JP2018037680A - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
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- 239000010410 layer Substances 0.000 claims abstract description 368
- 239000004065 semiconductor Substances 0.000 claims abstract description 153
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- 239000013078 crystal Substances 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
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- 230000015572 biosynthetic process Effects 0.000 description 5
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- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
【解決手段】太陽電池150は、ベース領域110を含む半導体基板10と、半導体基板10上に位置する導電型領域32、34と、導電型領域32、34上に位置する保護膜40aと、保護膜40aを挟んで導電型領域32、34に連結される電極42、44とを含む。太陽電池150は、さらに、トンネリング層20、パッシベーション膜24、反射防止膜26、絶縁層40bなどを含む。
【選択図】図2
Description
121 第1の基板
122 第2の基板
131 第1の密封材
132 第2の密封材
142 絶縁フィルム
144 リボン
145 バスリボン
150 太陽電池
151 第1の太陽電池
152 第2の太陽電池
Claims (20)
- 半導体基板と、
前記半導体基板上に形成される導電型領域と、
前記導電型領域上に形成される保護膜と、
前記保護膜を挟んで前記導電型領域に連結される電極と、
を含む太陽電池。 - 前記保護膜が前記導電型領域より大きいバンドギャップを有し、
前記電極と連結される前記保護膜の面にレーザエッチング跡が位置する、請求項1に記載の太陽電池。 - 前記保護膜は、前記電極と連結される部分において他の部分より薄い厚さを有する、請求項2に記載の太陽電池。
- 前記保護膜は、前記電極と連結される部分に凹部を備える、請求項2に記載の太陽電池。
- 前記保護膜は、前記導電型領域上に全体的に形成され、又は、前記導電型領域上において前記電極の少なくとも一部にわたって部分的に形成される、請求項1に記載の太陽電池。
- 前記導電型領域が前記半導体基板と異なる結晶構造を有し、
前記半導体基板と前記導電型領域との間に位置するトンネリング層をさらに含む、請求項1に記載の太陽電池。 - 前記保護膜上に前記電極が貫通する開口部を備える絶縁層をさらに含み、
前記電極が前記開口部を貫通して前記保護膜に接触する、請求項1に記載の太陽電池。 - 前記保護膜上に前記電極が貫通する開口部を備える絶縁層をさらに含み、
前記絶縁層のバンドギャップが前記保護膜のバンドギャップより小さい、請求項1に記載の太陽電池。 - 前記保護膜が酸化物または非晶質半導体を含み、
前記絶縁層が窒化物または炭化物を含む、請求項1に記載の太陽電池。 - 前記保護膜上に前記電極が貫通する開口部を備える絶縁層をさらに含み、
前記保護膜の厚さが前記絶縁層の厚さより薄い、請求項1に記載の太陽電池。 - 前記保護膜の厚さが1nm〜3nmである、請求項1に記載の太陽電池。
- 前記導電型領域は、前記半導体基板の一面に位置する第1の導電型領域と、前記半導体基板の前記一面に位置する第2の導電型領域と、を含み、
前記保護膜が前記第1及び第2の導電型領域上に形成される、請求項1に記載の太陽電池。 - 前記電極は、前記保護膜に接触し、透過性及び伝導性を有する接着層と、前記接着層上に形成される電極層と、を含み、
前記接着層がチタンまたはタングステンを含む、請求項1に記載の太陽電池。 - 半導体基板上に導電型領域を形成するステップと、
前記導電型領域上に保護膜を形成するステップと、
前記保護膜上に絶縁層を形成するステップと、
前記絶縁層に開口部を形成するステップと、
前記保護膜を挟んで前記導電型領域に連結される電極を前記保護膜上に形成するステップと、
を含む太陽電池の製造方法。 - 前記開口部がレーザエッチングによって形成され、
前記レーザエッチング時に前記保護膜が残存する、請求項14に記載の太陽電池の製造方法。 - 前記レーザエッチングに使用されるレーザのバンドギャップは、前記保護膜のバンドギャップより小さく、前記絶縁層のバンドギャップより大きい、請求項15に記載の太陽電池の製造方法。
- 前記保護膜が酸化物または非晶質半導体を含み、
前記絶縁層が窒化物または炭化物を含む、請求項14に記載の太陽電池の製造方法。 - 前記保護膜の厚さが前記絶縁層の厚さより薄い、請求項14に記載の太陽電池の製造方法。
- 前記保護膜の厚さが1nm〜3nmである、請求項14に記載の太陽電池の製造方法。
- 前記電極は、前記保護膜に接触し、透過性及び伝導性を有する接着層と、前記接着層上に形成される電極層と、を含み、
前記接着層は、チタンまたはタングステンを含み、スパッタリングによって形成される、請求項14に記載の太陽電池の製造方法。
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