JP2018005068A5 - - Google Patents

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Publication number
JP2018005068A5
JP2018005068A5 JP2016134000A JP2016134000A JP2018005068A5 JP 2018005068 A5 JP2018005068 A5 JP 2018005068A5 JP 2016134000 A JP2016134000 A JP 2016134000A JP 2016134000 A JP2016134000 A JP 2016134000A JP 2018005068 A5 JP2018005068 A5 JP 2018005068A5
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JP
Japan
Prior art keywords
permanent magnet
optical device
reflecting surface
optical
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2016134000A
Other languages
English (en)
Japanese (ja)
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JP6929024B2 (ja
JP2018005068A (ja
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Publication date
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Priority to JP2016134000A priority Critical patent/JP6929024B2/ja
Priority claimed from JP2016134000A external-priority patent/JP6929024B2/ja
Priority to CN201780040473.6A priority patent/CN109416457B/zh
Priority to KR1020197002601A priority patent/KR102165797B1/ko
Priority to PCT/JP2017/022311 priority patent/WO2018008364A1/ja
Publication of JP2018005068A publication Critical patent/JP2018005068A/ja
Publication of JP2018005068A5 publication Critical patent/JP2018005068A5/ja
Application granted granted Critical
Publication of JP6929024B2 publication Critical patent/JP6929024B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016134000A 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法 Expired - Fee Related JP6929024B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016134000A JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法
CN201780040473.6A CN109416457B (zh) 2016-07-06 2017-06-16 光学装置、曝光装置及物品的制造方法
KR1020197002601A KR102165797B1 (ko) 2016-07-06 2017-06-16 광학 장치, 노광 장치 및 물품의 제조 방법
PCT/JP2017/022311 WO2018008364A1 (ja) 2016-07-06 2017-06-16 光学装置、露光装置及び物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016134000A JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2018005068A JP2018005068A (ja) 2018-01-11
JP2018005068A5 true JP2018005068A5 (OSRAM) 2019-08-08
JP6929024B2 JP6929024B2 (ja) 2021-09-01

Family

ID=60912605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016134000A Expired - Fee Related JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法

Country Status (4)

Country Link
JP (1) JP6929024B2 (OSRAM)
KR (1) KR102165797B1 (OSRAM)
CN (1) CN109416457B (OSRAM)
WO (1) WO2018008364A1 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109932804B (zh) * 2019-03-04 2021-06-01 杭州电子科技大学 一种小口径轻型反射镜的柔性记忆合金支撑装置
JP2022022912A (ja) * 2020-07-10 2022-02-07 キヤノン株式会社 露光装置および物品製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02101402A (ja) 1988-10-11 1990-04-13 Omron Tateisi Electron Co 反射鏡装置
US6840638B2 (en) * 2002-07-03 2005-01-11 Nikon Corporation Deformable mirror with passive and active actuators
US7589822B2 (en) * 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
JP2008310925A (ja) * 2007-06-18 2008-12-25 Sony Corp 変形可能ミラー装置、光ピックアップ、光学ドライブ装置
FR2923301B1 (fr) * 2007-11-02 2010-09-17 Ujf Filiale Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir
FR2935054B1 (fr) * 2008-08-14 2011-01-28 Alpao Miroir deformable a actionneurs de force et raideur repartie
JP2011119551A (ja) * 2009-12-04 2011-06-16 Nikon Corp 光学部材変形装置、光学系、露光装置、デバイスの製造方法
US9202719B2 (en) * 2011-10-27 2015-12-01 The University Of British Columbia Displacement devices and methods for fabrication, use and control of same
JP5875537B2 (ja) * 2013-01-28 2016-03-02 三菱電機株式会社 形状可変鏡装置
JP2015050353A (ja) * 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP6168957B2 (ja) * 2013-09-30 2017-07-26 キヤノン株式会社 光学装置、投影光学系、露光装置および物品の製造方法
JP6336274B2 (ja) * 2013-12-25 2018-06-06 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法
JP2016092366A (ja) * 2014-11-11 2016-05-23 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

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