JP2018056309A - Semiconductor device - Google Patents

Semiconductor device Download PDF

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JP2018056309A
JP2018056309A JP2016190177A JP2016190177A JP2018056309A JP 2018056309 A JP2018056309 A JP 2018056309A JP 2016190177 A JP2016190177 A JP 2016190177A JP 2016190177 A JP2016190177 A JP 2016190177A JP 2018056309 A JP2018056309 A JP 2018056309A
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die pad
semiconductor device
semiconductor chip
side wall
lead
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JP6869602B2 (en
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真 竹沢
Makoto Takezawa
真 竹沢
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Ablic Inc
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Ablic Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/32257—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic the layer connector connecting to a bonding area disposed in a recess of the surface of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor device capable of suppressing flash burrs generated on a rear face of a die pad.SOLUTION: In a semiconductor device, a semiconductor chip 4 is placed on a recessed part 20 of a die pad 2. A lead inner part of a lead provided around the die pad, and the semiconductor chip 4 are electrically connected with each other via a bonding wire. The semiconductor device is covered with an encapsulation resin 8 except for a rear face of the die pad.SELECTED DRAWING: Figure 1

Description

本発明は、半導体装置に関するものである。   The present invention relates to a semiconductor device.

近年における電子デバイスは、電力消費の削減や環境負荷低減の為の低消費電流動作が要求されている。さらに、車載に代表される高温環境下での安定した高信頼動作が要求されている。電子デバイスの主たる構成を担う半導体デバイスも一種の抵抗と見なすことができ、電流が流れると、オン抵抗（電気を流したときの内部抵抗）に応じた熱を発生することになる。発生した熱は、半導体デバイスそのものに対してはもちろん、それを組み込んだ電子機器にもさまざまな悪影響を及ぼすことから、こうした熱による悪影響を回避するために、半導体パッケージの熱対策が不可欠となっている。半導体デバイスにおける熱は熱源となる半導体チップから最終的な熱の放出先となる空気へ放熱されるが、放熱される熱の大半は外部端子からプリント基板に熱伝導し、空気へと伝達する経路である。従って、半導体デバイスからプリント基板への放熱を促す構造が重要である。放熱性の高い半導体装置として、ダイパッドの裏面を封止樹脂から露出したものが提案されている（例えば、特許文献１参照）。   In recent years, electronic devices are required to operate with low current consumption for reducing power consumption and environmental load. Furthermore, stable and reliable operation in a high temperature environment typified by in-vehicle is required. A semiconductor device responsible for the main configuration of an electronic device can also be regarded as a kind of resistance. When a current flows, heat corresponding to on-resistance (internal resistance when electricity is passed) is generated. The generated heat has various adverse effects not only on the semiconductor device itself but also on the electronic equipment in which it is incorporated. Therefore, in order to avoid the adverse effects of such heat, it is essential to take measures against heat from the semiconductor package. Yes. The heat in a semiconductor device is radiated from the semiconductor chip that is the heat source to the air that is the final heat release destination, but most of the radiated heat is transferred from the external terminals to the printed circuit board and transferred to the air. It is. Therefore, a structure that promotes heat dissipation from the semiconductor device to the printed circuit board is important. As a semiconductor device having high heat dissipation, a semiconductor device in which the back surface of a die pad is exposed from a sealing resin has been proposed (for example, see Patent Document 1).

特開平９−１９９６３９号公報JP-A-9-199639 特願平１１−９５１８５号公報Japanese Patent Application No. 11-95185

しかしながら、この構造を有する半導体装置は、樹脂封止する際にダイパッド裏面と金型との間に樹脂が流れ込み、フラッシュバリと呼ばれる薄いバリが容易に形成されてしまう。そこで、フラッシュバリは放熱性を著しく阻害するため、放熱板の外周部へ溝を設けて流入を防ぐものが提案されている。（例えば、特許文献２参照）   However, in the semiconductor device having this structure, when the resin is sealed, the resin flows between the back surface of the die pad and the mold, and a thin burr called a flash burr is easily formed. In view of this, a flash burr has been proposed to prevent inflow by providing a groove in the outer peripheral portion of the heat radiating plate in order to significantly hinder heat dissipation. (For example, see Patent Document 2)

特許文献２に示された半導体装置では、ダイパッドに対して搭載する半導体チップの平面積が変化すると、それに伴ってフラッシュバリの発生量も変化し、流出防止の溝を越えて裏面放熱板の全面へ流れだしてしまうことがある。フラッシュバリ１０が付着形成された場合、これを除去するためには電解バリ浮かしやアルカリ無電解浸漬など技術的に高度な工程を付加する必要がある。   In the semiconductor device disclosed in Patent Document 2, when the plane area of the semiconductor chip mounted on the die pad is changed, the amount of flash burrs is also changed, and the entire surface of the backside heat sink is moved beyond the outflow prevention groove. May start to flow. When the flash burr 10 is deposited and formed, it is necessary to add a technically advanced process such as electrolytic burr floating or alkaline electroless dipping to remove the flash burr 10.

本発明は、上記課題に鑑み成されたもので、ラッシュバリが形成されても容易に除去することが可能な放熱性の高い半導体装置を得ることを目的とするものである。   The present invention has been made in view of the above problems, and an object of the present invention is to obtain a semiconductor device with high heat dissipation that can be easily removed even if a lash burr is formed.

上述の課題を解決するために以下の手段を用いた。
ダイパッド上に載置された半導体チップと、前記ダイパッドの周囲に設けられたリードと、前記リードのリードインナー部と前記半導体チップを電気的に接続するボンディングワイヤと、前記半導体チップおよび前記ダイパッドと前記ボンディングワイヤとを被覆する封止樹脂と、からなる半導体装置であって、前記ダイパッドの裏面は前記封止樹脂から露出し、前記裏面と反対側の前記ダイパッドの中央部上面には凹部が設けられ、前記凹部内に前記半導体チップが載置されていることを特徴とする半導体装置とした。 In order to solve the above-mentioned problems, the following means were used.
A semiconductor chip mounted on a die pad; a lead provided around the die pad; a lead inner portion of the lead; a bonding wire for electrically connecting the semiconductor chip; the semiconductor chip and the die pad; A sealing resin that covers a bonding wire, wherein the back surface of the die pad is exposed from the sealing resin, and a concave portion is provided on the upper surface of the central portion of the die pad opposite to the back surface. The semiconductor device is characterized in that the semiconductor chip is placed in the recess.

上記手段を用いることで、ダイパッド裏面にフラッシュバリが固着しても容易に除去することが可能で、良好な放熱性を有する半導体装置とすることができる。   By using the above means, even if flash burrs are fixed to the back surface of the die pad, they can be easily removed, and a semiconductor device having good heat dissipation can be obtained.

本発明の実施例である半導体装置の平面図である。It is a top view of the semiconductor device which is an Example of this invention. 本発明の実施例である半導体装置の断面図である。It is sectional drawing of the semiconductor device which is an Example of this invention. 本発明の実施例である半導体装置の要部拡大断面図である。It is a principal part expanded sectional view of the semiconductor device which is an Example of this invention. 本発明の実施例である半導体装置の工程途中における断面図である。It is sectional drawing in the middle of the process of the semiconductor device which is an Example of this invention. 本発明の実施例である半導体装置の変形例の断面図である。It is sectional drawing of the modification of the semiconductor device which is an Example of this invention. 本発明の実施例である半導体装置の変形例の平面図である。It is a top view of the modification of the semiconductor device which is an Example of this invention. 本発明の実施例である半導体装置の製造フローである。2 is a manufacturing flow of a semiconductor device according to an embodiment of the present invention. 従来構造の半導体装置の工程途中における断面図である。It is sectional drawing in the middle of the process of the semiconductor device of a conventional structure. 従来構造の半導体装置の工程途中における断面図である。It is sectional drawing in the middle of the process of the semiconductor device of a conventional structure.

発明者がフラッシュバリの発生状況について鋭意調査したところ、以下の様な知見が得られた。これについて図８および図９を用いて説明する。   As a result of an in-depth investigation on the occurrence of flash burrs by the inventors, the following findings were obtained. This will be described with reference to FIGS.

図８および図９は、従来構造の半導体装置の樹脂封止工程を図示したものである。図８（ａ）、（ｂ）はダイパッドに対して半導体チップの平面積が比較的小さく、図９（ａ）、（ｂ）はダイパッドに対して半導体チップの平面積が比較的大きい例である。図８（ａ）および図９（ａ）は樹脂封止前の図であり、図８（ｂ）および図９（ｂ）は樹脂封止後の図である。   8 and 9 illustrate a resin sealing process of a semiconductor device having a conventional structure. FIGS. 8A and 8B are examples in which the planar area of the semiconductor chip is relatively small with respect to the die pad, and FIGS. 9A and 9B are examples in which the planar area of the semiconductor chip is relatively large with respect to the die pad. . FIG. 8A and FIG. 9A are diagrams before resin sealing, and FIG. 8B and FIG. 9B are diagrams after resin sealing.

ダイパッド２に載置された半導体チップ４は、ボンディングワイヤ６を介してリード５と電気的に接続された状態で上下の金型１１、１２に収納される。その後、上下金型１１、１２で形成されるキャビティ（符号８で示した領域）にゲート９から樹脂８が充填され封止される。このとき、ダイパッド２の底面２aと下金型１１の上面との隙間に封止材８が入り込むことになる。   The semiconductor chip 4 placed on the die pad 2 is accommodated in the upper and lower molds 11 and 12 while being electrically connected to the lead 5 via the bonding wire 6. Thereafter, resin (8) is filled from the gate 9 into the cavity (region indicated by reference numeral 8) formed by the upper and lower molds 11 and 12 and sealed. At this time, the sealing material 8 enters the gap between the bottom surface 2 a of the die pad 2 and the upper surface of the lower mold 11.

図８（ａ）、（ｂ）に示す通り、ダイパッド２に対して半導体チップ４の平面積が小さいと、ゲート９から封止材８を充填する際に、半導体チップ４の最外周がダイパッド２の最外周付近に位置しないことにより、その直下にあるダイパッド底面２ａの最外周からダイパッド底面２ａ全面への封止材８の流動抵抗が小さくなり、ダイパッド底面２aを下金型１１の上面へ押し付ける力が弱くなる影響からフラッシュバリ１０の付着形成が増大する。逆に、図９（ａ）、（ｂ）に示している通り、ダイパッド２に対して半導体チップ４の平面積が大きいと封止材８の流動抵抗は増大してフラッシュバリ１０の付着形成が抑制されると考えられる。   As shown in FIGS. 8A and 8B, when the planar area of the semiconductor chip 4 is small with respect to the die pad 2, when the sealing material 8 is filled from the gate 9, the outermost periphery of the semiconductor chip 4 is the die pad 2. Is not located near the outermost periphery of the die pad, the flow resistance of the sealing material 8 from the outermost periphery of the die pad bottom surface 2a immediately below it to the entire die pad bottom surface 2a is reduced, and the die pad bottom surface 2a is pressed against the upper surface of the lower mold 11 The adhesion formation of the flash burr 10 increases due to the influence of the weak force. On the contrary, as shown in FIGS. 9A and 9B, when the plane area of the semiconductor chip 4 is large with respect to the die pad 2, the flow resistance of the sealing material 8 increases and the flash burr 10 is attached and formed. It is thought to be suppressed.

本発明は、以上の知見に基づきなされたもので、ダイパッドの平面積に対し半導体チップの平面積が小さい場合であってもフラッシュバリの発生を抑制できる半導体装置を提供するものである。   The present invention has been made based on the above knowledge, and provides a semiconductor device capable of suppressing the occurrence of flash burrs even when the plane area of a semiconductor chip is smaller than the plane area of a die pad.

以下、本発明の実施形態について図を用いて説明する。
図１は、本発明の実施例である半導体装置の断面図である。樹脂封止型の半導体装置１６は、半導体チップ４と、半導体チップ４を固定するダイパッド２と、ダイパッド２の周辺から外側に延在されたリード５とを備えている。半導体チップ４は、例えば、半導体基板と、半導体基板上に設けられた配線層などで構成されるものであり、ダイパッド２に接着剤３にて接着固定されている。ダイパッド２及びリード部５は、導電性を有するものであり、例えば、Ｆｅ−Ｎｉ合金やＣｕ合金等の金属で形成されている。リードインナー部５ａが導電性を有するボンディングワイヤ６を介して半導体チップ４上のパッドと電気的に接続されている。なお、ボンディングワイヤ６には、金線や銅線が用いられる。半導体チップ４とボンディングワイヤ６とリードインナー部５ａとダイパッド２の上面及び側面は封止樹脂８によって覆われている。一方、ダイパッド２の底面２ａは封止樹脂８により覆われてなく、外部へ露出している。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view of a semiconductor device according to an embodiment of the present invention. The resin-encapsulated semiconductor device 16 includes a semiconductor chip 4, a die pad 2 that fixes the semiconductor chip 4, and leads 5 that extend outward from the periphery of the die pad 2. The semiconductor chip 4 is composed of, for example, a semiconductor substrate and a wiring layer provided on the semiconductor substrate, and is bonded and fixed to the die pad 2 with an adhesive 3. The die pad 2 and the lead part 5 have conductivity, and are formed of a metal such as an Fe—Ni alloy or a Cu alloy, for example. The lead inner portion 5a is electrically connected to a pad on the semiconductor chip 4 through a conductive bonding wire 6. The bonding wire 6 is a gold wire or a copper wire. The upper surface and side surfaces of the semiconductor chip 4, the bonding wire 6, the lead inner portion 5 a, and the die pad 2 are covered with a sealing resin 8. On the other hand, the bottom surface 2a of the die pad 2 is not covered with the sealing resin 8 and is exposed to the outside.

ダイパッド２に搭載する半導体チップ４の平面積が変化すると、それに伴ってフラッシュバリ１０の発生量も変化し、フラッシュバリ１０がダイパッド２の底面２ａの外周部から中心に向けて流れ込むことになる。既に説明したように、図７はそのような状態を表しており、ダイパッド２の平面積に対して搭載する半導体チップ４の平面積が小さいとフラッシュバリ１０の発生量は増大する。そこで、このフラッシュバリの発生を回避するために、本実施例では図１に示す通り、半導体チップ４の周囲に側壁１を設けた。ダイパッド２は上面に側壁１に囲まれた凹部２０を有し、その凹部２０の底部に接着剤３を介して半導体チップ４を接着固定している。図１では、側壁１は半導体チップ４の近傍からダイパッド２の最外周までに及ぶ領域に設けられているが、この側壁１は半導体チップ４から離れた最外周領域のみに設けられていても良い。なお、側壁１と半導体チップ４側面との隙間には封止樹脂８が充填されている。また、側壁１の上面高さは半導体チップ４の上面高さと同程度である。   When the plane area of the semiconductor chip 4 mounted on the die pad 2 changes, the generation amount of the flash burr 10 changes accordingly, and the flash burr 10 flows from the outer peripheral portion of the bottom surface 2a of the die pad 2 toward the center. As already described, FIG. 7 shows such a state, and the generation amount of the flash burr 10 increases when the plane area of the semiconductor chip 4 to be mounted is small with respect to the plane area of the die pad 2. Therefore, in order to avoid the occurrence of the flash burr, in this embodiment, the side wall 1 is provided around the semiconductor chip 4 as shown in FIG. The die pad 2 has a recess 20 surrounded by the side wall 1 on the upper surface, and the semiconductor chip 4 is bonded and fixed to the bottom of the recess 20 with an adhesive 3. In FIG. 1, the side wall 1 is provided in a region extending from the vicinity of the semiconductor chip 4 to the outermost periphery of the die pad 2, but the side wall 1 may be provided only in the outermost peripheral region away from the semiconductor chip 4. . A gap between the side wall 1 and the side surface of the semiconductor chip 4 is filled with a sealing resin 8. Further, the upper surface height of the side wall 1 is approximately the same as the upper surface height of the semiconductor chip 4.

図２は、本発明の実施例である半導体装置の平面図である。ダイパッド２の中央部には凹部２０が設けられ、凹部２０内には接着剤３を介して半導体チップ４が固定されており、半導体チップ４の辺を側壁１が囲んでいる。ダイパッド２の周囲には複数のリードインナー部５ａがあり、本実施形態においては、ダイパッド２の一辺側に２本、対向する他辺側に２本、計４本配置されている。リードインナー部５ａが導電性を有するボンディングワイヤ６を介して半導体チップ４上のパッドと電気的に接続されている。なお、ボンディングワイヤ６には、金線や銅線が用いられる。   FIG. 2 is a plan view of a semiconductor device according to an embodiment of the present invention. A recess 20 is provided at the center of the die pad 2, and the semiconductor chip 4 is fixed in the recess 20 via an adhesive 3, and the side wall 1 surrounds the side of the semiconductor chip 4. Around the die pad 2, there are a plurality of lead inner portions 5a. In this embodiment, two lead inner portions 5a are arranged on one side of the die pad 2 and two on the opposite other side. The lead inner portion 5a is electrically connected to a pad on the semiconductor chip 4 through a conductive bonding wire 6. The bonding wire 6 is a gold wire or a copper wire.

図３は、本発明の実施例の半導体装置の要部拡大図で、図２のＡ−Ａ'線における部分断面図である。図３に示す通り、ダイパッド２の平面積より小さい半導体チップ４が接着剤３を介してダイパッド４の上面へ接着固定されている。ダイパッド２の上面には凹部２０が設けられ、半導体チップ４の平面積は凹部２０よりも小さく、凹部２０内に載置されている。側壁１の高さ（凹部深さ）１５は、半導体チップ４の厚さ以上で、側壁１の上面高さはリードインナー部５ａの上面高さより低いことが望ましい。このような構成とすることで、ボンディングワイヤ６とダイパッド２との接触の懸念が無い低背パッケージを形成することが可能となる。   FIG. 3 is an enlarged view of a main part of the semiconductor device according to the embodiment of the present invention, and is a partial cross-sectional view taken along line AA ′ of FIG. As shown in FIG. 3, a semiconductor chip 4 smaller than the plane area of the die pad 2 is bonded and fixed to the upper surface of the die pad 4 with an adhesive 3. A recess 20 is provided on the upper surface of the die pad 2, and the plane area of the semiconductor chip 4 is smaller than the recess 20 and is placed in the recess 20. It is desirable that the height (recess depth) 15 of the side wall 1 is equal to or greater than the thickness of the semiconductor chip 4 and the upper surface height of the side wall 1 is lower than the upper surface height of the lead inner portion 5a. By adopting such a configuration, it is possible to form a low-profile package that is free from fear of contact between the bonding wire 6 and the die pad 2.

図４は、本発明の半導体装置の工程途中における断面図である。
ダイパッド２の凹部に載置された半導体チップ４は、ボンディングワイヤ６を介してリード５と電気的に接続された状態で上下の金型１１、１２に収納される。その後、上下金型１１、１２で形成されるキャビティ（符号８で示した領域）にゲート９から樹脂８が充填（左から右への矢印で図示）されるが、その際、下方向の圧力（下矢印で図示）によってダイパッド２が下金型１１の上面に押し付けられることになる。これはキャビティ内での封止樹脂８の流動抵抗が増大するためである。ダイパッド２が下金型１１に強く押し付けられることで、その間に封止樹脂が入り込みにくくなり、フラッシュバリの発生が抑制されることになる。 FIG. 4 is a cross-sectional view in the middle of the process of the semiconductor device of the present invention.
The semiconductor chip 4 placed in the concave portion of the die pad 2 is housed in the upper and lower molds 11 and 12 while being electrically connected to the lead 5 via the bonding wire 6. Thereafter, the resin (filled with arrows from left to right) is filled from the gate 9 into the cavity formed by the upper and lower molds 11 and 12 (region indicated by reference numeral 8). The die pad 2 is pressed against the upper surface of the lower mold 11 (illustrated by a down arrow). This is because the flow resistance of the sealing resin 8 in the cavity increases. When the die pad 2 is strongly pressed against the lower mold 11, it becomes difficult for the sealing resin to enter between them, and the generation of flash burrs is suppressed.

図５は、本発明の半導体装置の変形例を示す断面図である。図１に示した半導体装置との違いは側壁１の外側に側壁突出部１ａを設けた点である。側壁突出部１ａは側壁１と同じ高さを有し、その底面は凹部２０の底面と同じである。そして、側壁突出部１ａの下部には封止樹脂８が充填されている。   FIG. 5 is a cross-sectional view showing a modification of the semiconductor device of the present invention. The difference from the semiconductor device shown in FIG. 1 is that a side wall protruding portion 1 a is provided outside the side wall 1. The side wall protrusion 1 a has the same height as the side wall 1, and the bottom surface thereof is the same as the bottom surface of the recess 20. And the sealing resin 8 is filled in the lower part of the side wall protrusion part 1a.

このような構成とすることで樹脂充填時に上方からダイパッド２外周部にかかる圧力がさらに増し、ダイパッド底面２ａを下金型の上面へ押し付ける力がさらに強くなり、フラッシュバリの付着が抑制されることになる。さらには、側壁突出部１ａの存在によりダイパッド２と封止樹脂８との接着性が増大するという副次的な効果もある。なお、側壁突出部１ａの材質はダイパッド２と同じＦｅ−Ｎｉ合金やＣｕ合金等の金属であるほうが成形上は好都合であるが、リード５やボンディングワイヤ６との接触を回避するということで絶縁体とすることでも構わない。   By adopting such a configuration, the pressure applied to the outer periphery of the die pad 2 from above during resin filling is further increased, the force pressing the die pad bottom surface 2a against the upper surface of the lower mold is further increased, and the flash burrs are prevented from adhering. become. Further, there is a secondary effect that the adhesion between the die pad 2 and the sealing resin 8 is increased due to the presence of the side wall protruding portion 1a. The material of the side wall protruding portion 1a is the same as that of the die pad 2 such as Fe-Ni alloy or Cu alloy in terms of molding, but it is insulated by avoiding contact with the lead 5 and the bonding wire 6. It does not matter even if it is a body.

図６は、本発明の半導体装置の他の実施例であり、図２の実施例において側壁形状の一部を変更した際の平面図を示している。ダイパッド２には接着剤３を介して半導体チップ４が固定されており、半導体チップ４の辺に対して側壁１が囲んでいる。この側壁１に封止樹脂８が流入する入り口のゲート９に対向で且つ垂直な樹脂流入溝７を有している。これにより、側壁1の高さが影響して封止樹脂８の流動性が低下し充填不足に至った場合でも樹脂流入溝７によって半導体装置１６の末端まで封止樹脂８が確実に充填可能となることから、ダイパッド底面２ａへのフラッシュバリ１０の付着形成を抑制しつつ安定的な封止樹脂８の充填が可能となる。尚、樹脂流入溝７は充填状態に応じて請求の範囲で形状を変更し設ける。   FIG. 6 shows another embodiment of the semiconductor device of the present invention, and shows a plan view when a part of the side wall shape is changed in the embodiment of FIG. A semiconductor chip 4 is fixed to the die pad 2 with an adhesive 3, and the side wall 1 surrounds the side of the semiconductor chip 4. The side wall 1 has a resin inflow groove 7 that is opposed to and perpendicular to the gate 9 at the entrance through which the sealing resin 8 flows. Thereby, even when the fluidity of the sealing resin 8 is lowered due to the height of the side wall 1 and the filling is insufficient, the sealing resin 8 can be reliably filled to the end of the semiconductor device 16 by the resin inflow groove 7. Therefore, it is possible to stably fill the sealing resin 8 while suppressing the formation of the flash burr 10 on the die pad bottom surface 2a. The resin inflow groove 7 is provided with a shape changed within the scope of the claims according to the filling state.

図７には、本発明の半導体装置の製造フローを示した。まず、Ｆｅ−Ｎｉ合金やＣｕ合金からなる平板の金属板を準備し、これを打ち抜き及びプレス加工を施してリードフレームを成形する。なお、側壁１はリードフレームを金型によるプレス工法やエッチング工法もしくは電鋳工法によって形成できる。次いで、ダイパッド上にダイボンディングペーストを介して半導体チップを載置する（Ｓ２）。続くワイヤボンド工程Ｓ３は半導体チップ上の電極とリードフレームのリードとをワイヤで接続する工程である。   FIG. 7 shows a manufacturing flow of the semiconductor device of the present invention. First, a flat metal plate made of an Fe—Ni alloy or a Cu alloy is prepared, and punched and pressed to form a lead frame. The side wall 1 can be formed by pressing the lead frame with a mold, an etching method, or an electroforming method. Next, a semiconductor chip is placed on the die pad via a die bonding paste (S2). The subsequent wire bonding step S3 is a step of connecting the electrodes on the semiconductor chip and the leads of the lead frame with wires.

組立検査工程Ｓ４にて外観検査をした後、ダイパッド上の半導体チップを樹脂で被覆（Ｓ５）する。このとき、図３（ｂ）に示すように、ダム１２の突端は金型１３と接触して樹脂の流れ込みを堰き止める役目を果たす。そして、その後、余分な樹脂バリ取りを行う（Ｓ６）。従来の半導体装置であれば、この後にフラッシュバリ１０を除去する工程になるが、本発明の半導体装置の製造工程においてはその工程は不要であり、リードメッキ工程Ｓ７とリード切断工程Ｓ８を経て本発明の半導体装置が完成する。
尚、本発明の実施形態について図面を参照して詳述したが、具体的な構成はこの実施形態に限られるものではなく、本発明の要旨を逸脱しない範囲の設計変更等も含まれる。 After the appearance inspection in the assembly inspection step S4, the semiconductor chip on the die pad is covered with a resin (S5). At this time, as shown in FIG. 3 (b), the tip of the dam 12 contacts the mold 13 and plays a role of blocking the flow of the resin. Then, excess resin deburring is performed (S6). In the case of a conventional semiconductor device, the flash burr 10 is subsequently removed, but this step is not necessary in the manufacturing process of the semiconductor device of the present invention, and this step is performed through a lead plating step S7 and a lead cutting step S8. The semiconductor device of the invention is completed.
Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment, and includes design changes and the like within a scope not departing from the gist of the present invention.

１ 側壁
１ａ 側壁突出部
２ ダイパッド
２ａ ダイパッド底面
３ 接着剤
４ 半導体チップ
４ａ 半導体チップ底面
５ リード
５ａ リードインナー部
６ ボンディングワイヤ
７ 樹脂流入溝
８ 封止樹脂
９ ゲート
１０ フラッシュバリ
１１ 下金型
１２ 上金型
１５ 側壁高さ（凹部深さ）
１６ 半導体装置
２０ 凹部
Ｓ１ リードフレーム成形工程
Ｓ２ ダイボンド工程
Ｓ３ ワイヤボンド工程
Ｓ４ 組立検査工程
Ｓ５ 樹脂封止工程
Ｓ６ 樹脂バリ取り工程
Ｓ７ リードメッキ工程
Ｓ８ リード切断工程 DESCRIPTION OF SYMBOLS 1 Side wall 1a Side wall protrusion part 2 Die pad 2a Die pad bottom face 3 Adhesive 4 Semiconductor chip 4a Semiconductor chip bottom face 5 Lead 5a Lead inner part 6 Bonding wire 7 Resin inflow groove 8 Sealing resin 9 Gate 10 Flash burr 11 Lower mold 12 Upper mold Mold 15 Side wall height (recess depth)
16 Semiconductor device 20 Recess S1 Lead frame forming step S2 Die bonding step S3 Wire bonding step S4 Assembly inspection step S5 Resin sealing step S6 Resin deburring step S7 Lead plating step S8 Lead cutting step

Claims (4)

表面に凹部を有するダイパッドと、
前記凹部内に載置された半導体チップと、
前記ダイパッドの周囲に設けられたリードと、
前記リードのリードインナー部と前記半導体チップを電気的に接続するボンディングワイヤと、
前記半導体チップ、前記ダイパッドおよび前記ボンディングワイヤを被覆している封止樹脂と、
を備え、
前記ダイパッドの裏面は前記封止樹脂から露出している半導体装置。 A die pad having a recess on the surface;
A semiconductor chip placed in the recess,
Leads provided around the die pad;
A bonding wire that electrically connects the lead inner portion of the lead and the semiconductor chip;
A sealing resin covering the semiconductor chip, the die pad and the bonding wire;
With
A semiconductor device in which a back surface of the die pad is exposed from the sealing resin. 前記凹部の深さが前記半導体チップの厚さよりも深いことを特徴とする請求項１記載の半導体装置。   2. The semiconductor device according to claim 1, wherein the depth of the recess is deeper than the thickness of the semiconductor chip. 前記ダイパッドの外方側面に側壁突出部が設けてあることを特徴とする請求項１または請求項２記載の半導体装置。   The semiconductor device according to claim 1, wherein a side wall protruding portion is provided on an outer side surface of the die pad. 前記ダイパッドの外周上面の一部に樹脂流入溝が設けられていることを特徴とする請求項１乃至３のいずれか１項記載の半導体装置。   4. The semiconductor device according to claim 1, wherein a resin inflow groove is provided in a part of an outer peripheral upper surface of the die pad. 5.
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