employs the following technical means. That is, in the first aspect of the present invention, a pressurized overheating step in which the cleaning liquid is a pressurized overheated liquid having a boiling point or higher under atmospheric pressure, and the pressurized overheated liquid is contained in a cleaning / drying container containing the article to be cleaned. Of the washing and drying container using a jetting process in which the pressurized overheated liquid is vaporized, a steam discharge container having a steam recovery port adjacent to the cleaning and drying container, and a suction means having a suction port communicating with the steam recovery port . A suction process for sucking the vapor of the pressurized superheated liquid sprayed into the washing and drying chamber into the suction port, and a reuse process for reusing the vapor of the pressurized superheated liquid sucked into the suction port as the pressurized superheated liquid In the suction process, the circulating fluid containing the cleaning liquid is circulated inside the circulating fluid piping, and suction means for sucking the vapor of the pressurized superheated liquid from the suction port is used. Steam of pressurized overheated liquid injected into the room The pressurized superheated liquid is injected so that the volume under atmospheric pressure is larger than the remaining volume obtained by subtracting the volume of the article to be cleaned from the container volume of the cleaning / drying container, and is injected into the cleaning / drying chamber in the suction process. In the spraying process, the pressurized overheated liquid injected into the cleaning / drying chamber in the cleaning / drying container is added with the cleaning liquid from the storage tank. In the suction process, the circulating fluid circulating in the circulating fluid pipe is less oily than the cleaning fluid and is incompatible with the cleaning fluid, and there is a difference in specific gravity between the cleaning fluid and the circulating fluid. The liquid of the pressurized superheated liquid that is circulated by returning to the liquid storage tank through the circulating pump through the circulating pump from the liquid storage tank that is separated and stored by the storage pump and stored together with the circulating liquid It is characterized by collecting in the tank.

According to this invention, the cleaning liquid is injected as a pressurized overheating liquid into the cleaning and drying chamber, the suction port of the suction means is guided to the vapor recovery port, and the vapor of the pressurized overheating liquid injected into the cleaning and drying chamber is sucked. Since the vapor of the pressurized superheated liquid sucked from the mouth is reused, the condensed liquid condensed from the vapor of the pressurized superheated liquid is difficult to form on the surface of the article to be cleaned. The effect is not reduced. Further, no condensate remains and no drying failure is caused. In addition, even if a warming substance is used as the cleaning liquid, the vapor of the pressurized overheating liquid is sucked from the suction port and the vapor of the pressurized overheating liquid is reused. It does not lead to the release of chemical substances.
Further, the suction means includes suction means for generating a negative pressure at the suction port when the circulating fluid containing the cleaning liquid circulates inside the piping for the circulating fluid . Therefore, the vapor of the pressurized overheated liquid can be quickly liquefied and recovered as a cleaning liquid. In addition, the volume of the pressurized superheated liquid sprayed into the cleaning / drying chamber under the atmospheric pressure is increased so as to be larger than the remaining volume obtained by subtracting the volume of the article to be cleaned from the container volume of the cleaning / drying container. The overheated liquid is sprayed. Therefore, there is a possibility that the vapor of the pressurized superheated liquid leaks out of the cleaning / drying chamber. It is possible to prevent the vapor of the pressurized overheating liquid from leaking to the outside, and it is possible to reliably reuse the vapor of the pressurized overheating liquid. Next, the circulating fluid circulating in the circulating fluid piping is circulated by returning from the storage tank storing the cleaning liquid through the circulating pump through the suction means and returning to the storage tank. The steam of the overheated liquid can be recovered as a cleaning liquid in the storage tank, and pumped again from the storage tank as the cleaning liquid for reuse, and suctioned from the suction port of the suction means immediately after cleaning the article to be cleaned Since the circulating fluid containing the vapor of pressurized overheated liquid and dirty oil and the cleaning liquid before being pumped into the cleaning and drying chamber exist in the same storage tank, the storage tank functions as an oil separation tank. The fats and oils removed from the parts to be cleaned can be adsorbed by the circulating fluid and recovered.

The invention according to claim 2 is characterized in that, in the suction step, the circulating liquid circulates while being cooled by the cooling heat exchanger.

  According to the present invention, the circulating liquid is circulated while being cooled by the cooling heat exchanger, thereby efficiently liquefying and recovering the vapor of the pressurized superheated liquid injected into the cleaning / drying chamber contained in the circulating liquid. I can do it.

The invention according to claim 3 is characterized in that, in the suction step, the cooling heat exchanger cools the circulating liquid in the liquid storage tank.

  According to this invention, since the cooling heat exchanger cools the circulating liquid in the liquid storage tank, the installation of the cooling heat exchanger becomes easy.

In the invention according to claim 4 , the liquid storage tank for storing the cleaning liquid, the cleaning / drying container in which the article to be cleaned is incorporated, and the pressurized overheating liquid which is led out from the liquid storage tank and becomes the boiling point or higher at atmospheric pressure. pressurizing process heating means, injection means for the steam injection and pressurization process heated liquid to be cleaned articles the pressurization process heating liquid washing drying vessel, is disposed adjacent to the cleaning and drying containers washing drying vessel A steam discharge container provided with a steam recovery port that communicates with the inside, and a vapor jetted onto an article to be cleaned in the cleaning / drying container through a suction port connected to the steam discharge container, and as a cleaning liquid in the liquid storage tank e Bei suction means for recovering, suction means includes an ejector having a suction port, a circulating liquid containing the recovered cleaning solution consists of a circulation pump for circulating through the ejector, circulating fluid, the specific gravity than the washing liquid Small oily and not compatible with cleaning liquid The pressurized overheating means for deriving the cleaning liquid from the liquid tank and making it a pressurized overheated liquid that has a boiling point or higher under atmospheric pressure includes a pressure feed pump for pumping the cleaning liquid in the liquid storage tank, and a heat exchanger for heating the cleaning liquid. The circulation pump circulates the upper layer circulating liquid in the liquid storage tank, and the pressure feed pump pumps the lower layer cleaning liquid in the liquid storage tank .

According to this invention, the vacuum overheated liquid sprayed to the article to be cleaned is sucked through the suction port connected to the steam discharge container, and the suction means for collecting the steam as the cleaning liquid in the liquid storage tank is provided. The surface of the parts to be cleaned is difficult to condense and the condensate is difficult to form, so the effect of removing dirty oil will not be reduced, and the cleaning liquid will not remain as a condensate, causing poor drying. Absent. Moreover, even if a warming substance is used as the cleaning liquid, the vapor of the pressurized overheating liquid is sucked from the suction port and the vapor of the pressurized overheating liquid is reused as the cleaning liquid. Does not lead to the release of greenhouse gases. Further, the suction means includes an ejector having a suction port and a circulation pump that circulates the circulating fluid containing the recovered cleaning liquid through the ejector. Since it can be mixed with the circulating liquid, the vapor of the pressurized overheated liquid can be quickly liquefied and recovered as a cleaning liquid or a circulating liquid. Furthermore, the circulation pump circulates the upper layer circulating fluid in the liquid storage tank, and the pressure feed pump pumps the lower layer cleaning liquid in the liquid storage tank, so that the upper layer circulating liquid in the liquid storage tank passes through the ejector. In addition to recovering the cleaning liquid from the suction port, it is possible to supply the under-oil-separated cleaning liquid with a small amount of dirt as a pressurized overheating liquid to the injection means, and the dirt of oils and fats removed from the parts to be cleaned is It can be recovered by adsorption to the circulating fluid.

The invention according to claim 5 is characterized in that a cooling heat exchanger for cooling the upper layer circulating liquid in the liquid storage tank is provided in the liquid storage tank.

  According to the present invention, the circulating liquid is circulated while being cooled by the cooling heat exchanger, whereby the vapor of the pressurized overheated liquid injected into the cleaning / drying chamber contained in the circulating liquid can be efficiently liquefied. .

1 is a schematic configuration diagram of a cleaning / drying apparatus constituting a first embodiment of the present invention. It is a schematic block diagram explaining the relationship between the volume of the article to be cleaned, the void volume in the cleaning / drying chamber around the cleaning article, and the volume of the cleaning / drying container in the embodiment. It is a schematic block diagram of the washing-drying apparatus which comprises 2nd Embodiment of this invention. It is a schematic block diagram which shows the washing | cleaning-drying apparatus of patent document 1.

  A plurality of modes for carrying out the present invention will be described below with reference to the drawings. In each embodiment, parts corresponding to the matters described in the preceding embodiment may be denoted by the same reference numerals, and redundant description may be omitted. When only a part of the configuration is described in each mode, the other modes described above can be applied to the other parts of the configuration.

  Not only combinations of parts that clearly show that combinations can be specifically made in each embodiment, but also combinations of the embodiments even if they are not clearly indicated unless there is a problem with the combination. It is also possible.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described in detail with reference to FIGS. 1 and 2. FIG. 1 is a schematic configuration diagram of a cleaning / drying apparatus constituting the first embodiment of the present invention. In FIG. 1, a part to be cleaned 1 to which oils and fats are attached is sent to the position of a cleaning / drying process by a conveying conveyor 2 schematically shown. At the position of the cleaning / drying step, a spray nozzle 3 and a liquid storage tank 5 for storing the cleaning liquid 4 are provided.

  The liquid storage tank 5 is a liquid whose boiling point changes remarkably between atmospheric pressure and pressurized pressure and is oleophobic for oils and fats, such as water, hydrous alcohol, hydrofluorocarbon (HFC), hydro A liquid such as fluoroether (HFE) having a boiling point (saturation temperature) of atmospheric pressure of 40 ° C. or higher is stored as the cleaning liquid 4.

  The boiling point is a temperature at which the pressure below the critical point of a substance and the saturated vapor pressure of the liquid are equal, and is also referred to as a boiling point. For example, when water is heated under a constant pressure, the temperature rises, and when the temperature reaches a certain temperature corresponding to the pressure, the temperature rise stops and boiling begins.

  This temperature is called “saturation temperature” corresponding to the pressure, and the pressure at that time is called “saturation pressure” with respect to that temperature. Water at the saturation temperature is called “saturated water (boiling water)”, and the vapor generated by evaporation is called “saturated steam”. This saturated steam changes its state to condensed water by heat radiation and utilization of heat. This condensed water is also called “condensate” or “drain”.

  Further, hydrofluorocarbon (HFC) is a kind of chlorofluorocarbon gas whose use amount is rapidly increasing as an alternative chlorofluorocarbon because it does not contain chlorine and does not destroy the ozone layer. It does not destroy the ozone layer, but has a very strong greenhouse effect.

  Hydrofluoroether (HFE) has an appropriate solubility and is excellent in compatibility with various materials, and is widely used for cleaning, solvent, heat medium and the like. Since the structure does not contain chlorine atoms, the ozone depletion coefficient is 0, and there is no flash point and it is safe.

  Next, the cleaning liquid 4 is pumped from the liquid storage tank 5 through the cleaning liquid pipe 7 to the spray nozzle 3 as the spraying means by the pressure feed pump 6 as the pressurizing means. A heat exchanger 8 for heating as a heating means is provided in the middle of pressure feeding, and the cleaning liquid 4 is a superheated liquid having a boiling point (saturation temperature) or higher at atmospheric pressure, preferably overheating near the boiling point at that pressure. Heated to liquid state. By injecting the pressurized overheated liquid from the injection nozzle 3 onto the part to be cleaned 1 under atmospheric pressure, cleaning and drying are performed in the same cleaning and drying process.

  In the cleaning / drying process, a cleaning / drying container 11 having a cleaning / drying chamber 10 surrounding the part to be cleaned 1 is provided. A steam discharge container 12 is provided downstream of the cleaning liquid 4 sprayed from the spray nozzle 3 and adjacent to the cleaning and drying container 11.

  The steam discharge container 12 is provided with a steam recovery port 13 for discharging the steam of the cleaning liquid 4 from the cleaning / drying chamber 10 and recovering it in the liquid storage tank 5. The volume of the vapor of the cleaning liquid 4 sprayed into the cleaning / drying chamber 10 is designed to be larger than the gap volume formed from the cleaning liquid spray hole of the spray nozzle 3 to the steam recovery port 13. .

  FIG. 2 is a schematic configuration diagram illustrating the relationship between the volume Qw of the article 1 to be cleaned, the void volume Qg in the cleaning / drying chamber 10 around the article 1 to be cleaned, and the volume Qc of the cleaning / drying container 11. In FIG. 2, the cleaning / drying container 11 has a total container volume Qc (Qc = Qg + Qw) of the volume Qw of the article 1 to be cleaned and the void volume (remaining volume) Qg around the article 1 to be cleaned.

  The pressurized overheated cleaning liquid 4 is sprayed in such an amount that the volume of the steam of the cleaning liquid 4 sprayed into the cleaning / drying chamber 10 is larger than the void volume (remaining volume) Qg. And the vapor | steam of the washing | cleaning liquid 4 is attracted | sucked from the vapor | steam collection | recovery port 13 of FIG. 1 with the quantity more than the quantity of the vapor | steam of the washing | cleaning liquid 4 injected in the washing | cleaning drying chamber 10. FIG.

  Thus, the pressurized overheated cleaning liquid 4 is injected so that the volume of the cleaning liquid 4 sprayed into the cleaning / drying chamber 10 under the atmospheric pressure is larger than the void volume (remaining volume) Qg. Although the cleaning effect is enhanced, there is a possibility that the vapor of the cleaning liquid 4 leaks out of the cleaning / drying chamber 10, but the vapor of the cleaning liquid 4 is more than the amount of the cleaning liquid 4 injected into the cleaning / drying chamber 10. Can be prevented from leaking out of the cleaning / drying chamber 10, and the steam of the cleaning liquid 4 can be reliably reused.

  In the liquid storage tank 5, an oily circulating liquid 15 that is incompatible with the cleaning liquid 4 and has a specific gravity smaller than that of the cleaning liquid 4 is stored. In the liquid storage tank 5, a layer of the circulating liquid 15 is formed in the upper layer portion, and a layer of the cleaning liquid 4 is formed in the lower layer portion.

  A cleaning liquid pipe 16 communicates with the lower layer of the cleaning liquid 4, and a circulating liquid consisting of a circulating liquid pipe 17 and a circulation pump 18 is provided in the upper layer of the circulating liquid 15 separately from the cleaning liquid circulation path. A path for circulating 15 is provided.

  An ejector 20 is provided in the path for circulating the circulating fluid 15. The suction port 21 of the ejector 20 communicates with the steam recovery port 13 in the steam discharge container 12. By circulating the circulating liquid 15 in the liquid storage tank 5 by the circulation pump 18, the vapor of the cleaning liquid 4 injected into the cleaning / drying chamber 10 from the vapor recovery port 13 to the ejector 20 is sucked.

  In FIG. 1, the circulation pump 18 is disposed downstream of the ejector 20. However, the circulation pump 18 may be disposed upstream of the ejector 20 so that the circulating fluid 15 is pumped to the ejector 20.

  By sucking the vapor of the cleaning liquid 4 from the vapor recovery port 13, the adhering dirt such as the vapor of the cleaning liquid 4 injected into the cleaning / drying chamber 10, the condensate, and the oil / fat removed from the parts 1 to be cleaned is removed. The air is mixed with the circulating fluid into the circulating fluid pipe 17 by the ejector 20 together with the air in the fluid 10 and is transported to the layer of the circulating fluid 15 in the liquid storage tank 5.

  The vapor of the cleaning liquid 4 is collected in the storage tank 5 as the cleaning liquid 4 by being mixed with the circulating liquid 15. Since the circulating liquid 15 and the cleaning liquid 4 are not compatible with each other, the cleaning liquid 4 is separated and collected in the lower layer of the liquid storage tank 5 due to the specific gravity difference between the circulating liquid 15 and the cleaning liquid 4 in the liquid storage tank 5. .

  The air sucked together with the cleaning liquid 4 from the vapor recovery port 13 rises in the layer of the circulating liquid 15 in the liquid storage tank 5 and is released into the atmosphere from the air vent pipe 23. Dirt such as fats and oils removed from the part to be cleaned 1 is dissolved in the oil-based circulating liquid 15, and unnecessary portions are periodically discharged from the drain discharge pipe 24 together with the circulating liquid 15.

  The operational effects of the first embodiment will be described below. A cylindrical part to be cleaned 1 (diameter 6 mm, height length 8 mm) is arranged in a cylindrical cleaning / drying chamber 10 such that the void volume (remaining volume) Qg in FIG. 2 is 2 cubic centimeters.

About 100 mg / dm ² of a water-insoluble cutting grinding oil (for example, a water-insoluble oil Yusilon cut arbus KZ216 from Yushiro Chemical Industry Co., Ltd.) is applied to the parts to be cleaned in advance. Further, as the cleaning liquid 4, water having a boiling point of 100 ° C. under atmospheric pressure is used as a pressurized superheated liquid of 0.3 MPa and 130 ° C. using a pressure pump 6 and a heat exchanger 8 for heating as heating means. State.

  Saturated hydrocarbon (dodecane) is used as the circulating liquid 15 in the liquid storage tank 5, while sucking the vapor of the cleaning liquid 4 injected at 0.2 liter / second from the vapor recovery port 13 from the suction port 21 of the ejector 20. Then, water in a state of a pressurized overheating liquid of 0.3 MPa and 130 ° C. is sprayed into the cleaning / drying chamber 10 for 5 seconds.

As a result, the amount of oil adhering to the part 1 to be cleaned after cleaning can be removed to 10 mg / dm ² or less. Further, when water is used as the cleaning liquid 4, condensed water is likely to be formed on the surface of the part to be cleaned 1, but the residual condensed water after cleaning is confirmed by the suction action by the ejector 20 from the steam recovery port 13. There wasn't.

  As the circulating liquid 15, hydrophobic hydrocarbons having 5 or more carbon atoms that are incompatible with the cleaning liquid 4 and have a specific gravity smaller than that of the cleaning liquid 4 are desirable. By using hydrocarbons, the dirt of fats and oils removed from the parts to be cleaned is adsorbed and collected by the circulating fluid.

  As described above, in the first embodiment, the cleaning liquid 4 is sprayed into the cleaning / drying chamber 10 in the cleaning / drying container 11 in which the article to be cleaned 1 is housed as a pressurized overheating liquid having an atmospheric pressure boiling point or higher. A steam discharge container 12 is provided adjacent to the cleaning / drying container 11, and the steam discharge container 12 includes a steam recovery port 13 communicating with the cleaning / drying chamber 10.

  Then, the suction port 21 of the ejector 20 through which the cleaning liquid 4 circulates is guided to the steam recovery port 13, and the steam of the cleaning liquid 4 injected into the cleaning / drying chamber 10 is sucked from the steam recovery port 13 of the steam discharge container 12, The sucked cleaning liquid 4 is reused.

  According to this, since the vapor | steam of the washing | cleaning liquid 4 is hard to condense on the surface of the to-be-cleaned component 1, and it is hard to form a condensed liquid, the removal effect of fats and oils does not fall. Further, the cleaning liquid 4 does not remain and does not cause drying failure.

  Further, even if a warming substance is used as the cleaning liquid 4, the vapor of the cleaning liquid 4 is sucked from the vapor recovery port 13, and the vapor of the sucked cleaning liquid 4 is returned to the storage tank 5 for reuse. Does not lead to the release of greenhouse substances into the environment.

(Second Embodiment)
Next, a second embodiment of the present invention will be described. In the following embodiments, the same components as those in the first embodiment described above are denoted by the same reference numerals, description thereof will be omitted, and different configurations and features will be described. FIG. 3 is a schematic configuration diagram of a cleaning / drying apparatus constituting the second embodiment of the present invention. In FIG. 3, reference numeral 25 denotes a cooling heat exchanger for cooling the circulating liquid 15 in the liquid storage tank 5.

  In this manner, the circulating pump 15 is driven and circulated in the circulating fluid piping 17 in a state where at least the circulating fluid 15 is cooled to room temperature or lower, preferably 10 ° C. or lower in the cooling heat exchanger 25. The cleaning liquid 4 sucked from the vapor recovery port 13 can be efficiently liquefied and recovered, and the cleaning liquid 4 can be efficiently separated in the liquid storage tank 5. The cooling heat exchanger 25 may be attached in the middle of the circulating fluid pipe 17 to cool the circulating fluid 15.

DESCRIPTION OF SYMBOLS 1 Parts to be cleaned 2 Conveyor 3 Jet nozzle 4 Cleaning liquid 5 Storage tank 6 Pressure feed pump 8 Heat exchanger for heating 10 Washing drying chamber 11 Washing drying container 12 Steam discharge container 13 Steam recovery port 15 Circulating liquid 16 Cleaning liquid piping 17 Circulation Liquid pipe 18 Circulating pump 20 Ejector 21 Suction port 23 Air vent pipe 24 Drain discharge pipe 25 Cooling heat exchanger Qc Volume of the washing and drying container Qg Void volume that becomes the remaining volume in the washing and drying chamber around the article to be washed Qw Covered Cleaning article volume

Claims (5)

A pressurized overheating step in which the cleaning liquid is at a boiling point or higher under atmospheric pressure,
An injection step of injecting the pressurized overheated liquid into a cleaning / drying container containing the article to be cleaned, and using the pressurized overheated liquid as a vapor;
The pressurization sprayed into the cleaning / drying chamber of the cleaning / drying container using a steam discharge container having a steam recovery port adjacent to the cleaning / drying container and a suction means having a suction port communicating with the steam recovery port. A suction step of sucking the vapor of the superheated liquid into the suction port; and a reuse step of reusing the vapor of the pressurized overheated liquid sucked into the suction port as the pressurized overheated liquid,
In the suction step, by using a suction means for sucking the vapor of the pressurized overheated liquid from the suction port by circulating the circulating liquid containing the cleaning liquid into the circulation liquid pipe ,
In the spraying step, the volume under atmospheric pressure of the vapor of the pressurized superheated liquid sprayed into the cleaning / drying chamber is less than the remaining volume obtained by subtracting the volume of the article to be cleaned from the container volume of the cleaning / drying container. The pressurized overheated liquid is jetted so that
In the suction step, an amount equal to or greater than the amount of vapor of the pressurized overheated liquid sprayed into the cleaning / drying chamber is sucked from the suction port,
In the injection process, the pressurizing process heating liquid that is injected into the cleaning and drying chamber of the washing and drying container consists those pressurized overheating the washing liquid from the storage tank,
In the suction process, the circulating fluid that circulates the circulating liquid for the pipe, the not compatible with each other and the cleaning liquid a small oil specific gravity than the washing liquid, the specific gravity difference between the circulating liquid and the washing liquid It circulates by passing through the piping for circulating fluid through the circulating pump from the reservoir for storing separately and returning to the reservoir,
A cleaning and drying method, wherein the vapor of the pressurized overheated liquid sucked from the suction port is collected in the liquid storage tank together with the circulating liquid. 2. The cleaning and drying method according to claim 1 , wherein in the suction step, the circulating liquid is circulated while being cooled by a cooling heat exchanger. 3. The cleaning and drying method according to claim 2 , wherein, in the suction step, the cooling heat exchanger cools the circulating liquid in the liquid storage tank. Storage tank for storing cleaning liquid,
A cleaning / drying container containing the article to be cleaned;
Pressurized overheating means for deriving the cleaning liquid from the liquid storage tank and forming a pressurized overheated liquid that has a boiling point or higher under atmospheric pressure,
An injection means for injecting the pressurized overheated liquid onto an article to be cleaned in the cleaning and drying container, and using the pressurized overheated liquid as a vapor;
A steam discharge container provided with a steam recovery port disposed adjacent to the cleaning / drying container and communicating with the cleaning / drying container; and a suction port connected to the steam discharging container; A suction means for sucking the vapor sprayed on the article to be cleaned and collecting it as the cleaning liquid in the liquid storage tank ;
The suction means includes an ejector having the suction port and a circulation pump that circulates the circulating fluid containing the recovered cleaning liquid through the ejector, and the circulating liquid has a specific gravity smaller than that of the cleaning liquid. Oily and incompatible with the cleaning solution,
The pressurized overheating means for deriving the cleaning liquid from the liquid storage tank and making it a pressurized overheating liquid that has a boiling point or higher at atmospheric pressure, heats the cleaning liquid and a pressure feed pump that pumps the cleaning liquid in the liquid storage tank A heat exchanger for heating, wherein the circulation pump circulates the circulating liquid in the upper layer in the liquid storage tank, and the pressure feed pump pressure-feeds the cleaning liquid in the lower layer in the liquid storage tank. Washing and drying equipment. The washing / drying apparatus according to claim 4 , wherein a cooling heat exchanger for cooling the circulating liquid in an upper layer in the liquid storage tank is provided in the liquid storage tank.

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