Classifications

• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02J—ELECTRIC POWER NETWORKS; CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
  • H02J9/00—Circuit arrangements for emergency or stand-by power supply, e.g. for emergency lighting
  • H02J9/04—Circuit arrangements for emergency or stand-by power supply, e.g. for emergency lighting in which the distribution system is disconnected from the normal source and connected to a standby source
  • H02J9/06—Circuit arrangements for emergency or stand-by power supply, e.g. for emergency lighting in which the distribution system is disconnected from the normal source and connected to a standby source with automatic change-over, e.g. UPS systems
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
  • H01J37/32082—Radio frequency generated discharge
  • H01J37/32128—Radio frequency generated discharge using particular waveforms, e.g. polarised waves
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
  • H01J37/32082—Radio frequency generated discharge
  • H01J37/32174—Circuits specially adapted for controlling the RF discharge
  • H01J37/32183—Matching circuits
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32431—Constructional details of the reactor
  • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
  • H01J37/32908—Utilities
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32917—Plasma diagnostics
  • H01J37/32926—Software, data control or modelling
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32917—Plasma diagnostics
  • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
  • H01J37/32944—Arc detection
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H1/00—Generating plasma; Handling plasma
  • H05H1/24—Generating plasma
  • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H1/00—Generating plasma; Handling plasma
  • H05H1/54—Plasma accelerators
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H2242/00—Auxiliary systems
  • H05H2242/20—Power circuits
  • H05H2242/22—DC, AC or pulsed generators

Definitions

• the invention relates to a method in which a connected to a mains voltage power generator is operated in a nominal operating mode.
• the invention relates to a power generator.
• Power generators in particular high-frequency generators, are generally supplied from a three-phase network, which supplies, for example, 3 ⁇ 400 V at 50 Hz. Due to weather conditions, fluctuations on the load side as well as other influences on the part of the mains supply, partial or total dips may occur for different durations at the mains voltage supplied by the three-phase network. This is especially problematic when a plasma is used as the load supplied by the power generator. A plasma shows a dependence of the impedance on the power delivered by the power generator. If the performance is completely lost for some time, go through the processes that are not directly reversible. For example, the plasma may go out, necessitating a re-ignition. When layers are formed using the plasma, the properties of the layer surfaces can be undesirably altered.
• Object of the present invention is to provide a way to bridge a mains voltage interruption, so that the power generator withstands longer mains voltage interruptions and is quickly ready for use again.
• This object is achieved according to the invention by a method in which a connected to a mains voltage power generator is operated in a nominal operating mode, wherein the mains voltage or a derived quantity is monitored for the occurrence of at least one predetermined event and at the occurrence of at least one predetermined event a predefined Operation mode of the power generator is triggered, wherein the predefined operating mode deviates from the nominal operating mode.
• a power signal to be supplied to a load is generated for proper operation of a load.
• the method according to the invention thus serves to supply a load, in particular a plasma load with power, wherein a power signal to be supplied to the load is generated in a rated operating mode by means of a power generator connected to a mains voltage, the mains voltage or a quantity derived therefrom with regard to the occurrence of at least one predetermined event is monitored and at the occurrence of the at least one predetermined event, a predefined operating mode of the power generator deviating from the nominal operating mode is triggered.
• This method is particularly advantageous if it is a high-frequency power generator which generates a high-frequency power signal and supplies a plasma load with this generated high-frequency power signal.
• the predefined operating modes can be designed, for example, so that the supply of the load, in particular a plasma load, is maintained with power and the load is operated in a defined state.
• a predefined operating mode can cause the state of aggregation in the load, for example a plasma state, to be maintained.
• a predefined operating mode causes a plasma, if it is a plasma load, does not go out.
• a predefined operating mode can be provided, which keeps a predetermined number of charge carriers in the load, in particular a plasma, in motion.
• the output power of the power generator may be lowered.
• the output power of the power generator can be lowered to an output power of zero watts.
• the mains voltage or the quantity derived therefrom for determining the occurrence of a first event can be monitored with regard to overcoming, in particular falling short of, a first reference value. For example, it can be monitored whether the mains voltage drops and falls below a predetermined reference value. In this case, a predefined operating mode can be triggered.
• the mains voltage or the quantity derived therefrom can be monitored for determining the occurrence of a first event with regard to the duration of overcoming, in particular undershooting, of the first reference value.
• a predefined operating mode is triggered when the mains voltage or the quantity derived therefrom overcomes the first reference value for a predefined first time duration, in particular falls below it.
• the predetermined first time duration can be fixed, for example. Alternatively or additionally, the predetermined first time period can be set by the user manually or via a data interface. Alternatively or additionally, the predetermined first period of time may be variable depending on the rate of change of the mains voltage or a variable derived therefrom. Alternatively or additionally, the predetermined first time duration can be variable depending on the amount of power for supplying the load. At the occurrence of the predetermined first event, at least one of the following modes of operation may be triggered: a. Reducing the output power of the power generator, b. Change to an operating mode with a lower power consumption compared to the current operating mode.
• the power signal generated by the power generator is pulsed.
• the power signal can be output with a duty cycle (duty cycle) ⁇ 20%, in particular even ⁇ 10%, particularly preferably ⁇ 2%. This causes the energy stored in the power supply of the power generator for a longer period of time to maintain the plasma state of the load.
• the reduction in the output power of the power generator can be at an output power ⁇ 20%, in particular even ⁇ 10%, particularly preferably ⁇ 2%.
• the power consumption of the power generator can be reduced to a power consumption ⁇ 20%, in particular even ⁇ 10%, particularly preferably ⁇ 2%.
• the duration of a mains voltage reduction which can be bridged by the power generator can thus be increased by a factor of 50 or more. If a power generator can not survive only mains voltage reductions of 1 ms to less than 10 ms without the triggering of the predefined operating mode according to the invention, before it switches itself off completely, then a power generator with the triggering according to the invention predefined operating mode lasting longer than 10 ms to 1000 ms and longer.
• the mains voltage or the quantity derived therefrom can be monitored for determining the occurrence of a second event with regard to overcoming, in particular exceeding, the first or a second reference value. If the occurrence of the second event is detected, a predefined operating mode can again be triggered. In this case, it can be recognized as the occurrence of the second event when the mains voltage or the quantity derived therefrom overcomes the first reference value in the other direction than was previously detected for the occurrence of the first event.
• a second reference value may also be used that does not match the first reference value. The second reference value may be greater or less than the first reference value. It may be the same or a different size used to determine the occurrence of the second event as to determine the occurrence of the first event.
• the mains voltage or the quantity derived therefrom can be monitored for determining the occurrence of a second event with regard to the duration of the overcoming, in particular exceeding, of the first or a second reference value.
• a further predefined operating mode is triggered when the mains voltage or the quantity derived therefrom overcomes, in particular exceeds, the first or second reference value for a predetermined further period of time. Premature triggering of the predefined operating mode can thereby be prevented. This is important, for example, in larger systems with many connected high-power consumers with rated power decreases greater than 1 kW, in particular greater than 10 kW. After a short mains voltage reduction in the range of a few microseconds rose customers up to approx.
• the predetermined additional period of time can counteract this, in that, in particular, the power consumers equipped with large energy stores receive their rated power again from the supply network only after the predetermined further period of time.
• Large energy stores can store up to several 100J of electrical energy in the range of 1J. Frequently, the energy stores are designed depending on the rated power of the power consumers and are in the range of U / kW rated power up to some 10J / kW rated power.
• the power generator itself can charge their energy stores without having to overload the mains supply.
• this method step is of particular importance when the first reference value is undershot, because, in particular, after a mains voltage dip, the risk of overshooting Lastung of the supply network is particularly high, because usually in this case, particularly powerful high-power consumers at the same time try to consume rated power and charge their energy storage.
• the predetermined additional period of time may, for. B. be predetermined. Alternatively or additionally, the predetermined additional period of time can be set by the user manually or via a data interface. Alternatively or additionally, the predetermined additional period of time may be variable depending on the rate of change of the mains voltage or a variable derived therefrom. Alternatively or additionally, the predetermined additional period of time can be variable depending on the amount of power for supplying the load. Alternatively or additionally, the predetermined further time duration can be variable as a function of the duration of the mains voltage reduction.
• overcoming the first or the second reference value can be debounced. This is to mean that a change from undershooting and exceeding the reference value within a predetermined interval is only recognized as such if, after the predetermined interval, the first occurrence of overcoming of the reference value has been preserved.
• debouncing can be done, for example, by using a Schmitt trigger, inserting a hysteresis, or by repeatedly checking the overcoming within the interval.
• the output power of the power generator may be returned to the original value, i. before a predefined operating mode has been triggered after the occurrence of the first predefined event. It can therefore be transferred to the nominal operating mode.
• Fitting circuit between the high frequency power generator and the load to be fixed.
• capacitor positions of capacitors may be retained in the matching circuit. This makes it easier to make an impedance adjustment when returning to the rated operation mode.
• the elements of the matching circuit can be set to predefined values. This is for example in question, with mechanically variable or electronically switched
• the frequency of the impedance is adjusted to match the impedance changed generator, it can be set at the occurrence of the first event and a predetermined frequency.
• the power generated during the execution of a predefined operating mode can be detected and the power can be generated in a subsequent subsequent operating mode depending on the power detected in the predefined operating mode.
• the nominal operating mode wherein in the intermediate sequence operating mode with a low recovery current is used.
• the output power not supplied during the mains voltage dip is detected and that subsequently, when the mains voltage is present again, the process is prolonged or the output power is increased, depending on the output power not supplied during the interruption phase.
• the scope of the invention also includes a power generator
• a measuring device for measuring a mains voltage or a variable derived therefrom
• a monitoring device for monitoring the measured mains voltage or the quantity derived therefrom
• the operating mode selector may be configured to set predefined operating modes.
• the power generator can be used to supply loads where the state of aggregation may change, such as in a plasma or evaporation process.
• a predefined operating mode can be designed, for example, so that the supply of the load, in particular a plasma load, is maintained with power and the load is operated in a defined state.
• a predefined operating mode can cause the state of aggregation in the load, for example a plasma state, to be maintained.
• a predefined operating mode causes a plasma, if it is a plasma load, does not go out.
• a predefined operating mode can be provided, which keeps a predetermined number of charge carriers in the load, in particular a plasma, in motion.
• the output power of the power generator may be lowered, in the extreme case is lowered to an output power of zero watts.
• the power generator can have sufficient energy stores, in particular capacitive energy stores, which make it possible to work for a predetermined period of time in the predefined operating mode in which the measuring device, the monitoring device and the operating mode Selector are supplied with sufficient energy, so that the method described above can be performed.
• the capacitive energy stores can have capacities of a few hundredpF.
• the capacitive energy stores are designed to be charged to voltages of a few 100V. This allows several joules of energy to be stored.
• the power generator can be used to supply loads in which the state of aggregation does not change, e.g. for inductive or dielectric heating.
• the output power can be reduced to zero at the occurrence of the first event, e.g. by removing a 13.56 MHz clock from the power generator while the link (s) in the power generator remain charged.
• a particularly low recovery current can be achieved with a return of the required mains voltage.
• the power generator may include a measuring device for measuring the power generated.
• an adjusting device for adjusting the power generated can be provided.
• Fig. 1 is a schematic representation of a plasma system
• Fig. 2 is a flow chart to illustrate the invention
• 3a shows a diagram for illustrating the time profile of the mains voltage
• 3b is a diagram showing the time course of the output power of a power generator
• FIG. 1 shows a plasma system 1 with a power generator 2, which is connected to a mains voltage 3.
• the mains voltage 3 is referred to in the following text as the supply voltage.
• the power generator 2 generates a power signal, which is output at the output 4.
• the power output at the output 4 can be given via a cable 5 and an optional matching circuit 6 to a plasma chamber 7, in particular an electrode 8 in the plasma chamber 7.
• a plasma 9 can be generated in the plasma chamber 7.
• the available mains voltage 3 or a quantity associated therewith can be detected.
• the detected variable can be supplied to a monitoring device 11 which monitors whether the measured mains voltage or the quantity derived therefrom exceeds or falls below a predetermined reference value. If it is detected by the monitoring device 11 that a predetermined event has occurred, a predefined operating mode 2 can be triggered by an operating mode selector 12.
• Matching circuit 6 are given and matching elements 13, 14 can be set to a certain value or can be fixed in their existing value or in their current position. By means of a predefined operating mode, it can be achieved, for example, that the plasma 9 in the plasma chamber 7 does not go out, although only a very low mains voltage 3 is available or it has even completely failed.
• the power at the output 4 can be measured. It may be one generated in the power generator 2 and / or one connected to the load, e.g. the plasma 9 reflected power act. Depending on the measured power, the power generated in the power generator 2 can be regulated and / or the
• Adjustment circuit 6 are set.
• step 100 a power signal is generated by the power generator 2 in a nominal operating mode, which is output at the output 4 and a load, in particular a plasma 9, in the plasma chamber 7 is supplied.
• step 101 it is monitored whether the measured mains voltage or the quantity derived therefrom overcomes a predetermined first reference value. If this is not the case, the step 100 returned, so continues to generate the power in nominal operating mode to supply the load.
• step 102 is entered in which the mains voltage or the quantity derived therefrom is monitored for determining the occurrence of a first event with regard to the duration of overcoming, in particular undershooting, the first reference value.
• step 103 it is checked whether the mains voltage or the quantity derived therefrom overcomes the first reference value for a predetermined first period of time. If this is not the case, the system returns to step 100, that is, the power is still generated in nominal operating mode to supply the load.
• step 104 is entered in which a predefined operating mode of the power generator is triggered. For example, the output by the power generator 2 power can now be reduced.
• Steps 102 and 103 may also be skipped, that is, it may also be jumped from step 101 directly to step 104 if the measured mains voltage or the quantity derived therefrom overcomes a predetermined first reference value.
• step 105 it is checked whether the mains voltage or an associated quantity overcomes the first or a second reference value. If this is not the case, the predefined operating mode is maintained, that is to say transferred to step 102. Becomes a Overcoming the first or second reference value detected, so another predefined operating mode is triggered. In the exemplary embodiment shown, this further predefined operating mode coincides with the nominal operating mode of step 100. However, it is also conceivable that another predefined operating mode is executed. Instead of directly triggering the further predefined operating mode, it can also be provided that the further predefined operating mode is triggered when the mains voltage or the quantity derived therefrom overcomes , in particular exceeds, the first or second reference value for a predefined further period of time.
• FIG. 3a shows a diagram in which the mains voltage is plotted over time.
• the course of the mains voltage carries the handlesszei ⁇ chen 30.
• the mains voltage 30 falls below a first reference value UNI-
• the mains voltage 30 was below the reference value UNI for a first time duration tdi. This is equivalent to the occurrence of a first predetermined event. Since the occurrence of the first predetermined event has been detected, a predefi ⁇ ned operating mode is triggered, which means in this case that the power output at the output 4 of the power generator 2 31 (see Figure 3b) is reduced and is in particular output pulsed.
• the power 31 output at the output 4 of the power generator 2 is equal to the rated power P RF i until the instant t 2 .
• the power output 31 is pulsed with a ge ⁇ geninate the rated power P RF i reduced power amplitude P RF 2-
• the period of the pulsed output power is indicated by T. It can be seen that the duration of the pulse t P is significantly shorter than the duration t PP the pulse break. This means that the duty cycle is clearly ⁇ 20%, in particular ⁇ 10%.
• the mains voltage 30 exceeds a second reference value U N 2. The operating mode is not changed yet.
• the further time duration td2 can be specified longer than the first time duration tdi. In particular, it can be preset by a factor of 10 longer than the first time duration tdi.
• the first time period tdi can be specified with a duration of one microsecond to several thousand microseconds.
• the further duration td2 can be specified with a duration of one millisecond up to a few thousand milliseconds.
• the power generator 2 can be accommodated in a housing, in particular in a metallic housing, and have electrical power supply connections. In both devices, one or more modules may be arranged. Assemblies can be mounted on metallic bodies and / or printed circuit boards. Furthermore, ventilation connections for air circulation and cooling can be provided. Furthermore, the power generator 2 may have various connections such as coolant connections or connections for electrical connection to external components. All connections can be equipped with electronic filters to increase the immunity of the power generator and to limit the noise emission of the power generator.
• Operating mode selectors 12 may each be part of a control unit individually or in any combination.
• the control unit can be designed as an analog or in particular as a digital control unit. For this, the measuring signals are filtered, sampled and digitized.
• a digital control unit may be used in a microprocessor, e.g. B. in a digital signal processor (DSP) or in a programmable logic device (PLD), in particular in an FPGA be realized. This allows the control unit to work very fast.
• DSP digital signal processor
• PLD programmable logic device

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• 2014
  • 2014-06-27 DE DE102014212439.5A patent/DE102014212439A1/de active Pending
• 2015
  • 2015-06-25 JP JP2017519959A patent/JP6685294B2/ja active Active
  • 2015-06-25 WO PCT/EP2015/064437 patent/WO2015197783A1/de not_active Ceased
• 2016
  • 2016-12-21 US US15/386,763 patent/US10212797B2/en active Active

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