JP2018063233A - Probe and probe head structure of probe card thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe and a probe card structure thereof.SOLUTION: A probe 2 of a probe head structure of a probe card has a slender needle body formed by stamping a circular cylinder needle, and has a first section 21 and a second section 22 different in cross-sectional shape from each other. The maximum width of the cross section of the first section is wider than the minimum width of the cross section of the second section. The cross section of the second section 22 is square but a connection position at which two sides are adjacent to each other is arcuate. The probe head is composed of a plurality of probes, a first stationary plate, a second stationary plate, a plurality of interval pieces and a plurality of insulation pieces. Upper and lower positions of the second section of the plurality of probes are limited by the first stationary plate and the second stationary plate. The plurality of interval pieces and the plurality of insulation pieces are placed at an intermediate position in a cross interval manner. The insulation pieces limit a curvature deformation of the probe at intervals. Consequently, a vertical type probe and a probe head structure thereof can be provided which can be subjected to a related test by enduring appropriate strength and elasticity and high amperage.SELECTED DRAWING: Figure 2A

Description

  The present invention relates to a probe and a probe head structure of the probe card, and more particularly to a square-shaped vertical probe formed by a press working method and a probe head structure formed by assembling the probe.

  The wafer test is performed by using a probe to establish electrical contact between the circuit board of the test apparatus and the plurality of contact pads of the semiconductor chip. The probe applies a voltage to the contact pad and determines whether the test semiconductor chip is defective by controlling the associated test equipment and software.

  With the development of the integrated circuit manufacturing process, the line width and distance between circuits are decreasing day by day, and the distance between adjacent contact pads is gradually approaching homology and reduction. A correspondingly used probe head has also encountered problems. As shown in FIG. 1, which is a probe distribution schematic diagram of a probe head used for a chip test, the probe 11 employs a metal fine needle having a circular cross section, and the distance T between the probes 11 is homologous. In this embodiment, the distance T is only 20 μm. As the contractor wishes to increase the amount of current and perform related tests, this shaped probe will not be able to meet the needs of the contractor because it will not be able to increase the cross-sectional size any further and withstand higher current loads. Yes.

  Further, currently, a probe uses a MEMS etching technique to manufacture a needle body having a rectangular cross section, but the periphery has a right-angled shape, and it is necessary to attach the probe head to a corresponding ceramic substrate when assembling the probe head. However, since the ceramic substrate forms attachment holes for attachment by a laser processing method, the four corners of the attachment holes form arcuate surfaces. In the test process, the probe is compressed by contact and moves up and down frequently, but moves a small amount of curvature, but the right-angle side fluctuates excessively with the arc surface of the mounting hole, causing dust to fall, affecting the operation of the tip test. There is a risk of giving.

  Furthermore, in the present microchip test, since the distance between the contact pads is small and close to homology, a vertical probe card is generally used. Therefore, it is necessary to use a probe with a relatively small size (wire diameter of 50 μm or less), but it is not easy to control the elasticity and strength. If the probe is too short, the strength is sufficient, but the elasticity difference is inferior. If it is too long, the amount of elastic deformation is large and the contact effect is inferior. Thus, there is a need to improve the design.

  In the prior art, it is necessary to adopt a probe having a small size, but it is not easy to control its elasticity and strength. If the probe is too short, the strength is sufficient, but the elasticity difference is inferior. However, the contact effect is inferior.

  The present invention is a probe formed by press working, and has a first section and a second section having different cross-sectional shapes. The second section cross section has a square shape, but the connection position where two side edges are adjacent is an arc shape. The present invention relates to a probe capable of providing a probe having a larger cross-sectional area under a condition in which the distance between the probes is limited, and performing a related test with a higher amount of current, and a probe head structure of the probe card.

  The present invention is a multi-spacing limited probe head structure, which uses multi-spacing insulating pieces to limit the amount of deformation of a plurality of probe multi-stages, maintains the preferred strength and moderate deformation of the probe, and probes and semiconductors in the test process The present invention relates to a probe capable of maintaining a good contact state with a chip and a probe head structure of the probe card.

  The probe according to the present invention is an elongated needle body formed by pressing a cylindrical needle, and has a first section and a second section having different cross-sectional shapes, and the maximum width of the first section cross section is the second section. The cross section is wider than the minimum width of the cross section, and the local portion protrudes to the side of the second section, and the second section cross section has a square shape. The axial length is shorter than the second section.

  The probe head structure according to the present invention includes a first fixing plate, a second fixing plate, a plurality of spacing pieces, a plurality of insulating pieces, and a plurality of probes. A plurality of first fixed holes are distributed in the first fixing plate. A plurality of second localization holes are distributed in the second fixing plate. A plurality of position-limiting holes are distributed in the insulating piece, and the plurality of spacing pieces and the plurality of insulating pieces are crossed and overlapped with each other between the first fixing plate and the second fixing plate, respectively. Fixed. The probe is an elongated needle body formed by pressing a cylindrical needle, and has a first section and a second section having different cross-sectional shapes, and the maximum width of the first section cross section is the maximum of the second section cross section. It is wider than the width, and the first section local part protrudes to the side of the second section, and the cross section of the second section has a square shape. Sections are confined in order from top to bottom in the first fixed hole, the plurality of position limiting holes, and the second fixed hole, the first section projecting from the top surface of the first fixed plate, and It is inserted.

  The shape of the cross section of the first section of the probe according to the present invention can be at least one of a circle, a rectangle, and an ellipse depending on the processing method.

  Since the probe of the present invention can provide a probe having a large cross-sectional area under a condition in which the distance between the probes is limited, a related test can be performed with a higher amount of current, and a plurality of probe multi-stages can be obtained using multi-interval insulation pieces. The deformation amount of the probe is limited, the preferable strength and appropriate deformation of the probe are maintained, and a good contact state between the probe and the semiconductor chip in the test process can be maintained.

It is a probe distribution schematic diagram of the conventional probe head. It is a three-dimensional view of the probe of the first embodiment of the present invention. It is a local enlarged view of the probe of the first embodiment of the present invention. It is an enlarged view of the probe right side end surface of the first embodiment of the present invention. It is sectional drawing of the 2nd section of 1st embodiment probe of this invention. It is a local enlarged view of the probe of the second embodiment of the present invention. It is an end surface enlarged view of a probe of a second embodiment of the present invention. It is a local enlarged view of the probe of the third embodiment of the present invention. It is an end surface enlarged view of a probe of a third embodiment of the present invention. It is a cross-sectional schematic diagram of the probe head of the probe card by this invention. It is a local enlarged view of the probe head of the probe card by this invention. It is a structure schematic diagram of this invention 1st fixed plate, a space | interval piece, and an insulation piece. It is an expansion schematic diagram of the 1st fixed hole of this invention.

  2A and 2B, a probe 2 according to the present invention is an elongated needle body formed by pressing a cylindrical needle, and has a first section 21 and a second section 22 that are continuous but have different cross-sectional shapes. . As shown in FIGS. 3A and 3B, in the present embodiment, the first section 21 has a circular cross-sectional shape, and the second section 22 has a square cross-sectional shape, but the connection position where two side edges 221 are adjacent is as follows. An arc shape 222 is exhibited. Since the probe 2 according to the present invention is a kind of microprobe, the cross-sectional size is equal to or smaller than 50 μm, and the cylindrical needle is formed by pressing, so that the strength of the probe 2 can be enhanced, and any two The connection position where the side edges 221 are adjacent exhibits an arc shape 222. This special arc-shaped 222 design provides good correspondence in assembly and use. When it is necessary to assemble a probe head using a plurality of probes, the second section 22 of the probe 2 according to the present invention provides a maximum cross-sectional design under the condition that the distance between the probes is homologous. As a result, it is possible to meet the needs of suppliers who increase the amount of current and perform related tests.

  Since the second section 22 of the probe 2 is formed by pressing a cylindrical needle, the cross section is close to a square, and the connection position where the two sides are adjacent has an arc shape. Even if an error occurs in processing, the difference between two opposing sides is smaller than one tenth of the distance between any two opposing sides.

  In order to make the process of assembling the probe 2 according to the present invention into a probe head more convenient, easy and quick, the probe 2 according to the present invention has a first section 21 and a second section 22 having different shapes. The length of the first section 21 is shorter than that of the second section 22, and the maximum width A of the cross section of the first section 21 is wider than the minimum width B of the cross section of the second section 22. In this embodiment, the cross section of the first section 21 is circular and the maximum width is equal to the diameter. The cross section of the second section 22 resembles a square, and its minimum width B is the distance between opposite sides. In the present embodiment, the first section 21 local portion projects to the four side edges 221 around the second section 22.

  In the present embodiment, the probe 2A has a first section 21A and a second section 22, as shown in FIGS. 4A and 4B, which are a probe local enlarged view and an end face enlarged view of the second embodiment of the present invention. The cross-sectional shape of the second section 22 is similar to that of the above-described embodiment, but the difference between the two is the shape of the first section 21A. In this embodiment, the cross section of the first section 21A is elliptical, the maximum width A of the cross section of the first section 21 is wider than the minimum width B of the cross section of the second section 22, and the local area of the first section 21A is: Projects to the side 221 of the second section 22.

  In this embodiment, the probe 2B has a first section 21B and a second section 22, as shown in 5A and 5B which are a probe local enlarged view and an end face enlarged view of the third embodiment of the present invention. The cross-sectional shape of the second section 22 is similar to the above-described embodiment, but the difference between them is the shape of the first section 21B. In this embodiment, the cross section of the first section 21B is rectangular, the maximum width A of the cross section of the first section 21B is wider than the minimum width B of the cross section of the second section 22, and the local part of the first section 21B is It projects to the side 221 of the second section 22. As is clear from the above-described embodiment, the cross-sectional shapes of the first sections 21, 21A, and 21B of the different embodiments are different depending on the processing method, and this does not limit the scope of the present invention. All 22 shapes are homologous.

  6 and 7 are a schematic sectional view and a partially enlarged schematic view of a vertical elastic probe head manufactured by operating the present invention. The probe head structure according to the present invention includes a plurality of probes 2, a first fixing plate 3, a second fixing plate 4, a plurality of spacing pieces 5, and a plurality of insulating pieces 6.

As shown in FIGS. 2A and 2B, the probe 2 is an elongated needle body, and has a first section 21 and a second section 22 having different cross-sectional shapes.
The maximum width of the cross section of the first section 21 is wider than the minimum width of the cross section of the second section 22, the cross section of the second section 22 has a square shape, and the connection position where the two side edges 221 are adjacent is an arc shape 222. Presents.
In the present embodiment, the first section 21 is located at the top end, is responsible for contact with the circuit board, and cannot pass through the first fixed plate 3.
In the present embodiment, the probe 2 is a micro metal probe, the cross-sectional size is equal to or smaller than 50 μm, the length is smaller than 10 mm, and the elasticity of the flexible curve is provided.

The first fixing plate 3 and the second fixing plate 4 are limited to the lower position on the second section 22 of the probe 2.
A plurality of first fixed holes 31 are distributed in the first fixed plate 3.
A plurality of second localization holes 41 are distributed in the second fixing plate 4.
The size and shape of the first localization hole 31 and the second localization hole 41 are similar to those of the second section 22.
As shown in FIG. 9, which is an enlarged schematic diagram of the first fixed hole 3, the first fixed hole 31 and the second fixed hole 41 are fine micro holes formed by laser processing. A circular arc surface is formed at the connection position.
Since the second section 22 of the probe 2 according to the present invention has a square shape, and the adjacent sides have an arc surface design, the first localization hole 31 and the second localization hole 41 are compatible.
As shown in FIG. 7, after assembly, the first fixing plate 3 is limited to the second section 22 and cannot pass through the first section 21.

The interval piece 5 is an annular fixed piece (see FIG. 8), and the intermediate hollow area 51 is a distribution area of the plurality of probes 2.
In this embodiment, the space | interval piece 5 is a metal thin piece, the space | interval of each insulation piece 6 is opened, and a position is fixed.
Therefore, the interval piece 5 does not necessarily have to be an annular shape, and may be sufficient as long as the interval between the insulating pieces 6 can be opened and the operation of the probe 2 is not hindered.

A plurality of position limiting holes 61 are distributed in the insulating piece 6, and the position limiting holes 61 are larger than or equal to the lateral size of the second section 22.
At the time of assembly, the plurality of spacing pieces 5 and the plurality of insulating pieces 6 have a method of crossing and overlapping, and are fixed between the first fixing plate 3 and the second fixing plate 4, respectively.
The insulating piece 6 is used to limit the amount of deformation of the probe 2 that bends after receiving pressure, and to install the insulating piece 6 at intervals.
As a result, when the probe 2 is contacted perpendicularly and receives pressure, the sections are curved and deformed with a small arc degree, maintain appropriate strength, avoid excessive bending, and maintain a good contact state with the tip.
In the present embodiment, the insulating piece 6 is made of a transparent plastic material.

At the time of assembly, the plurality of probes 2 are first installed from the top to the bottom into the plurality of first fixed holes 31 of the first fixing plate 3.
Since the cross section of the first section 21 is larger than the fixed hole 31, the first sections 21 of the plurality of probes 2 are limited on the top surface of the first fixing plate 3.
Then turn it upside down.
The spacing piece 5 and the insulating piece 6 are stacked on the first fixed plate 3 in order.
Since the insulating piece 6 is a transparent plastic piece, it is advantageous for assembly, so that the plurality of probes 2 pass through the plurality of position limiting holes 61 and finally the second fixing plate 4 is close to the end of the second section 22. Attach to section.
Thus, the second sections 22 of the plurality of probes 2 pass through the second localization hole 41 to complete the entire assembly operation.
The first fixing plate 3, the second fixing plate 4, and the plurality of spacing pieces 5 can be fixed by penetrating bolts or sandwiched by other constituent members, thus completing the assembly of the probe head.
In the probe 2, the first section 21 protrudes from the first fixing plate 3 and contacts the circuit board, and the second section 22 protrudes from the bottom surface of the second fixing plate 4 and contacts the chip waiting for the test.

  By operating the probe card manufactured according to the present invention, the spacing piece 5 and the insulating piece 6 close to the bottom end of the second section 22 can be taken out in a situation where the needle length of the probe 2 worn out in accordance with use is shortened. Thus, the position of the second fixing plate 4 is raised, the length of the second section 22 protruding from the bottom surface of the second fixing plate 5 is lengthened, and the service life of the probe head can be extended.

In summary, the first section 21 of each probe 2 of the probe head according to the present invention, which has been assembled, protrudes from the top surface of the first fixing plate 3, and the second section 22 is in the first fixed position in order from top to bottom. The holes 31, the plurality of position-limiting holes 61, and the second localization hole 41 are limited, and the plurality of insulating pieces 6 are spaced apart to shape the amount of bending deformation of the probe 2. Good elasticity and strength to accommodate relatively long designs.
In addition, since the cross section of the second section 22 of the probe 2 is designed to be square, this type of vertical probe can withstand a higher amount of current and perform related tests. Overcoming chip test problems.
In addition, the assembly is more accurate due to the design in which the adjacent sides of the probe second section 22 present an arc surface.

DESCRIPTION OF SYMBOLS 11 Probe T Space | interval distance 2 Probe 21 1st section 22 2nd section 221 Side 222 Arc shape 3 1st fixing plate 31 1st fixed hole 4 2nd fixing plate 41 2nd fixed hole 5 Space | interval piece 51 Hollow area 6 Insulating piece 61 Position-limited hole A Maximum width B Minimum width

Claims (9)

The probe is an elongated needle body formed by cylindrical needle pressing, and has a first section and a second section having different cross-sectional shapes,
The second section cross section has a square shape, but the connection position where two side edges are adjacent has an arc shape,
The maximum width of the first section cross-section is wider than the minimum width of the second section cross-section, and the first section local part projects to the side of the second section, and the axial length is shorter than the second section. Probe head structure of the probe and its probe card.   The probe head structure of the probe and its probe card according to claim 1, wherein the cross section of the first section can be at least one of a circle, a rectangle and an ellipse.   The probe head structure of a probe and its probe card according to claim 1, wherein the minimum distance of the second section section is a distance between opposite sides. The probe card probe head structure has a first fixed plate, a second fixed plate, a plurality of spacing pieces, a plurality of insulating pieces, and a plurality of probes.
A plurality of first fixed holes are distributed in the first fixing plate,
A plurality of second localization holes are distributed in the second fixing plate,
In the insulating piece, a plurality of position limiting holes are distributed, and the plurality of spacing pieces and the plurality of insulating pieces intersect and overlap each other, and are disposed between the first fixing plate and the second fixing plate. Fixed,
The probe is an elongated needle body having a first section and a second section having different cross-sectional shapes, the maximum width of the first section section being wider than the minimum width of the second section section, and the first section local area is Projecting to the side of the second section, the section of the second section is square, and the connection position where the two sides are adjacent is arcuate, and the first section of each probe is adjacent to the first fixing plate. The probe and a probe head structure of the probe card, wherein the second section is limited to the first fixed hole, the plurality of position limiting holes, and the second fixed hole.   5. The probe and probe head structure of the probe card according to claim 4, wherein the cross section of the first section can be at least one of a circle, a rectangle and an ellipse.   The probe head structure of the probe and its probe card according to claim 4, wherein the first section cannot pass through the first fixed hole.   5. The probe and probe head structure of the probe card according to claim 4, wherein shapes of the first fixed position, the position limiting hole, and the second localization hole are similar to the shape of the second section cross section. .   5. The probe head structure according to claim 4, wherein the insulating piece is a transparent plastic piece.   5. The probe and probe head structure of the probe and its probe card according to claim 4, wherein the spacing piece is an annular fixed piece, and the intermediate hollow area is a distribution area of the plurality of probes.

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