JP2018078233A - 成膜装置及び成膜方法 - Google Patents
成膜装置及び成膜方法 Download PDFInfo
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- JP2018078233A JP2018078233A JP2016220589A JP2016220589A JP2018078233A JP 2018078233 A JP2018078233 A JP 2018078233A JP 2016220589 A JP2016220589 A JP 2016220589A JP 2016220589 A JP2016220589 A JP 2016220589A JP 2018078233 A JP2018078233 A JP 2018078233A
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- gas supply
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 8
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- 238000000231 atomic layer deposition Methods 0.000 description 10
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
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- 239000012159 carrier gas Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- GIRKRMUMWJFNRI-UHFFFAOYSA-N tris(dimethylamino)silicon Chemical compound CN(C)[Si](N(C)C)N(C)C GIRKRMUMWJFNRI-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/401—Oxides containing silicon
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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Abstract
【解決手段】処理室1と、該処理室内に設けられ、基板を上面に周方向に沿って載置可能な基板載置領域を有する回転テーブル2と、該回転テーブルの半径方向に延在し、該回転テーブルの半径を覆うように該回転テーブルの上方に該回転テーブルと第1の間隔を有して設けられた原料ガス供給手段32と、該回転テーブルの半径方向の軸側の所定領域を覆うように、該回転テーブルと該第1の間隔よりも広い第2の間隔を有して、該原料ガス供給手段の近傍に設けられた軸側補助ガス供給手段33と、を有する。
【選択図】図2
Description
該処理室内に設けられ、基板を上面に周方向に沿って載置可能な基板載置領域を有する回転テーブルと、
該回転テーブルの半径方向に延在し、該回転テーブルの半径を覆うように該回転テーブルの上方に該回転テーブルと第1の間隔を有して設けられた原料ガス供給手段と、
前記回転テーブルの前記半径方向の軸側の所定領域を覆うように、前記回転テーブルと前記第1の間隔よりも広い第2の間隔を有して、前記原料ガス供給手段の近傍に設けられた軸側補助ガス供給手段と、を有する。
まず、本発明の実施形態に係る成膜装置について説明する。図1から図3までを参照すると、成膜装置は、ほぼ円形の平面形状を有する扁平な真空容器1と、真空容器1内に設けられ、真空容器1の中心に回転中心を有する回転テーブル2と、を備えている。真空容器1は、内部に収容したウェハの表面上に成膜処理を行うための処理室である。真空容器1は、有底の円筒形状を有する容器本体12と、容器本体12の上面に対して、例えばOリングなどのシール部材13(図1)を介して気密に着脱可能に配置される天板11とを有している。
図13は、本発明の実施形態に係るプラズマ処理装置のプラズマ発生部の一例の分解斜視図である。
図12及び図13に示すように、筐体90の上方側には、当該筐体90の内部形状に概略沿うように形成された導電性の板状体である金属板例えば銅などからなる、接地されたファラデーシールド95が収納されている。このファラデーシールド95は、筐体90の底面に沿うように水平に係止された水平面95aと、この水平面95aの外終端から周方向に亘って上方側に伸びる垂直面95bと、を備えており、平面視で例えば概略六角形となるように構成されていても良い。
次に、本発明の実施形態に係る成膜方法について、上述の成膜装置を用いて実施される場合を例に挙げ説明する。このため、これまでに参照した図面を適宜参照する。
次に、本発明の実施形態に係る成膜装置及び成膜方法を実施したシミュレーション実験の結果について説明する。なお、理解の容易のため、上述の実施形態で説明した構成要素に対応する構成要素には同一の参照番号を付し、その説明を省略する。実施例に用いた成膜装置は、上述の実施形態で説明した成膜装置と同様の構成を有し、原料ガス供給部32、軸側補助ガス供給部33及び外周側補助ガス供給部34の総てを備えたシャワーヘッド30を有する成膜装置である。原料ガス供給部32と回転テーブル2との間の間隔d1は1.5mm、軸側補助ガス供給部33及び外周側補助ガス供給部34と回転テーブル2との間の間隔d3、d2は3mmに設定されている。また、シャワーヘッド30の底面板31も高底面領域31bと回転テーブル2との間隔も3mmに設定されている。
図24は、本実施形態に係る成膜装置を用いて成膜処理を実施した実施例1の実施結果を示した図である。実施例1においては、原料ガス供給部32からの原料ガスである有機シランガスの流量を10sccmで一定とし、軸側補助ガス供給部33からのArガスの流量を種々変化させた。また、外周側補助ガス供給部34からは、ガスの供給を行わなかった。
2 回転テーブル
24 凹部
30 シャワーヘッド
31 底面板
32 原料ガス供給部
33 軸側補助ガス供給部
34 外周側補助ガス供給部
32a〜34a ガス供給路
39 ガス導入口
39a ガス導入路
81 プラズマ発生部
120〜123 流量制御器
130〜133 ガス供給源
P1〜P3 処理領域
W ウェハ
Claims (16)
- 処理室と、
該処理室内に設けられ、基板を上面に周方向に沿って載置可能な基板載置領域を有する回転テーブルと、
該回転テーブルの半径方向に延在し、該回転テーブルの半径を覆うように該回転テーブルの上方に該回転テーブルと第1の間隔を有して設けられた原料ガス供給手段と、
前記回転テーブルの前記半径方向の軸側の所定領域を覆うように、前記回転テーブルと前記第1の間隔よりも広い第2の間隔を有して、前記原料ガス供給手段の近傍に設けられた軸側補助ガス供給手段と、を有する成膜装置。 - 前記回転テーブルの前記半径方向の外周側の所定領域を覆うように、前記回転テーブルと前記第2の間隔と等しいかそれよりも広い第3の間隔を有して、前記原料ガス供給手段の近傍に設けられた外周側補助ガス供給手段を更に有する請求項1に記載の成膜装置。
- 前記原料ガス供給手段、前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段は、シャワーヘッドとして一体的に構成されている請求項2に記載の成膜装置。
- 前記シャワーヘッドは、前記回転テーブルの前記周方向の一部を扇形に覆う形状を有する請求項3に記載の成膜装置。
- 前記原料ガス供給手段、前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段は、前記シャワーヘッドの底面に、前記回転テーブルの前記半径方向に沿って直線状に配列された複数のガス吐出孔を各々有する請求項4に記載の成膜装置。
- 前記複数のガス吐出孔は、前記シャワーヘッドの前記底面内で、前記回転テーブルの回転方向の上流側の所定位置に配置された請求項5に記載の成膜装置。
- 前記原料ガス供給手段、前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段は、各々独立して流量及びガス組成を変更可能なように、個別の供給ラインとして構成されている請求項2乃至6のいずれか一項に記載の成膜装置。
- 前記原料ガス供給手段は少なくとも原料ガス供給源に接続され、
前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段は少なくとも不活性ガス供給源に接続された請求項2乃至7のいずれか一項に記載の成膜装置。 - 前記原料ガス供給手段から供給される原料ガスはシリコン含有ガスであり、
前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段から供給される補助ガスは、膜厚を調整するための膜厚調整用ガスである請求項2乃至8のいずれか一項に記載の成膜装置。 - 処理室内に設けられた回転テーブル上に載置された基板に、前記回転テーブルの周方向の一部に設けられた原料ガス供給領域において、前記回転テーブルの上方で前記回転テーブルの半径を覆うように、前記回転テーブルと第1の間隔を有して設けられた原料ガス供給手段から、前記回転テーブルを回転させながら原料ガスを供給する工程と、
前記原料ガス供給領域において、前記回転テーブルの軸側の所定領域を覆うように、前記回転テーブルと前記第1の間隔よりも広い第2の間隔を有して、前記原料ガス供給手段の近傍に設けられた軸側補助ガス供給手段から、前記回転テーブルを回転させながら膜厚を調整するための所定の軸側補助ガスを供給する工程と、を有する成膜方法。 - 前記原料ガス供給領域において、前記回転テーブルの外周側の所定領域を覆うように、前記回転テーブルと前記第2の間隔と等しいかそれよりも広い第3の間隔を有して、前記原料ガス供給手段の近傍に設けられた外周側補助ガス供給手段から、前記回転テーブルを回転させながら膜厚を調整するための所定の外周側補助ガスを供給する工程を更に有する請求項10に記載の成膜方法。
- 前記原料ガスを供給する工程、前記軸側補助ガスを供給する工程及び前記外周側補助ガスを供給する工程は、同時に継続的に行われる請求項11に記載の成膜方法。
- 前記原料ガス供給手段から供給される原料ガスはシリコン含有ガスであり、
前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段から供給される前記軸側補助ガス及び前記外周側補助ガスは、不活性ガスを含むガスである請求項11又は12に記載の成膜方法。 - 前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段は、前記原料ガスの濃度を低下させるように前記軸側補助ガス及び前記外周側補助ガスを供給する請求項11乃至13のいずれか一項に記載の成膜方法。
- 前記原料ガス供給手段、前記軸側補助ガス供給手段及び前記外周側補助ガス供給手段は、シャワーヘッドとして一体的に構成され、前記原料ガス、前記軸側補助ガス及び前記外周側補助ガスは、前記シャワーヘッドの底面から供給される請求項11乃至13のいずれか一項に記載の成膜方法。
- 前記原料ガスは、30sccm以下の流量で供給される請求項10乃至15のいずれか一項に記載の成膜方法。
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JP2021052066A (ja) * | 2019-09-24 | 2021-04-01 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
JP7274387B2 (ja) | 2019-09-24 | 2023-05-16 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
CN114686853A (zh) * | 2020-12-31 | 2022-07-01 | 拓荆科技股份有限公司 | 可控气流分布的气体喷头 |
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