JP2017536518A - 真空バルブ - Google Patents
真空バルブ Download PDFInfo
- Publication number
- JP2017536518A JP2017536518A JP2017527606A JP2017527606A JP2017536518A JP 2017536518 A JP2017536518 A JP 2017536518A JP 2017527606 A JP2017527606 A JP 2017527606A JP 2017527606 A JP2017527606 A JP 2017527606A JP 2017536518 A JP2017536518 A JP 2017536518A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- roller
- motion
- groove section
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/42—Valve seats
- F16K1/425—Attachment of the seat to the housing by plastical deformation, e.g. valve seat or housing being plastically deformed during mounting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/52—Means for additional adjustment of the rate of flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
- F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
- F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
前記バルブハウジング100の内側に位置し、前記流入部110を開閉するバルブブレード200と、
前記バルブブレード200と連結され、上部に突出し形成される連結突起310が形成されるバルブロッド300と、
前記連結突起310と連結され、下部両側面にストロークローラー410がそれぞれ形成され、上部両側面にエルモーションローラー(L-Motion Roller)420がそれぞれ形成されるエルモーションブロック(L-Motion Block)400と、
前記エルモーションブロック(L-Motion Block)400と連結され、前記エルモーションローラー(L-Motion Roller)420がそれぞれ引き込まれて上下に移動できるように、両側面に開閉駆動ガイド溝510がそれぞれ形成される駆動ブロック500と、
前記駆動ブロック500の一面に具備するスプリングピン600と、前記スプリングピン600と、
前記エルモーションローラー(L-Motion Roller)420の間に具備する弾性部材700と、
前記バルブハウジング100の上部に結合され、両側の内面には、前記ストロークローラー410がそれぞれ導入されるように陥没し形成されるストロークローラーレール溝810が構成されるガイドハウジング800と、
前記ガイドハウジング800の上部に着脱可能に結合されるシリンダー900と、
前記シリンダー900の内部から外部へ気密を維持すると、突出して駆動ブロック500と連結され、油圧によって垂直運動するピストン910と、を含んで構成されることを特徴とする。
閉鎖方向C側に偏心されるように設置することを特徴とする。
Claims (6)
- 内側に流体移動ホール(101)を形成し、流体を流入する流入部(110)と流体を流出する流出部(120)を形成するバルブハウジング(100)と、
前記バルブハウジング(100)の内側に位置し、前記流入部(110)を開閉するバルブブレード(200)と、
前記バルブブレード(200)と連結され、上部に突出し形成される連結突起(310)が形成されるバルブロッド(300)と、
前記連結突起(310)と連結され、下部両側面にストロークローラー(410)がそれぞれ形成され、上部両側面にエルモーションローラー(L-Motion Roller)(420)が
それぞれ形成されるエルモーションブロック(L-Motion Block)(400)と、
前記エルモーションブロック(L-Motion Block)(400)と連結され、前記のエルモーションローラー(L-Motion Roller)(420)がそれぞれ引き込まれ、上下に移動可能なように両側面に開閉駆動ガイド溝(510)がそれぞれ形成される駆動ブロック(500)と、
前記駆動ブロック(500)の一面に具備したスプリングピン(600)と、
前記スプリングピン(600)と、前記エルモーションローラー(L-Motion Roller)(420)の間に具備する弾性部材(700)と、
前記バルブハウジング(100)の上部に結合され、両側の内面には、前記ストロークローラー(410)がそれぞれ引き込みされるように陥没し形成されるストロークローラーレール溝(810)が構成されるガイドハウジング(800)と、
前記ガイドハウジング(800)の上部に着脱可能に結合されるシリンダー(900)と、
前記シリンダー(900)の内部から外部へ気密を維持すると、突出して駆動ブロック(500)と連結され、油圧によって垂直運動するピストン(910)と、を含んで構成されることを特徴とする真空バルブ(1)。 - 前記ストロークローラー(410)は、前記エルモーションローラー(L-Motion Roller)(420)より閉鎖方向(C)側に偏心されるように設置することを特徴とする、請求項1に記載の真空バルブ(1)。
- 前記開閉駆動ガイド溝(510)は、閉鎖方向(C)側に突出し形成される突出溝区間(511)が構成され、前記エルモーションローラー(L-Motion Roller)(420)が前記突出溝区間(511)に位置すると、前記ストロークローラー(410)を中心に、前記バルブブレード(200)が開放方向(O)側へ傾いた状態を維持することを特徴とする、請求項2に記載の真空バルブ(1)。
- 前記突出溝区間(511)から上方向へ向かいながら、開放方向(O)側へ傾くように形成される第1傾斜溝区間(512)が構成され、前記エルモーションローラー(L-Motion Roller)(420)が、前記第1傾斜溝区間(512)の末端部(512a)に位置すると、前記ストロークローラー(410)を中心に、前記バルブブレード(200)が閉鎖方向(C)側へ移動し、前記バルブブレード(200)が前記流入部(110)を閉鎖することを特徴とする、請求項3に記載の真空バルブ(1)。
- 前記突出溝区間(511)から下方向へ向かいながら、開放方向(O)側へ傾くように形成される第2傾斜溝区間(513)が構成され、前記エルモーションローラー(L-Motion Roller)(420)が前記第2傾斜溝区間(513)の末端部(513a)に位置すると、前記ストロークローラー(410)を中心に、前記バルブブレード(200)が閉鎖方向(C)側へ移動し、前記バルブブレード(200)が前記バルブハウジング(100)の内部面(102)に密着することを特徴とする、請求項4に記載の真空バルブ(1)。
- 前記流入部(110)が形成された前記バルブハウジング(100)の側面には、打孔し形成される結合ホール(130)が構成され、前記結合ホール(130)に結合され、前記バルブブレード(200)の閉鎖面(201)に存在する工程副産物が除去されるように浄化されたガスが移動するガス移動ホール(1100)が形成されたバルブブレードクリーンガイド装置(1000)が構成されることを特徴とする、請求項1に記載の真空バルブ(1)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020140165234A KR101725249B1 (ko) | 2014-11-25 | 2014-11-25 | 진공밸브 |
KR10-2014-0165234 | 2014-11-25 | ||
PCT/KR2015/009695 WO2016085100A1 (ko) | 2014-11-25 | 2015-09-16 | 진공밸브 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017536518A true JP2017536518A (ja) | 2017-12-07 |
JP6580137B2 JP6580137B2 (ja) | 2019-09-25 |
Family
ID=56074602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017527606A Active JP6580137B2 (ja) | 2014-11-25 | 2015-09-16 | 真空バルブ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10132414B2 (ja) |
JP (1) | JP6580137B2 (ja) |
KR (1) | KR101725249B1 (ja) |
CN (1) | CN107002890B (ja) |
WO (1) | WO2016085100A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109555869A (zh) * | 2017-09-25 | 2019-04-02 | 新莱应材科技有限公司 | 无弹簧式闸阀 |
EP3492790A1 (en) * | 2017-12-04 | 2019-06-05 | King Lai Hygienic Materials Co., Ltd. | Spring free gate valve |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2657778B2 (ja) | 1994-10-31 | 1997-09-24 | 株式会社岸川特殊バルブ | ゲートバルブ |
JP4169892B2 (ja) | 1999-12-03 | 2008-10-22 | 株式会社アルバック | ゲートバルブ |
US7100892B2 (en) * | 2003-08-26 | 2006-09-05 | Kitz Sct Corporation | Non-rubbing gate valve for semiconductor fabrication apparatus |
US7637477B2 (en) * | 2004-12-17 | 2009-12-29 | Tokyo Electron Limited | Gate valve apparatus of vacuum processing system |
JP5545152B2 (ja) * | 2010-09-22 | 2014-07-09 | Smc株式会社 | ゲートバルブ |
JP5533839B2 (ja) * | 2011-11-04 | 2014-06-25 | Smc株式会社 | 無摺動型ゲートバルブ |
CN202484328U (zh) * | 2012-01-06 | 2012-10-10 | 肇庆市振华真空机械有限公司 | 一种真空闸阀 |
KR101375280B1 (ko) | 2012-04-06 | 2014-03-17 | 프리시스 주식회사 | 게이트 밸브 |
US8973847B2 (en) * | 2012-07-09 | 2015-03-10 | Easy Spray Llc | Non-aerosol liquid spray device with continuous spray |
US9086172B2 (en) * | 2012-07-19 | 2015-07-21 | Vat Holding Ag | Vacuum valve |
KR101236013B1 (ko) * | 2012-08-01 | 2013-02-21 | 선동수 | 진공챔버 개폐장치 |
CN103016766B (zh) * | 2012-12-28 | 2016-04-27 | 兰州高压阀门有限公司 | 羰基冶金工艺专用阀 |
KR101431661B1 (ko) | 2013-05-24 | 2014-08-22 | 주식회사 에스알티 | 윙 블레이드 게이트 밸브 |
-
2014
- 2014-11-25 KR KR1020140165234A patent/KR101725249B1/ko active IP Right Grant
-
2015
- 2015-09-16 CN CN201580063224.XA patent/CN107002890B/zh active Active
- 2015-09-16 WO PCT/KR2015/009695 patent/WO2016085100A1/ko active Application Filing
- 2015-09-16 US US15/528,851 patent/US10132414B2/en active Active
- 2015-09-16 JP JP2017527606A patent/JP6580137B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR101725249B1 (ko) | 2017-04-27 |
WO2016085100A1 (ko) | 2016-06-02 |
CN107002890A (zh) | 2017-08-01 |
KR20160062789A (ko) | 2016-06-03 |
US20170268680A1 (en) | 2017-09-21 |
JP6580137B2 (ja) | 2019-09-25 |
CN107002890B (zh) | 2019-04-05 |
US10132414B2 (en) | 2018-11-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6115628B2 (ja) | ゲートバルブ | |
JP6115627B2 (ja) | ゲートバルブ | |
JP2015017655A (ja) | 無摺動型ゲートバルブ | |
KR20130049745A (ko) | 무슬라이딩형 게이트 밸브 | |
JP6580137B2 (ja) | 真空バルブ | |
KR102342061B1 (ko) | 실린더 장치 | |
JP5779194B2 (ja) | 位置決め装置 | |
KR101407656B1 (ko) | 진공 차단 장치 | |
KR102122559B1 (ko) | 게이트 밸브 및 챔버 | |
TWI733553B (zh) | 工件支架 | |
JP2015113976A (ja) | シリンダ装置 | |
KR20160104840A (ko) | 저소음 진공 게이트밸브 | |
KR20230029540A (ko) | 게이트밸브 | |
JPWO2018143158A1 (ja) | 切り替え弁 | |
KR101305855B1 (ko) | 프레스 장치 | |
KR101321366B1 (ko) | 가스 실린더의 스트로크 연장을 위한 밸브체 구조물 | |
KR102203831B1 (ko) | 게이트 진공 밸브용 액츄에이터 구조 | |
KR102574233B1 (ko) | U motion 게이트밸브 | |
JP4470201B2 (ja) | ゲートバルブ | |
JPH08128542A (ja) | ゲートバルブ | |
JP3898695B2 (ja) | 高圧流体発生装置 | |
KR102532356B1 (ko) | 필터용 개폐 기구 및 이를 포함하는 필터 조립체 | |
KR101739557B1 (ko) | 게이트 밸브의 개폐장치 | |
JP2006194301A (ja) | クッションピン均圧化用シリンダ | |
KR100456971B1 (ko) | 가스 실린더용 밸브 구조물 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180803 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190528 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190530 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190725 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190813 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190827 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6580137 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |