JP2018030099A - Spraying method, spray film production method, and spray film production apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a spraying method, a spray film production method, and a spray film production apparatus which produce an even and precise film on a surface of a curved material.SOLUTION: In a spraying method of spraying a coating agent to an object surface 11 from a spray nozzle 2, the object surface 11 has a curved surface, the spray nozzle 2 moves along the object surface 11 while maintaining a distance between a tip end of the spray nozzle 2 and the object surface 11 in a spray direction of the spray nozzle 2 at a predetermined distance L, and the spray nozzle 2 moves along the object surface 11 while maintaining a relative movement speed of the tip end constant in a direction parallel to a tangential plane of an intersection of the spray direction and the object surface 11.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a spray spraying method, a spray film forming method using the spray spraying method, and a spray film forming apparatus, and in particular, a spray spraying method, a spray film forming method, and a spray film forming apparatus for a film-formed object having a curved surface. About.

  Spray film formation is a method that has been used for a long time for coating exteriors of industrial products. In recent years, spray film-forming has come to be widely used as a precision film-forming technique for industrial products that require higher accuracy, such as displays, touch panels, and fuel cells.

  As a spray film forming method corresponding to such a precision film forming technique, a coating agent is sprayed on a film formation object from a spray nozzle that scans and moves in parallel along the surface of the film formation object. There is a method of forming a film. Specifically, it is a method of forming a precision film on a flat surface using a spray nozzle that performs reciprocating scanning while feeding a predetermined distance for each scanning (for example, Patent Document 1).

JP2003-320299A

  Recently, a number of displays and touch panels having convex or concave curved surfaces have been manufactured as industrial products to be film-formed. However, for uniform precision film formation on a curved surface, it is necessary to further improve the spray film forming method as disclosed in Patent Document 1 to cope with film formation on a curved surface.

  As a spray film forming method for a film forming object having a three-dimensional shape such as a curved surface, there is a method of forming a film on a curved surface by attaching a spray nozzle to the tip of a multi-axis robot arm. However, in the case of precision film formation, the setting of the trajectory, angle, and the like of the spray nozzle is relied on teaching for memorizing work by an expert. Further, in the case of a multi-axis robot arm, further improvements are necessary for precise film formation such as speed stability of the arm tip.

  The present invention has been made in view of the above circumstances, and a spray spraying method, a spray film forming method, and a spray product for forming a uniform precision film on the surface of a film-formed object having a curved surface. It is an exemplary problem to provide a membrane device.

  In order to solve the above problems, the present invention has the following configuration.

(1) The spray spraying method is a spray spraying method in which the coating agent is sprayed from the spray nozzle toward the target surface, the target surface has a curved surface, and the spray nozzle includes a tip of the spray nozzle, the target surface, In the direction parallel to the tangential plane at the intersection of the spray direction and the target surface, while moving along the target surface while maintaining the distance in the spray direction of the spray nozzle at a predetermined distance between The spray nozzle moves along the target surface while maintaining the relative moving speed of the tip constant.

  The distance between the spray nozzle and the target surface (film formation) in the spray direction of the spray nozzle is constant, and in a direction parallel to the tangential plane at the intersection of the spray direction of the spray nozzle and the target surface Since the relative movement speed is constant, a uniform precision film can be formed even on a target surface having a curved surface.

  In the present specification, the “precision film” refers to a uniform thin film having a thickness of about 10 μm or less.

(2) It is preferable that the spray nozzle moves in a state where the spray direction is maintained constant.

(3) The spray nozzle has a single movement perpendicular to the ground contact surface in a state where the spray direction is maintained parallel to a direction perpendicular to the ground contact surface on which the object having the target surface is installed. It is preferable to move in a plane.

  By moving the spray nozzle in a state where the spraying direction of the spray nozzle is constant, in particular, in a state where the spray nozzle is maintained parallel to the direction perpendicular to the ground plane, a more precise and uniform precision membrane can be manufactured. Further, efficient film formation is possible by moving in a single moving plane perpendicular to the ground plane, that is, by making the scanning movement direction of the spray nozzle on a straight line.

(4) When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end, and a position on the target surface that reaches last is a rear. The spray nozzle moves in a direction parallel to the ground contact surface, approaches the front end portion of the target surface, and moves along the target surface from the front end portion toward the rear end portion. Then, the spray nozzle moves away from the rear end portion in a direction parallel to the ground contact surface, and the spray nozzle is in front of the position where the coating agent sprayed from the spray nozzle first reaches the front end portion. It is preferable to start the movement in the spray direction.

(5) When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end portion, and a position on the target surface that reaches last is a rear side. The spray nozzle moves in a direction parallel to the ground contact surface, approaches the front end portion of the target surface, and moves along the target surface from the front end portion toward the rear end portion. Then, moving away from the rear end in a direction parallel to the ground plane, the spray nozzle is behind the position where the coating agent sprayed from the spray nozzle does not reach the rear end, It is preferable to end the movement in the spray direction.

  The spray nozzle starts moving in the spraying direction in front of the position where the coating agent sprayed from the spray nozzle first reaches the front end, and / or the coating agent sprayed from the spray nozzle is at the rear end. By ending the movement in the spraying direction behind the position where it does not reach the part, the movement of the spray nozzle at the front end part and the rear end part becomes smooth. As a result, rapid acceleration / deceleration in the spray direction of the spray nozzle is alleviated, so that application unevenness in the vicinity of the front end portion and the rear end portion is not required even if the drive control of the spray nozzle in the spray direction is not excessively high performance. Can be reduced.

(6) The spray nozzle moves along the target surface while maintaining the spray direction to be parallel to a normal direction in a tangential plane at the intersection of the spray direction and the target surface. Also good.

  A uniform precision membrane can also be produced by moving the spray nozzle so that the spray direction is always parallel to the normal direction of the target surface.

(7) When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end, and a position on the target surface that reaches last is a rear side. The spray nozzle moves in a direction parallel to the ground plane on which the object having the target surface is installed and approaches the front end portion of the target surface, from the front end portion to the rear end portion. After moving along the target surface toward the surface, it moves away from the rear end portion in a direction parallel to the ground contact surface, and is away from the tip of the spray nozzle by the predetermined distance and perpendicular to the spray direction. When the diameter of the coating area on the plane is D, an extension line extending the target surface forward from the front end of the target surface in the plane in which the spray nozzle moves, and the front of the target surface The spray nozzle has a first passing point that is a predetermined distance away from a first intersection with a circle having a radius D / 2 centered at an end portion in a first normal direction on a tangential plane at the first intersection. It is preferable that the spray nozzle moves so that the spray direction of the spray nozzle is parallel to the first normal direction at the first passing point.

(8) When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end portion, and a position on the target surface that reaches last is a rear side. The spray nozzle moves in a direction parallel to the ground plane on which the object having the target surface is installed and approaches the front end portion of the target surface, from the front end portion to the rear end portion. After moving along the target surface toward the surface, it moves away from the rear end portion in a direction parallel to the ground contact surface, and is away from the tip of the spray nozzle by the predetermined distance and perpendicular to the spray direction. When the diameter of the coating area in the plane is D, an extension line extending the target surface rearward from the rear end of the target surface in the plane in which the spray nozzle moves, and the rear of the target surface The spray nozzle has a second passing point that is separated from the second intersection point with the circle having a radius D / 2 centered at the end portion by the predetermined distance in the second normal direction on the tangential plane at the second intersection point. It is preferable that the spray nozzle moves so that the spray direction of the spray nozzle is parallel to the second normal direction at the second passing point.

  The spray nozzle moves the first passage point and / or the second passage point so that the spray direction is parallel to the first normal line and the second normal line, thereby producing a more uniform precision membrane. It becomes possible. That is, when passing through the first passage point and / or the second passage point, the spray nozzle is already prepared in a state suitable for the production of a precision membrane with a uniform trajectory and spraying direction. A uniform precision film can be formed.

(9) A spray casting method for forming a film on the surface of the target surface by the spray spraying method according to (1) to (8) above.

  This is a spray film forming method employing the spray spraying method of (1) to (8) above, and it is possible to form a uniform precision film.

(10) A grounding surface on which an object having a target surface is installed, a spray nozzle that sprays a coating agent toward the target surface, and the spray nozzle in a direction parallel to the grounding surface and the grounding surface. A moving mechanism for independently moving each spray direction of the spray nozzle different from the parallel direction, and maintaining a distance in the spray direction between the tip of the spray nozzle and the target surface at a predetermined distance. The spray nozzle is moved while maintaining a constant relative movement speed of the tip of the spray nozzle parallel to the tangential plane at the intersection of the spray direction of the spray nozzle and the target surface. Spray film forming device that moves.

  This is a spray film forming apparatus that realizes the spraying method of (1) to (8) above, and can form a uniform precision film.

  Further objects and other features of the present invention will become apparent from the preferred embodiments described below with reference to the accompanying drawings.

  According to the present invention, it is possible to provide a spray spraying method, a spray film forming method, and a spray film forming apparatus for forming a uniform precision film on the surface of a film-formed object having a curved surface.

1 is a schematic perspective view of a spray film forming apparatus according to Embodiment 1. FIG. It is the elements on larger scale which show the moving mechanism of the spray film forming apparatus shown in FIG. 3 is a schematic diagram illustrating an example of a target surface 11. FIG. It is a schematic diagram which shows an example of the locus | trajectory 9 which the spray nozzle 2 scans and moves on the target surface 11 shown to FIG. 3A. It is explanatory drawing which shows the locus | trajectory 9 of the spray nozzle 2 on the XZ plane in case the spray nozzle 2 scans and moves on a convex curved surface. It is explanatory drawing which shows the locus | trajectory 9 of the spray nozzle 2 on the XZ plane in case the spray nozzle 2 scans and moves on a concave curved surface. It is explanatory drawing of the scanning speed in case the spray nozzle 2 scan-moves on a convex curved surface. It is explanatory drawing which shows the starting point of the acceleration of a Z-axis direction, when the spray nozzle 2 carries out scanning movement on a convex curved surface. It is explanatory drawing which shows the end point of the acceleration of a Z-axis direction in case the spray nozzle 2 carries out scanning movement on a convex-shaped curved surface. It is explanatory drawing which shows the locus | trajectory 9 of the spray nozzle 2 in the start and the end point of the acceleration in a Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. It is a schematic diagram which shows the other example of the target surface 11. FIG. It is a schematic diagram which shows an example of the locus | trajectory 9 which the spray nozzle 2 scans and moves on the target surface 11 shown to FIG. 9A. It is explanatory drawing which shows the locus | trajectory 9 on the YZ plane in case the spray nozzle 2 carries out a scanning movement on the convex spherical surface. It is explanatory drawing which shows the locus | trajectory 9 on the YZ plane in case the spray nozzle 2 carries out the scanning movement on the concave spherical surface. It is a flowchart which shows each process of the spraying method which concerns on Embodiment 1. FIG. It is explanatory drawing which shows the modification 1 in which the spray angle of the spray nozzle 2 changes, when the spray nozzle 2 carries out the scanning movement on the curved surface.

[Embodiment 1]
Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view of a spray film forming apparatus 1 according to the first embodiment. The spray film forming apparatus 1 according to Embodiment 1 includes a stage 5 that forms a ground contact surface on which an object having a target surface is installed, a spray nozzle 2 that sprays a coating agent toward the target surface, and a spray nozzle 2. And a moving mechanism for moving. The spray film forming apparatus 1 may include an exhaust chamber 6 for discharging the coating agent that has not adhered to the object 10 adjacent to the stage 5. Further, the spray film forming apparatus 1 may include a fan unit 7 equipped with a HEPA filter in order to introduce clean air into the film forming chamber.

  FIG. 2 is a partially enlarged view showing a moving mechanism of the spray film forming apparatus 1 shown in FIG. When the stage 5 is the XY plane, the moving mechanism includes an X-axis arm 3X parallel to the X-axis, a Y-axis arm 3Y parallel to the Y-axis orthogonal to the X-axis in the XY plane, and perpendicular to the XY plane. A Z-axis arm 3Z parallel to the Z-axis. The X-axis drive device 22, the Y-axis drive device 23, and the Z-axis drive device 24 that the X-axis arm 3X, the Y-axis arm 3Y, and the Z-axis arm 3Z respectively have are driven independently of each other, thereby spray nozzles. 2 can be moved.

  1 and 2, one X-axis arm 3X bridged by two parallel Y-axis arms 3Y on two parallel Y-axis arms 3Y is moved along the Y-axis arm 3Y. It can slide in the axial direction. On this X-axis arm 3X, the Z-axis arm 3Z can slide in the X-axis direction along the X-axis arm 3X. The spray nozzle 2 can slide on the Z-axis arm 3Z in the Z-axis direction along the Z-axis arm 3Z. The tip of the spray nozzle 2 is directed downward in the Z-axis direction, and is configured to spray the coating agent downward in the Z-axis direction. The movement in the X-axis direction is driven by the X-axis driving device 22, the movement in the Y-axis direction is driven by the Y-axis driving device 23, and the movement in the Z-axis direction is driven by the Z-axis driving device 24. The spray nozzle 2 can be freely moved in each of the axial direction and the Z-axis direction.

  By providing such a moving mechanism, the spray film forming apparatus 1 allows the spray nozzle 2 to be independently in a direction parallel to the stage 5 and a spray direction of the spray nozzle 2 different from the direction parallel to the stage 5. It is possible to move. Furthermore, the spray film forming apparatus 1 can move the spray nozzle 2 while maintaining a constant distance in the spraying direction between the tip of the spray nozzle 2 and the target surface. The spray film forming apparatus 1 moves the spray nozzle 2 while maintaining a constant relative moving speed parallel to the tangent plane at the intersection of the spray direction of the spray nozzle 2 and the target surface at the tip of the spray nozzle 2. It is possible to make it. It is preferable that the spray direction of the spray nozzle 2 is fixed, and in this embodiment, the movement of the spray nozzle 2 in a state where the spray direction is maintained constant will be described. Of course, a configuration in which the spray direction of the spray nozzle 2 is not fixed is possible as will be described later in Modification 1.

  It is preferable that the spray nozzle 2 moves in a state where the spray direction of the spray nozzle 2 is maintained parallel to the direction perpendicular to the stage 5. That is, it is preferable that the spray nozzle 2 moves in a state where the spray direction of the spray nozzle 2 is fixed in parallel to the Z-axis direction. At this time, it is more preferable that the spray nozzle 2 moves in a single moving plane perpendicular to the ground plane. For example, as shown in FIGS. 3A and 3B, the spray nozzle 2 can be moved in a moving plane that is perpendicular to the stage 5 and parallel to the X-axis direction. Needless to say, the direction of movement of the spray nozzle 2 is not limited to the X-axis direction, and if the direction is perpendicular to the stage 5, the X-axis and Y-axis directions may be within the movement plane parallel to the Y-axis direction. It may be in a moving plane that is not parallel to either.

  Here, the example of the locus | trajectory 9 of the spray nozzle 2 at the time of film-forming to the target surface 11 is demonstrated using FIG. 3A and FIG. 3B. Here, a case where the target surface 11 is a curved surface obtained by cutting out a part of a side surface of a cylinder will be described. FIG. 3A is a schematic diagram illustrating an example of the target surface 11. FIG. 3B is a schematic diagram illustrating an example of a locus 9 in which the spray nozzle 2 scans and moves on the target surface 11 illustrated in FIG. 3A. FIG. 3A shows a case where the target surface 11 is a curved surface that shows an arc in the Z-X cross section and whose shape does not change in the Y-axis direction, that is, a curved surface obtained by cutting out part of the side surface of a cylinder. Yes. 3A, when the film is formed on the target surface 11 as shown in FIG. 3B, the distance in the spray direction with respect to the target surface 11 is maintained at a predetermined distance L while the spray nozzle 2 is scanned and moved in the X-axis direction. When the end of the predetermined movement range in the X-axis direction is reached, stop moving in the X-axis direction, move in the Y-axis direction by a predetermined pitch, and then spray in the direction opposite to the X-axis direction. The nozzle 2 is moved by scanning. In this way, a precise film can be formed on the target surface 11 by repeating a series of steps in which movements in the X-axis direction, the Y-axis direction, and the Z-axis direction are combined.

  A series of steps combining movements in the X-axis direction, the Y-axis direction, and the Z-axis direction can be realized by programming in advance and executing a scanning movement program generated by the programming. For example, it is possible to control the movement of the spray nozzle 2 by mounting a control device and a storage device on the spray film forming apparatus 1 and executing a scanning movement program stored in the storage device. Specifically, a series of signal information (scanning movement program) for driving the X-axis drive device 22, the Y-axis drive device 23, and the Z-axis drive device 24 together is stored in a storage device. The control device can control the movement of the spray nozzle 2 by driving the X-axis drive device 22, the Y-axis drive device 23, and the Z-axis drive device 24 together based on the stored scanning movement program.

  In the programming described above, programming can be easily performed by setting parameter values corresponding to the target surface 11 in the spray film forming apparatus 1. For example, when the target surface 11 is a curved surface obtained by cutting out a part of a side surface of a cylinder, setting items for parameter values can be reduced. Specifically, the distance [H] from the tip of the spray nozzle 2 to the stage 5 at the apex of the curved surface (arc), the radius of curvature [R] of the arc, the scanning movement speed [V] of the spray nozzle 2, and the pitch width [P] ], It is only necessary to set the coordinate range [X] in the X-axis direction and the coordinate range [Y] in the Y-axis direction of the target surface 11. A plurality of target surfaces 11 may exist on one sample, and a part of the target surfaces 11 (for one scanning movement) is formed by one movement (in the X-axis direction). It may be arranged.

  FIG. 4 is an explanatory diagram showing the locus 9 of the spray nozzle 2 on the XZ plane when the spray nozzle 2 scans and moves on a convex curved surface. In FIG. 4, the object 10 has an object surface 11 that is convex upward (Z-axis direction). The spray nozzle 2 scans and moves on at least the target surface 11 of the target object 10 while maintaining a predetermined distance L in the Z-axis direction with respect to the target surface 11. At this time, the locus 9 drawn by the spray nozzle 2 coincides at least partially with a curve obtained by moving the target surface 11 of the target object 10 by a predetermined distance L in the Z-axis direction.

  FIG. 5 is an explanatory diagram showing the locus 9 of the spray nozzle 2 on the XZ plane when the spray nozzle 2 scans and moves on the concave curved surface. In FIG. 5, the object 10 has an object surface 11 that is concave upward (in the Z-axis direction). The spray nozzle 2 scans and moves on at least the target surface 11 of the target object 10 while maintaining a predetermined distance L in the Z-axis direction with respect to the target surface 11. At this time, the locus 9 drawn by the spray nozzle 2 coincides at least partially with a curve obtained by moving the target surface 11 of the target object 10 by a predetermined distance L in the Z-axis direction.

  In the present embodiment, the spray nozzle 2 scans and moves while the moving speed (scanning speed) obtained by combining the speed component in the direction parallel to the stage 5 and the speed component in the direction perpendicular to the stage 5 is maintained constant. To do. FIG. 6 is an explanatory diagram of the scanning speed when the spray nozzle 2 scans and moves on a convex curved surface. In FIG. 6, the locus | trajectory 9 of the target object 10 and the spray nozzle 2 in a ZX plane is shown. In FIG. 6, Va represents the speed obtained by combining the speed component in the X-axis direction (direction parallel to the stage 5) and the speed component in the Z-axis direction (direction perpendicular to the stage 5). In addition, since the spray nozzle 2 scans and moves while maintaining the distance from the surface of the object 10 at a predetermined distance L, the trajectory 9 of the spray nozzle 2 substantially follows the surface of the object 10. The scanning speed Va is a speed parallel to the tangential direction of the curved surface drawn by the locus 9 of the spray nozzle 2.

  As shown in FIG. 6, the scanning speed Va of the spray nozzle 2 is constant. That is, in the vicinity of the end portion of the object 10, the velocity component in the X-axis direction is relatively small in a region where the velocity component in the Z-axis direction is large. In the vicinity of the apex of the object 10, the velocity component in the X-axis direction is relatively large in a region where the velocity component in the Z-axis direction is small. In a region where the velocity component in the Z-axis direction approximates zero near the top of the object 10, the velocity component in the X-axis direction approximates the scanning velocity Va.

  In the spray film forming apparatus 1, the spray section in which the coating agent is sprayed from the spray nozzle 2 is not limited to the target surface 11, and is a straight line that moves parallel to the stage 5 before and after the target surface 11 in the scanning movement direction. A section can be provided. That is, the spray section of the spray nozzle 2 may have a straight section and a curved section when passing through the target surface 11 and its vicinity. By providing such a straight section, it can be set as the run-up section for making the movement speed of the spray nozzle 2 of the spray nozzle 2 constant. Here, in the movement of the spray nozzle 2, the changing point that changes from the straight section to the curved section is hereinafter referred to as “first changing point”, and the changing point that changes from the curved section to the straight section is referred to as “ This is called “second change point”.

  FIG. 7A is an explanatory diagram showing an acceleration starting point in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. The movement of the spray nozzle 2 starts to move in the spray direction in front of the position where the coating agent sprayed from the spray nozzle 2 first reaches the front end portion 13. That is, the acceleration in the direction perpendicular to the stage 5 is started in a region on the straight section side of the first change point 15 and the distance from the first change point 15 is longer than D / 2. In other words, the spray nozzle 2 approaches the curved surface to be coated, and the position of the spray nozzle 2 where the coating agent sprayed from the spray nozzle 2 reaches the target surface 11 (hereinafter referred to as “film formation start point”), It is preferable that acceleration in the Z-axis direction is started.

  Here, “D” is the diameter of the application region in a plane perpendicular to the spraying direction, which is a predetermined distance L away from the spray nozzle 2. In addition, an application area | region is an area | region where the coating agent sprayed from the spray nozzle 2 spread | diffuses in the cone shape centering on a spray direction with the front-end | tip of the spray nozzle 2, and adheres to the circular cross section perpendicular | vertical to a spray direction. I will say. However, since the coating agent sprayed by the spray nozzle 2 becomes fine particles, it may adhere to the outside of the above-described coating region. Therefore, in the present invention, the diameter of the smallest circular area among the circular areas to which 95% or more of the sprayed coating agent adheres on a plane perpendicular to the spraying direction that is a predetermined distance L away from the spray nozzle 2 in the spraying direction. Can be “D”. Further, the “front end” is a position on the target surface that is first reached when moving in the moving direction of the spray nozzle 2 in a plane including the moving direction of the spray nozzle 2. Thus, by starting acceleration in the Z-axis direction before the distance 2 / D from the first change point 15, fluctuations in the scanning speed Va in the vicinity of the first change point 15 can be minimized. . Thereby, even if the drive control of the spray nozzle 2 in the Z-axis direction and the X-axis direction is not made to have an excessively high performance, it is possible to suppress the occurrence of defects such as coating unevenness on the target surface 11.

  FIG. 7B is an explanatory diagram showing an end point of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. The movement of the spray nozzle 2 ends the movement of the spray nozzle 2 in the spraying direction behind the position where the coating agent sprayed from the spray nozzle 2 does not reach the rear end portion 14. That is, it is preferable that the acceleration in the direction perpendicular to the stage 5 is completed in a region on the straight section side of the second change point 16 and a distance from the second change point 16 longer than D / 2. In other words, the position of the spray nozzle 2 where the spray nozzle 2 approaches the end of the curved surface to be coated and the coating agent sprayed from the spray nozzle 2 does not reach the target surface 11 (hereinafter referred to as “film formation end point”). Further, it is preferable that the acceleration in the Z-axis direction is finished. In this way, by ending acceleration in the Z-axis direction at a depth beyond the distance D / 2 from the second change point 16, fluctuations in the scanning speed Va in the vicinity of the second change point 16 can be minimized. . Thereby, even if the drive control of the spray nozzle 2 in the Z-axis direction and the X-axis direction is not made to have an excessively high performance, it is possible to suppress the occurrence of defects such as coating unevenness on the target surface 11.

  In the embodiment described above, the distance from the first change point 15 or the second change point 16 may be larger than D / 2, but from the viewpoint of shortening the processing (film formation) time, The upper limit of the distance from the two change points 16 is preferably D or less. In addition, it is a spray area between the film formation start point and the film formation end point, and the scanning speed Va of the spray nozzle 2 is constant. Before the film forming start point and after the film forming end point, the moving speed of the spray nozzle 2 does not have to be constant, and can be an acceleration / deceleration section for reaching the scanning speed Va. In the acceleration / deceleration section, spraying from the spray nozzle 2 can be started to prepare for spraying in the spray section. In this case, the length of the acceleration / deceleration section is from the viewpoint of suppressing the amount of coating agent used. Is preferably short. For example, the upper limit of the length of the acceleration / deceleration section can be set to D or less, which is the upper limit of the distance from the first change point 15 or the second change point 16. By shortening the length of the acceleration / deceleration section, the processing (film formation) time can be shortened, and as a result, the production capacity can be improved.

  Further, in the scanning movement direction of the spray nozzle 2, the position in the Z-axis direction of the spray nozzle 2 is maintained at the predetermined distance L while maintaining the position in the Z-axis direction of the film-forming start point. Regardless) the spray nozzle 2 can be scanned. On the rear side of the film forming end point, the position of the spray nozzle 2 in the Z-axis direction is moved by scanning the spray nozzle 2 while maintaining the position of the film forming end point in the Z-axis direction (regardless of the predetermined distance L). Can do.

  Although FIG. 7A and FIG. 7B demonstrated the case where the object surface 11 was a curved surface and only this curved surface was a film forming object, it does not exclude that a straight section can be a film forming object.

  FIG. 8 is an explanatory diagram showing the locus 9 of the spray nozzle 2 at the start and end points of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. As shown in FIG. 8, in the vicinity of the first change point 15 and / or the second change point 16, the locus 9 of the spray nozzle 2 at the transition portion between the straight section and the curved section is convex on the stage 5 side. It may be formed by a curved line. That is, even if the trajectory 9 of the spray nozzle 2 at the transition from the straight section to the curved section in the vicinity of the first change point 15 is formed by a curve due to the start of acceleration in the Z-axis direction before the first change point 15. Good. Further, even when the acceleration in the Z-axis direction at the back of the second change point 16 is completed, the locus 9 of the spray nozzle 2 at the transition portion from the curve section to the straight section in the vicinity of the second change point 16 is formed by a curve. Good.

  The curve of the transition portion between the straight line section and the curved section in the vicinity of the first change point 15 and / or the second change point 16 may have a predetermined R (R). The R (R) of the curve is preferably 5 to 15 mm, for example, and more preferably about 10 mm. By making the curve having an appropriate R (R), the transition portion between the straight section and the curved section becomes smoother, and it is not necessary to use a high acceleration performance as the Z-axis drive device.

  Next, a case where the target surface 11 is a spherical surface will be described. FIG. 9A is a schematic diagram illustrating another example of the target surface 11. FIG. 9B is a schematic diagram illustrating an example of a trajectory 9 in which the spray nozzle 2 scans and moves on the target surface 11 illustrated in FIG. 9A. FIG. 9A shows a case where the target surface 11 is a curved surface obtained by cutting out a part of a spherical surface. Also in this case, as shown in FIG. 9B, as in the case of FIG. 3B described above, by repeating a series of strokes combining movements in the X-axis direction, the Y-axis direction, and the Z-axis direction, the target surface 11 is precisely A membrane can be formed. However, naturally, the movement in the Z-axis direction varies depending on the position in the Y-axis direction.

  Even when the target surface 11 is a spherical surface, the scanning movement of the spray nozzle 2 in the ZX plane is basically the same as the case where the target surface 11 is a curved surface obtained by cutting out a part of the side surface of a cylinder. The locus 9 of the spray nozzle 2 is as shown in FIGS. However, naturally, the curvature radius R changes depending on the position in the Y-axis direction.

Here, with reference to FIG. 10 and FIG. 11, a description will be given of changes in parameters due to a difference in position in the Y-axis direction when the target surface 11 is a spherical surface. FIG. 10 is an explanatory diagram showing a locus 9 on the YZ plane when the spray nozzle 2 scans and moves on a convex spherical surface. FIG. 11 is an explanatory diagram showing a locus 9 on the YZ plane when the spray nozzle 2 scans and moves on a concave spherical surface. When the target surface 11 is a spherical surface, the radius of curvature R ′ at the position where the distance from the center in the Y-axis direction, that is, the position where the radius of curvature R is maximum, is Y ′ is obtained by the following equation (1). Can do.

Further, the distance H ′ from the tip of the spray nozzle 2 to the stage 5 at the top of the arc at the position where the distance from the center in the Y-axis direction is Y ′ can be obtained by the following equation (2).
| H−H ′ | = RR− (2)
In the above formula (2), when the target surface 11 is a spherical surface convex upward (Z-axis direction), the difference (HH ′) is a positive value, and the target surface 11 is upward (Z-axis direction). In the case of a concave spherical surface, the difference (H−H ′) is a negative value.

  In the above-described first embodiment, the case where the target surface 11 is a curved surface obtained by cutting out a part of a cylinder and a spherical surface has been described. Of course, the shape of the target surface 11 is not limited, and the spray film forming apparatus 1 is an arbitrary one. A precision film can be formed on a curved surface having a shape. At this time, the trajectory of the spray nozzle 2 and the scanning speed Va can be calculated from a function representing an arbitrary shape of the target surface 11 and stored in the storage device of the spray film forming apparatus 1. The control device uses the parameter values of the trajectory of the spray nozzle 2 and the scanning speed Va together with the other parameter values described above to scan the spray nozzle 2 that forms a precision film on the target surface 11 having the arbitrary shape. The movement can be controlled.

  Use as a coating agent is not particularly limited as long as it can be sprayed by the spray nozzle 2. For example, an antifouling coating agent using a fluorine-based solvent, an antireflection agent using an organic solvent, a hard coating agent, or the like may be used.

[Spray spray method]
The spraying method according to the first embodiment will be described with reference to FIG. The spray nozzle 2 approaches the front end 13 of the target surface 11 by linear movement in the X-axis direction (S101). The spray nozzle 2 is at a position more than D / 2 away from the front end portion 13 in front of the front end portion 13, that is, ahead of the position where the coating agent sprayed from the spray nozzle 2 first reaches the front end portion 13, The movement in the direction is started (S102).
The spray nozzle 2 passes through a position that is a predetermined distance L away from the front end portion 13 in the Z-axis direction, and extends from the front end portion 13 to the rear end portion 14 along the target surface 11 between the target surface 11 and the spray nozzle 2. It moves while maintaining the distance from the tip at a predetermined distance L (S103). The spray nozzle 2 passes through a position that is a predetermined distance L away from the rear end portion 14 in the Z-axis direction, and is sprayed from the spray nozzle 2 at a position more than D / 2 behind the rear end portion 14. The movement in the Z-axis direction is finished behind the position where the agent does not reach the rear end 14 (S104). Thereafter, the spray nozzle 2 moves away from the rear end portion 14 of the target surface 11 by linear movement in the X-axis direction (S105).
When the spray nozzle 2 reaches a predetermined position in the X-axis direction, the control device determines whether or not the film formation region of the object 11 is completed, that is, whether or not the film formation of the scheduled film formation region is completed. Is done by. When the film forming region is finished (Yes), the film forming process is finished. If the film forming region has not ended (No), the film is moved by a predetermined pitch in the Y-axis direction according to a program stored in advance in the storage device (S107). Thereafter, the process returns to S101, the scanning movement is started by folding back in the X-axis direction, and the film forming process is similarly performed in S101 to S105. In this way, the scanning movement in the X-axis direction, the movement at a predetermined pitch in the Y-axis direction, and the scanning movement by folding back in the X-axis direction are repeated until the film forming region is completed.

[Modification 1]
FIG. 13 is an explanatory view showing Modification 1 in which the spray angle of the spray nozzle 2 changes when the spray nozzle 2 scans and moves on the curved surface. As shown in FIG. 13, in the first modification, the spray direction of the spray nozzle 2 is variable in a direction having an angle with respect to the θ axis (Z axis direction). Other configurations can be the same as the spray film forming apparatus 1 in the first embodiment. By setting it as such a structure, the spray direction of the coating agent from the spray nozzle 2 can be made parallel to the direction always perpendicular | vertical with respect to the target surface 11 in the plane containing a scanning direction. That is, when the spray nozzle 2 moves along the target surface 11, the spray direction of the spray nozzle 2 can be changed at any time so as to be parallel to the normal direction of the target surface 11. As a result, a more uniform precision film can be formed.

  When the spray angle of the spray nozzle 2 is variable so as to be in the normal direction of the target surface 11, the scanning movement of the spray nozzle 2 may be a locus 9 as shown in FIG. 13 before and after the target surface 11. preferable.

  In FIG. 13, as in FIGS. 7A, 7 </ b> B, etc., the spray nozzle 2 moves linearly parallel to the X-axis direction and approaches the front end 13 of the target surface 11. Next, the spray nozzle 2 is also moved in the Z-axis direction so that the position of the tip of the spray nozzle 2 is a predetermined distance L on the normal line at the front end portion 13 of the target surface 11, and the front of the target surface 11. The angle of the spray direction of the spray nozzle 2 is changed so that the spray direction of the spray nozzle 2 at the end portion 13 is the normal direction at the front end portion 13 of the target surface 11.

  At this time, as shown in FIG. 13, it is preferable that the tip of the spray nozzle 2 passes through the first passing point 17 ahead of the position on the front end 13 of the target surface 11 in the normal direction. Here, the first passing point 17 is an extension line extending the target surface forward from the front end 13 of the target surface and a radius centered on the front end 13 of the target surface in the movement plane of the spray nozzle 2. This is a point separated from the first intersection with the circle of D / 2 by a predetermined distance L in the first normal direction on the tangent plane at the first intersection. Note that “D” is the diameter of the coating region on a plane perpendicular to the spraying direction, which is a predetermined distance L away from the spray nozzle 2, as described above. In addition, when the tip of the spray nozzle 2 passes through the first passage point 17, the spray direction of the spray nozzle 2 is preferably parallel to the first normal direction. By passing through the first passing point 17 in this way, the transition from the film forming preparation section to the film forming section can be made smooth.

  Next, as shown in FIG. 13, the spray nozzle 2 moves along the target surface while maintaining the spray direction to be parallel to the normal direction on the tangent plane at the intersection of the spray direction and the target surface. Moving. That is, the spray nozzle 2 moves while appropriately changing the angle θ with respect to the Z-axis direction so that the spray direction of the spray nozzle 2 is always parallel to the normal direction of the target surface.

  After the spray nozzle 2 moves on the target surface and reaches the normal of the tangential plane at the rear end 14, the spray nozzle 2 moves in the spray direction angle and the Z-axis direction, and finally in the X-axis direction. Move straight in parallel to At this time, as shown in FIG. 13, it is preferable that the tip of the spray nozzle 2 passes through a second passing point 18 behind the position in the normal direction at the rear end 14 of the target surface. Here, the second passing point 18 is an extension line extending from the rear end 14 of the target surface to the rear and a radius centered on the rear end 14 of the target surface in the moving plane of the spray nozzle 2. This is a point separated from the second intersection with the circle of D / 2 by a predetermined distance L in the second normal direction on the tangent plane at the second intersection. In addition, when the tip of the spray nozzle 2 passes through the second passage point 18, the spray direction of the spray nozzle 2 is preferably parallel to the second normal direction. By passing through the first passing point 17 in this way, the transition from the film forming section to the film forming preparation section can be made smooth.

  The extension line obtained by extending the target surface forward or rearward is, for example, a case where the target surface is matched with a curved surface obtained by cutting out a part of a spherical surface or a part of a side surface of a cylinder, that is, a target surface in a moving plane of the spray nozzle 2 When the cross-section is an arc shape, the arc shape can be extended from the front end portion 13 and / or the rear end portion 14. The arc shape extended here is concentric with the cut arc shape and has the same radius. Note that both ends of a curved surface obtained by cutting out a part of a spherical surface or a part of a side surface of a cylinder are a front end 13 and a rear end 14, respectively. Naturally, the cross section of the target plane in the moving plane is not limited to the arc shape, and may be, for example, an ellipse or an oval. The extension line extended from the front end portion 13 and / or the rear end portion 14 of the target surface can be widely adopted as long as the extension line can be smoothly connected to the cross-sectional shape of the target surface.

  Further, the extension line extending the target surface forward or backward may be a straight line extending in the tangential direction at the front end portion 13 and / or the rear end portion 14 in the moving plane of the spray nozzle 2.

  The shape of the target surface can be stored in advance in a storage device mounted on the spray film forming apparatus. For example, it can be stored in the storage device as a function having X, Y, and Z as variables corresponding to the X axis, Y axis, and Z axis of the drive mechanism of the spray film forming apparatus. In that case, the function of the extension line from the front end portion 13 and / or the rear end portion 14 can be calculated based on a function stored in advance.

1: Spray film forming device 2: Spray nozzle 3X: X-axis arm 3Y: Y-axis arm 3Z: Z-axis arm 5: Stage 6: Chamber 7: Fan unit 9: Trajectory 10: Object 11: Target surface 13: Front end Part 14: Rear end 15: First changing point 16: Second changing point 17: First passing point 18: Second passing point

Claims (10)

In the spray spraying method of spraying the coating agent from the spray nozzle toward the target surface,
The target surface has a curved surface;
The spray nozzle moves along the target surface while maintaining a distance in the spray direction of the spray nozzle between the tip of the spray nozzle and the target surface at a predetermined distance,
The spray nozzle moves along the target surface while maintaining a constant relative movement speed of the tip in a direction parallel to a tangential plane at the intersection of the spray direction and the target surface;
Spray spraying method. The spray nozzle moves in a state where the spray direction is maintained constant.
The spraying method according to claim 1. In a state where the spray direction is maintained parallel to a direction perpendicular to a ground plane on which an object having the target surface is installed, the spray nozzle is within a single moving plane perpendicular to the ground plane. Moving,
The spraying method according to claim 2. When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end, and a position on the target surface that reaches last is a rear end. ,
The spray nozzle moves in a direction parallel to the ground plane, approaches the front end of the target surface, and moves along the target surface from the front end toward the rear end. Move away from the rear end in a direction parallel to the ground contact surface,
The spray nozzle starts moving in the spray direction in front of a position where the coating agent sprayed from the spray nozzle first reaches the front end,
The spraying method according to claim 3. When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end, and a position on the target surface that reaches last is a rear end. ,
The spray nozzle moves in a direction parallel to the ground plane, approaches the front end of the target surface, and moves along the target surface from the front end toward the rear end. Move away from the rear end in a direction parallel to the ground contact surface,
The spray nozzle ends the movement in the spray direction behind the position where the coating agent sprayed from the spray nozzle does not reach the rear end,
The spraying method according to claim 3. The spray nozzle moves along the target surface while maintaining the spray direction to be parallel to a normal direction in a tangential plane at the intersection of the spray direction and the target surface;
The spraying method according to claim 1. When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end, and a position on the target surface that reaches last is a rear end. ,
The spray nozzle moves in a direction parallel to a grounding surface on which an object having the target surface is installed, approaches the front end portion of the target surface, and moves from the front end portion toward the rear end portion. After moving along the target surface, move away from the rear end in a direction parallel to the ground contact surface,
When the diameter of the application area in a plane perpendicular to the spraying direction, which is separated from the tip of the spray nozzle by the predetermined distance, is D,
In the plane where the spray nozzle moves, an extension line extending the target surface forward from the front end of the target surface, and a circle having a radius D / 2 centered on the front end of the target surface The spray nozzle passes through a first passing point that is a predetermined distance away from the first intersecting point in the first normal direction on the tangential plane at the first intersecting point, and the spray nozzle passes the first passing point at the first passing point. The spray nozzle moves so that the spray direction of the nozzle is parallel to the first normal direction;
The spraying method according to claim 6. When the spray nozzle moves in a plane including the moving direction of the spray nozzle, a position on the target surface that reaches first is a front end, and a position on the target surface that reaches last is a rear end. ,
The spray nozzle moves in a direction parallel to a grounding surface on which an object having the target surface is installed, approaches the front end portion of the target surface, and moves from the front end portion toward the rear end portion. After moving along the target surface, move away from the rear end in a direction parallel to the ground contact surface,
When the diameter of the application area in a plane perpendicular to the spraying direction, which is separated from the tip of the spray nozzle by the predetermined distance, is D,
In the plane in which the spray nozzle moves, an extension line extending the target surface rearward from the rear end of the target surface, and a circle having a radius D / 2 centered on the rear end of the target surface The spray nozzle passes through a second passing point that is a predetermined distance away from the second intersecting point in the second normal direction in the tangential plane at the second intersecting point, and the spray nozzle passes the second passing point at the second passing point. The spray nozzle moves so that the spray direction of the nozzle is parallel to the second normal direction;
The spraying method according to claim 6.   The spray film-forming method which forms a film | membrane on the surface of the said target surface by the spraying method of Claim 1-8. A ground plane on which an object having a target surface is installed;
A spray nozzle for spraying the coating agent toward the target surface;
A moving mechanism for independently moving the spray nozzle in a direction parallel to the ground contact surface and a spray direction of the spray nozzle different from the direction parallel to the ground contact surface;
With
While maintaining the distance in the spray direction between the tip of the spray nozzle and the target surface at a predetermined distance, the spray nozzle is moved,
Moving the spray nozzle while maintaining a constant relative movement speed parallel to a tangential plane at the intersection of the spray direction of the spray nozzle and the target surface at the tip of the spray nozzle;
Spray film forming device.

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