JP2018059852A - 力センサの製造方法、および、力センサ - Google Patents
力センサの製造方法、および、力センサ Download PDFInfo
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- JP2018059852A JP2018059852A JP2016198484A JP2016198484A JP2018059852A JP 2018059852 A JP2018059852 A JP 2018059852A JP 2016198484 A JP2016198484 A JP 2016198484A JP 2016198484 A JP2016198484 A JP 2016198484A JP 2018059852 A JP2018059852 A JP 2018059852A
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- force sensor
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- Pressure Sensors (AREA)
Abstract
Description
101 変形部
102 検出部
106 基礎部材
107 弾性部
111 中心孔
112 分割孔
113 接続部
121 貫通孔
122 素子部
123 帯状部
124 架橋部
125 端子部
161 保持部
201 シリコン層
202 酸化シリコン層
301 押圧部材
302 球体
Claims (8)
- MEMS(Micro Electro Mechanical Systems)としての力センサの製造方法であって、
半導体製の基礎部材の一部表面に所定の元素を付着させ、
前記基礎部材を加熱しながら、
所定の元素が付着した部分、および、その近傍を押圧部材により押圧し、
前記元素を前記基礎部材の表層部に拡散させながら、塑性変形させる
力センサの製造方法。 - 前記基礎部材を押圧部材により押圧する前に、前記基礎部材に貫通状の中心孔を設け、
前記中心孔に球体の一部をはめ込み、
前記球体を介して前記押圧部材により前記元素が付着した部分、および、その近傍を押圧する
請求項1に記載の力センサの製造方法。 - 前記基礎部材を押圧部材により押圧する前に、前記基礎部材の厚さ方向に貫通する孔を複数箇所に設ける
請求項1または2に記載の力センサの製造方法。 - MEMS(Micro Electro Mechanical Systems)としての力センサであって、
半導体製の板状の基礎部材の一部が板面から突出するように湾曲する変形部と、
前記変形部の湾曲している表層の一部に素子部が設けられる検出部と
を備える力センサ。 - 前記変形部の形状はドーム形状であり、
前記検出部は、前記変形部の頂点を中心とする円周上に並んで複数箇所に配置される
請求項4に記載の力センサ。 - 前記変形部の頂点部分に貫通状の中心孔を備える
請求項5に記載の力センサ。 - 前記変形部は、
隣り合う前記検出部の間に設けられる貫通状の分割孔を備える
請求項5または6に記載の力センサ。 - 前記検出部は、
厚さ方向に貫通する貫通孔を備える
請求項4から7のいずれか1項に記載の力センサ。
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JP2016198484A JP6777929B2 (ja) | 2016-10-06 | 2016-10-06 | 力センサの製造方法、および、力センサ |
Publications (2)
Publication Number | Publication Date |
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JP2018059852A true JP2018059852A (ja) | 2018-04-12 |
JP6777929B2 JP6777929B2 (ja) | 2020-10-28 |
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