JP2017525945A - サンプル及び／又はサンプル表面に形成された少なくとも１つのフィルムの特性及び／又はパラメータを測定するためのアレンジメント - Google Patents

サンプル及び／又はサンプル表面に形成された少なくとも１つのフィルムの特性及び／又はパラメータを測定するためのアレンジメント Download PDF

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JP2017525945A
JP2017525945A JP2016575491A JP2016575491A JP2017525945A JP 2017525945 A JP2017525945 A JP 2017525945A JP 2016575491 A JP2016575491 A JP 2016575491A JP 2016575491 A JP2016575491 A JP 2016575491A JP 2017525945 A JP2017525945 A JP 2017525945A
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sample
electromagnetic radiation
radiation
detector
film formed
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JP2017525945A5 (enExample
Inventor
ヴルフ グレーレルト
ヴルフ グレーレルト
フィリップ ヴォールマン
フィリップ ヴォールマン
フロリアン グルーバー
フロリアン グルーバー
Original Assignee
フラウンホッファー−ゲゼルシャフト・ツァー・フォデラング・デル・アンゲワンテン・フォーシュング・エー．ファウ．
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Publication of JP2017525945A publication Critical patent/JP2017525945A/ja
Publication of JP2017525945A5 publication Critical patent/JP2017525945A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8438—Mutilayers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
JP2016575491A 2014-06-23 2015-06-22 サンプル及び／又はサンプル表面に形成された少なくとも１つのフィルムの特性及び／又はパラメータを測定するためのアレンジメント Pending JP2017525945A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014009372.7A DE102014009372B4 (de) 2014-06-23 2014-06-23 Verfahren zur Bestimmung von Eigenschaften und/oder Parametern einer Probe und/oder mindestens einer auf einer Oberfläche einer Probe ausgebildeten Schicht
DE102014009372.7 2014-06-23
PCT/EP2015/063984 WO2015197555A1 (de) 2014-06-23 2015-06-22 Anordnung zur bestimmung von eigenschaften und/oder parametern einer probe und/oder mindestens einer auf oder an einer oberfläche einer probe ausgebildeten schicht

Publications (2)

Publication Number Publication Date
JP2017525945A true JP2017525945A (ja) 2017-09-07
JP2017525945A5 JP2017525945A5 (enExample) 2018-05-24

Family

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Application Number Title Priority Date Filing Date
JP2016575491A Pending JP2017525945A (ja) 2014-06-23 2015-06-22 サンプル及び／又はサンプル表面に形成された少なくとも１つのフィルムの特性及び／又はパラメータを測定するためのアレンジメント

Country Status (6)

Country Link
US (1) US10228329B2 (enExample)
EP (1) EP3158323B1 (enExample)
JP (1) JP2017525945A (enExample)
DE (1) DE102014009372B4 (enExample)
ES (1) ES2919872T3 (enExample)
WO (1) WO2015197555A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015217091B4 (de) 2015-09-07 2017-05-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V Anordnung zur Bestimmung der erreichbaren Haftfestigkeit vor Ausbildung einer stoffschlüssigen Verbindung an einer Oberfläche eines Fügepartners
DE102015223853B4 (de) * 2015-12-01 2025-07-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur Bestimmung der Tiefe von in Oberflächen eines Substrates, auf dem mindestens eine Schicht aus einem vom Substratmaterial abweichenden Material ausgebildet ist, ausgebildeten Vertiefungen
DE102017217231A1 (de) * 2017-09-27 2019-03-28 Robert Bosch Gmbh Verfahren zur Bestimmung von oxydischen und/oder organischen Belegungen einer Probe mit einer Metalloberfläche
RU2768539C1 (ru) * 2018-03-30 2022-03-24 ДжФЕ СТИЛ КОРПОРЕЙШН Устройство для измерения относительного содержания мелких частиц, система для измерения относительного содержания мелких частиц и способ выполнения операции для доменной печи
CN111273311A (zh) * 2020-01-03 2020-06-12 电子科技大学 一种激光三维焦平面阵列成像系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118829A (ja) * 1983-11-30 1985-06-26 Matsushita Electric Works Ltd 照明装置付テレビカメラ
JP2008525158A (ja) * 2004-12-28 2008-07-17 ハイパームド・インコーポレーテッド 全身生理機能およびショックの決定、評価および監視におけるハイパースペクトル／マルチスペクトルイメージング
JP2013044729A (ja) * 2011-08-26 2013-03-04 Sumitomo Electric Ind Ltd 塗布状態測定方法
WO2013157641A1 (ja) * 2012-04-20 2013-10-24 株式会社 オフィス・カラーサイエンス 変角分光イメージング測定方法およびその装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6717668B2 (en) * 2000-03-07 2004-04-06 Chemimage Corporation Simultaneous imaging and spectroscopy apparatus
US7099005B1 (en) * 2000-09-27 2006-08-29 Kla-Tencor Technologies Corporation System for scatterometric measurements and applications
IL174590A (en) * 2005-03-29 2015-03-31 Yoel Arieli A method and an imaging system for the analysis of optical properties of an object illuminated by a light source
US20070019194A1 (en) * 2005-07-21 2007-01-25 Liangyao Chen Full spectral range spectrometer
DE102006034776B3 (de) 2006-07-27 2008-03-06 Infineon Technologies Ag Verfahren und Messvorrichtung zur ellipsometrischen Vermessung von Strukturelementen sowie Verwendung des Verfahrens
US7763876B2 (en) * 2007-04-06 2010-07-27 Xerox Corporation Gloss and differential gloss measuring system
DE102007018048A1 (de) * 2007-04-13 2008-10-16 Michael Schwertner Verfahren und Anordnung zur optischen Abbildung mit Tiefendiskriminierung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118829A (ja) * 1983-11-30 1985-06-26 Matsushita Electric Works Ltd 照明装置付テレビカメラ
JP2008525158A (ja) * 2004-12-28 2008-07-17 ハイパームド・インコーポレーテッド 全身生理機能およびショックの決定、評価および監視におけるハイパースペクトル／マルチスペクトルイメージング
JP2013044729A (ja) * 2011-08-26 2013-03-04 Sumitomo Electric Ind Ltd 塗布状態測定方法
WO2013157641A1 (ja) * 2012-04-20 2013-10-24 株式会社 オフィス・カラーサイエンス 変角分光イメージング測定方法およびその装置

Also Published As

Publication number Publication date
EP3158323A1 (de) 2017-04-26
DE102014009372B4 (de) 2025-04-30
US20170212056A1 (en) 2017-07-27
DE102014009372A1 (de) 2015-12-24
US10228329B2 (en) 2019-03-12
WO2015197555A1 (de) 2015-12-30
ES2919872T3 (es) 2022-07-28
EP3158323B1 (de) 2022-05-11

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