JP2018016826A - Power supply jig, work holding jig, and chemical treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a power supply jig that prevents the peeling of a fluorine resin film provided on a substrate.SOLUTION: A power supply jig for power supply to a workpiece has a substrate with at least its surface made of titanium, a portion of the substrate that is connected to the workpiece is provided with a noble metal film, and at least part of the surface of the substrate, excluding the portion at which the noble metal film is provided, includes a fluorine resin film.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a power feeding jig, a work holding jig, and a chemical processing apparatus.

  In recent years, various electronic devices have come to use substrates in which conductive layers and various functional layers are formed on an insulating base material. And in manufacturing the above-mentioned board | substrate, various chemical processing apparatuses are used conventionally, when forming a conductive layer and various functional layers on an insulating base material by chemical processing.

For example, in Patent Document 1, a processing tank is disposed between a workpiece supply device that supplies a long sheet, which is a workpiece wound on a reel, and a workpiece winding device that winds the workpiece on a reel. It is a long sheet plating device that performs plating while conveying the workpiece continuously from the workpiece supply device to the workpiece winding device with the surface vertical, while holding the upper end of the workpiece on the upper part of the treatment tank and feeding power Provided with a transport device for transporting, the work gripping part that grips the work of the transport device is lowered in the processing tank to grip the work, and the work transport speed by the work winding device and the work transport speed by the transport device And a long sheet plating apparatus characterized by the fact that they are synchronized with each other.

  Like the plating apparatus disclosed in Patent Document 1, it is necessary to supply power to the workpiece depending on the type of the chemical processing apparatus, and a power supply jig is used. In the plating apparatus disclosed in Patent Document 1, a conveying device that conveys a workpiece is configured to convey the workpiece while feeding and feeding the workpiece.

  Since such a power supply jig supplies power to the workpiece, a metal is generally used for the base. However, in order to prevent chemical processing from being performed on the substrate by the chemical processing apparatus, or leakage due to contact between the substrate and other members, etc., the contact portion with the workpiece or a connection portion with another member A film made of a fluororesin is disposed on the surface of the substrate except for.

JP 2006-193794 A

  However, when a fluororesin film (fluororesin film) is disposed on the surface of the substrate, the adhesion between the substrate and the fluororesin film is low, and the fluororesin film may peel off due to repeated use. there were.

  In view of the above-described problems of the related art, an object of one aspect of the present invention is to provide a power supply jig that suppresses peeling of a fluororesin film provided on a substrate.

In order to solve the above problems, in one aspect of the present invention,
A power supply jig for supplying power to a workpiece,
Having at least a substrate whose surface is made of titanium;
A noble metal film is disposed on a portion of the base that is connected to the workpiece,
Provided is a power supply jig in which a fluororesin film is directly disposed on at least a part of the surface of the base body excluding a portion where the noble metal film is disposed.

  According to one aspect of the present invention, it is possible to provide a power supply jig that suppresses peeling of a fluororesin film provided on a substrate.

Explanatory drawing of the electric power feeding jig which concerns on embodiment of this invention. Explanatory drawing of the workpiece holding jig which concerns on embodiment of this invention. Explanatory drawing of the chemical processing apparatus which concerns on embodiment of this invention.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments, and the following embodiments are not departed from the scope of the present invention. Various modifications and substitutions can be made.
[Power supply jig]
An embodiment of the power supply jig of the present invention will be described below.

The power supply jig of this embodiment is a power supply jig for supplying power to a workpiece,
Having at least a substrate whose surface is made of titanium;
A noble metal film is disposed on a portion of the base that is connected to the workpiece,
A power feeding jig in which a fluororesin film is directly disposed on at least a part of the surface of the substrate excluding a portion where the noble metal film is disposed can be provided.

  The power supply jig according to this embodiment will be described with reference to FIGS. 1 (a) and 1 (b).

  Fig.1 (a) has shown the front view which made the surface of the side containing the part which contacts the workpiece | work of the electric power feeding jig | tool of this embodiment the front. Moreover, FIG.1 (b) has shown sectional drawing in the AA 'line in Fig.1 (a).

  FIG. 1A and FIG. 1B show a power supply jig 10 according to this embodiment, which has a base body 11 having at least a surface made of titanium.

  A noble metal film 12 is disposed on the surface of the substrate 11 facing the workpiece, that is, on the portion connected to the workpiece. Further, the fluororesin film 13 is directly disposed on at least a part of the surface of the base 11 except for the portion where the noble metal film 12 is disposed.

  Hereinafter, each member will be described.

  The substrate 11 only needs to have at least a surface made of titanium, that is, at least the surface portion may be made of titanium. For example, a structure in which a titanium film is arranged on the surface of a core portion formed of a metal other than titanium or the like. It can also be. Moreover, the whole base | substrate 11 may be comprised from titanium.

  According to the study of the inventor of the present invention, at least the surface of the substrate 11 is made of titanium, and the fluororesin film 13 is disposed so as to be in direct contact with the surface of the substrate 11. Adhesion can be particularly enhanced. For this reason, it becomes possible to suppress that the fluororesin film | membrane 13 which is a resin film provided on the base | substrate 11 peels.

  Moreover, since at least the surface of the base body 11 is made of titanium, the electrical resistance of the base body 11 can be suppressed, so that the loss of power supplied to the workpiece from the power supply means connected to the power supply jig can be reduced. Is possible.

  The shape of the substrate 11 is not particularly limited, but as shown in FIG. 1B, the substrate 11 is perpendicular to a surface perpendicular to a portion where a noble metal film to be described later is arranged, that is, a portion connected to a workpiece. It is preferable that the cross-sectional shape along the line AA ′, which is a flat surface, is L-shaped. For this reason, the base body 11 has a bent portion 111 as shown in FIG. 1B, and includes one side 112 on the side including the portion where the noble metal film 12 is disposed, and the other side, that is, for example, a power supply means. An L-shape can be formed by the other side 113 serving as a side connected to another member.

  As will be described later, two power supply jigs of the present embodiment can be combined into a work holding jig, and the cross-sectional shape of the power supply jig is L-shaped to form a work holding jig. This is because it is easy to achieve both functions of supplying power to the workpiece and holding the workpiece.

  In FIG. 1B, an example in which one side 112 is shorter than the other side 113 is shown, but the present invention is not limited to such a form. However, as described above, when the workpiece holding jig is used, one side 112 serving as a claw for holding (clamping) the workpiece is shorter, and the other side 113 storing the end of the gripped workpiece is stored. Is preferably long.

  By placing the noble metal film 12, which is a noble metal film, on the portion of the substrate 11 that is connected to the workpiece, that is, the portion of the substrate 11 that is electrically connected to the workpiece, the contact between the substrate 11 and the workpiece is enhanced. It becomes possible to make electricity flow more easily. As the noble metal, there is acid resistance, and a noble metal can be preferably used rather than copper. For example, platinum, gold, silver, palladium, iridium and the like can be used. Since the noble metal film 12 is arranged in this way, the base 11 of the power supply jig 10 of the present embodiment is connected to the workpiece via the noble metal film 12.

  In the conventional power supply jig, a noble metal film may be formed on the entire surface of the base. However, in the power supply jig of the present embodiment, the noble metal film is disposed at a portion of the base 11 connected to the workpiece. In addition, when the titanium on the surface of the substrate 11 and the fluororesin film 13 are configured to be in direct contact, the adhesion of the fluororesin film 13 to the substrate 11 can be enhanced. Further, by limiting the range in which the noble metal film is formed, the amount of expensive noble metal used can be reduced and the cost can be suppressed.

  And the fluororesin film | membrane 13 can be formed in at least one part except the part which has arrange | positioned the noble metal film | membrane 12 among the surfaces of the base | substrate 11. FIG. By providing the fluororesin film 13 which is a film made of a fluororesin, it is possible to prevent the base 11 from being chemically processed in the chemical processing apparatus, or from contacting the base 11 with another member and causing electric leakage.

  The fluororesin film 13 is preferably disposed on the entire surface of the substrate 11 excluding the portion of the substrate 11 where the above-described noble metal film 12 is disposed and the portion 114 connected to another member. As described above, by disposing the fluororesin film 13 on the entire surface of the base 11 excluding a predetermined region, the base 11 is subjected to chemical processing in a chemical processing apparatus, or leakage due to contact with other members. This can be prevented more reliably.

  In addition, although it does not specifically limit with the other member of the part 114 connected to another member, For example, the member which fixes the electric power feeding jig | tool 10, the electric power feeding means which supplies electric power to the electric power feeding jig 10, and the electric power feeding means and electric power feeding Examples include a member for connecting a jig. When the power supply jig 10 of this embodiment is used for a work holding jig described later, examples of other members include a rotation support plate and a base plate.

  The fluororesin used for the fluororesin film is not particularly limited, but is preferably a fluororesin that can be directly formed on titanium. Specifically, as the fluororesin, for example, ethylene-tetrafluoroethylene copolymer (ETFE) can be preferably used. That is, the fluororesin film is preferably an ethylene-tetrafluoroethylene copolymer film (ETFE film).

  Next, a method for manufacturing the power supply jig of this embodiment will be described.

  The manufacturing method of the electric power feeding jig of this embodiment can have the following processes, for example.

  A substrate preparation step of preparing a substrate.

  A noble metal film forming step of forming a noble metal film on a portion of the substrate connected to the workpiece;

  A fluororesin film forming step of directly forming a fluororesin film on at least a part of the surface of the substrate excluding a portion where the noble metal film is disposed on the substrate.

  The order in which the above steps are performed is not particularly limited, but it is preferable to perform the steps in the order described above.

  In the substrate preparation step, a substrate processed into a predetermined shape can be prepared. The shape of the substrate is not particularly limited. For example, as described with reference to FIGS. 1A and 1B, the surface A− is a surface perpendicular to the portion where the noble metal film is formed in the noble metal film formation step. The cross-sectional shape at the A ′ line is preferably L-shaped. For this reason, the base | substrate 11 processed into the L shape, for example can be prepared.

  The method for processing the substrate into a predetermined shape is not particularly limited, but it can be processed into a desired shape from a metal plate or the like as a raw material by, for example, press working or welding. Moreover, it can also be set as the base | substrate of a desired shape by casting etc.

  As described above, it is preferable that at least the surface of the substrate is made of titanium. For this reason, a base | substrate preparation process can also be set as the process of forming a core part of a predetermined shape, for example with metals other than titanium, and forming a titanium film on the surface of the core part (film formation).

  The substrate may be made of titanium. For this reason, a base | substrate preparation process can also be made into the process of manufacturing the base | substrate made from titanium which has a desired shape by press work, welding, etc. using a metal plate made from titanium. Moreover, it can also be set as the process of manufacturing the base | substrate made from titanium which has a desired shape by casting.

  In the noble metal film forming step, the noble metal film can be formed on the portion of the substrate that is connected to the workpiece. The method for forming the noble metal film is not particularly limited, and can be formed by any method. For example, a dry plating method such as a sputtering method, an ion plating method, or an evaporation method, or a wet plating method such as an electrolytic plating method can be used.

  In the fluororesin film forming step, the fluororesin film can be directly formed on at least a part of the surface of the substrate excluding the portion where the noble metal film is disposed.

  In addition, in the manufacturing method of the electric power feeding jig of this embodiment, it is preferable to implement a baking process before implementing a fluororesin film | membrane formation process. This is because by performing the firing step, organic substances adhering to the surface of the substrate can be reduced and removed, and the chemical state can be modified.

  There are no particular restrictions on the conditions for the firing step, but it is preferable to carry out at a temperature of 300 ° C. to 600 ° C. for 30 minutes to 3 hours, for example. The conditions of the atmosphere in the firing step are not particularly limited, but an oxygen-containing atmosphere such as an air atmosphere is preferable.

  The firing step is preferably performed, for example, after the noble metal film forming step and before the fluororesin film forming step.

According to the power supply jig of the present embodiment described above, the fluororesin film is disposed directly on at least a part of the surface of the substrate having at least a surface made of titanium. For this reason, the adhesiveness of a base | substrate and a fluororesin film | membrane can be improved especially, and it can suppress that the fluororesin film | membrane provided on the base | substrate peels.
[Work holding jig]
Next, an embodiment of a workpiece holding jig will be described.

  The work holding jig of the present embodiment can have a configuration in which a pair of the above-described power supply jigs is provided and the noble metal films of the pair of power supply jigs are opposed to each other.

  A configuration example of the workpiece holding jig of the present embodiment will be described with reference to FIG.

  As shown in FIG. 2, the workpiece holding jig 20 of the present embodiment can include the power feeding jigs 10 a and 10 b described above. The pair of power supply jigs 10a and 10b can be arranged so that the noble metal films 12a and 12b face each other. Thus, by arranging the pair of power supply jigs 10a and 10b so that the noble metal films 12a and 12b face each other, the work is held (clamped) between the noble metal films 12a and 12b, and the noble metal film 12a is held against the work. , 12b can be used as a work holding jig that can be powered.

  The workpiece holding jig 20 can hold and release the workpiece by changing the distance between the noble metal films 12a and 12b.

  The workpiece holding jig can further include an arbitrary member as necessary.

  For example, as shown in FIG. 2, the workpiece holding jig 20 can include a base plate 21, a rotation support plate 22, a rotation shaft 23, and a roller 24.

  The base plate 21 can be a plate-like member formed of a conductor such as a metal material, for example, and power can be supplied to the power supply jig via the base plate 21 from power supply means 27 and the like described later.

  The rotation support plate 22 is provided so as to be rotatable about a rotation shaft 23 and is urged counterclockwise in FIG. 2 by, for example, a spring or the like. Further, the rotation support plate 22 can be provided with a roller 24 at the upper end.

  The power feeding jigs 10 a and 10 b described above can be connected to the lower ends of the base plate 21 and the rotation support plate 22, respectively.

  The rotation support plate 22 is rotated clockwise around the rotation shaft 23 together with the power supply jig 10b by pressing the roller 24 toward the base plate 21, for example, and the noble metal film 12a of the power supply jigs 10a and 10b, 12b can be opened. In this state, after the workpiece is supplied between the noble metal films 12a and 12b of the power supply jigs 10a and 10b, the pressed roller 24 is released, so that the rotation support plate 22 and the power supply jig 10b are shown in FIG. The workpiece can be held between the noble metal films 12a and 12b of the power supply jigs 10a and 10b.

  When the roller 24 is pressed again with the workpiece held, and the rotation support plate 22 and the power supply jig 10b rotate in the clockwise direction around the rotation shaft 23, the noble metal films 12a of the power supply jigs 10a and 10b, The space between 12b is opened and the workpiece is released.

  In addition, when a work holding jig is used by being mounted on a chemical processing apparatus or the like described later, an arbitrary member can be connected to the work holding jig as necessary. These members will be described later.

According to the work holding jig of the present embodiment described above, the power supply jig described above is included, and the power supply jig can suppress the peeling of the fluororesin film provided on the substrate. Yes. For this reason, the frequency | count of performing maintenance, such as replacement | exchange of an electric power feeding jig, can be reduced, for example, and productivity can be improved.
[Chemical processing equipment]
Next, an embodiment of the chemical treatment apparatus of this embodiment will be described.

  The chemical treatment apparatus of this embodiment can be a chemical treatment apparatus provided with the above-described workpiece holding jig. Therefore, the chemical treatment apparatus of the present embodiment can also be referred to as a chemical treatment apparatus provided with the power feeding jig described above.

  The chemical processing apparatus of this embodiment is demonstrated using FIG. 2, FIG.

  FIG. 3 shows a top view of the chemical treatment apparatus of the present embodiment.

  As shown in FIG. 3, the chemical treatment apparatus 30 can include, for example, a work supply device 31, a work collection device 32, a chemical treatment tank 34, and a work holding jig 20. The chemical treatment apparatus 30 can further include a pretreatment tank 33, a posttreatment tank 35, an endless belt 36, pulleys 371, 372, and the like. Then, the surface of the workpiece 38 that is the object to be processed can be subjected to chemical processing, for example, electroplating processing in the chemical processing tank 34. In the drawings shown below, the X direction indicates the conveyance direction of the workpiece 38 between the pulley 371 and the pulley 372 and the longitudinal direction of the chemical treatment tank 34, and the Y direction indicates the short direction of the chemical treatment tank 34. , Z direction indicates the vertical direction.

  The workpiece 38 is not particularly limited, and examples thereof include materials that require chemical treatment. As the work 38, for example, an insulating base material formed of various materials such as a resin material can be used. When the work 38 is an insulating substrate, a seed layer made of a conductor such as a metal thin film is disposed on the surface so that power can be supplied from the power supply jig of the work holding jig 20. Is preferred. Such a seed layer can be disposed on the surface of the workpiece 38 on which chemical treatment is performed. Therefore, for example, it is preferable to dispose a seed layer on both surfaces when both surfaces of the workpiece 38 are chemically treated, and on one surface when one surface of the workpiece 38 is chemically treated.

  In FIG. 3, although the example which used the long sheet-like thing as the workpiece | work 38 is shown, it is not limited to the form which concerns. However, it is preferable to use a long sheet-shaped workpiece from the viewpoint of productivity and the like.

  The configuration of the workpiece supply device 31 is not particularly limited, but is a supply means for supplying the workpiece 38 to the chemical processing line of the chemical processing device 30. In the example shown in FIG. 3, the workpiece 38 wound in a roll shape can be sent out by a plurality of conveyance rollers, but is not limited to such a form.

  The configuration of the workpiece recovery device 32 is not particularly limited, but is a recovery means for recovering the workpiece 38 that has been subjected to chemical processing in the chemical processing device 30. In the example illustrated in FIG. 3, the workpiece collection device 32 can collect the workpiece 38 by winding it in a roll shape.

  Therefore, in the example shown in FIG. 3, the workpiece 38 is conveyed by the roll-to-roll method. In the example shown in FIG. 3, the workpiece 38 is configured to hold and convey the width direction along the ground and the vertical direction.

  The pretreatment tank 33 is a treatment tank that performs pretreatment for chemical treatment on the workpiece 38, and can perform, for example, a treatment for cleaning the surface of the workpiece 38, a treatment for improving the wettability of the surface of the workpiece 38, or the like. .

  The chemical treatment tank 34 is a tank that performs chemical treatment on the workpiece 38, and can perform, for example, electrolytic plating treatment. When the electrolytic plating treatment is performed in the chemical treatment tank 34, the chemical treatment tank is a plating tank, and a plating solution can be stored therein. Moreover, in order to perform an electroplating process, arbitrary members which are not shown in figure, such as an electrode and a means to stir a plating solution, can also be arrange | positioned.

  The chemical treatment tank 34 is not limited to a plating tank for performing an electrolytic plating process, and may be a chemical treatment tank for performing other electrochemical treatment such as electrolytic etching.

  The shape and size of the chemical treatment tank 34 are not particularly limited, and can be arbitrarily selected according to the time required for the chemical treatment, the conveyance speed of the workpiece 38, and the like. For example, the chemical treatment tank 34 can have a rectangular parallelepiped shape that extends long along the conveyance direction of the workpiece 38.

  In addition, the chemical treatment tank 34 has a slit-like inlet that is long in the Z direction, that is, the height direction of the tank on the right side in FIG. 3, and a slit-like outlet that is long in the Z direction like the right side on the left side. Can be placed. Thus, by providing slits on the side surfaces of the chemical treatment tank 34 on the upstream side and the downstream side in the conveyance direction of the workpiece, the workpiece 38 passes through the slit from the right side entrance in FIG. For example, after entering the chemical treatment tank 34 and being immersed in a solution in the chemical treatment tank to be subjected to chemical treatment, it can be discharged from the outlet on the left side.

  In the post-treatment tank 35, for example, cleaning or the like can be performed as post-treatment of the workpiece 38 that has been subjected to chemical treatment. When washing is performed in the post-treatment tank 35, for example, washing with water or chemical cleaning using a chemical may be used.

The endless belt 36 is an endless metal belt made of, for example, stainless steel, and is provided with a plurality of work holding jigs 20 fixed at predetermined intervals as described above, and can be wound around pulleys 371 and 372. it can. At least one of the pulleys 371 and 372 is rotationally driven by, for example, a motor (not shown), and the endless belt 36 can be rotated as the pulleys 371 and 372 rotate. Since the end of the workpiece 38 is held by the workpiece holding jig 20 disposed on the endless belt 36, the rotational speed of the endless belt 36 corresponds to the conveyance speed of the workpiece 38 supplied from the workpiece supply device 31. It is preferable. For this reason, it is preferable to adjust the rotational speed of the pulleys 371 and 372 according to the conveyance speed of the workpiece 38 supplied from the workpiece supply device 31.

  The plurality of work holding jigs 20 provided on the endless belt 36 can be held by the endless belt 36 in the width direction end, for example, the upper end, of the work 38 fed from the work supply device 31. The workpiece 38 can be conveyed by rotating together with the endless belt 36. The workpiece holding jig 20 can be configured to pass through the pretreatment tank 33, the chemical treatment tank 34, and the posttreatment tank 35 while holding the workpiece 38, and to release the workpiece 38 after a predetermined treatment is performed. The workpiece 38 released from the workpiece holding jig 20 is taken up and collected by the workpiece collection device 32.

  Therefore, for example, the roller 24 described with reference to FIG. 2 is pressed toward the base plate 21 at a part where the work holding jig 20 starts to hold (clamp) the work 38 and a part where the work 38 is released. It is possible to provide a pressing means to perform. As the pressing means, for example, a plate-like body (applying plate) substantially parallel to the conveyance path of the workpiece holding jig 20 can be used. Such a pressing means is included in the transport path of the work holding jig 20 by the endless belt 36, immediately after joining the transport path of the work 38, immediately after joining, or immediately after leaving the transport path of the work 38. It can be provided so as to press the roller 24 substantially in parallel with the transport path of the workpiece holding jig 20.

  A work holding jig 20 that holds the lower end of the work 38 may be provided instead of or in addition to the work holding jig 20 that holds the upper end of the work 38. In particular, it is preferable to provide a work holding jig 20 that holds the upper end and the lower end of the work 38 in the width direction. This is because the structure in which both ends of the work 38 are held prevents wrinkles or slack from occurring on the work 38 and enables chemical treatment such as plating to be performed more uniformly.

  When the work holding jig 20 that holds the lower end of the work 38 is provided, the endless belt that is stretched between the pulleys on the lower end side of the work 38 is provided in the same manner as the work holding jig 20 that holds the upper end of the work 38. And a plurality of workpiece holding jigs 20 can be fixed to the endless belt at predetermined intervals. In this case, the endless belt can also be configured to rotate in accordance with the rotation of the pulley. In addition, as in the case of the work holding jig that holds the upper end of the work 38, a pressing unit that presses the roller 24 of the work holding jig 20 toward the base plate 21 may be provided.

  In the chemical processing apparatus 30 having the above-described configuration, first, the work 38 is sent out from the work supply apparatus 31, and the plurality of work holding jigs 20 provided on the endless belt 36 include the upper end and / or the lower end of the work 38. Hold and transport. The workpiece 38 is conveyed while being held by the workpiece holding jig 20, and is subjected to each treatment through the pretreatment tank 33, the chemical treatment tank 34, and the posttreatment tank 35. The workpiece 38 that has undergone a series of chemical treatments is released from the workpiece holding jig 20, wound around the workpiece collection device 32, and collected. Through the above operation in the chemical processing apparatus 30, the workpiece 38 can be subjected to chemical processing.

  In the chemical treatment apparatus 30 shown in FIG. 3, the pretreatment tank 33 and the posttreatment tank 35 are provided in addition to the chemical treatment tank 34, but the pretreatment tank 33 and the posttreatment tank 30 are provided. Only one or both of the treatment tanks 35 may be provided. Further, the pretreatment tank 33 and the posttreatment tank 35 are not limited to only one tank, and a plurality of them can be provided.

  Also, a plurality of chemical treatment tanks 34 can be provided on the conveyance path of the workpiece 38. When a plurality of chemical treatment tanks 34 are provided, the chemical treatment performed in the plurality of chemical treatment tanks 34 is not necessarily the same, and chemical treatment tanks 34 that perform different chemical treatments can be arranged.

  Between the pretreatment tank 33, the chemical treatment tank 34, and the posttreatment tank 35, cleaning means for cleaning the workpiece so that the chemical solution used in each tank is not brought into other tanks, or liquid attached to the workpiece is liquid. It is also possible to provide liquid draining means for cutting. When a plurality of chemical treatment tanks 34 and the like are provided, cleaning means and the like can be similarly provided between the tanks.

  In addition, as described above, when the work holding jig 20 is fixed to the endless belt 36, an arbitrary member is further disposed between the work holding jig 20 and the endless belt 36 as necessary. You can also. Furthermore, the work holding jig 20 can be configured to receive power from a power supply means (not shown in FIG. 3) of the chemical processing apparatus. A configuration example will be described with reference to FIG.

  As shown in FIG. 2, the workpiece holding jig 20 can be configured to be connected to a positioning roller 25 and a belt fixing plate 26. The work holding jig 20 can also be configured to be able to be connected to the power supply means 27 so as to hold and transport the work and to supply power to the work from the power supply means 27.

  The positioning rollers 25 are provided on both surfaces of the belt fixing plate 26. For example, the positioning roller 25 is in contact with the upper surface of a positioning member provided in the chemical processing tank, so that the workpiece is appropriately applied to the liquid level of the solution in the chemical processing tank. The position (height) of the workpiece holding jig can be determined so that the workpiece is conveyed at the position.

  The belt fixing plate 26 is provided with positioning rollers 25 on both sides, and is fixed to an endless belt 36 (not shown) located on the right side in FIG. The work holding jig 20 is fixed to the endless belt 36 by the belt fixing plate 26 and can move along with the rotating endless belt 36. Further, the upper end side of the belt fixing plate 26 can be bent in a substantially horizontal direction, and a contact surface 261 that contacts the power supply brush 271 of the power supply means 27 can be provided.

  The power supply means 27 can include a cathode bus bar 272 and a pressing spring 273 in addition to the power supply brush 271.

  The cathode bus bar 272 is a rectangular plate-like electrode that is long in the X direction and is connected to a power source (not shown) via a rectifier, and can be fixed to the upper part of the chemical treatment tank, for example. A plurality of power supply brushes 271 can be provided below the cathode bus bar 272.

  The power supply brush 271 sequentially contacts the contact surface 261 of the belt fixing plate 26 connected to the work holding jig 20 that passes under the cathode bus bar 272, and can supply power to the power supply jigs 10a and 10b.

  The power supply brush 271 can be pressed toward the contact surface 261 of the belt fixing plate 26 by a pressing spring 273 as pressing means provided between the power supply brush 271 and the cathode bus bar 272. For this reason, the power supply brush 271 can keep the contact area with the contact surface 261 constant even if the position in the Z direction of the contact surface 261 of the belt fixing plate 26 connected to the workpiece holding jig 20 varies. it can.

  According to the chemical treatment apparatus of the present embodiment described above, the work holding jig including the power feeding jig described above is included. And the electric power feeding jig which concerns can suppress that the fluororesin film provided on the base | substrate peels. For this reason, the frequency | count of performing maintenance, such as replacement | exchange of an electric power feeding jig, can be reduced, for example, and productivity can be improved.

Specific examples and comparative examples will be described below, but the present invention is not limited to these examples.
[Example 1]
A metal plate made of titanium was bent into an L shape by press molding to prepare a base 11 shown in FIGS. 1A and 1B (base preparation step).

  As shown in FIG. 1B, the base 11 has a bent portion 111 at the bent portion, one side 112 on the side where the noble metal film 12 is disposed at the end, and other members such as a power supply means. An L-shape is formed with the other side 113 which is the side connected to the. In addition, the position of the bent portion 111 is selected so that one side 112 is shorter than the other side 113.

  Next, platinum plating was performed only on the portion of the substrate that is connected to the workpiece by electrolytic plating to form a platinum film as the noble metal film 12 (noble metal film forming step).

  And the base | substrate 11 which formed the platinum film | membrane as the noble metal film | membrane 12 was heat-processed at 500 degreeC for 1 hour (baking process).

  Next, an ETFE fluororesin film is directly formed on the entire surface of the substrate 11 except for the portion where the platinum film as the noble metal film 12 is disposed and the portion 114 connected to other members. 10 was formed (fluororesin film forming step).

The obtained power supply jig was subjected to electrodeposition and peeling on a noble metal film exposed to the power supply jig in a copper sulfate aqueous solution having a copper concentration of 30 g / L and a sulfuric acid concentration of 200 g / L. = 50 seconds: repeated for 10 seconds, and the number of days until the fluororesin film peels from the substrate was evaluated. When evaluated with five power supply jigs produced in the same manner, the average number of days until peeling was 21 days.
[Example 2]
A power feeding jig was prepared and evaluated in the same manner as in Example 1 except that the firing step was not performed. When evaluated with five power supply jigs produced in the same manner, the average number of days until the fluororesin film was peeled off from the substrate was 18 days.
[Comparative Example 1]
In the same manner as in Example 1, a titanium metal plate was bent into an L shape by press molding to prepare a base (base preparation step).

  Next, platinum plating was performed on the entire surface of the substrate by sputtering to form a platinum film as a noble metal film (noble metal film forming step).

  Furthermore, a surface treatment was performed on the surface of the platinum film with a base material except for a surface connected to the workpiece and a portion connected to another member (base material processing step).

  Next, a fluorinated resin film of ECTFE (ethylene-chlorotrifluoroethylene copolymer) is formed on the entire surface except for the surface connected to the workpiece and the portion connected to other members on the surface of the substrate, and the power supply jig Was formed (fluororesin film forming step).

  The obtained power supply jig was evaluated in the same manner as in Example 1. When evaluated with five power supply jigs produced in the same manner, the average number of days until the fluororesin film peeled from the substrate was 2 days.

  From the results of Example 1, Example 2 and Comparative Example 1 shown above, at least the surface has a base made of titanium, the noble metal film is arranged on the part of the base that is connected to the workpiece, and the noble metal film is arranged. It was confirmed that the fluororesin film provided on the substrate can be prevented from being peeled off by using the power supply jig in which the fluororesin film is directly disposed on at least a part of the surface of the substrate excluding the part.

  In addition, each of the power supply jigs prepared in Example 1, Example 2, and Comparative Example 1 is used as the work holding jig 20 described with reference to FIG. 2, and is attached to the chemical processing apparatus 30 described with reference to FIG. Then, electrodeposition and peeling were repeatedly performed on the surface of the noble metal film of the power supply jig. As a result, similarly to the above-described results, the chemical processing apparatus including the work holding jig using the power supply jigs manufactured in Example 1 and Example 2 used the power supply jig manufactured in Comparative Example 1. It was confirmed that the fluororesin film provided on the substrate of the power supply jig can be prevented from peeling as compared with the chemical treatment apparatus including the workpiece holding jig. For this reason, it has been confirmed that the number of maintenance operations such as replacement of the power supply jig can be reduced, and productivity can be improved.

  In addition, when evaluating the said chemical processing apparatus 30, the copper plating tank which put the copper plating solution as the chemical processing tank 34 was prepared, and it implemented. At this time, a copper plating solution having a copper concentration of 30 g / l, a sulfuric acid concentration of 200 g / l, and a bath temperature of 50 ° C. is used. In addition, a tank containing an aqueous sulfuric acid solution was prepared as the pretreatment tank 33, and a tank containing water was prepared as the posttreatment tank 35.

10, 10a, 10b Power supply jig 11 Base body 12, 12a, 12b Precious metal film 13 Fluororesin film 20 Work holding jig 30 Chemical treatment apparatus

Claims (5)

A power supply jig for supplying power to a workpiece,
Having at least a substrate whose surface is made of titanium;
A noble metal film is disposed on a portion of the base that is connected to the workpiece,
A power feeding jig in which a fluororesin film is directly disposed on at least a part of the surface of the base, excluding a portion where the noble metal film is disposed.   The power feeding jig according to claim 1, wherein the fluororesin film is an ethylene-tetrafluoroethylene copolymer film.   The power feeding jig according to claim 1, wherein the base body has an L-shaped cross section in a plane perpendicular to a portion where the noble metal film is disposed. It has a pair of electric power feeding jigs as described in any one of Claims 1 thru | or 3,
A workpiece holding jig arranged such that the noble metal films of a pair of the feeding jigs face each other.   A chemical processing apparatus comprising the workpiece holding jig according to claim 4.

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