DE102014212439A1 - Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator - Google Patents

Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator Download PDF

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Publication number
DE102014212439A1
DE102014212439A1 DE102014212439.5A DE102014212439A DE102014212439A1 DE 102014212439 A1 DE102014212439 A1 DE 102014212439A1 DE 102014212439 A DE102014212439 A DE 102014212439A DE 102014212439 A1 DE102014212439 A1 DE 102014212439A1
Authority
DE
Germany
Prior art keywords
operating mode
power
power generator
mains voltage
event
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102014212439.5A
Other languages
German (de)
English (en)
Inventor
Ekkehard Mann
Florian Zehetner
Markus Winterhalter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Huettinger GmbH and Co KG
Original Assignee
Trumpf Huettinger GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Huettinger GmbH and Co KG filed Critical Trumpf Huettinger GmbH and Co KG
Priority to DE102014212439.5A priority Critical patent/DE102014212439A1/de
Priority to PCT/EP2015/064437 priority patent/WO2015197783A1/de
Priority to JP2017519959A priority patent/JP6685294B2/ja
Publication of DE102014212439A1 publication Critical patent/DE102014212439A1/de
Priority to US15/386,763 priority patent/US10212797B2/en
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—ELECTRIC POWER NETWORKS; CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J9/00—Circuit arrangements for emergency or stand-by power supply, e.g. for emergency lighting
    • H02J9/04—Circuit arrangements for emergency or stand-by power supply, e.g. for emergency lighting in which the distribution system is disconnected from the normal source and connected to a standby source
    • H02J9/06—Circuit arrangements for emergency or stand-by power supply, e.g. for emergency lighting in which the distribution system is disconnected from the normal source and connected to a standby source with automatic change-over, e.g. UPS systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32128—Radio frequency generated discharge using particular waveforms, e.g. polarised waves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32908—Utilities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32926—Software, data control or modelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32944—Arc detection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
DE102014212439.5A 2014-06-27 2014-06-27 Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator Pending DE102014212439A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102014212439.5A DE102014212439A1 (de) 2014-06-27 2014-06-27 Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator
PCT/EP2015/064437 WO2015197783A1 (de) 2014-06-27 2015-06-25 Verfahren zum betrieb eines leistungsgenerators und leistungsgenerator
JP2017519959A JP6685294B2 (ja) 2014-06-27 2015-06-25 電力発生器を動作させるための方法、及び、電力発生器
US15/386,763 US10212797B2 (en) 2014-06-27 2016-12-21 Method of maintaining a supply of power to a load

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014212439.5A DE102014212439A1 (de) 2014-06-27 2014-06-27 Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator

Publications (1)

Publication Number Publication Date
DE102014212439A1 true DE102014212439A1 (de) 2015-12-31

Family

ID=53524744

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102014212439.5A Pending DE102014212439A1 (de) 2014-06-27 2014-06-27 Verfahren zum Betrieb eines Leistungsgenerators und Leistungsgenerator

Country Status (4)

Country Link
US (1) US10212797B2 (https=)
JP (1) JP6685294B2 (https=)
DE (1) DE102014212439A1 (https=)
WO (1) WO2015197783A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6843273B2 (ja) * 2018-01-23 2021-03-17 株式会社Ｆｕｊｉ プラズマ発生装置および情報処理方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29919711U1 (de) * 1999-04-22 2000-08-31 Söring GmbH, 25451 Quickborn Plasma-Generator
DE69717243T2 (de) * 1996-12-31 2003-05-08 The Perkin-Elmer Corp., Norwalk Hochfrequenz-Transistor-Oszillatorsystem
DE19643709B4 (de) * 1995-10-30 2007-03-01 Rübig Ges.m.b.H. & Co. KG Vorrichtung zum Behandeln eines Werkstückes in einer Gasentladung
DE102006043898A1 (de) * 2006-09-19 2008-04-17 Siemens Ag Vorrichtung und Verfahren zum Betrieb einer Plasmaanlage
DE202010012884U1 (de) * 2010-11-15 2011-02-17 Hüttinger Elektronik GmbH & Co.KG Leistungsgeneratoranordnung
WO2013003205A1 (en) * 2011-06-30 2013-01-03 Advanced Energy Industries, Inc. Method and apparatus for measuring the power of a power generator while operating in variable frequency mode and/or while operating in pulsing mode

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Publication number Priority date Publication date Assignee Title
US6162563A (en) 1996-08-20 2000-12-19 Daiso Co., Ltd Polymer Solid Electrolyte
US5923099A (en) * 1997-09-30 1999-07-13 Lam Research Corporation Intelligent backup power controller
US6879140B2 (en) * 2002-09-26 2005-04-12 Mks Instruments, Inc. Power holdup circuit
US7049751B2 (en) * 2003-07-16 2006-05-23 Advanced Energy Industries, Inc Termination of secondary frequencies in RF power delivery
WO2005015964A1 (ja) * 2003-08-07 2005-02-17 Hitachi Kokusai Electric Inc. 基板処理装置及び基板処理方法
DE102004018502B3 (de) * 2004-04-14 2006-01-12 Phoenix Contact Gmbh & Co. Kg Vorrichtung zur unterbrechungsfreien Stromversorgung
US7067829B2 (en) * 2004-11-23 2006-06-27 Ibis Technology Coporation Power sag detection and control in ion implanting system
US7305311B2 (en) * 2005-04-22 2007-12-04 Advanced Energy Industries, Inc. Arc detection and handling in radio frequency power applications
DE502005003768D1 (de) * 2005-10-17 2008-05-29 Huettinger Elektronik Gmbh HF-Plasmaversorgungseinrichtung
EP1786075B1 (de) 2005-11-12 2008-12-03 HÜTTINGER Elektronik GmbH + Co. KG Verfahren zum Betrieb einer Vakuumplasmaprozessanlage
US7795817B2 (en) * 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
DE502007006093D1 (de) * 2007-03-08 2011-02-10 Huettinger Elektronik Gmbh Verfahren und Vorrichtung zum Unterdrücken von Bogenentladungen beim Betreiben eines Plasmaprozesses
WO2011016266A1 (ja) * 2009-08-07 2011-02-10 株式会社京三製作所 パルス変調高周波電力制御方法およびパルス変調高周波電源装置
KR101303040B1 (ko) * 2012-02-28 2013-09-03 주식회사 뉴파워 프라즈마 플라즈마 챔버의 아크 검출 방법 및 장치
US9316675B2 (en) * 2012-09-06 2016-04-19 Mks Instruments, Inc. Secondary plasma detection systems and methods
DE102012223662B4 (de) * 2012-12-18 2017-12-14 TRUMPF Hüttinger GmbH + Co. KG Verfahren zur Erzeugung einer Hochfrequenzleistung und Leistungsversorgungssystem mit einem Leistungswandler zur Versorgung einer Last mit Leistung
US9578731B2 (en) * 2014-10-16 2017-02-21 Advanced Energy Industries, Inc. Systems and methods for obtaining information about a plasma load

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19643709B4 (de) * 1995-10-30 2007-03-01 Rübig Ges.m.b.H. & Co. KG Vorrichtung zum Behandeln eines Werkstückes in einer Gasentladung
DE69717243T2 (de) * 1996-12-31 2003-05-08 The Perkin-Elmer Corp., Norwalk Hochfrequenz-Transistor-Oszillatorsystem
DE29919711U1 (de) * 1999-04-22 2000-08-31 Söring GmbH, 25451 Quickborn Plasma-Generator
DE102006043898A1 (de) * 2006-09-19 2008-04-17 Siemens Ag Vorrichtung und Verfahren zum Betrieb einer Plasmaanlage
DE202010012884U1 (de) * 2010-11-15 2011-02-17 Hüttinger Elektronik GmbH & Co.KG Leistungsgeneratoranordnung
WO2013003205A1 (en) * 2011-06-30 2013-01-03 Advanced Energy Industries, Inc. Method and apparatus for measuring the power of a power generator while operating in variable frequency mode and/or while operating in pulsing mode

Also Published As

Publication number Publication date
JP2017527092A (ja) 2017-09-14
JP6685294B2 (ja) 2020-04-22
US10212797B2 (en) 2019-02-19
WO2015197783A1 (de) 2015-12-30
US20170105274A1 (en) 2017-04-13

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