JP2018006693A - Glass lid and duv-led device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a glass lid capable of efficiently condensing light in the horizontal direction of a DUV (deep ultraviolet)-LED element forward, and an LED device using the glass lid.SOLUTION: An inner circumferential wall includes: a DUV light transmissive glass frame 11 having an inclined wall also serving as a reflector base portion; and a DUV light transmissive glass window 12 airtightly sealed to the frame so as to cover one opening of the frame. The frame has at least a DUV reflective coating 13 on an inclined wall surface 11a.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a glass lid used in a DUV light emitting device and a DUV-LED device using the same.

  In recent years, DUV-LED devices that can irradiate deep ultraviolet (DUV) light having a shorter wavelength (200 to 300 nm) than ultraviolet (UV) light have attracted attention. DUV-LED is a high-density optical information recording, information / electronic field such as high-luminance and long-life fluorescent lighting equipment, high-speed decomposition treatment of pollutants and allergens, sterilization, skin treatment, laser scalpel, cell sterilization, medical treatment, etc. Application to such as is expected. In the conventional DUV-LED device, a DUV-LED element is mounted on a base having a concave cross section made of a highly heat conductive material such as aluminum nitride, and the inside of the base is filled with an inert gas such as nitrogen gas, and the container opening is DUV transparent. The quartz lid and the base were hermetically sealed with an Au—Sn alloy brazing material. The DUV-LED light emitting element has an extremely low luminous efficiency as compared with the visible light LED. In addition, the aluminum nitride used for the base is a material having a very low reflectance. Therefore, the DUV-LED package includes copper and aluminum. It is necessary to improve the reflectance by forming a reflector such as a metal plate.

  However, the conventional quartz lid has a transmittance of 90 to 93% in the UV region and is very excellent in the transmittance of DUV light. On the other hand, the thermal expansion coefficient α is 0.6 ppm / K. Not a material. Therefore, a copper or aluminum reflector (reflector) having a large α is provided on a base of aluminum nitride formed in a concave shape. Examples of methods for forming a three-dimensional aluminum nitride base include injection molding, press molding, and multilayer ceramics. However, the three-dimensional shape of the base increases the shrinkage during sintering due to the injection molding method, resulting in large dimensional variations. According to the press molding method, the mold becomes complicated when a sheet consisting of multiple pieces is manufactured. In other words, the laminated ceramic method has a drawback in that the thermal conductivity is lowered because the flat ceramic plate is laminated. Furthermore, a three-dimensional base having a cavity is difficult to form a fine pattern when an electrode is formed using a paste or the like before sintering. When a circuit is formed after sintering, a concave shape having a reflector is not used. There are also restrictions such as having to be flat.

  In the conventional DUV-LED device, a DUV-LED element is mounted on a concave aluminum nitride container consisting of a floor portion having an electrode conducting inside and outside the container and a peripheral wall portion surrounding the floor portion, and an open end face is a flat-plate quartz lid. It was sealed and formed. Since the reflectance of aluminum nitride is extremely low and the luminous efficiency is reduced, aluminum nitride is sintered and then refired in the air atmosphere to form an oxide layer of alumina with high reflectance on the surface, or a mechanism such as an aluminum reflector There was a need to add parts separately. However, the luminous efficiency of the DUV-LED element is inferior to that of the visible light-LED element. In particular, the thickness of the product is limited, and a light, thin, and small size with less space to add mechanical parts such as a reflector is provided. This has been a major problem in DUV-LED devices. In addition, the DUV-LED device having the above-described configuration requires high-temperature refiring and additional parts, and is not necessarily a preferable configuration economically.

  On the other hand, as a glass material that transmits DUV light, there is a high-ultraviolet-transmissive borosilicate glass material described in Patent Document 1. This high ultraviolet transmissive borosilicate glass has a UV transmittance of 80% or more, a value close to that of quartz, and has a thermal expansion coefficient α of around 4 ppm / K.

JP 2011-032162 A

  An object of the present invention is to realize a glass lid capable of efficiently condensing the light in the horizontal direction of the DUV-LED element forward and an LED device using the glass lid.

  According to the present invention, a DUV light transmissive glass frame having an inclined wall whose inner peripheral wall surface also serves as a reflector base, and a DUV light transmissive material that covers one opening of the frame and is hermetically sealed to the frame. There is provided a glass lid for DUV-LED, comprising a glass window, wherein the frame has a DUV reflective coating on at least an inclined wall surface. The DUV reflective coating provided on the frame may be further provided on the sealing surface with the window (upper frame upper surface) and / or the lower frame surface of the frame as required. The window of the present invention may be provided with a coating film for preventing reflection of the window surface.

  According to another aspect of the present invention, a base made of a high thermal conductive material having a plurality of wiring electrodes, a DUV-LED element mounted on the base and electrically connected to the wiring electrodes, and an upper portion of the DUV-LED element are covered. A DUV-LED device formed from a hermetically sealed DUV transmissive glass lid, the lid comprising a DUV light transmissive glass frame having an inclined wall whose inner peripheral wall surface also serves as a reflector base, and the frame A DUV-LED comprising a window of DUV light-transmitting glass which covers one opening of the body and is hermetically sealed to the frame, and the frame has a DUV reflective coating on at least an inclined wall surface An apparatus is provided.

  The window of the DUV-LED device according to the present invention may be provided with a coating film on the window surface for the purpose of preventing reflection.

  The DUV-LED glass lid and the DUV-LED device using the glass lid according to the present invention reflect horizontal DUV light by the DUV reflective coating provided on the inclined wall surface of the lid frame and converge in the vertical direction. it can. Since no additional parts such as a metal reflector are required, it is easy to reduce the size and thickness, and packaging at the wafer level is possible. Further, since aluminum nitride is expensive, a relatively inexpensive flat plate is preferable, but the base of the DUV-LED device of the present invention is flat and has an economic effect.

  The glass lid for DUV-LED of the present invention is provided with a DUV reflective coating so that the DUV reflective coating is not damaged by providing the DUV reflective coating on the upper end surface of the frame which is the sealing surface with the window. Anodic bonding with window glass is possible at working temperatures below the melting point. Further, by providing the DUV reflective coating on the lower end surface of the frame that is the sealing surface with the base of the DUV-LED device, the working temperature below the melting point of the DUV reflective coating is prevented so that the DUV reflective coating is not damaged. With this, it is possible to solder to the base.

The glass lid 10 which concerns on this invention is shown, (a) is a top view, (b) is a front fragmentary sectional view cut | disconnected along DD of (a), (c) shows a top view. 1 shows a DUV-LED device 200 according to the present invention, in which (a) is a plan view seen from above with the window 12 removed, and (b) is a front sectional view cut along DD of (a). . In this figure, wiring members such as wiring electrodes and bonding wires are not shown.

As shown in FIG. 1, the glass lid 10 according to the present invention includes a frame 11 made of DUV light-transmitting borosilicate glass having an inclined wall whose inner peripheral wall surface also serves as a reflector base, and one of the frames 11. And a window 12 made of DUV light-transmitting borosilicate glass hermetically sealed to the frame 11 so as to cover the opening, and the frame 11 has a DUV reflective coating 13 at least on the inclined wall surface 11a. . The inclined wall surface 11a is preferably provided such that an angle (inclination angle) β formed by the inclined wall surface 11a and the frame lower end surface 11c is 45 to 85 °. The DUV reflective coating 13 may be provided on the sealing surface (frame upper end surface) 11b and / or the frame lower end surface 11c with the window 12 as necessary. The film forming method of the DUV reflective coating 13 may be any film forming method as long as the DUV reflective coating can be formed. For example, any of a plating film, a sputtering film, and a vapor deposition film may be used. Any material may be used for the DUV reflective coating 13 as long as it is a metal coating with high DUV reflectivity, but aluminum or an alloy material containing aluminum as a main component is particularly preferable. The aluminum DUV reflective coating 13 may be applied to the sealing surface 11 b with the window 12, and in that case, anodic bonding is used to bond the frame 11 and the window 12. Since the anodic bonding is performed at an operating temperature lower than the melting point of the DUV reflective coating 13, it does not affect the reflectivity of the DUV reflective coating 13. The window 12 may be provided with an AR coating in which HfO ₂ or ZrO ₂ and SiO ₂ are laminated as necessary for the purpose of preventing reflection of the window surface.

A DUV-LED device 200 according to the present invention is a DUV LED device using the glass lid 10 as a lid, as shown in FIG. 2, such as aluminum nitride, silicon nitride or the like having a plurality of wiring electrodes. A base 201 made of a high thermal conductivity material, a DUV-LED element 202 mounted on the base 201 and electrically connected to a wiring electrode, and a DUV-transmissive glass lid 10 hermetically sealed covering the top of the DUV-LED element 202 The glass lid 10 includes a frame 11 made of DUV light-transmitting borosilicate glass having an inclined wall whose inner peripheral wall surface also serves as a reflector base, and one opening of the frame 11. And a window 12 made of DUV light-transmitting borosilicate glass hermetically sealed to the frame 11, and the frame 11 has at least an inclined wall surface 11. Having DUV reflective coating 13. The inclined wall surface 11a is preferably provided so that the inclination angle is 45 to 85 °. The DUV reflective coating 13 may be provided on the sealing surface (frame upper end surface) 11b and / or the frame lower end surface 11c with the window 12 as necessary. The film forming method of the DUV reflective coating 13 may be any film forming method as long as the DUV reflective coating can be formed. For example, any of a plating film, a sputtering film, and a vapor deposition film may be used. Any material can be used for the DUV reflective coating 13 as long as it is a metal coating with high DUV reflectivity, and aluminum or an alloy material containing aluminum as a main component is particularly preferable. The aluminum DUV reflective coating 13 may be applied to the sealing surface 11 b with the window 12, and in that case, anodic bonding is used to bond the frame 11 and the window 12. The glass lid 10 is hermetically sealed to the base 201 using a brazing material 203 having an operating temperature equal to or lower than the melting point of the DUV reflective coating 13 so as not to affect the reflectivity of the DUV reflective coating 13. At that time, an inert gas such as nitrogen gas, He gas, or Ar gas is filled and sealed so that the constituent materials in the DUV-LED device do not deteriorate. Further, the window 12 of the glass lid 10 may be provided with an AR coating in which HfO ₂ or ZrO ₂ and SiO ₂ are laminated on the window surface for the purpose of preventing reflection.

  As shown in FIG. 1, Example 1 of the metal-glass lid 10 according to the present invention has a borosilicate glass (SCHOTT 8337B, DUV light transmittance 88˜ 92%, α = 4.1 ppm / K), and a window 12 made of borosilicate glass (SCHOTT 8337B) which covers one opening of the frame 11 and is hermetically sealed to the frame 11 The frame 11 has a DUV reflective coating 13 made of aluminum on the inclined wall surface 11a, the frame upper end surface 11b, and the frame lower end surface 11c.

  As shown in FIG. 2, a DUV-LED device 200 according to the present invention includes a base 201 made of aluminum nitride (α = 4.5 ppm / K) having a plurality of wiring electrodes, a wiring electrode mounted on the base 201, and an electric A DUV-LED device formed of a connected DUV-LED element 202 and a DUV transmissive glass lid 10 that covers and seals the upper part of the DUV-LED element 202, and the glass lid 10 has an inner peripheral wall surface. Is a frame 11 of borosilicate glass (SCHOTT 8337B, DUV light transmittance 88-92%, α = 4.1 ppm / K) having an inclined wall that also serves as a reflector base, and one opening of the frame 11 And a window 12 of borosilicate glass (8337B manufactured by SCHOTT) covered and sealed to the frame 11. The frame 11 includes an inclined wall surface 11a and a frame upper end surface 11b. And a DUV reflective coating 13 made of aluminum on the lower end surface 11c of the frame. The glass lid 10 of the DUV-LED device 20 is hermetically sealed to the base using a 90Au—Sn brazing material 203 having a melting point of 217 ° C. At that time, the container of the DUV-LED device is filled with nitrogen gas.

  The present invention is a high-power deep ultraviolet LED device that requires long-term durability, particularly for high-energy deep ultraviolet light, such as a high-density optical information recording device, a high-intensity and long-life fluorescent lighting device, and pollution. It can be used for lids for DUV-LED devices such as substances and allergens, disinfection lamps, skin treatment devices, laser scalpels, cell sorting devices, and packages for DUV-LED devices.

10 ... Glass lid,
11 ... Frame,
11a ... inclined wall surface,
11b: sealing surface (upper end surface of the frame),
11c ... lower end surface of the frame,
12 ... Wind,
13 ... DUV reflective coating,
β ・ ・ ・ An angle formed between the inclined wall surface and the lower end surface of the frame (inclination angle),
200 ... DUV-LED device,
201 ... base,
202 ... DUV-LED element,
203 ... brazing material.

Claims (12)

  A DUV light transmissive glass frame having an inclined wall whose inner peripheral wall surface also serves as a reflector base, and a DUV light transmissive glass window that covers one opening of the frame and is hermetically sealed to the frame. And the frame body has a DUV reflective coating on at least an inclined wall surface thereof.   The glass lid for a DUV-LED according to claim 1, wherein the frame and the window are borosilicate glass.   3. The DUV-LED glass lid according to claim 1, wherein the inclined wall surface is provided with an inclination angle of 45 to 85 °.   The DUV-LED glass lid according to any one of claims 1 to 3, wherein the DUV reflective coating is made of aluminum or an alloy material containing aluminum as a main component.   5. The frame according to any one of claims 1 to 4, wherein the DUV reflective coating is further provided on a sealing surface (the upper surface of the frame) and / or a lower surface of the frame. The glass lid for DUV-LED as described in one.   6. The DUV-LED glass lid according to claim 5, wherein the frame is anodically bonded to the window at the sealing surface (upper end surface of the frame).   A base made of a high thermal conductivity material having a plurality of wiring electrodes, a DUV-LED element mounted on the base and electrically connected to the wiring electrode, and a DUV-transmissive glass hermetically sealed covering the top of the DUV-LED element A DUV-LED device formed from a lid, wherein the glass lid covers a DUV light-transmitting frame having an inclined wall whose inner peripheral wall surface also serves as a reflector base, and one opening of the frame. A DUV-LED device comprising: a DUV light transmitting window hermetically sealed to the frame, wherein the frame has a DUV reflective coating on at least an inclined wall surface.   The DUV-LED device according to claim 7, wherein the frame and the window are borosilicate glass.   The DUV-LED device according to claim 7 or 8, wherein the inclined wall surface is provided to have an inclination angle of 45 to 85 °.   The DUV-LED device according to any one of claims 7 to 9, wherein the DUV reflective coating is made of aluminum or an alloy material containing aluminum as a main component.   11. The frame according to claim 7, wherein the DUV reflective coating is further provided on the sealing surface (the upper surface of the frame) and / or the lower surface of the frame. The DUV-LED device according to one. The DUV-LED device according to claim 11, wherein the frame is anodically bonded to the window at the sealing surface (upper end surface of the frame).

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