JP2018058165A - Workpiece holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece holder which can stably rotate a workpiece to process the workpiece having good surface accuracy.SOLUTION: A workpiece holder holds a workpiece which is a process object and includes: a rotor in which a workpiece bonding jig including the workpiece bonded thereto is attached and which rotates with the workpiece bonding jig; a receiving member which is formed with a passage for supplying a fluid to an interface with the rotor and receives the rotor; and a housing which houses the receiving member and is formed with a compression hole for supplying a compressed fluid to the receiving member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a workpiece holder that holds a workpiece in workpiece grinding or polishing.

  2. Description of the Related Art Conventionally, a lens holder is known as a workpiece holder that holds a lens so that it can rotate and swing when a lens, which is an example of a workpiece, is ground or polished (see, for example, Patent Document 1). The lens and the lens holder rotate and swing according to the movement of a grindstone that grinds or polishes the lens.

  Patent Document 2 discloses a mechanism for forcibly rotating a lens holder using a magnet.

Japanese Unexamined Patent Publication No. Sho 63-120072 JP 2001-310252 A

  However, in the workpiece holder of Patent Document 1, for example, when the lens to be processed is an extremely small lens having a diameter of 5 mm or less, the lens and the lens holder that follow the rotation of the grindstone cannot be sufficiently rotated and processed. In some cases, the surface accuracy of the lens deteriorates.

  Further, in the work holder of Patent Document 2, water, sludge, abrasives, etc. are scattered on the bearing, and the bearing is deteriorated, so that the rotation resistance becomes high, and it becomes difficult to forcibly rotate the lens holder by the magnet. there were. When the forced rotation of the lens holder is attenuated, the surface accuracy of the processed lens may be lowered.

  This invention is made | formed in view of the above, Comprising: It aims at providing the workpiece | work holder which can rotate the workpiece | work stably and can process the workpiece | work which has favorable surface accuracy.

  In order to solve the above-described problems and achieve the object, a workpiece holder according to an aspect of the present invention is a workpiece holder that holds a workpiece to be processed, and the workpiece is attached to the workpiece. A sticking jig is mounted, a rotating body that rotates together with the work sticking jig, a flow path that supplies a fluid to an interface between the rotating body, a receiving member that receives the rotating body, A housing for housing the receiving member, wherein the housing is formed with a pressurizing hole for supplying a pressurized fluid to the receiving member.

  The workpiece holder according to an aspect of the present invention includes a pivot bearing structure that rotates the rotating body relative to the housing, and the rotating body has a diameter larger than at least a part of the receiving member. A retaining portion is formed.

  In the work holder according to one aspect of the present invention, the rotating body has a shaft portion that passes through a center of the pivot bearing structure, and the shaft portion can be rotated by power from a motor. And

  The workpiece holder according to one aspect of the present invention is characterized in that the receiving member is made of a porous member.

  Moreover, the workpiece holder according to an aspect of the present invention is characterized in that the porous member is formed using a metal, an alloy, or a ceramic.

  In the workpiece holder according to an aspect of the present invention, the fluid is air, and the receiving member is a porous member formed using metal, and bubbles having a diameter of 1 to 100 μm are provided. It is characterized by.

  In the workpiece holder according to one aspect of the present invention, the receiving member has an annular groove formed on an inner peripheral surface that contacts the rotating body or an outer peripheral surface that contacts the housing. And

  The workpiece holder according to one aspect of the present invention is characterized in that the workpiece has a diameter of 5 mm or less.

  ADVANTAGE OF THE INVENTION According to this invention, the workpiece holder which can rotate a workpiece | work stably and can process the workpiece | work which has favorable surface accuracy is realizable.

FIG. 1 is a schematic cross-sectional view showing a configuration of a lens processing apparatus including a workpiece holder according to Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view of the receiving member and the housing shown in FIG. FIG. 3 is a perspective view illustrating an example of a swing member attached to the housing illustrated in FIG. 1. FIG. 4 is a schematic cross-sectional view illustrating a configuration of a lens processing apparatus including a workpiece holder according to Modification 1 of Embodiment 1. FIG. 5 is a schematic cross-sectional view illustrating a configuration of a lens processing apparatus including a workpiece holder according to Modification 2 of Embodiment 1. 6 is a cross-sectional view of the receiving member and the housing shown in FIG. FIG. 7 is a schematic cross-sectional view showing a configuration of a lens processing apparatus including a workpiece holder according to Embodiment 2 of the present invention. FIG. 8 is a schematic cross-sectional view showing a configuration of a lens processing apparatus including a workpiece holder according to Embodiment 3 of the present invention.

  Embodiments of a workpiece holder according to the present invention will be described below with reference to the drawings. Note that the present invention is not limited to these embodiments. In the following embodiments, a lens holder for holding a lens will be described as an example, but the present invention can be applied to a workpiece holder in general.

  In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals as appropriate. It should be noted that the drawings are schematic, and the relationship between the dimensions of each element, the ratio of each element, and the like may differ from the actual situation. Even between the drawings, there are cases in which portions having different dimensional relationships and ratios are included.

(Embodiment 1)
FIG. 1 is a schematic cross-sectional view showing a configuration of a lens processing apparatus including a workpiece holder according to Embodiment 1 of the present invention. As shown in FIG. 1, the lens processing apparatus 100 is disposed so as to face a lens holder 2 as a workpiece holder that holds a lens 1 as a workpiece to be processed, and to sandwich the lens holder 2 and the lens 1. A grindstone holder 3.

  The lens 1 is a lens made of extremely small glass having a diameter of 5 mm or less, for example, for an endoscope. However, the workpiece to be processed may be a crystal material other than glass, a lens made of ceramic or the like, an optical element such as a mirror, or a workpiece such as a molding die.

  The lens holder 2 is mounted with a lens sticking jig 21 as a work sticking jig to which the lens 1 is stuck and a lens sticking jig 21, and rotates around the axis O 1 together with the lens sticking jig 21. A rotating member 22, a receiving member 23 that receives the rotating member 22, a housing 24 that houses the receiving member 23, and a strus bearing 25 that rotates the rotating member 22 relative to the housing 24.

  The lens 1 is bonded to the lens sticking jig 21 with wax or the like. A shaft portion is formed on the opposite side of the lens sticking jig 21 from the lens 1 and is inserted into the concave portion of the rotating body 22.

  A magnet 22a is attached to the bottom of the recess in which the shaft portion of the lens sticking jig 21 of the rotating body 22 is inserted. When the magnet 22a attracts the lens sticking jig 21 made of metal, the lens sticking jig 21 is attached to be rotatable around the axis O1. The rotating body 22 has a diameter larger than that of the receiving member 23, and is formed with a retaining portion 22 b that prevents the rotating body 22 from falling off the receiving member 23.

  The receiving member 23 is made of a porous member formed of stainless steel, a metal such as a trunk or an alloy, or a ceramic such as alumina or SiC. The porous member is a member formed so that bubbles are connected to each other. FIG. 2 is a cross-sectional view of the receiving member and the housing shown in FIG. FIG. 2 is a cross-sectional view corresponding to the line AA in FIG. As shown in FIGS. 1 and 2, the receiving member 23 communicates with a pressurizing hole 24 a of a housing 24 described later as a flow path for supplying a fluid, for example, compressed air, to the interface with the rotating body 22. A through hole 23 a and an annular groove 23 b provided on the inner peripheral surface that is in communication with the through hole 23 a and is in contact with the rotating body 22 are formed. Furthermore, since the receiving member 23 is a porous member, the air supplied to the groove portion 23b is diffused through the bubbles and released from the outer surface of the receiving member 23. That is, bubbles in the porous member serve as a fluid flow path. The fluid is, for example, air, but may be another gas or a liquid such as water or oil. When the fluid is air, the bubbles of the porous member preferably have a diameter of about 1 to 100 μm, for example.

  The housing 24 is formed with a pressurizing hole 24 a for supplying pressurized air to the receiving member 23. In addition, the housing 24 is formed with an escape hole 24b through which air supplied from the pressurizing hole 24a is released. FIG. 3 is a perspective view illustrating an example of a swing member attached to the housing illustrated in FIG. 1. A U-shaped rocking member 26 and a rocking member 27 shown in FIG. 3 are combined and attached to the outer periphery of the housing 24, and a rotation shaft (not shown) is inserted into the hole 26a and the hole 27a. As a result, the entire lens holder 2 including the housing 24 can be swung in the left-right direction in FIG. 1 about an axis (not shown) perpendicular to the paper surface in FIG. 1, and the axis O2 in FIG. The center is swingable in the front-rear direction of FIG. Therefore, the lens holder 2 swings following the swing of the grindstone holder 3, and the lens 1 and a grindstone 31 described later are kept in contact with each other.

  The strass bearing 25 receives a load applied from the grindstone holder 3 through the lens 1 when the lens 1 is processed.

  The grindstone holder 3 includes a grindstone 31 that abuts on the lens 1 to polish or grind the lens 1, and a grindstone rotating shaft 32 to which the grindstone 31 is fixed. The grindstone 31 is fixed to the grindstone rotating shaft 32 with an adhesive or the like.

  The grindstone rotating shaft 32 rotates around the axis O3 in FIG. 1 by power from a motor (not shown). Then, the lens 1 and the lens holder 2 are driven by the frictional force between the lens 1 and the grindstone 31, and rotate around the axis O1. Further, the grindstone rotating shaft 32 swings in the direction of the arrow in FIG. 1 about an axis (not shown) perpendicular to the paper surface of FIG. Then, according to the rocking of the grindstone rotating shaft 32, the lens 1 and the lens holder 2 are driven to rock in the front-rear direction and the left-right direction in FIG.

  Here, when the lens 1 is processed, when compressed air is supplied from the pressure hole 24a of the lens holder 2 (arrow A1 in FIG. 1), the receiving member made of the through hole 23a, the groove 23b, and the porous member. Air is released from the escape holes 24b and the gaps between the rotating body 22 and the receiving member 23 through the bubbles 23 (arrow A2 and arrow A3 in FIG. 1). At this time, a slight gap is formed between the rotating body 22 and the receiving member 23 due to the pressure of the compressed air, and the contact resistance between the rotating body 22 and the receiving member 23 is lost. As a result, the lens holder 2 easily follows the grindstone 31 even if the lens 1 is a very small lens. Therefore, the lens holder 2 is a workpiece holder that can stably rotate the workpiece and process a workpiece having good surface accuracy.

  Further, in the lens holder 2, the strus bearing 25 is accommodated in the housing 24, and water, sludge, and abrasives are released by the air released from the clearance holes 24 b and the gaps between the rotating body 22 and the receiving member 23. Etc., it is possible to prevent water, sludge, abrasives and the like from adhering to the strus bearing 25. As a result, in the lens holder 2, it is prevented that the strus bearing 25 deteriorates. Therefore, the lens holder 2 is a workpiece holder that can stably rotate the workpiece and process a workpiece having good surface accuracy. Further, when the strus bearing 25 is deteriorated, it is necessary to replace the strus bearing 25. However, in the lens holder 2, the effort and cost for replacing the strus bearing 25 can be reduced.

  When the receiving member 23 is made of a porous member, the fluid reaches the interface with the rotator 22 using bubbles as a flow path even if the through hole 23a and the groove 23b are not formed in the receiving member 23. Therefore, the through hole 23 a and the groove 23 b may not be formed in the receiving member 23.

(Modification 1)
FIG. 4 is a schematic cross-sectional view illustrating a configuration of a lens processing apparatus including a workpiece holder according to Modification 1 of Embodiment 1. As shown in FIG. 4, in the lens processing apparatus 100 </ b> A, the receiving member 23 </ b> A of the lens holder 2 </ b> A as a work holder is used as a flow path for supplying a fluid such as compressed air to the interface with the rotating body 22. An annular groove 23 </ b> Aa is formed on the outer peripheral surface that is in communication with the 24 pressure holes 24 a and is in contact with the housing 24. Furthermore, since the receiving member 23A is a porous member, the air supplied to the groove 23Aa is diffused through the bubbles and is released from the outer surface of the receiving member 23A. As described above, even if the groove 23Aa is not formed on the inner peripheral surface side, air is diffused by the bubbles of the receiving member 23A, and a slight gap is formed between the rotating body 22 and the receiving member 23A. The contact resistance between the rotating body 22 and the receiving member 23A is lost. Therefore, the lens holder 2A is a workpiece holder that can stably rotate the workpiece and process the workpiece having good surface accuracy.

(Modification 2)
FIG. 5 is a schematic cross-sectional view illustrating a configuration of a lens processing apparatus including a workpiece holder according to Modification 2 of Embodiment 1. 6 is a cross-sectional view of the receiving member and the housing shown in FIG. 6 is a cross-sectional view corresponding to the line BB in FIG. As shown in FIGS. 5 and 6, in the lens processing apparatus 100 </ b> B, a flow path for supplying a fluid, for example, compressed air, to the interface with the rotating body 22 in the receiving member 23 </ b> B of the lens holder 2 </ b> B as a work holder. As shown, a groove 23Ba communicating with the pressurizing hole 24a of the housing 24 and a plurality of pores 23Bb extending from the groove 23Ba toward the inner peripheral surface of the rotating body 22 are formed. The receiving member 23B may be a porous member, but may not be a porous member. When the receiving member 23B is not a porous member, the air supplied from the groove 23Ba is discharged from the pores 23Bb, so that a slight gap is formed between the rotating body 22 and the receiving member 23B. The contact resistance between the body 22 and the receiving member 23B is eliminated. Accordingly, the lens holder 2B is a workpiece holder that can stably rotate the workpiece and process a workpiece having good surface accuracy.

(Embodiment 2)
FIG. 7 is a schematic cross-sectional view showing a configuration of a lens processing apparatus including a workpiece holder according to Embodiment 2 of the present invention. As shown in FIG. 7, in the lens processing apparatus 200, only the rotating body 222 and the pivot bearing structure 225 of the lens holder 202 are different from the lens processing apparatus 100 of the first embodiment, and other configurations are the lens processing. Since it is the same as the apparatus 100, description is abbreviate | omitted suitably. The lens holder 202 includes a pivot bearing structure 225 that rotates the rotating body 222 with respect to the housing 24.

  A magnet 222a is attached to the recess of the rotating body 222 where the lens sticking jig 21 is inserted. The rotating body 222 is formed with a retaining portion 222b that prevents the rotating body 222 from falling off the receiving member 23. The outer diameter of the retaining portion 22b of the first embodiment is larger than the inner diameter of the receiving member 23, but the outer diameter of the retaining portion 222b of the second embodiment is at least one of the inner diameters of the receiving member 23. It is larger than the part. Thus, the shape of the retaining portion is not particularly limited. Further, a conical portion 222 c is formed on the opposite side of the rotating body 222 from the lens 1. When the conical portion 222c contacts the pivot bearing structure 225, the pivot bearing structure 225 receives a load applied from the grindstone holder 3 through the lens 1 when the lens 1 is processed, and the rotating body 222 is Positioned. In the lens holder 202, by using the pivot bearing structure 225, the rotational resistance can be further reduced as compared with the case of the first embodiment.

  Thus, the structure for receiving the load applied from the grindstone holder 3 via the lens 1 when processing the lens 1 is not limited to the strus bearing, and is not particularly limited as long as it has a low rotational resistance.

(Embodiment 3)
FIG. 8 is a schematic cross-sectional view showing a configuration of a lens processing apparatus including a workpiece holder according to Embodiment 3 of the present invention. As shown in FIG. 8, in the lens processing apparatus 300, only the rotating body 322, the pivot bearing structure 325, and the motor unit 303 of the lens holder 302 are different from the lens processing apparatus 100 according to the first embodiment, and the others. Since the configuration is the same as that of the lens processing apparatus 100, description thereof will be omitted as appropriate. The lens holder 302 includes a pivot bearing structure 325 that rotates the rotating body 322 relative to the housing 24.

  A magnet 322a is attached to the recess of the rotating body 322 in which the lens sticking jig 21 is inserted. The rotating body 322 is formed with a retaining portion 322b that prevents the rotating body 322 from falling off the receiving member 23. The outer diameter of the retaining portion 322b is larger than at least a part of the inner diameter of the receiving member 23. Further, a conical portion 322 c is formed on the opposite side of the rotating body 322 from the lens 1. When the conical portion 322c contacts the pivot bearing structure 325, the pivot bearing structure 325 receives a load applied from the grindstone holder 3 through the lens 1 when the lens 1 is processed, and the rotating body 322 is Positioned.

  Further, the rotating body 322 is arranged circumferentially on the shaft portion 322d penetrating the center of the pivot bearing structure 325, the disk-shaped pedestal portion 322e formed at the tip of the shaft portion 322d, and the pedestal portion 322e. Magnet 322f.

  The motor part 303 includes a motor 303a for supplying power, a shaft part 303b that is rotated by the power from the motor 303a, a disk-like pedestal part 303c formed at the tip of the shaft part 303b, and a circular part on the pedestal part 303c. And a magnet 303d arranged in a circumferential shape.

  When the motor 303a of the motor section 303 is driven, the shaft section 303b, the pedestal section 303c, and the magnet 303d rotate integrally around the axis O1 in FIG. Then, due to the magnetic force from the magnet 303d, the magnet 322f disposed so as to face the magnet 303d rotates about the axis O1, and the rotating body 322, the lens attaching jig 21, and the lens 1 center about the axis O1. Rotate to. That is, the shaft portion 303b of the rotating body 322 can be rotated by the power from the motor 303a.

  As described above, the lens holder 302 is forced to rotate by the motor 303a without being driven by the grindstone 31. Therefore, for example, even if the lens 1 to be processed is a minute lens having a diameter of 1 mm or less, the lens holder 302 rotates. Therefore, the lens holder 302 is a workpiece holder that can stably rotate the workpiece and process a workpiece having good surface accuracy.

  Further, in the lens holder 302, the pivot bearing structure 325 is accommodated in the housing 24, and water, sludge, and polishing are performed by the air released from the clearance hole 24 b and the gap between the rotating body 322 and the receiving member 23. Blowing off the material and the like prevents water, sludge, abrasives and the like from adhering to the pivot bearing structure 325. As a result, in the lens holder 302, the pivot bearing structure 325 is prevented from being deteriorated. Therefore, the lens holder 302 is a workpiece holder that can stably rotate the workpiece and process a workpiece having good surface accuracy.

  Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

DESCRIPTION OF SYMBOLS 1 Lens 2, 2A, 2B, 202, 302 Lens holder 3 Grindstone holder 21 Lens sticking jig 22, 222, 322 Rotating body 22a, 222a, 303d, 322a, 322f Magnet 22b, 222b, 322b Retaining part 23, 23A, 23B Receiving member 23a Through hole 23b, 23Aa, 23Ba Groove 23Bb Porous 24 Housing 24a Pressurizing hole 24b Relief hole 25 Strath bearing 26, 27 Oscillating member 26a, 27a Hole 31 Grinding stone 32 Grinding wheel rotating shaft 100, 100A, 100B , 200, 300 Lens processing device 222c, 322c Conical part 225, 325 Pivot bearing structure 303 Motor part 303a Motor 303b, 322d Shaft part 303c, 322e Base part

Claims (8)

A workpiece holder for holding a workpiece to be machined,
A work pasting jig on which the work is pasted is mounted, and a rotating body that rotates together with the work pasting jig;
A flow path for supplying fluid to the interface with the rotating body is formed, and a receiving member for receiving the rotating body;
A housing for housing the receiving member, wherein a pressure hole for supplying a pressurized fluid to the receiving member is formed;
A workpiece holder characterized by comprising: A pivot bearing structure for rotating the rotating body with respect to the housing;
The work holder according to claim 1, wherein a retaining portion having a diameter larger than at least a part of the receiving member is formed on the rotating body.   The work holder according to claim 2, wherein the rotating body has a shaft portion that passes through a center of the pivot bearing structure, and the shaft portion can be rotated by power from a motor.   The workpiece holder according to claim 1, wherein the receiving member is a porous member.   The work holder according to claim 4, wherein the porous member is formed using a metal, an alloy, or a ceramic. The fluid is air;
The workpiece according to any one of claims 1 to 5, wherein the receiving member is made of a porous member made of metal, and is provided with bubbles having a diameter of 1 to 100 µm. Retaining tool.   7. The receiving member according to claim 1, wherein an annular groove is formed on an inner peripheral surface that contacts the rotating body or an outer peripheral surface that contacts the housing. Work holding tool.   The workpiece holder according to any one of claims 1 to 7, wherein the workpiece has a diameter of 5 mm or less.

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