JP2018026137A5 - - Google Patents

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Publication number
JP2018026137A5
JP2018026137A5 JP2017156611A JP2017156611A JP2018026137A5 JP 2018026137 A5 JP2018026137 A5 JP 2018026137A5 JP 2017156611 A JP2017156611 A JP 2017156611A JP 2017156611 A JP2017156611 A JP 2017156611A JP 2018026137 A5 JP2018026137 A5 JP 2018026137A5
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JP
Japan
Prior art keywords
bladder
chamber
elongated
displacement
hydraulic fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017156611A
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English (en)
Japanese (ja)
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JP2018026137A (ja
JP6948875B2 (ja
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Publication date
Application filed filed Critical
Publication of JP2018026137A publication Critical patent/JP2018026137A/ja
Publication of JP2018026137A5 publication Critical patent/JP2018026137A5/ja
Application granted granted Critical
Publication of JP6948875B2 publication Critical patent/JP6948875B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2017156611A 2016-08-11 2017-08-14 高純度分配ユニット Active JP6948875B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662373724P 2016-08-11 2016-08-11
US62/373,724 2016-08-11

Publications (3)

Publication Number Publication Date
JP2018026137A JP2018026137A (ja) 2018-02-15
JP2018026137A5 true JP2018026137A5 (enExample) 2020-08-27
JP6948875B2 JP6948875B2 (ja) 2021-10-13

Family

ID=61158829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017156611A Active JP6948875B2 (ja) 2016-08-11 2017-08-14 高純度分配ユニット

Country Status (5)

Country Link
US (1) US10712663B2 (enExample)
JP (1) JP6948875B2 (enExample)
KR (1) KR102394995B1 (enExample)
CN (1) CN107728430B (enExample)
TW (1) TWI760354B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9987655B2 (en) * 2015-06-26 2018-06-05 Tokyo Electron Limited Inline dispense capacitor system
US10682663B2 (en) * 2018-10-31 2020-06-16 The Boeing Company Methods for dispensing flowable materials
US11383211B2 (en) * 2019-04-29 2022-07-12 Tokyo Electron Limited Point-of-use dynamic concentration delivery system with high flow and high uniformity
CN111468325A (zh) * 2020-06-05 2020-07-31 余祥红 一种能够自动增压的汽车喷漆装置
US12216400B2 (en) 2021-01-22 2025-02-04 Tokyo Electron Limited Directed self-assembly
JP7578535B2 (ja) * 2021-04-15 2024-11-06 株式会社コガネイ 液体供給装置
TWI876256B (zh) * 2022-02-14 2025-03-11 日商斯庫林集團股份有限公司 基板處理裝置以及基板處理方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2467150A (en) 1943-11-12 1949-04-12 Carl H Nordell Valve
US2517820A (en) 1948-08-10 1950-08-08 American Cyanamid Co Fluid-pressure controller
BE491946A (enExample) 1949-01-04 1900-01-01
US4195810A (en) 1978-03-31 1980-04-01 Lavin Aaron M Pinch valve
US4442954A (en) 1982-07-30 1984-04-17 National Instrument Company, Inc. Self-pressurizing pinch valve
JPS60171582U (ja) * 1984-04-20 1985-11-13 トキコ株式会社 塗布ガン装置
JPS62121669A (ja) * 1985-11-19 1987-06-02 Toshiba Corp 塗布装置
US4867208A (en) * 1988-02-04 1989-09-19 Fitzgerald Robert M Apparatus for storing and dispensing fluid under pressure
FR2651552B1 (fr) 1989-09-01 1991-12-06 Cit Alcatel Vanne et dispositifs utilisant ladite vanne.
JPH09303302A (ja) * 1996-05-13 1997-11-25 Morikawa Sangyo Kk 流体の一時貯留器及びそれを用いた流体の一時貯留装置
KR100754342B1 (ko) 1999-10-18 2007-09-03 인터그레이티드 디자인즈 엘.피. 유체 분배 방법 및 장치
JP2002021715A (ja) * 2000-07-10 2002-01-23 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法
CN1328149C (zh) * 2000-10-23 2007-07-25 因斯蒂尔医学技术有限公司 具有外壳和柔性内部气囊的流体分配器
JP2002231668A (ja) 2001-01-31 2002-08-16 Mitsubishi Materials Silicon Corp スラリー移送装置
US6568416B2 (en) 2001-02-28 2003-05-27 Brian L. Andersen Fluid flow control system, fluid delivery and control system for a fluid delivery line, and method for controlling pressure oscillations within fluid of a fluid delivery line
CN1561313A (zh) 2001-10-01 2005-01-05 Fsi国际公司 流体分配装置
US7335003B2 (en) 2004-07-09 2008-02-26 Saint-Gobain Performance Plastics Corporation Precision dispense pump
KR100643494B1 (ko) 2004-10-13 2006-11-10 삼성전자주식회사 반도체 제조용 포토레지스트의 디스펜싱장치
KR20060065188A (ko) 2004-12-10 2006-06-14 삼성전자주식회사 반도체 코팅설비의 포토레지스트 분사장치
US20060174656A1 (en) 2005-02-08 2006-08-10 Owens-Brockway Glass Container Inc. Glassware forming machine with bladder-operated cooling wind valve
JP2006336574A (ja) 2005-06-03 2006-12-14 Anest Iwata Corp 不活性ガス昇圧送給方法および装置
JP4942449B2 (ja) * 2006-10-18 2012-05-30 株式会社コガネイ 薬液供給装置
US20080169230A1 (en) 2007-01-12 2008-07-17 Toshiba America Electronic Components, Inc. Pumping and Dispensing System for Coating Semiconductor Wafers
EP2369210B1 (en) * 2008-12-10 2018-03-28 Sudo Premium Engineering Co., Ltd. Temperature-responsive fluid flow control apparatus
JP5416672B2 (ja) * 2010-09-28 2014-02-12 株式会社コガネイ 薬液供給装置
JP5672204B2 (ja) * 2011-09-13 2015-02-18 東京エレクトロン株式会社 液処理装置、液処理方法及び記憶媒体
US9718082B2 (en) * 2014-01-26 2017-08-01 Tokyo Electron Limited Inline dispense capacitor

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