JP2017527092A5 - - Google Patents

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Publication number
JP2017527092A5
JP2017527092A5 JP2017519959A JP2017519959A JP2017527092A5 JP 2017527092 A5 JP2017527092 A5 JP 2017527092A5 JP 2017519959 A JP2017519959 A JP 2017519959A JP 2017519959 A JP2017519959 A JP 2017519959A JP 2017527092 A5 JP2017527092 A5 JP 2017527092A5
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JP
Japan
Prior art keywords
system voltage
power
reference value
power generator
load
Prior art date
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Application number
JP2017519959A
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English (en)
Japanese (ja)
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JP2017527092A (ja
JP6685294B2 (ja
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Priority claimed from DE102014212439.5A external-priority patent/DE102014212439A1/de
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Publication of JP2017527092A publication Critical patent/JP2017527092A/ja
Publication of JP2017527092A5 publication Critical patent/JP2017527092A5/ja
Application granted granted Critical
Publication of JP6685294B2 publication Critical patent/JP6685294B2/ja
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JP2017519959A 2014-06-27 2015-06-25 電力発生器を動作させるための方法、及び、電力発生器 Active JP6685294B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014212439.5 2014-06-27
DE102014212439.5A DE102014212439A1 (de) 2014-06-27 2014-06-27 Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator
PCT/EP2015/064437 WO2015197783A1 (de) 2014-06-27 2015-06-25 Verfahren zum betrieb eines leistungsgenerators und leistungsgenerator

Publications (3)

Publication Number Publication Date
JP2017527092A JP2017527092A (ja) 2017-09-14
JP2017527092A5 true JP2017527092A5 (https=) 2018-06-07
JP6685294B2 JP6685294B2 (ja) 2020-04-22

Family

ID=53524744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017519959A Active JP6685294B2 (ja) 2014-06-27 2015-06-25 電力発生器を動作させるための方法、及び、電力発生器

Country Status (4)

Country Link
US (1) US10212797B2 (https=)
JP (1) JP6685294B2 (https=)
DE (1) DE102014212439A1 (https=)
WO (1) WO2015197783A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6843273B2 (ja) * 2018-01-23 2021-03-17 株式会社Ｆｕｊｉ プラズマ発生装置および情報処理方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
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AT405582B (de) * 1995-10-30 1999-09-27 Ruebig Ges M B H & Co Kg Vorrichtung zum behandeln eines werkstückes in einer gasentladung
US6162563A (en) 1996-08-20 2000-12-19 Daiso Co., Ltd Polymer Solid Electrolyte
US6329757B1 (en) * 1996-12-31 2001-12-11 The Perkin-Elmer Corporation High frequency transistor oscillator system
US5923099A (en) * 1997-09-30 1999-07-13 Lam Research Corporation Intelligent backup power controller
DE29919711U1 (de) * 1999-04-22 2000-08-31 Söring GmbH, 25451 Quickborn Plasma-Generator
US6879140B2 (en) * 2002-09-26 2005-04-12 Mks Instruments, Inc. Power holdup circuit
US7049751B2 (en) * 2003-07-16 2006-05-23 Advanced Energy Industries, Inc Termination of secondary frequencies in RF power delivery
WO2005015964A1 (ja) * 2003-08-07 2005-02-17 Hitachi Kokusai Electric Inc. 基板処理装置及び基板処理方法
DE102004018502B3 (de) * 2004-04-14 2006-01-12 Phoenix Contact Gmbh & Co. Kg Vorrichtung zur unterbrechungsfreien Stromversorgung
US7067829B2 (en) * 2004-11-23 2006-06-27 Ibis Technology Coporation Power sag detection and control in ion implanting system
US7305311B2 (en) * 2005-04-22 2007-12-04 Advanced Energy Industries, Inc. Arc detection and handling in radio frequency power applications
DE502005003768D1 (de) * 2005-10-17 2008-05-29 Huettinger Elektronik Gmbh HF-Plasmaversorgungseinrichtung
EP1786075B1 (de) 2005-11-12 2008-12-03 HÜTTINGER Elektronik GmbH + Co. KG Verfahren zum Betrieb einer Vakuumplasmaprozessanlage
DE102006043898A1 (de) * 2006-09-19 2008-04-17 Siemens Ag Vorrichtung und Verfahren zum Betrieb einer Plasmaanlage
US7795817B2 (en) * 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
DE502007006093D1 (de) * 2007-03-08 2011-02-10 Huettinger Elektronik Gmbh Verfahren und Vorrichtung zum Unterdrücken von Bogenentladungen beim Betreiben eines Plasmaprozesses
WO2011016266A1 (ja) * 2009-08-07 2011-02-10 株式会社京三製作所 パルス変調高周波電力制御方法およびパルス変調高周波電源装置
DE202010012884U1 (de) * 2010-11-15 2011-02-17 Hüttinger Elektronik GmbH & Co.KG Leistungsgeneratoranordnung
US20130006555A1 (en) * 2011-06-30 2013-01-03 Advanced Energy Industries, Inc. Method and apparatus for measuring the power of a power generator while operating in variable frequency mode and/or while operating in pulsing mode
KR101303040B1 (ko) * 2012-02-28 2013-09-03 주식회사 뉴파워 프라즈마 플라즈마 챔버의 아크 검출 방법 및 장치
US9316675B2 (en) * 2012-09-06 2016-04-19 Mks Instruments, Inc. Secondary plasma detection systems and methods
DE102012223662B4 (de) * 2012-12-18 2017-12-14 TRUMPF Hüttinger GmbH + Co. KG Verfahren zur Erzeugung einer Hochfrequenzleistung und Leistungsversorgungssystem mit einem Leistungswandler zur Versorgung einer Last mit Leistung
US9578731B2 (en) * 2014-10-16 2017-02-21 Advanced Energy Industries, Inc. Systems and methods for obtaining information about a plasma load

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