JP2018019039A5 - - Google Patents
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- JP2018019039A5 JP2018019039A5 JP2016150330A JP2016150330A JP2018019039A5 JP 2018019039 A5 JP2018019039 A5 JP 2018019039A5 JP 2016150330 A JP2016150330 A JP 2016150330A JP 2016150330 A JP2016150330 A JP 2016150330A JP 2018019039 A5 JP2018019039 A5 JP 2018019039A5
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- JP
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- Prior art keywords
- semiconductor region
- light detection
- detection device
- potential
- disposed
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- 239000004065 semiconductor Substances 0.000 claims 47
- 238000001514 detection method Methods 0.000 claims 29
- 239000012535 impurity Substances 0.000 claims 7
- 238000006243 chemical reaction Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000015556 catabolic process Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 230000002194 synthesizing effect Effects 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016150330A JP7013120B2 (ja) | 2016-07-29 | 2016-07-29 | 光検出装置および光検出システム |
| US15/656,490 US10497818B2 (en) | 2016-07-29 | 2017-07-21 | Photodetection device and photodetection system |
| CN201710628241.4A CN107665897B (zh) | 2016-07-29 | 2017-07-28 | 光检测设备和光检测系统 |
| US16/662,713 US11309442B2 (en) | 2016-07-29 | 2019-10-24 | Photodetection device and photodetection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016150330A JP7013120B2 (ja) | 2016-07-29 | 2016-07-29 | 光検出装置および光検出システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018019039A JP2018019039A (ja) | 2018-02-01 |
| JP2018019039A5 true JP2018019039A5 (cg-RX-API-DMAC7.html) | 2019-06-20 |
| JP7013120B2 JP7013120B2 (ja) | 2022-01-31 |
Family
ID=61081471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016150330A Active JP7013120B2 (ja) | 2016-07-29 | 2016-07-29 | 光検出装置および光検出システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7013120B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10636818B2 (en) * | 2018-04-04 | 2020-04-28 | Avago Technologies International Sales Pte. Limited | Semiconductor device and sensor including a single photon avalanche diode (SPAD) structure |
| JP7236692B2 (ja) * | 2019-03-27 | 2023-03-10 | パナソニックＩｐマネジメント株式会社 | 光検出器及び光検出器の製造方法 |
| JP7379117B2 (ja) * | 2019-11-27 | 2023-11-14 | キヤノン株式会社 | 光電変換装置及び光電変換システム |
| JP7638664B2 (ja) * | 2020-01-31 | 2025-03-04 | キヤノン株式会社 | 光電変換装置、光電変換システム、および移動体 |
| JP7488782B2 (ja) * | 2021-03-03 | 2024-05-22 | 日立Ｇｅニュークリア・エナジー株式会社 | フォトダイオード |
| CN113299787B (zh) * | 2021-05-21 | 2022-04-29 | 武汉新芯集成电路制造有限公司 | 半导体器件及其制造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7714292B2 (en) | 2006-02-01 | 2010-05-11 | Koninklijke Philips Electronics N.V. | Geiger mode avalanche photodiode |
| EP2013916B1 (en) | 2006-04-25 | 2011-03-02 | Koninklijke Philips Electronics N.V. | Implementation of avalanche photo diodes in (bi) cmos processes |
| DE102007000377A1 (de) | 2007-07-16 | 2009-01-22 | Hilti Aktiengesellschaft | Laserdistanzhandmessgerät mit einem Impulsrückmischverfahren |
| IT1392366B1 (it) | 2008-12-17 | 2012-02-28 | St Microelectronics Rousset | Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile, schiera di fotodiodi e relativo procedimento di fabbricazione |
| JP2011159756A (ja) | 2010-01-29 | 2011-08-18 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
| US9160949B2 (en) | 2013-04-01 | 2015-10-13 | Omnivision Technologies, Inc. | Enhanced photon detection device with biased deep trench isolation |
| JP2015056622A (ja) | 2013-09-13 | 2015-03-23 | 株式会社リコー | 半導体装置 |
| JP2015084392A (ja) | 2013-10-25 | 2015-04-30 | 浜松ホトニクス株式会社 | 光検出器 |
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2016
- 2016-07-29 JP JP2016150330A patent/JP7013120B2/ja active Active