JP6756545B2 - Spray spray method, spray film forming method, and spray film forming device - Google Patents

Description

The present invention relates to a spray spraying method, a spray film forming method using the spray film forming method, and a spray film forming apparatus, and more particularly, a spray spraying method, a spray film forming method, and a spray film forming apparatus for an object to be filmed having a curved surface. Regarding.

Spray film formation is a method that has been used for a long time for painting the exterior of industrial products. In recent years, spray film forming has come to be widely adopted as a precision film forming technology for industrial products such as displays, touch panels, and fuel cells that require higher accuracy.

As a spray film forming method corresponding to such a microfiltration technique, a coating agent is sprayed onto the film to be formed from a spray nozzle that scans and moves in parallel along the surface of the film to be formed to form a microfiltration film. There is a method of forming a film. Specifically, it is a method of forming a microfiltration film on a flat surface by using a spray nozzle that reciprocally scans while feeding pitches by a predetermined distance for each scan (for example, Patent Document 1).

Japanese Patent Application Laid-Open No. 2003-320299

Recently, many displays, touch panels, and the like having a convex or concave curved surface have been manufactured as industrial products for film formation. However, in order to form a uniform precision film on a curved surface, it is necessary to further improve the spray film forming method as disclosed in Patent Document 1 so as to correspond to the film forming on a curved surface.

As a spray film forming method for a film forming object having a three-dimensional shape such as a curved surface, there is a method in which a spray nozzle is attached to the tip of a multi-axis robot arm to form a film on a curved surface. However, in the case of precision film forming, the setting of the trajectory and angle of the spray nozzle depends on the teaching that memorizes the work by a skilled person. Further, in the case of a multi-axis robot arm, further improvement is required for precision film formation such as speed stability at the tip of the arm.

The present invention has been made in view of the above circumstances, and is a spray spraying method, a spray film forming method, and a spray manufacturing method for forming a uniform microfiltration film on the surface of a film to be formed having a curved surface. An exemplary task is to provide a membrane device.

In order to solve the above problems, the present invention has the following configurations.

(1) The spray spray method is a spray spray method in which a coating agent is sprayed from a spray nozzle toward a target surface. The target surface has a curved surface, and the spray nozzle has a tip of the spray nozzle and the target surface. While maintaining the distance of the spray nozzle in the spray direction between them at a predetermined distance, the spray nozzle moves along the target surface and is in a direction parallel to the tangent plane at the intersection of the spray direction and the target surface. The spray nozzle moves along the target surface while maintaining the relative movement speed of the tip constant.

The distance between the spray nozzle and the target surface (film to be formed) in the spray direction of the spray nozzle is constant, and in a direction parallel to the tangent plane at the intersection of the spray direction of the spray nozzle and the target surface. Since the relative movement speed is constant, a uniform precision film can be formed even on a target surface having a curved surface.

As used herein, the term "microfiltration" refers to a uniform thin film having a thickness of about 10 μm or less.

(2) It is preferable that the spray nozzle moves while the spray direction is kept constant.

(3) The spray nozzle moves in a single motion perpendicular to the ground plane while the spray direction is maintained parallel to the ground plane in which the object having the target surface is installed. It is preferable to move in a plane.

By moving the spray nozzle while the spray direction of the spray nozzle is kept constant, particularly parallel to the direction perpendicular to the ground plane, a more accurate and uniform precision film can be manufactured. Further, by moving in a single moving plane perpendicular to the ground plane, that is, by making the scanning moving direction of the spray nozzle on a straight line, efficient film formation becomes possible.

(4) When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end, and the position on the target surface that reaches last is the rear. As an end portion, the spray nozzle moves in a direction parallel to the ground contact surface, approaches the front end portion of the target surface, and moves along the target surface from the front end portion to the rear end portion. After that, the spray nozzle moves away from the rear end portion in a direction parallel to the ground plane, and the spray nozzle is in front of the position where the coating agent sprayed from the spray nozzle first reaches the front end portion. , It is preferable to start the movement in the spraying direction.

(5) When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end, and the position on the target surface that reaches last is the rear. As an end portion, the spray nozzle moves in a direction parallel to the ground contact surface, approaches the front end portion of the target surface, and moves along the target surface from the front end portion to the rear end portion. After that, the spray nozzle moves away from the rear end portion in a direction parallel to the ground plane, and the spray nozzle is rearward from the position where the coating agent sprayed from the spray nozzle does not reach the rear end portion. It is preferable to end the movement in the spraying direction.

The spray nozzle begins to move in the spray direction in front of the position where the coating agent sprayed from the spray nozzle first reaches the front end, and / or the coating agent sprayed from the spray nozzle is at the rear end. By terminating the movement in the spraying direction behind the position where the portion does not reach, the movement of the spray nozzle at the front end portion and the rear end portion becomes smooth. As a result, the sudden acceleration / deceleration of the spray nozzle in the spray direction is alleviated, so even if the drive control in the spray direction of the spray nozzle is not made excessively high performance, coating unevenness near the front end and the rear end Can be reduced.

(6) The spray nozzle moves along the target surface while maintaining the spray direction parallel to the normal direction in the tangent plane at the intersection of the spray direction and the target surface. May be good.

A uniform microfiltration can also be produced by moving the spray nozzle so that the spray direction is always parallel to the normal direction of the target surface.

(7) When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end, and the position on the target surface that reaches last is the rear. As an end portion, the spray nozzle moves in a direction parallel to the ground plane on which the object having the target surface is installed and approaches the front end portion of the target surface, and the front end portion to the rear end portion. After moving along the target surface toward, the rear end of the spray nozzle moves in a direction parallel to the ground plane and moves away from the tip of the spray nozzle, at a predetermined distance from the tip of the spray nozzle, and perpendicular to the spray direction. When the diameter of the coating region on the plane is D, an extension line extending the target surface forward from the front end of the target surface and the front end of the target surface in the plane in which the spray nozzle moves. The spray nozzle passes through a first passing point separated by the predetermined distance in the direction of the first normal line in the tangent plane at the first intersection from the first intersection with a circle having a radius D / 2 centered on the portion. Moreover, it is preferable that the spray nozzle moves so that the spray direction of the spray nozzle is parallel to the first normal direction at the first passing point.

(8) When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end, and the position on the target surface that reaches last is the rear. As an end portion, the spray nozzle moves in a direction parallel to the ground plane on which the object having the target surface is installed and approaches the front end portion of the target surface, and the front end portion to the rear end portion. After moving along the target surface toward, the rear end of the spray nozzle moves in a direction parallel to the ground plane and moves away from the tip of the spray nozzle, at a predetermined distance from the tip of the spray nozzle, and perpendicular to the spray direction. When the diameter of the coating region on the plane is D, an extension line extending the target surface rearward from the rear end of the target surface and the rear end of the target surface in the plane in which the spray nozzle moves. The spray nozzle passes through a second passing point separated by the predetermined distance in the second normal direction in the tangent plane at the second intersection from the second intersection with a circle having a radius D / 2 centered on the portion. Moreover, it is preferable that the spray nozzle moves at the second passing point so that the spray direction of the spray nozzle is parallel to the second normal direction.

A more uniform microfiltration is produced by the spray nozzle moving the first passing point and / or the second passing point so that the spray direction is parallel to the first normal and the second normal. It becomes possible. That is, when passing through the first passing point and / or the second passing point, the spray nozzles are already prepared in a state suitable for forming a microfiltration film having a uniform trajectory and spray direction, so that the accuracy is higher. A uniform microfiltration film can be formed.

(9) A spray film forming method for forming a film on the surface of the target surface by the spray spray method according to (1) to (8) above.

It is a spray film forming method that employs the spray spraying methods (1) to (8) above, and it is possible to form a uniform microfiltration film.

(10) A ground surface on which an object having a target surface is installed, a spray nozzle for spraying a coating agent toward the target surface, and the spray nozzle in a direction parallel to the ground surface and on the ground surface. A moving mechanism for independently moving the spray nozzle in each of the spray directions different from the parallel direction is provided, and the distance between the tip of the spray nozzle and the target surface in the spray direction is maintained at a predetermined distance. While moving the spray nozzle while maintaining a constant relative movement speed of the tip of the spray nozzle parallel to the tangent plane at the intersection of the spray direction of the spray nozzle and the target surface, the spray nozzle A spray film forming device that moves.

It is a spray film forming apparatus that realizes the spray spraying methods (1) to (8) above, and can form a uniform microfiltration film.

Further objections or other features of the invention will be manifested by preferred embodiments described below with reference to the accompanying drawings.

According to the present invention, it is possible to provide a spray spraying method, a spray film forming method, and a spray film forming apparatus for forming a uniform precision film on the surface of a film to be formed having a curved surface.

It is a schematic perspective view of the spray film forming apparatus which concerns on Embodiment 1. FIG. It is a partially enlarged view which shows the moving mechanism of the spray film forming apparatus shown in FIG. It is a schematic diagram which shows an example of the target surface 11. It is a schematic diagram which shows an example of the locus 9 in which the spray nozzle 2 scans and moves on the target surface 11 shown in FIG. 3A. It is explanatory drawing which shows the locus 9 of the spray nozzle 2 on the XZ plane when the spray nozzle 2 scans and moves on the convex curved surface. It is explanatory drawing which shows the locus 9 of the spray nozzle 2 on the XZ plane when the spray nozzle 2 scans and moves on the concave curved surface. It is explanatory drawing of the scanning speed when the spray nozzle 2 scans and moves on a convex curved surface. It is explanatory drawing which shows the start point of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. It is explanatory drawing which shows the end point of the acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. It is explanatory drawing which shows the locus 9 of the spray nozzle 2 at the start and end points of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. It is a schematic diagram which shows another example of the object surface 11. FIG. 5 is a schematic view showing an example of a locus 9 in which the spray nozzle 2 scans and moves on the target surface 11 shown in FIG. 9A. It is explanatory drawing which shows the locus 9 on the YY plane when the spray nozzle 2 scans and moves on a convex spherical surface. It is explanatory drawing which shows the locus 9 in the YY plane when the spray nozzle 2 scans and moves on the concave spherical surface. It is a flowchart which shows each process of the spray spray method which concerns on Embodiment 1. It is explanatory drawing which shows the modification 1 which changes the spray angle of a spray nozzle 2 when the spray nozzle 2 scans and moves on a curved surface.

[Embodiment 1]
Hereinafter, Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a schematic perspective view of the spray film forming apparatus 1 according to the first embodiment. The spray film forming apparatus 1 according to the first embodiment includes a stage 5 for forming a ground surface on which an object having a target surface is installed, a spray nozzle 2 for spraying a coating agent toward the target surface, and a spray nozzle 2. It is provided with a moving mechanism for moving. The spray film forming apparatus 1 may be provided with an exhaust chamber 6 adjacent to the stage 5 for discharging the coating agent that has not adhered to the object 10. Further, the spray film forming apparatus 1 may include a fan unit 7 equipped with a HEPA filter in order to take clean air into the film forming chamber.

FIG. 2 is a partially enlarged view showing the moving mechanism of the spray film forming apparatus 1 shown in FIG. When the stage 5 is in the XY plane, the moving mechanism includes an X-axis arm 3X parallel to the X-axis, a Y-axis arm 3Y parallel to the Y-axis orthogonal to the X-axis in the XY plane, and a perpendicular to the XY plane. It has a Z-axis arm 3Z parallel to the Z-axis. The X-axis drive device 22, the Y-axis drive device 23, and the Z-axis drive device 24 of the X-axis arm 3X, the Y-axis arm 3Y, and the Z-axis arm 3Z, respectively, are driven independently of each other to drive the spray nozzle. 2 can be moved.

In FIGS. 1 and 2, one X-axis arm 3X bridged over two parallel Y-axis arms 3Y to these two parallel Y-axis arms 3Y is Y along the Y-axis arm 3Y. It can slide in the axial direction. On the X-axis arm 3X, the Z-axis arm 3Z can slide in the X-axis direction along the X-axis arm 3X. The spray nozzle 2 can slide on the Z-axis arm 3Z in the Z-axis direction along the Z-axis arm 3Z. The tip of the spray nozzle 2 faces downward in the Z-axis direction, and is configured to spray the coating agent downward in the Z-axis direction. Then, the movement in the X-axis direction is driven by the X-axis drive device 22, the movement in the Y-axis direction is driven by the Y-axis drive device 23, and the movement in the Z-axis direction is driven by the Z-axis drive device 24. The spray nozzle 2 can be freely moved in each of the axial direction and the Z-axis direction.

By providing such a moving mechanism, the spray film forming apparatus 1 makes the spray nozzle 2 independent of the direction parallel to the stage 5 and the spray direction of the spray nozzle 2 different from the direction parallel to the stage 5. It is possible to move it. Further, the spray film forming apparatus 1 can move the spray nozzle 2 while maintaining a constant distance between the tip of the spray nozzle 2 and the target surface in the spray direction. Further, the spray film forming apparatus 1 moves the spray nozzle 2 while maintaining a constant relative movement speed of the tip of the spray nozzle 2 parallel to the tangent plane at the intersection of the spray direction of the spray nozzle 2 and the target surface. It is possible to make it. The spray direction of the spray nozzle 2 is preferably fixed, and in the present embodiment, the movement of the spray nozzle 2 in a state where the spray direction is kept constant will be described. As will be described later in Modification 1, it is of course possible to configure the spray nozzle 2 so that the spray direction is not fixed.

It is preferable that the spray nozzle 2 moves while the spray direction of the spray nozzle 2 is maintained parallel to the direction perpendicular to the stage 5. That is, it is preferable that the spray nozzle 2 moves while the spray direction of the spray nozzle 2 is fixed in parallel with the Z-axis direction. At this time, it is more preferable that the spray nozzle 2 moves in a single moving plane perpendicular to the ground plane. For example, as shown in FIGS. 3A and 3B, the spray nozzle 2 can be moved in a moving plane perpendicular to the stage 5 and parallel to the X-axis direction. Needless to say, the moving direction of the spray nozzle 2 is not limited to the X-axis direction, but if it is a direction perpendicular to the stage 5, even if it is in a moving plane parallel to the Y-axis direction, the X-axis and the Y-axis It may be in a moving plane that is not parallel to either.

Here, an example of the locus 9 of the spray nozzle 2 when forming a film on the target surface 11 will be described with reference to FIGS. 3A and 3B. Here, a case where the target surface 11 is a curved surface obtained by cutting out a part of the side surface of the cylinder will be described. FIG. 3A is a schematic view showing an example of the target surface 11. FIG. 3B is a schematic view showing an example of a locus 9 in which the spray nozzle 2 scans and moves on the target surface 11 shown in FIG. 3A. FIG. 3A shows a case where the target surface 11 shows an arc in the ZX cross section and the shape does not change in the Y-axis direction, that is, a curved surface obtained by cutting out a part of the side surface of the cylinder. There is. When forming a film on the target surface 11 as shown in FIG. 3A, as shown in FIG. 3B, the spray nozzle 2 is scanned and moved in the X-axis direction, and the distance from the target surface 11 in the spray direction is maintained at a predetermined distance L. Move in the Z-axis direction, and when it reaches the end of the predetermined movement range in the X-axis direction, stop the movement in the X-axis direction, move in the Y-axis direction by a predetermined pitch, and then spray in the opposite direction in the X-axis direction. The nozzle 2 is scanned and moved. By repeating a series of steps in which movements in the X-axis direction, the Y-axis direction, and the Z-axis direction are combined in this way, a microfiltration film can be formed on the target surface 11.

A series of steps combining movements in the X-axis direction, the Y-axis direction, and the Z-axis direction can be realized by programming in advance and executing the scanning movement program generated by the programming. For example, the movement of the spray nozzle 2 can be controlled by mounting the control device and the storage device on the spray film forming device 1 and executing the scanning movement program stored in the storage device by the control device. Specifically, a series of signal information (scanning movement program) for co-driving the X-axis drive device 22, the Y-axis drive device 23, and the Z-axis drive device 24 is stored in a storage device, and the storage device stores the signal information (scanning movement program). The movement of the spray nozzle 2 can be controlled by the control device cooperatingly driving the X-axis drive device 22, the Y-axis drive device 23, and the Z-axis drive device 24 based on the stored scanning movement program.

In the above-mentioned programming, programming can be easily performed by setting the parameter values corresponding to the target surface 11 in the spray film forming apparatus 1. For example, when the target surface 11 is a curved surface obtained by cutting out a part of the side surface of the cylinder, the number of parameter value setting items can be reduced. Specifically, the distance [H] from the tip of the spray nozzle 2 to the stage 5 at the apex of the curved surface (arc), the radius of curvature [R] of the arc, the scanning movement speed [V] of the spray nozzle 2, and the pitch width [P]. ], The coordinate range [X] in the X-axis direction of the target surface 11 and the coordinate range [Y] in the Y-axis direction need only be set. A plurality of target surfaces 11 may be present on one sample, and a part (one scanning movement) of the plurality of target surfaces 11 is formed by one movement (in the X-axis direction). It may be arranged.

FIG. 4 is an explanatory view showing a locus 9 of the spray nozzle 2 on the XX plane when the spray nozzle 2 scans and moves on the convex curved surface. In FIG. 4, the object 10 has an object surface 11 that is convex upward (in the Z-axis direction). The spray nozzle 2 scans and moves on at least the target surface 11 of the object 10 while maintaining a predetermined distance L in the Z-axis direction with respect to the target surface 11. At this time, the locus 9 drawn by the spray nozzle 2 coincides with at least a part of the curve obtained by moving the target surface 11 of the object 10 by a predetermined distance L in the Z-axis direction.

FIG. 5 is an explanatory view showing a locus 9 of the spray nozzle 2 on the XX plane when the spray nozzle 2 scans and moves on the concave curved surface. In FIG. 5, the object 10 has a concave object surface 11 upward (Z-axis direction). The spray nozzle 2 scans and moves on at least the target surface 11 of the object 10 while maintaining a predetermined distance L in the Z-axis direction with respect to the target surface 11. At this time, the locus 9 drawn by the spray nozzle 2 coincides with at least a part of the curve obtained by moving the target surface 11 of the object 10 by a predetermined distance L in the Z-axis direction.

In the present embodiment, the spray nozzle 2 scans while maintaining a constant moving speed (scanning speed) that is a combination of a speed component in a direction parallel to the stage 5 and a speed component in a direction perpendicular to the stage 5. To do. FIG. 6 is an explanatory diagram of a scanning speed when the spray nozzle 2 scans and moves on a convex curved surface. In FIG. 6, the locus 9 of the object 10 and the spray nozzle 2 in the ZX plane is shown. In FIG. 6, Va represents the combined velocity of the velocity component in the X-axis direction (direction parallel to the stage 5) and the velocity component in the Z-axis direction (direction perpendicular to the stage 5). Since the spray nozzle 2 scans and moves while maintaining the distance between the surface of the object 10 and the object 10 at a predetermined distance L, the locus 9 of the spray nozzle 2 substantially follows the surface of the object 10. The scanning speed Va is a speed parallel to the tangential direction of the curved surface drawn by the locus 9 of the spray nozzle 2.

As shown in FIG. 6, the scanning speed Va of the spray nozzle 2 is constant. That is, in the vicinity of the end of the object 10, the velocity component in the X-axis direction is relatively small in the region where the velocity component in the Z-axis direction is large. Further, in the region where the velocity component in the Z-axis direction is small in the vicinity of the apex of the object 10, the velocity component in the X-axis direction is relatively large. In the region where the velocity component in the Z-axis direction is close to zero in the very vicinity of the apex of the object 10, the velocity component in the X-axis direction is close to the scanning velocity Va.

In the spray film forming apparatus 1, the spraying section for spraying the coating agent from the spray nozzle 2 is not limited to the target surface 11, and is a straight line that moves parallel to the stage 5 before and after the target surface 11 in the scanning moving direction. A section can be provided. That is, the spray section of the spray nozzle 2 may include a straight section and a curved section when passing over the target surface 11 and its vicinity. By providing such a straight section, it is possible to make the approach section for keeping the moving speed of the spray nozzle 2 of the spray nozzle 2 constant. Here, the change point that changes from the straight section to the curved section in the movement of the spray nozzle 2 is hereinafter referred to as the "first change point", and the change point that changes from the curved section to the straight section is hereinafter referred to as "the first change point". It is called "the second change point".

FIG. 7A is an explanatory diagram showing a start point of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. The movement of the spray nozzle 2 starts in the spraying direction in front of the position where the coating agent sprayed from the spray nozzle 2 first reaches the front end portion 13. That is, acceleration in the direction perpendicular to the stage 5 is started in the region on the straight section side of the first change point 15 and the distance from the first change point 15 is longer than D / 2. In other words, before the position of the spray nozzle 2 (hereinafter referred to as "film formation start point") where the spray nozzle 2 approaches the curved surface to be coated and the coating agent sprayed from the spray nozzle 2 reaches the target surface 11. It is preferable that acceleration in the Z-axis direction is started.

Here, "D" is the diameter of the coating region in a plane perpendicular to the spray direction, which is a predetermined distance L from the spray nozzle 2. The coating area is a region in which the coating agent sprayed from the spray nozzle 2 is diffused in a conical shape centered on the spraying direction with the tip of the spray nozzle 2 as the apex and adheres to a circular cross section perpendicular to the spraying direction. I will say. However, since the coating agent sprayed by the spray nozzle 2 becomes fine particles, it may adhere to the outside of the above-mentioned coating region. Therefore, in the present invention, the diameter of the smallest circular region among the circular regions to which 95% or more of the sprayed coating agent adheres on a plane perpendicular to the spraying direction, which is a predetermined distance L from the spray nozzle 2 in the spraying direction. Can be "D". Further, the "front end portion" is a position on the target surface that first reaches when the spray nozzle 2 moves in the moving direction in the plane including the moving direction of the spray nozzle 2. In this way, by starting the acceleration in the Z-axis direction before the distance 2 / D from the first change point 15, the fluctuation of the scanning speed Va in the vicinity of the first change point 15 can be minimized. .. As a result, it is possible to suppress the occurrence of defects such as coating unevenness on the target surface 11 without making the drive control of the spray nozzle 2 in the Z-axis direction and the X-axis direction excessively high performance.

FIG. 7B is an explanatory diagram showing an end point of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. The movement of the spray nozzle 2 ends in the spray direction at a position rearward of the position where the coating agent sprayed from the spray nozzle 2 does not reach the rear end portion 14. That is, it is preferable that the acceleration in the direction perpendicular to the stage 5 is completed in the region on the straight section side of the second change point 16 and the distance from the second change point 16 is longer than D / 2. In other words, the position of the spray nozzle 2 where the spray nozzle 2 approaches the end of the curved surface to be coated and the coating agent sprayed from the spray nozzle 2 does not reach the target surface 11 (hereinafter referred to as "film formation end point"). It is preferable that the acceleration in the Z-axis direction ends at the deeper part. In this way, by terminating the acceleration in the Z-axis direction behind the distance D / 2 from the second change point 16, the fluctuation of the scanning speed Va in the vicinity of the second change point 16 can be minimized. .. As a result, it is possible to suppress the occurrence of defects such as coating unevenness on the target surface 11 without making the drive control of the spray nozzle 2 in the Z-axis direction and the X-axis direction excessively high performance.

In the above-described embodiment, the distance from the first change point 15 or the second change point 16 may be larger than D / 2, but from the viewpoint of shortening the processing (film formation) time, the first change point 15 or the second change point 16 2 The upper limit of the distance from the change point 16 is preferably D or less. The spraying section is between the film forming start point and the film forming end point, and the scanning speed Va of the spray nozzle 2 is constant. The moving speed of the spray nozzle 2 does not have to be constant before the film forming start point and behind the film forming end point, and can be an acceleration / deceleration section for reaching the scanning speed Va. In the acceleration / deceleration section, spraying from the spray nozzle 2 can be started in preparation for spraying in the spray section, but in that case, the length of the acceleration / deceleration section is long from the viewpoint of suppressing the amount of the coating agent used. Is preferably short. For example, the upper limit of the length of the acceleration / deceleration section can be D or less, which is the upper limit of the distance from the first change point 15 or the second change point 16. By shortening the length of the acceleration / deceleration section, the processing (film forming) time can be shortened, and as a result, the production capacity can be improved.

Further, in the scanning moving direction of the spray nozzle 2, on the front side of the film forming start point, the position of the spray nozzle 2 in the Z axis direction is maintained at the position of the film forming start point in the Z axis direction (at a predetermined distance L). Regardless, the spray nozzle 2 can be moved by scanning. On the rear side of the film forming end point, the position of the spray nozzle 2 in the Z-axis direction is such that the spray nozzle 2 is scanned and moved while maintaining the position of the film forming end point in the Z-axis direction (regardless of the predetermined distance L). Can be done.

In FIGS. 7A and 7B, a case where the target surface 11 is a curved surface and only this curved surface is a film forming target has been described, but it is not excluded that a straight section may be a film forming target.

FIG. 8 is an explanatory diagram showing a locus 9 of the spray nozzle 2 at the start and end points of acceleration in the Z-axis direction when the spray nozzle 2 scans and moves on a convex curved surface. As shown in FIG. 8, in the vicinity of the first change point 15 and / or the second change point 16, the locus 9 of the spray nozzle 2 at the transition portion between the straight section and the curved section is convex on the stage 5 side. It may be formed by a curved line. That is, even if the locus 9 of the spray nozzle 2 at the transition portion from the straight section to the curved section in the vicinity of the first changing point 15 is formed by the curved line due to the start of acceleration in the Z-axis direction before the first changing point 15. Good. Further, even if the locus 9 of the spray nozzle 2 at the transition portion from the curved section to the straight section in the vicinity of the second changing point 16 is formed by the curved line due to the end of the acceleration in the Z-axis direction at the back of the second changing point 16. Good.

The curve of the transition portion between the straight section and the curved section in the vicinity of the first change point 15 and / or the second change point 16 may have a predetermined R (R). The R (R) of the curve is, for example, preferably 5 to 15 mm, more preferably about 10 mm. By forming a curve having an appropriate R (R), the transition portion between the straight section and the curved section becomes smoother, and it is not necessary to use a Z-axis drive device having high acceleration performance.

Next, a case where the target surface 11 is a spherical surface will be described. FIG. 9A is a schematic view showing another example of the target surface 11. FIG. 9B is a schematic view showing an example of a locus 9 in which the spray nozzle 2 scans and moves on the target surface 11 shown in FIG. 9A. FIG. 9A shows a case where the target surface 11 is a curved surface obtained by cutting out a part of a spherical surface. In this case as well, as shown in FIG. 9B, as in the case of FIG. 3B described above, by repeating a series of strokes combining the movements in the X-axis direction, the Y-axis direction, and the Z-axis direction, the target surface 11 is precisely contacted. The membrane can be formed. However, as a matter of course, the movement in the Z-axis direction varies depending on the position in the Y-axis direction.

Even when the target surface 11 is a spherical surface, the scanning movement of the spray nozzle 2 in the ZX plane is basically the same as when the target surface 11 is a curved surface obtained by cutting out a part of the side surface of the cylinder. The locus 9 of the spray nozzle 2 as shown in FIGS. 4 and 5 is obtained. However, as a matter of course, the radius of curvature R changes depending on the position in the Y-axis direction.

Here, with reference to FIGS. 10 and 11, changes in parameters due to differences in position in the Y-axis direction when the target surface 11 is a spherical surface will be described. FIG. 10 is an explanatory view showing a locus 9 on a YY plane when the spray nozzle 2 scans and moves on a convex spherical surface. FIG. 11 is an explanatory view showing a locus 9 on a YY plane when the spray nozzle 2 scans and moves on a concave spherical surface. When the target surface 11 is a spherical surface, the radius of curvature R'at the center in the Y-axis direction, that is, the position where the distance from the position where the radius of curvature R is maximum is Y'is calculated by the following equation (1). Can be done.

Further, the distance H'from the tip of the spray nozzle 2 to the stage 5 at the apex of the arc at the position where the distance from the center in the Y-axis direction is Y'can be obtained by the following equation (2).
| HH'| = R-R'... (2)
In the above equation (2), when the target surface 11 is a spherical surface convex upward (Z-axis direction), the difference (H-H') is a positive value, and the target surface 11 is upward (Z-axis direction). In the case of a concave spherical surface, the difference (HH') is a negative value.

In the above-described first embodiment, the case where the target surface 11 is a curved surface obtained by cutting out a part of a cylinder and a spherical surface has been described, but of course, the shape of the target surface 11 is not limited, and the spray film forming apparatus 1 is arbitrary. A microfiltration can be formed on a curved surface having a shape. At this time, the trajectory of the spray nozzle 2 and the scanning speed Va can be calculated from the function representing an arbitrary shape of the target surface 11 and stored in the storage device of the spray film forming apparatus 1. The control device uses the trajectory of the spray nozzle 2 and the parameter values of the scanning speed Va together with the other parameter values described above to scan the spray nozzle 2 for forming a precision film on the target surface 11 having the arbitrary shape. The movement can be controlled.

The use as a coating agent is not particularly limited as long as it can be sprayed by the spray nozzle 2. For example, an antifouling coating agent using a fluorine-based solvent, an antireflection agent using an organic solvent, a hard coating agent, or the like may be used.

[Spray spray method]
The spray spraying method according to the first embodiment will be described with reference to FIG. The spray nozzle 2 approaches the target surface 11 in a linear motion toward the front end portion 13 in the X-axis direction (S101). The spray nozzle 2 is located at a position more than D / 2 in front of the front end portion 13, that is, in front of the position where the coating agent sprayed from the spray nozzle 2 first reaches the front end portion 13, and the Z axis. The movement in the direction is started (S102).
The spray nozzle 2 passes through a position L separated from the front end portion 13 in the Z-axis direction by a predetermined distance L, and along the target surface 11, from the front end portion 13 to the rear end portion 14, the target surface 11 and the spray nozzle 2 It moves while maintaining the distance to the tip at a predetermined distance L (S103). The spray nozzle 2 passes through a position L away from the rear end portion 14 in the Z-axis direction by a predetermined distance L, and at a position more than D / 2 behind the rear end portion 14, that is, the coating sprayed from the spray nozzle 2. The movement in the Z-axis direction is completed after the position where the agent does not reach the rear end portion 14 (S104). After that, the spray nozzle 2 moves linearly away from the rear end portion 14 of the target surface 11 in the X-axis direction (S105).
When the spray nozzle 2 reaches a predetermined position in the X-axis direction, the control device determines whether or not the film-forming region of the object 11 is completed, that is, whether or not the film-forming of the planned film-forming region is completed. Is done by. When the film-forming region is completed (Yes), the film-forming process is completed. When the film forming region is not completed (No), the film is moved by a predetermined pitch in the Y-axis direction according to a program stored in the storage device in advance (S107). After that, it returns to S101, turns back in the X-axis direction to start scanning movement, and the film forming process is performed in the same manner in S101 to S105. In this way, the scanning movement in the X-axis direction, the movement of a predetermined pitch in the Y-axis direction, and the scanning movement in the X-axis direction are repeated until the film forming region is completed.

[Modification 1]
FIG. 13 is an explanatory view showing a modification 1 in which the spray angle of the spray nozzle 2 changes when the spray nozzle 2 scans and moves on the curved surface. As shown in FIG. 13, in the first modification, the spray direction of the spray nozzle 2 is variable in a direction having an angle with respect to the θ axis (Z axis direction). Other configurations can be the same as those of the spray film forming apparatus 1 in the above-described first embodiment. With such a configuration, the spraying direction of the coating agent from the spray nozzle 2 can always be parallel to the direction perpendicular to the target surface 11 in the plane including the scanning direction. That is, when the spray nozzle 2 moves along the target surface 11, the spray direction of the spray nozzle 2 can be changed at any time so as to be parallel to the normal direction of the target surface 11. This makes it possible to form a more uniform microfiltration film.

When the spray angle of the spray nozzle 2 is variable so as to be in the normal direction of the target surface 11, the scanning movement of the spray nozzle 2 may have a locus 9 as shown in FIG. 13 before and after the target surface 11. preferable.

In FIG. 13, similarly to FIGS. 7A and 7B, the spray nozzle 2 linearly moves in parallel with the X-axis direction and approaches the front end portion 13 of the target surface 11. Next, the spray nozzle 2 is also moved in the Z-axis direction so that the position of the tip of the spray nozzle 2 is a predetermined distance L on the normal line at the front end portion 13 of the target surface 11, and the front of the target surface 11 The angle of the spraying direction of the spray nozzle 2 is changed so that the spraying direction of the spray nozzle 2 at the end portion 13 is the normal direction at the front end portion 13 of the target surface 11.

At this time, as shown in FIG. 13, the tip of the spray nozzle 2 preferably passes through the first passing point 17 ahead of the position on the front end portion 13 of the target surface 11 in the normal direction. Here, the first passing point 17 is an extension line extending the target surface forward from the front end portion 13 of the target surface and a radius centered on the front end portion 13 of the target surface in the moving plane of the spray nozzle 2. It is a point separated by a predetermined distance L from the first intersection with the circle of D / 2 in the direction of the first normal in the tangent plane at the first intersection. Note that "D" is the diameter of the coating region on a plane perpendicular to the spray direction, which is a predetermined distance L away from the spray nozzle 2 as described above. Further, when the tip of the spray nozzle 2 passes through the first passing point 17, the spray direction of the spray nozzle 2 is preferably parallel to the first normal direction. By passing through the first passing point 17 in this way, the transition from the film-forming preparation section to the film-forming section can be smoothed.

Next, as shown in FIG. 13, the spray nozzle 2 is maintained along the target surface while maintaining the spray direction parallel to the normal direction in the tangent plane at the intersection of the spray direction and the target surface. Moving. That is, the spray nozzle 2 moves while appropriately changing the angle θ with respect to the Z-axis direction so that the spray direction of the spray nozzle 2 is always parallel to the normal direction of the target surface.

After the spray nozzle 2 moves on the target surface and reaches the normal line of the tangent plane at the rear end 14, the spray nozzle 2 moves in the angle of the spray direction and the Z-axis direction, and finally in the X-axis direction. It moves linearly in parallel with. At this time, as shown in FIG. 13, the tip of the spray nozzle 2 preferably passes through the second passing point 18 behind the position on the rear end portion 14 of the target surface in the normal direction. Here, the second passing point 18 is an extension line extending the target surface rearward from the rear end portion 14 of the target surface in the moving plane of the spray nozzle 2, and a radius centered on the rear end portion 14 of the target surface. It is a point separated from the second intersection with the circle of D / 2 by a predetermined distance L in the direction of the second normal in the tangent plane at the second intersection. Further, when the tip of the spray nozzle 2 passes through the second passing point 18, the spray direction of the spray nozzle 2 is preferably parallel to the second normal direction. By passing through the first passing point 17 in this way, the transition from the film-forming section to the film-forming preparation section can be smoothed.

The extension line extending the target surface forward or backward is, for example, when the target surface is matched with a curved surface obtained by cutting out a part of a spherical surface or a part of a side surface of a cylinder, that is, the target surface in the moving plane of the spray nozzle 2. When the cross section of is an arc shape, the arc shape can be extended from the front end portion 13 and / or the rear end portion 14. The arc shape extended here is concentric with the cut out arc shape and has the same radius. Both ends of a curved surface obtained by cutting out a part of a spherical surface or a part of a side surface of a cylinder become a front end portion 13 and a rear end portion 14, respectively. As a matter of course, the cross section of the target surface in the moving plane is not limited to the arc shape, and may be, for example, an ellipse or an oval. The extension line extending from the front end portion 13 and / or the rear end portion 14 of the target surface can be widely adopted as long as the extension line can be smoothly connected to the cross-sectional shape of the target surface.

Further, the extension line extending the target surface forward or backward may be a straight line extending in the tangential direction at the front end portion 13 and / or the rear end portion 14 in the moving plane of the spray nozzle 2.

The shape of the target surface can be stored in advance in a storage device mounted on the spray film forming device. For example, it can be stored in the storage device as a function having X, Y, and Z corresponding to the X-axis, Y-axis, and Z-axis of the drive mechanism of the spray film-forming device as variables. In that case, the function of the extension line from the front end portion 13 and / or the rear end portion 14 can be calculated based on the function stored in advance.

1: Spray film forming device 2: Spray nozzle 3X: X-axis arm 3Y: Y-axis arm 3Z: Z-axis arm 5: Stage 6: Chamber 7: Fan unit 9: Trajectory 10: Object 11: Target surface 13: Front end Part 14: Rear end 15: First change point 16: Second change point 17: First pass point 18: Second pass point

Claims (10)

In the spray spraying method in which the coating agent is sprayed from the spray nozzle toward the target surface,
The target surface has a curved surface and
The spray nozzle moves along the target surface while maintaining a predetermined distance between the tip of the spray nozzle and the target surface in the spray direction of the spray nozzle.
The spray nozzle moves along the target surface while maintaining a constant relative moving speed of the tip in a direction parallel to the tangent plane at the intersection of the spray direction and the target surface.
Spray spray method. The spray nozzle moves while the spray direction is kept constant.
The spray spray method according to claim 1. The spray nozzle is maintained in a single moving plane perpendicular to the ground plane, with the spray direction maintained parallel to the ground plane on which the object having the target plane is placed. Moving,
The spray spraying method according to claim 2. When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end portion, and the position on the target surface that reaches last is the rear end portion. ,
After the spray nozzle moves in a direction parallel to the ground plane, approaches the front end portion of the target surface, moves from the front end portion toward the rear end portion, and then moves along the target surface. Move away from the rear end in a direction parallel to the ground plane,
The spray nozzle starts moving in the spray direction in front of the position where the coating agent sprayed from the spray nozzle first reaches the front end portion.
The spray spraying method according to claim 3. When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end portion, and the position on the target surface that reaches last is the rear end portion. ,
After the spray nozzle moves in a direction parallel to the ground plane, approaches the front end portion of the target surface, moves from the front end portion toward the rear end portion, and then moves along the target surface. Move away from the rear end in a direction parallel to the ground plane,
The spray nozzle ends the movement in the spraying direction behind the position where the coating agent sprayed from the spray nozzle does not reach the rear end portion.
The spray spraying method according to claim 3. The spray nozzle moves along the target surface while maintaining the spray direction parallel to the normal direction in the tangent plane at the intersection of the spray direction and the target surface.
The spray spray method according to claim 1. When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end portion, and the position on the target surface that reaches last is the rear end portion. ,
The spray nozzle moves in a direction parallel to the ground plane on which the object having the target surface is installed, approaches the front end portion of the target surface, and moves from the front end portion to the rear end portion. After moving along the target surface, it moves away from the rear end in a direction parallel to the ground plane.
When the diameter of the coating region in the plane perpendicular to the spray direction, which is a predetermined distance from the tip of the spray nozzle, is D.
In the plane in which the spray nozzle moves, an extension line extending the target surface forward from the front end portion of the target surface and a circle having a radius D / 2 centered on the front end portion of the target surface. The spray nozzle passes through the first passing point separated by the predetermined distance in the direction of the first normal in the tangent plane at the first crossing point from the first crossing point of the above, and at the first passing point, the spray The spray nozzle moves so that the spray direction of the nozzle is parallel to the first normal direction.
The spray spraying method according to claim 6. When the spray nozzle moves in the plane including the moving direction of the spray nozzle, the position on the target surface that reaches first is the front end portion, and the position on the target surface that reaches last is the rear end portion. ,
The spray nozzle moves in a direction parallel to the ground plane on which the object having the target surface is installed, approaches the front end portion of the target surface, and moves from the front end portion to the rear end portion. After moving along the target surface, it moves away from the rear end in a direction parallel to the ground plane.
When the diameter of the coating region in the plane perpendicular to the spray direction, which is a predetermined distance from the tip of the spray nozzle, is D.
In the plane in which the spray nozzle moves, an extension line extending the target surface rearward from the rear end portion of the target surface and a circle having a radius D / 2 centered on the rear end portion of the target surface. The spray nozzle passes through a second passing point separated by the predetermined distance in the second normal direction in the tangent plane at the second intersection from the second crossing point of the above, and the spray is made at the second passing point. The spray nozzle moves so that the spray direction of the nozzle is parallel to the second normal direction.
The spray spraying method according to claim 6. A spray film forming method for forming a film on the surface of the target surface by the spray spray method according to any one of claims 1 to 8. A ground plane on which an object with a target surface is installed,
A spray nozzle that sprays the coating agent toward the target surface, and
A moving mechanism that independently moves the spray nozzle in a direction parallel to the ground plane and in a spray direction of the spray nozzle different from the direction parallel to the ground plane.
With
While maintaining the distance between the tip of the spray nozzle and the target surface in the spray direction at a predetermined distance, the spray nozzle is moved and the spray nozzle is moved.
The spray nozzle is moved while maintaining a constant relative moving speed of the tip of the spray nozzle parallel to the tangent plane at the intersection of the spray direction of the spray nozzle and the target surface.
Spray film forming device.

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