JP2018022813A5 - - Google Patents

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Publication number
JP2018022813A5
JP2018022813A5 JP2016154213A JP2016154213A JP2018022813A5 JP 2018022813 A5 JP2018022813 A5 JP 2018022813A5 JP 2016154213 A JP2016154213 A JP 2016154213A JP 2016154213 A JP2016154213 A JP 2016154213A JP 2018022813 A5 JP2018022813 A5 JP 2018022813A5
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JP
Japan
Prior art keywords
conveyance
target device
maintenance
maintenance target
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016154213A
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English (en)
Japanese (ja)
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JP2018022813A (ja
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Publication date
Application filed filed Critical
Priority to JP2016154213A priority Critical patent/JP2018022813A/ja
Priority claimed from JP2016154213A external-priority patent/JP2018022813A/ja
Publication of JP2018022813A publication Critical patent/JP2018022813A/ja
Publication of JP2018022813A5 publication Critical patent/JP2018022813A5/ja
Pending legal-status Critical Current

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JP2016154213A 2016-08-05 2016-08-05 プローバ Pending JP2018022813A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016154213A JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016154213A JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020024517A Division JP2020074496A (ja) 2020-02-17 2020-02-17 プローバ

Publications (2)

Publication Number Publication Date
JP2018022813A JP2018022813A (ja) 2018-02-08
JP2018022813A5 true JP2018022813A5 (cg-RX-API-DMAC7.html) 2019-06-20

Family

ID=61164587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016154213A Pending JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Country Status (1)

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JP (1) JP2018022813A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7361258B2 (ja) * 2019-11-19 2023-10-16 株式会社東京精密 プローバの組立方法及びティーチング治具
JP7390934B2 (ja) 2020-03-03 2023-12-04 東京エレクトロン株式会社 検査装置
JP7433644B2 (ja) * 2020-06-05 2024-02-20 Ａｉメカテック株式会社 基板検出装置、基板検出方法、及び基板処理ユニット

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5088167B2 (ja) * 2008-02-22 2012-12-05 東京エレクトロン株式会社 プローブ装置、プロービング方法及び記憶媒体
JP2010157550A (ja) * 2008-12-26 2010-07-15 Toshiba Corp ウエハテストシステム
JP6267928B2 (ja) * 2013-10-29 2018-01-24 東京エレクトロン株式会社 ウエハ検査装置の整備用台車及びウエハ検査装置の整備方法
JP6271257B2 (ja) * 2014-01-08 2018-01-31 東京エレクトロン株式会社 基板検査装置及びプローブカード搬送方法

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