JP6555154B2 - Member cleaning method and member cleaning apparatus - Google Patents

Description

  The present invention relates to a method for cleaning a member to which oil or fat is adhered, and a member cleaning apparatus.

  2. Description of the Related Art Conventionally, there has been known a cleaning method for a member in which a blast material is sprayed on a member to which oil or fat is attached, and the attached oil or fat is physically removed. For example, Patent Document 1 discloses a member cleaning method in which supercooled liquid droplets having oleophobicity are jetted onto a member together with gas as a blast material.

JP 2013-253272 A

  However, since the member cleaning method described in Patent Document 1 can clean only a relatively narrow region, it is necessary to install a plurality of injection nozzles or scan the injection nozzles in order to perform cleaning over a wide range. . Another possible method is to use carbonate-based material particles having oleophobic properties and relatively high compatibility with water as a blasting material. In this method, the carbonate-based material to be injected generates a used blast waste material in which the carbonate-based material and oil are mixed after washing the member. Moreover, when water is used as a cleaning agent for a carbonate-based material after the member is cleaned with the carbonate-based material, a used cleaning agent in which fats and oils are mixed with the carbonate-based material and water is discharged as a waste liquid. In order to recover a carbonate-based material having a relatively high purity from the waste liquid, it is necessary to repeatedly regenerate and continuously distill the waste liquid, which not only complicates the waste liquid regeneration process but also increases the regeneration cost. .

  An object of the present invention is to provide a cleaning method for a member that can easily clean a member to which oil or fat is adhered.

The present invention is a method for cleaning a member capable of removing oils and fats adhering to the member, and includes a first cleaning step, a second cleaning step, a first cooling step, and a phase separation step.
In the first cleaning step, particles of the cyclic carbonate material are sprayed onto the member.
In the second cleaning step, the member and the vapor of the carbonate cleaning agent are brought into contact with each other after the first cleaning step.
In the first cooling step, the member is cooled after the second cleaning step.
The phase separation step includes a used cleaning agent that is a mixture of the oil and fat removed from the member, the cyclic carbonate-based material injected onto the member in the first cleaning step, and the carbonate cleaning agent that has contacted the member in the second cleaning step. Cool and phase-separate into liquid oil and fat, solid cyclic carbonate material and liquid carbonate detergent.

  In the member cleaning method of the present invention, in the first cleaning step, particles of the cyclic carbonate material are sprayed as a blast material onto the member to which the oil is adhered, and the oil is physically removed. At this time, the particles of the cyclic carbonate material adhering to the member are removed by the vapor of the carbonate cleaning agent in the second cleaning step performed after the first cleaning step. The carbonate detergent adhering to the member in the second cleaning step is removed by vaporizing in the first cooling step. Thus, in the method for cleaning a member of the present invention, it is possible to reliably clean a member to which oil or fat is adhered by a combination of carbonate-based material particles as a blast material and a carbonate cleaner.

  Furthermore, in the method for cleaning a member of the present invention, the used cleaning agent is cooled in the phase separation step. When the used cleaning agent is cooled, the oil and fat contained in the used cleaning agent, the cyclic carbonate-based material, and the difference in the freezing point and specific gravity of the carbonate cleaning agent, the oil and fat in the liquid state from the top side, the solid state The phase separation is performed so that the cyclic carbonate-based material and the carbonate detergent in a liquid state are arranged in this order. In the member cleaning method of the present invention, this phase separation is used to separately collect liquid oil and fat, solid state cyclic carbonate-based material, and liquid state carbonate detergent. Thereby, in the method for cleaning a member of the present invention, the cyclic carbonate material and the carbonate cleaning agent can be easily recovered.

Moreover, this invention is a cleaning apparatus of the member which can remove the fats and oils adhering to a member, Comprising: 1st washing | cleaning part, carbonate supply part, 2nd washing | cleaning part, member cooling part, cleaning agent supply part, cleaning agent A storage part and a cleaning agent cooling part are provided.
The 1st washing | cleaning part can inject the particle | grains of cyclic carbonate type material to a member.
The carbonate supply unit can supply the cyclic carbonate material to the first cleaning unit.
The second cleaning unit can contact the member injected with the cyclic carbonate material and the vapor of the carbonate cleaning agent.
The member cooling unit cools the member that has come into contact with the carbonate detergent vapor.
The cleaning agent supply unit supplies vapor of the carbonate cleaning agent to the second cleaning unit.
The cleaning agent storage unit stores used cleaning agent that is a mixture of the oil and fat removed from the member, the cyclic carbonate-based material injected in the first cleaning unit, and the carbonate cleaning agent in contact with the member in the second cleaning unit. Is possible.
The cleaning agent cooling unit is provided in the cleaning agent storage unit, and can cool the used cleaning agent to a temperature below the freezing point of the cyclic carbonate material.

  In the cleaning apparatus for members according to the present invention, in the first cleaning section, particles of cyclic carbonate-based material are sprayed as a blast material onto the member to which the oils and fats adhere, and the oils and fats are physically removed. At this time, the cyclic carbonate material adhering to the member is removed by the vapor of the carbonate cleaning agent in the second cleaning section. The carbonate cleaning agent adhering to the member in the second cleaning unit is vaporized by cooling the member in the member cooling unit. Thus, in the member cleaning apparatus of the present invention, it is possible to reliably clean a member to which oil or fat is adhered.

  Furthermore, in the cleaning apparatus for members according to the present invention, the used cleaning agent stored in the cleaning agent storage unit is cooled by the cleaning agent cooling unit, so that the oil and fat in the liquid state, the cyclic carbonate-based material in the solid state, and It can be phase separated into a liquid carbonate detergent. Thereby, in the washing | cleaning apparatus of the member of this invention, cyclic carbonate type material and a carbonate cleaning agent can be collect | recovered easily.

It is sectional drawing of the cleaning apparatus of the member by 1st embodiment of this invention. It is II arrow directional view of FIG. It is a flowchart of the washing | cleaning method of the member by 1st embodiment of this invention, Comprising: It is a flowchart of the washing | cleaning process of a member. It is a flowchart of the washing | cleaning method of the member by 1st embodiment of this invention, Comprising: It is a flowchart of the reproduction | regeneration process of a used cleaning agent. It is a schematic diagram explaining the reproduction | regeneration process of the used cleaning agent by 1st embodiment of this invention. It is sectional drawing of the cleaning apparatus of the member by 2nd embodiment of this invention. It is sectional drawing of the cleaning apparatus of the member by 3rd embodiment of this invention. It is a flowchart of the washing | cleaning method of the member by 3rd embodiment of this invention.

  Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
A member cleaning method and a member cleaning apparatus according to a first embodiment of the present invention will be described with reference to FIGS. The cleaning device 1 as the “member cleaning device” according to the present embodiment can remove deposits including oils and fats adhering to the member 5 transported by the transport conveyor 7. Examples of the oil and fat contained in the deposit include machine oil in cutting, grinding, and press molding. Moreover, examples of the deposit excluding fats and oils include cutting waste and grinding waste. In FIG. 1, the upper side of the paper surface is shown as the “top” side, and the lower side of the paper surface is shown as the “ground” side.

  First, the cleaning agent used for cleaning the member 5 in the cleaning apparatus 1 will be described. In the cleaning device 1, ethylene carbonate as a “cyclic carbonate material” and HFE (hydrofluoroether) as a “carbonate cleaning agent” are used for cleaning the member 5.

  Ethylene carbonate is one of cyclic carbonate materials and is a colorless crystal at normal temperature. Since ethylene carbonate has a high boiling point and a large polarity, it is easy to mix with water or an organic solvent.

  Hydrofluoroether is a material that is compatible with ethylene carbonate but not oil or fat. Hydrofluoroether has a boiling point of about 56 degrees and can therefore exist in a liquid state at room temperature.

  Next, the structure of the washing | cleaning apparatus 1 is demonstrated based on FIG. The cleaning apparatus 1 includes a transport conveyor 7, a “first cleaning unit”, a “second cleaning unit”, a “member cooling unit”, a cleaning tank 10 as a “cleaning agent supply unit”, a carbonate supply unit 25, a cleaning agent. A playback unit 30 and the like are provided.

  The cleaning tank 10 is formed in a bottomed cylindrical shape. The cleaning tank 10 has a partition plate 11 formed so as to extend in the vertical direction substantially at the center. The partition plate 11 incorporates a heater (not shown) so as to be maintained at a temperature equal to or higher than the freezing point of ethylene carbonate.

The cleaning tank 10 has an opening 12 on the top side. As shown in FIG. 1, the transfer conveyor 7 is provided so as to enter the inside of the cleaning tank 10 through the opening 12 of the cleaning tank 10, pass through the ground side of the partition plate 11, and exit from the opening 12 to the outside of the cleaning tank 10. Yes.
As shown in FIG. 2, the opening 12 is formed in a rectangular shape. In the present embodiment, the opening 12 is formed such that (L2 / L1) is 2 or more, where the length of the short side is length L1 and the length of the long side is length L2.

  The washing tank 10 has a heater 13 on the ground side inside. The heater 13 generates an amount of heat capable of boiling the hydrofluoroether stored in the cleaning tank 10. Thereby, a boiling layer Lb10 of hydrofluoroether is formed on the ground side inside the cleaning tank 10. Further, a hydrofluoroether vapor layer Lv10 in which the hydrofluoroether vapor evaporated from the boiling layer Lb10 is drifting is formed in the top direction of the boiling layer Lb10.

The cleaning tank 10 has cooling pipes 14 and 15 as “member cooling portions” inside the side walls 101 and 102 facing the partition plate 11. In the cooling pipes 14 and 15, a refrigerant having a temperature not higher than the freezing point of the cyclic carbonate material, desirably about 40 degrees lower than the freezing point flows. Thereby, the cold air layer Lc110 is formed on the cooling pipe 14 side as viewed from the partition plate 11. Further, a cold air layer Lc210 is formed on the cooling pipe 15 side when viewed from the partition plate 11. The cold air layers Lc110 and Lc210 are gas layers having a temperature below the freezing point of the cyclic carbonate material. The cold air layers Lc110 and Lc210 can be liquefied by cooling the vapor of the hydrofluoroether in the vapor layer Lv10 in the celestial direction, thus preventing the vapor of the hydrofluoroether from moving in the celestial direction. It has a function. In FIG. 1, the boundary of the top side of the cold air layers Lc110 and Lc210 is indicated by a dotted line Lc11.
On the ground side of the cooling pipes 14 and 15, flanges 141 and 151 are provided. The eaves 141 and 151 are formed so as to be able to collect liquid that has condensed due to being cooled by the cooling pipes 14 and 15.
In the present embodiment, the cleaning tank 10 is formed such that (L3 / L1) is 1 or more when the distance L3 from the boundary Lv11 between the vapor layer Lv10 and the cold air layer Lc210 to the opening 12 is set.

The cleaning tank 10 has an injection nozzle 16 as a “first cleaning unit”. The injection nozzle 16 is provided on the side wall 101. The injection nozzle 16 is formed so that ethylene carbonate can be atomized and injected.
The cleaning tank 10 has a water separation unit 17. The water separation unit 17 is provided on the side wall 102. The water separation unit 17 includes a separator 171 and a water drain 172. In the separator 171, the water separation unit 17 separates the liquid accumulated in the baskets 141 and 151 into water and a liquid other than water. The water separated in the separator 171 is discharged out of the cleaning apparatus 1 by a water drain 172.

  The carbonate supply unit 25 includes a carbonate storage tank 26, a heater 27, a high-pressure pump 28, a supply pipe 29, and the like.

  The carbonate storage tank 26 is formed so as to store ethylene carbonate in a liquid state. In this embodiment, the carbonate storage tank 26 is charged with liquid ethylene carbonate.

  The heater 27 is provided in the carbonate storage tank 26 and heats the ethylene carbonate in the carbonate storage tank 26 so that the liquid state can be maintained by electric power supplied from a power source (not shown).

The high-pressure pump 28 is connected to the carbonate storage tank 26 and the injection nozzle 16 via a supply pipe 29. The supply pipe 29 can keep the temperature of the ethylene carbonate in the liquid state flowing inside so that the ethylene carbonate can maintain the liquid state. The high-pressure pump 28 can pump a fluid having a relatively high viscosity, and can pump the fluid at a pressure of up to 20 MPa, for example.
The liquid ethylene carbonate pumped by the high-pressure pump 28 is jetted by the jet nozzle 16 onto the cold air layer Lc110. That is, the spray layer Ls10 into which ethylene carbonate is injected is formed in the cold air layer Lc110 as shown in FIG.

  The cleaning agent regeneration unit 30 includes a cleaning agent processing tank 31 as a “cleaning agent storage unit”, a cooling unit 32 as a “cleaning agent cooling unit”, a heater 33 as a “cleaning agent heating unit”, a transfer pipe 34, and a recovery pipe. 35, a reflux pipe 36, and the like.

The cleaning agent treatment tank 31 stores used cleaning agent transferred from the boiling layer Lb10 by opening and closing a transfer valve 301 provided in the transfer pipe 34. Here, the used cleaning agent refers to a mixture of oil and fat removed from the member 5, ethylene carbonate sprayed from the spray nozzle 16, and hydrofluoroether in contact with the member 5.
The transfer pipe 34 has a filter 302 that removes solids contained in the used cleaning agent.

The cooling unit 32 is provided so as to surround the cleaning agent treatment tank 31. The cooling unit 32 can cool the cleaning agent treatment tank 31.
The heater 33 is provided in the cleaning agent treatment tank 31. The heater 33 can heat the cleaning agent treatment tank 31.

The recovery pipe 35 is provided on the ground side of the cleaning agent processing tank 31. The recovery pipe 35 can discharge the ground side liquid in the cleaning agent processing tank 31 to the outside of the cleaning agent processing tank 31.
The reflux pipe 36 is provided to communicate the inside of the cleaning agent treatment tank 31 and the cold air layer Lc210. The reflux pipe 36 can discharge the vapor in the cleaning agent treatment tank 31 to the cold air layer Lc210.

  Next, a method for cleaning the member 5 using the cleaning apparatus 1 will be described. In FIG. 3, the flowchart of the washing | cleaning process of the member 5 in the washing | cleaning apparatus 1 is shown. FIG. 4 shows a flowchart of a used cleaning agent regeneration process in the cleaning apparatus 1.

First, the cleaning process of the member 5 will be described.
In step (hereinafter, simply referred to as “S”) 101, the member 5 transported by the transport conveyor 7 is carried into the cleaning tank 10. In the present embodiment, the transport conveyor 7 transports the member 5 at a constant speed in the directions of the white arrows F11, F12, F13, F14, F15, and F16 shown in FIG. In S <b> 101, the member 5 moving in the direction of the white arrow F <b> 11 shown in FIG. 1 is carried into the cleaning tank 10.

  Next, in S <b> 102 as the “first cleaning step”, ethylene carbonate is injected onto the member 5. The member 5 carried into the cleaning tank 10 in S101 enters the cold air layer Lc110. When the member 5 passing through the cold air layer Lc110 enters the spray layer Ls10, the injection nozzle 16 injects liquid ethylene carbonate supplied by the carbonate supply unit 25 toward the member 5. At this time, the injected ethylene carbonate in the liquid state changes into solid fine particles by cooling in the cold air layer Lc110. The ethylene carbonate in the form of fine particles collides with the member 5 and physically removes the deposits adhering to the surface of the member 5.

  Part of ethylene carbonate injected from the injection nozzle 16 reaches the partition plate 11. Since the partition plate 11 is heated to the melting point of ethylene carbonate or higher, the solid particles of ethylene carbonate that have reached the partition plate 11 change to a liquid state. The ethylene carbonate in a liquid state on the surface of the partition plate 11 flows into the boiling layer Lb10 of hydrofluoroether through a recovery groove (not shown).

  Next, in S103 as the “second cleaning step”, the hydrofluoroether vapor is brought into contact with the member 5. In the sprayed layer Ls10, ethylene carbonate may be left adhered to the member 5 on which ethylene carbonate has been sprayed instead of removing the deposits such as fats and oils. The member 5 from which the adhering matter adhering to the spray layer Ls10 has been removed passes through the spray layer Ls10 and the cold air layer Lc110 and enters the vapor layer Lv10. In the vapor layer Lv10, when the hydrofluoroether vapor drifting in the vapor layer Lv10 comes into contact with the member 5, ethylene carbonate adhering to the member 5 is removed by condensation of the hydrofluoroether vapor. At this time, the hydrofluoroether condensate containing ethylene carbonate is dropped into the boiling layer Lb10.

Next, in S104 as the “first cooling step”, the member is cooled. The member 5 from which the ethylene carbonate adhering to the vapor layer Lv10 has been removed passes through the vapor layer Lv10 and enters the cold air layer Lc210. In the cold air layer Lc210, the hydrofluoroether adhering to the member 5 is removed from the member 5 by being vaporized. The hydrofluoroether vaporized from the member 5 is cooled by the cooling pipe 15 and moves to the water separation unit 17 through the trough 151. The water separator 17 separates the liquid flowing in from the trough 151 into water and hydrofluoroether. The water separated from the hydrofluoroether is discharged out of the system, and the hydrofluoroether is returned to the boiling layer Lb10.
Finally, in S105, the member 5 is carried out of the cleaning tank 10.

Next, the used cleaning agent regeneration step will be described with reference to FIGS.
First, in S111, the used cleaning agent for the boiling layer Lb10 is collected. The liquid of the boiling layer Lb10 is mainly hydrofluoroether, but includes deposits including oils and fats removed from the member 5 by the cleaning of the member 5 in S102 and ethylene carbonate sprayed by the spray nozzle 16. In S111, the liquid used cleaning agent in the boiling layer Lb10 is moved to the cleaning agent processing tank 31 via the transfer pipe 34 (open arrow F21 in FIG. 5A). At this time, solids contained in the used cleaning agent, for example, cutting waste and grinding waste, are removed by the filter 302.

  Next, in S112 as the “phase separation step”, the used cleaning agent in the cleaning agent treatment tank 31 is cooled. In the present embodiment, the cleaning agent treatment tank 31 is cooled by the cooling unit 32 to below the freezing point of ethylene carbonate. When the used cleaning agent is cooled below the freezing point of ethylene carbonate, the used cleaning solution Wa1 in the cleaning agent treatment tank 31 is phase-separated as shown in FIG. Specifically, the ethylene carbonate cooled to below the freezing point becomes a solid (reference symbol We1 in FIG. 5B). On the other hand, the fats and oils are located in a liquid state on the top side of the solid state ethylene carbonate due to a specific gravity relationship with the solid state ethylene carbonate (reference character Wo1 in FIG. 5B). Also. Hydrofluoroether exists in a liquid state on the ground side of solid state ethylene carbonate (reference numeral Wh1 in FIG. 5B).

  Next, in S <b> 113 as the “recovery step”, the liquid oil and fat and the liquid hydrofluoroether are recovered from the cleaning agent treatment tank 31. Liquid oils are discarded. The liquid hydrofluoroether is recovered by the recovery pipe 35 and returned to the boiling layer Lb10 in the cleaning tank 10 (open arrow F22 in FIG. 5B).

  Next, in S114 as the “heating step”, the solid ethylene carbonate remaining in the cleaning agent treatment tank 31 is heated. In S114, the solid state ethylene carbonate is heated by the heater 33 so as to have a temperature higher than the boiling point of the hydrofluoroether, preferably 10 degrees higher than the boiling point. At this time, the solid state ethylene carbonate undergoes a phase change from the solid state to the liquid state, and the hydrofluoroether trapped in the solid state ethylene carbonate is vaporized. The vaporized hydrofluoroether is returned to the cold air layer Lc 210 in the cleaning tank 10 through the reflux pipe 36. The gaseous hydrofluoroether returned to the cold air layer Lc210 is liquefied in the cold air layer Lc210. The hydrofluoroether that has become liquid returns to the boiling layer Lb10.

  In S114, when the purity of ethylene carbonate reaches a predetermined purity, the ethylene carbonate in a liquid state is recovered and returned to the carbonate storage tank 26.

  When the cleaning of the member 5 is repeated in the cleaning device 1, the boiling point of the hydrofluoroether in the boiling layer Lb10 increases due to the mixing of ethylene carbonate and the oil removed from the member 5. For this reason, the expansion of the vapor layer Lv10 in the vertical direction is reduced, and the process of S103 for removing the ethylene carbonate adhering to the member 5 is shortened. For this reason, since there exists a possibility that ethylene carbonate cannot be removed reliably, the quality of the member 5 falls. Therefore, it is necessary to renew the hydrofluoroether when the concentration of ethylene carbonate or fat / oil in the boiling layer Lb10 reaches the control value defined from the cleaning quality.

  In the cleaning method for the member 5 using the cleaning apparatus 1, in S111, the used cleaning agent containing the oil and fat adhering to the member 5, the ethylene carbonate injected by the injection nozzle 16, and the hydrofluoroether is used as a cleaning agent processing tank. Collect in 31. When the collected used cleaning agent is cooled, it is phase-separated from the top to the liquid oil and fat, the solid ethylene carbonate, and the liquid hydrofluoroether in this order from the top depending on the difference in freezing point and specific gravity. In the cleaning apparatus 1, oil and fat, ethylene carbonate, and hydrofluoroether can be recovered from the used cleaning agent by utilizing this phase separation. Thereby, in the washing | cleaning method of the member 5, ethylene carbonate and hydrofluoroether can be easily isolate | separated and collect | recovered from a used washing | cleaning agent.

  Further, in the cleaning method for the member 5 according to the present embodiment, the cleaning agent regeneration unit 30 separates the liquid hydrofluoroether and the solid ethylene carbonate by cooling, and then converts the solid ethylene carbonate to hydrofluoroether. Heat to boiling point or higher. Thereby, the hydrofluoroether confined in the solid ethylene carbonate is vaporized and returned to the washing tank 10 through the reflux pipe 36. Therefore, it is possible to reliably separate ethylene carbonate and hydrofluoroether and recover relatively high purity ethylene carbonate.

  Moreover, in the cleaning method for the member 5 according to the present embodiment, ethylene carbonate and hydrofluoroether can be separated from the used cleaning agent with a relatively high purity by adjusting the temperature. Thereby, since ethylene carbonate and hydrofluoroether can be separated with a simple configuration, the equipment cost and operation cost of the cleaning process can be reduced.

  In the method for cleaning the member 5 according to the present embodiment, the fine particles of ethylene carbonate are collided with the member 5 as a blast material, and the oils and fats adhering to the member 5 are physically removed. Since the ethylene carbonate fine particles are relatively soft, the member 5 is hardly damaged at the time of collision. Thereby, the deterioration of the quality of the member 5 can be prevented.

Conventionally, when blast cleaning using solid fine particles is performed on a member to which a liquid deposit is adhered, the blast material may remain adhered to the member by the liquid deposit. For this reason, there exists a possibility that washing | cleaning may become inadequate and the quality of a member may fall.
In the cleaning method for the member 5 according to the present embodiment, the ethylene carbonate that remains attached after colliding the ethylene carbonate fine particles against the member to which the liquid oil is attached is a highly compatible hydrofluoroether. Can be removed. That is, the method for cleaning the member 5 according to the present embodiment can also be applied to cleaning a member to which a liquid deposit is attached.

  Moreover, since the non-aqueous cleaning agent of ethylene carbonate and hydrofluoroether is used in the cleaning method of the member 5 according to the present embodiment, it is also applicable to the cleaning of electronic components such as wafers, glass, and mounting substrates that are avoided. can do.

  Further, in the method for cleaning the member 5 according to the present embodiment, incombustible hydrofluoroether is used to remove ethylene carbonate adhering to the member 5. Thereby, since the risk of combustion of ethylene carbonate which is a combustible substance can be reduced, the member 55 can be cleaned relatively safely.

  In the cleaning apparatus 1, the opening 12 of the cleaning tank 10 formed in a rectangular shape is formed so that the ratio of the long side length L2 to the short side length L1 is 2 or more. The length of the cleaning tank 10 in the vertical direction is such that the ratio of the distance L3 from the top boundary Lv11 of the hydrofluoroether vapor layer Lv10 to the opening 12 with respect to the length L1 of the short side of the opening 12 is 1 or more. It is formed as follows. Thereby, volatilization from the opening 12 of hydrofluoroether can be suppressed.

  In the cleaning apparatus 1, when the solid ethylene carbonate remaining in the cleaning agent treatment tank 31 is heated in S <b> 114, the hydrofluoroether gas generated through the reflux pipe 36 is returned to the cold air layer Lc 210. To make it liquid. The hydrofluoroether that has become liquid returns to the boiling layer Lb10 in the washing tank 10. As a result, the yield of hydrofluoroether can be improved in the regeneration of the used cleaning agent.

  Further, the cleaning device 1 is provided with a filter 302 capable of removing solid matter between the boiling layer Lb10 and the cleaning agent treatment tank 31. Thereby, the cutting waste and the grinding waste contained in the used cleaning agent can be removed before the used cleaning agent is cooled in S112.

(Second embodiment)
Next, a cleaning apparatus according to a second embodiment of the present invention will be described with reference to FIG. The second embodiment is different from the first embodiment in the configuration of the carbonate supply unit. In addition, the same code | symbol is attached | subjected to the site | part substantially the same as 1st embodiment, and description is abbreviate | omitted.

  FIG. 6 shows a schematic diagram of the cleaning device 1 as the “member cleaning device” according to the second embodiment. The cleaning device 2 includes a conveyor 7, a cleaning tank 10, a carbonate supply unit 45, a cleaning agent regeneration unit 30, and the like. In FIG. 6, the upper side of the paper surface is shown as the “top” side, and the lower side of the paper surface is shown as the “ground” side.

  The carbonate supply unit 45 includes a temperature control hopper 46, a supply pipe 47, a compressed gas supply unit 48, a mixer 49, and the like.

  The temperature control hopper 46 is formed so as to be able to store solid ethylene carbonate. The temperature control hopper 46 includes a temperature controller 461. The temperature controller 461 is provided so as to surround the temperature control hopper 46. The temperature controller 461 adjusts the temperature in the temperature control hopper 46 so that it is not higher than the freezing point of ethylene carbonate. The temperature control hopper 46 is charged with solid ethylene carbonate.

  The supply pipe 47 connects the temperature control hopper 46 and the injection nozzle 16. The supply pipe 47 can keep the temperature of the ethylene carbonate flowing inside so that the ethylene carbonate can maintain a solid state.

  The compressed gas supply unit 48 is connected to a mixer 49 and a temperature control hopper 46 provided in the supply pipe 47. The compressed gas supply unit 48 supplies a high-pressure gas or a low-temperature liquefied gas whose temperature is adjusted below the freezing point of ethylene carbonate to the temperature-controlled hopper 46, and pressurizes solid ethylene carbonate. The compressed gas supply unit 48 can also supply the high-pressure gas or the low-temperature liquefied gas to the mixer 49.

  The mixer 49 mixes solid state ethylene carbonate sent from the temperature control hopper 46 with the high-pressure gas or low-temperature liquefied gas supplied from the compressed gas supply unit 48 and supplies the mixture to the injection nozzle 16. The injection nozzle 16 injects a high-pressure gas or a low-temperature liquefied gas mixed with solid ethylene carbonate into the washing tank 10 to the cold air layer Lc110 to form the spray layer Ls10.

  In the present embodiment, the cleaning device 2 jets solid ethylene carbonate from the jet nozzle 16 and physically removes deposits adhering to the member 5. Thereby, this embodiment has the same effect as a first embodiment.

(Third embodiment)
Next, a cleaning apparatus according to a third embodiment of the present invention will be described with reference to FIGS. The third embodiment is different from the first embodiment in the arrangement of the conveyance rails in the cleaning tank. In addition, the same code | symbol is attached | subjected to the site | part substantially the same as 1st embodiment, and description is abbreviate | omitted.

  FIG. 7 shows a schematic diagram of the cleaning device 3 as a “member cleaning device” according to the third embodiment. The cleaning apparatus 3 includes a transport conveyor 7, a “first cleaning unit”, a “second cleaning unit”, a “member cooling unit”, and a cleaning tank 50 as a “cleaning agent supply unit”, a carbonate supply unit 25, a cleaning agent A playback unit 30 and the like are provided. In FIG. 7, the upper side of the paper surface is shown as the “top” side, and the lower side of the paper surface is shown as the “ground” side.

  The cleaning tank 50 is formed in a bottomed cylindrical shape. The cleaning tank 50 is provided with a partition plate 11 formed so as to extend in the vertical direction near the injection nozzle 16. The cleaning tank 50 has the heater 13 as a “cleaning agent supply unit” on the ground side inside. The cleaning tank 50 has cooling pipes 14 and 15 inside the side walls 501 and 502 facing the partition plate 11. On the ground side of the cooling pipes 14 and 15, flanges 141 and 151 are provided. The injection nozzle 16 included in the cleaning tank 50 is provided on the side wall 501. The water separation unit 17 included in the cleaning tank 50 is provided on the side wall 502.

  The conveyor 7 that enters the cleaning tank 50 through the opening 52 of the cleaning tank 50 is disposed so as to meander in the cleaning tank 50 as shown in FIG. Specifically, the conveyor 7 sequentially passes through the cold air layer Lc110, the spray layer Ls10, the vapor layer Lv10, the boiling layer Lb10, the vapor layer Lv10, the cold air layer Lc210, the vapor layer Lv10, and the cold air layer Lc210 in the cold air layer Lc110. Has been placed.

  Next, a method for cleaning the member 5 using the cleaning device 3 will be described. In FIG. 8, the flowchart of the washing | cleaning process of the member 5 in the washing | cleaning apparatus 3 is shown. In addition, about the reproduction | regeneration process of hydrofluoro ether, since it is the same as 1st embodiment, it abbreviate | omits here.

  First, in S301, the member 5 conveyed by the conveyance conveyor 7 is carried into the washing tank 50 similarly to S101 of 1st embodiment. In the present embodiment, the transport conveyor 7 transports the member 5 at a constant speed in the directions of the white arrows F31, F32, F33, F34, F35, F36, F37, and F38 shown in FIG. In S <b> 301, the member 5 that moves in the direction of the white arrow F <b> 31 illustrated in FIG. 7 is carried into the cleaning tank 50.

  Next, in S302 as the “first cleaning step”, ethylene carbonate is injected onto the member 5 as in S102 of the first embodiment. Part of the solid state fine particles of ethylene carbonate injected in S <b> 302 changes to a liquid state in the partition plate 11. The ethylene carbonate in a liquid state on the surface of the partition plate 11 flows into the boiling layer Lb10 of hydrofluoroether through a recovery groove (not shown).

  Next, in S303 as the “second cleaning step”, the hydrofluoroether vapor is brought into contact with the member 5 as in S103 of the first embodiment. Thereby, the ethylene carbonate adhering to the member 5 is removed.

  Next, in S304 as the “third cleaning step”, the member 5 is immersed in a boiling liquid of hydrofluoroether. The member 5 that has passed through the vapor layer Lv10 enters the boiling layer Lb10. In the boiling layer Lb10, since the hydrofluoroether is boiling, the boiling liquid of the hydrofluoroether is stirred. By this stirring, ethylene carbonate adhering to the member 5 that could not be removed by contact with steam is dissolved and removed.

  Next, in S305 as the “first cooling step”, the member 5 is cooled as in S104 of the first embodiment. The member 5 coming out of the boiling layer Lb10 passes through the vapor layer Lv10 and then enters the cold air layer Lc210. In the cold air layer Lc210, the hydrofluoroether adhering to the member 5 is removed from the member 5 by being vaporized.

  Next, in S306 as an “additional cleaning step”, the hydrofluoroether vapor is brought into contact with the member 5 again. The member 5 moving again to the ground side in the cold air layer Lc210 enters the vapor layer Lv10 again. As a result, the member 5 comes into contact with the hydrofluoroether vapor again, and the ethylene carbonate adhering to the member 5 is further removed.

Next, the member 5 is cooled in S307 as the “additional cooling step”. The member 5 that has passed through the vapor layer Lv10 reenters the cold air layer Lc210. In the cold air layer Lc210, the hydrofluoroether adhering to the member 5 is removed from the member 5 by being vaporized.
Finally, in S308, the member 5 is carried out of the cleaning tank 10.

  For example, when the member 5 has a complicated shape, ethylene carbonate injected for removing oil and fat may not be removed only by one contact with the hydrofluoroether vapor. In the method for cleaning the member 5 according to the present embodiment, the ethylene carbonate adhering to the details of the member 5 can be reliably dissolved and removed by immersing the member 5 in a boiling liquid of hydrofluoroether. Therefore, the third embodiment has the effects of the first embodiment and can reliably clean even a member having a complicated shape.

  In the cleaning method for the member 5 according to the present embodiment, the contact between the high purity hydrofluoroether vapor and the member 5 and the cooling of the member 5 are performed a plurality of times. Thereby, the ethylene carbonate adhering to the detail of the member 5 can be removed more reliably.

  Moreover, in this embodiment, since the member 5 is immersed in the boiling liquid of hydrofluoroether, the fats and oils and ethylene carbonate which are contained in the liquid of the boiling layer Lb10 may adhere to the member 5 again. In the present embodiment, since the hydrofluoroether having a relatively high purity can be recovered in the regeneration process of the liquid of the boiling layer Lb10, oil and fat and ethylene carbonate are also contained in the immersion of the hydrofluoroether of the member 5 in the boiling liquid. It can prevent adhering to the member 5 again.

(Other embodiments)
In the above-described embodiment, the oil and fat adhering to the member is assumed to be machine oil in cutting, grinding, and press forming. However, fats and oils are not limited to this. Any material that does not dissolve in carbonate, such as greases, waxes, fluxes, and liquid crystals may be used.

  In the above-described embodiment, the cyclic carbonate material used by the cleaning device is ethylene carbonate. However, the cyclic carbonate material used by the cleaning device is not limited to this. For example, a cyclic carbonate material having a melting point of 30 to 60 degrees, such as propylene carbonate and butylene carbonate used as an organic electrolyte may be used.

  In the above-described embodiment, the carbonate cleaning agent used by the cleaning apparatus is hydrofluoroether. However, the carbonate cleaning agent used by the cleaning device is not limited to this. The carbonate detergent only needs to have an atmospheric pressure boiling point of 40 to 100 degrees and higher than the freezing point of ethylene carbonate. Moreover, what is necessary is just a material which is compatible with carbonates, but is incompatible with fats and oils. For example, fluorine compounds such as HFC (hydrofluorocarbon), HFO (hydrofluoroolefin), and HCFC (hydrochlorofluorocarbon) may be used.

  In the first embodiment, the carbonate storage tank is charged with liquid ethylene carbonate. However, the state of ethylene carbonate charged into the carbonate storage tank is not limited to this. It may be in a solid state and the shape is not limited.

  In the first embodiment, the liquid state ethylene carbonate supplied by the carbonate supply unit is changed to solid fine particles by the injection nozzle. However, the method for injecting atomized ethylene carbonate is not limited to this. A method of injecting using a piston or a method of injecting compressed gas and liquid ethylene carbonate with a two-fluid nozzle may be used. When jetting with a two-fluid nozzle, the temperature of the compressed gas is preferably set to a temperature equal to or higher than the freezing point of ethylene carbonate, preferably about 5 to 10 degrees higher than the freezing point.

  In the third embodiment, the member passes through the vapor layer, the boiling layer, and the vapor layer and then enters the cooling layer, and then enters the vapor layer and then enters the cooling layer. However, after entering the cooling layer and entering the cooling layer, it may enter the cooling layer and then enter the cooling layer. That is, in this case, the ethylene carbonate in the high-purity hydrofluoroether vapor layer is washed twice, so that the ethylene carbonate can be reliably removed.

  In the above-described embodiment, the liquid used cleaning agent is cooled and phase-separated. However, the used cleaning agent in a liquid state may be cooled by leaving it to dissipate heat.

  In the above-described embodiment, the member is continuously transported at a constant speed by the transport conveyor. However, the state in which a member is conveyed is not limited to this. You may move by the pitch conveyance which stops after moving a fixed distance.

  In the above-described embodiment, the opening of the cleaning tank is formed so that the transport conveyor passes therethrough. At this time, volatilization of the hydrofluoroether can be further suppressed by using a lid having a gap that allows the conveyance conveyor to pass through.

  In the above-described embodiment, the rectangular opening is formed such that (L2 / L1) is 2 or more, where the length of the short side is L1 and the length of the long side is L2. did. The shape of the opening is not limited to this.

  In the above-described embodiment, the cleaning tank 10 is formed so that (L3 / L1) is 1 or more when the distance L3 from the boundary Lv11 between the vapor layer Lv10 and the cold air layer Lc210 to the opening 12 is set. However, the shape of the cleaning tank 10 is not limited to this.

  In the above-described embodiment, the “first cleaning unit”, “second cleaning unit”, “member cooling unit”, and “cleaning agent supply unit” are integrally provided as a cleaning tank. However, the “first cleaning unit”, the “second cleaning unit”, the “member cooling unit”, and the “cleaning agent supply unit” may be provided separately.

  As mentioned above, this invention is not limited to such embodiment, It can implement with a various form in the range which does not deviate from the summary.

1, 2, 3 ... Cleaning device 5 ... Member 10 ... Cleaning tank (first cleaning unit, second cleaning unit, member cooling unit, cleaning agent supply unit)
13 ... Heater (cleaning agent supply part)
14, 15 ... cooling pipe (member cooling part)
16 ... Injection nozzle (first cleaning part)
25 ... carbonate supply part 31 ... cleaning agent treatment tank (cleaning agent storage part)
32 ... Cooling unit (cleaning agent cooling unit)

Claims (15)

A method for cleaning a member capable of removing oil and fat adhering to the member (5),
A first cleaning step of injecting particles of the cyclic carbonate material onto the member;
After the first cleaning step, a second cleaning step of bringing the carbonate cleaning agent vapor into contact with the member;
A first cooling step for cooling the member after the second cleaning step;
Used that is a mixture of the oil and fat removed from the member, the cyclic carbonate-based material sprayed onto the member in the first cleaning step, and the carbonate cleaning agent in contact with the member in the second cleaning step A phase separation step of cooling the cleaning agent to phase-separate the oil and fat in a liquid state, the cyclic carbonate-based material in a solid state, and the carbonate cleaning agent in a liquid state;
Cleaning method for members including A recovery step of recovering the carbonate detergent in a liquid state after the phase separation step;
After the recovery step, a heating step of heating the temperature of the cyclic carbonate-based material that has become a solid state in the phase separation step to a boiling point or more of the carbonate detergent,
The member cleaning method according to claim 1, further comprising:   The member cleaning according to claim 1, further comprising a third cleaning step of immersing the member in a boiling liquid of the carbonate cleaning agent after the second cleaning step and before the first cooling step. Method. After the first cooling step, an additional cleaning step of bringing the carbonate detergent vapor into contact with the member;
An additional cooling step for cooling the member after the additional cleaning step;
The member cleaning method according to any one of claims 1 to 3, further comprising: The cyclic carbonate-based material, propylene carbonate, ethylene carbonate, and, parts materials cleaning method according to claim 1 which is any one of butylene carbonate.   The member cleaning method according to any one of claims 1 to 5, wherein the carbonate cleaning agent is any one of hydrofluorocarbon, hydrofluoroether, hydrofluoroolefin, and hydrochlorofluorocarbon. A member cleaning device (1, 2, 3) capable of removing oils and fats adhering to the member (5),
A first cleaning section (10, 16) capable of injecting particles of cyclic carbonate-based material on the member;
A carbonate supply section (25) capable of supplying the cyclic carbonate-based material to the first cleaning section;
A second cleaning section (10) capable of bringing the member into which the cyclic carbonate-based material has been jetted into contact with the vapor of the carbonate cleaning agent;
A member cooling section (10, 14, 15) for cooling the member in contact with the carbonate detergent vapor;
A cleaning agent supply unit (10, 13) for supplying vapor of the carbonate cleaning agent to the second cleaning unit;
A used cleaning agent that is a mixture of the oil and fat removed from the member, the cyclic carbonate-based material sprayed in the first cleaning unit, and the carbonate cleaning agent in contact with the member in the second cleaning unit. A storable cleaning agent reservoir (31);
A cleaning agent cooling section (32) provided in the cleaning agent storage section and capable of cooling the used cleaning agent to a temperature below the freezing point of the cyclic carbonate-based material;
An apparatus for cleaning a member comprising:   A cleaning agent heating unit (33) provided in the cleaning agent storage unit and capable of heating a mixture of the cyclic carbonate material and the carbonate cleaning agent in the cleaning agent storage unit to a temperature equal to or higher than a boiling point of the carbonate cleaning agent. The member cleaning apparatus according to claim 7 further provided.   A reflux pipe (36) provided to connect the cleaning agent reservoir and the member cooling unit, and capable of flowing the carbonate cleaning agent in a gaseous state in the cleaning agent reservoir into the member cooling unit. The apparatus for cleaning a member according to 7 or 8.   A transfer pipe (34) that is provided in the cleaning agent reservoir and has a filter (302) capable of collecting foreign substances contained in the used cleaning agent, and through which the used cleaning agent flowing into the cleaning agent reservoir flows. The member cleaning apparatus according to any one of claims 7 to 9, further comprising:   The said cleaning agent supply part is a cleaning apparatus of the member as described in any one of Claims 7-10 which has the heater (13) which can boil the said carbonate cleaning agent.   The first cleaning unit, the second cleaning unit, the member cooling unit, and the cleaning agent supply unit are integrally formed, and from the ground side, the cleaning agent supply unit, the second cleaning unit, and the first cleaning unit Or the member cooling section, the cleaning agent supply section and the second cleaning section, and the second cleaning section, the first cleaning section, and the member cooling section communicate with each other. The member cleaning apparatus according to any one of 7 to 11. A transport conveyor (7) capable of transporting the members;
The first cleaning unit and the member cooling unit are provided adjacent to the top side of the second cleaning unit,
The top side of the first cleaning unit and the member cooling unit is formed with an opening (12) through which the member can be carried into the first cleaning unit and the member can be carried out of the member cooling unit by the conveyor. The member cleaning apparatus according to claim 12. The opening is formed in a rectangular shape,
The member cleaning apparatus according to claim 13, wherein a ratio of a length (L1) of a short side of the opening to a length (L2) of a long side of the opening is 2 or more.   The distance (L3) from the boundary (Lv11) between the vapor layer (Lv10) in which the member cooling unit has the vapor of the carbonate detergent and the cooling layer (Lc210) in the member cooling unit to the opening The member cleaning apparatus according to claim 14, wherein a ratio of a length (L1) of a short side of the opening is 1 or more.

Images