ES2919872T3 - Disposición para la determinación de propiedades y/o parámetros de una muestra y/o al menos una capa configurada sobre o en una superficie de una muestra - Google Patents

Disposición para la determinación de propiedades y/o parámetros de una muestra y/o al menos una capa configurada sobre o en una superficie de una muestra Download PDF

Info

Publication number
ES2919872T3
ES2919872T3 ES15730192T ES15730192T ES2919872T3 ES 2919872 T3 ES2919872 T3 ES 2919872T3 ES 15730192 T ES15730192 T ES 15730192T ES 15730192 T ES15730192 T ES 15730192T ES 2919872 T3 ES2919872 T3 ES 2919872T3
Authority
ES
Spain
Prior art keywords
sample
electromagnetic radiation
detectors
layer
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES15730192T
Other languages
English (en)
Spanish (es)
Inventor
Wulf Grählert
Philipp Wollmann
Florian Gruber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Application granted granted Critical
Publication of ES2919872T3 publication Critical patent/ES2919872T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8438—Mutilayers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
ES15730192T 2014-06-23 2015-06-22 Disposición para la determinación de propiedades y/o parámetros de una muestra y/o al menos una capa configurada sobre o en una superficie de una muestra Active ES2919872T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014009372.7A DE102014009372B4 (de) 2014-06-23 2014-06-23 Verfahren zur Bestimmung von Eigenschaften und/oder Parametern einer Probe und/oder mindestens einer auf einer Oberfläche einer Probe ausgebildeten Schicht
PCT/EP2015/063984 WO2015197555A1 (de) 2014-06-23 2015-06-22 Anordnung zur bestimmung von eigenschaften und/oder parametern einer probe und/oder mindestens einer auf oder an einer oberfläche einer probe ausgebildeten schicht

Publications (1)

Publication Number Publication Date
ES2919872T3 true ES2919872T3 (es) 2022-07-28

Family

ID=53434366

Family Applications (1)

Application Number Title Priority Date Filing Date
ES15730192T Active ES2919872T3 (es) 2014-06-23 2015-06-22 Disposición para la determinación de propiedades y/o parámetros de una muestra y/o al menos una capa configurada sobre o en una superficie de una muestra

Country Status (6)

Country Link
US (1) US10228329B2 (enExample)
EP (1) EP3158323B1 (enExample)
JP (1) JP2017525945A (enExample)
DE (1) DE102014009372B4 (enExample)
ES (1) ES2919872T3 (enExample)
WO (1) WO2015197555A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015217091B4 (de) 2015-09-07 2017-05-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V Anordnung zur Bestimmung der erreichbaren Haftfestigkeit vor Ausbildung einer stoffschlüssigen Verbindung an einer Oberfläche eines Fügepartners
DE102015223853B4 (de) * 2015-12-01 2025-07-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur Bestimmung der Tiefe von in Oberflächen eines Substrates, auf dem mindestens eine Schicht aus einem vom Substratmaterial abweichenden Material ausgebildet ist, ausgebildeten Vertiefungen
DE102017217231A1 (de) * 2017-09-27 2019-03-28 Robert Bosch Gmbh Verfahren zur Bestimmung von oxydischen und/oder organischen Belegungen einer Probe mit einer Metalloberfläche
RU2768539C1 (ru) * 2018-03-30 2022-03-24 ДжФЕ СТИЛ КОРПОРЕЙШН Устройство для измерения относительного содержания мелких частиц, система для измерения относительного содержания мелких частиц и способ выполнения операции для доменной печи
CN111273311A (zh) * 2020-01-03 2020-06-12 电子科技大学 一种激光三维焦平面阵列成像系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118829A (ja) * 1983-11-30 1985-06-26 Matsushita Electric Works Ltd 照明装置付テレビカメラ
US6717668B2 (en) * 2000-03-07 2004-04-06 Chemimage Corporation Simultaneous imaging and spectroscopy apparatus
US7099005B1 (en) * 2000-09-27 2006-08-29 Kla-Tencor Technologies Corporation System for scatterometric measurements and applications
AU2005327078A1 (en) * 2004-12-28 2006-08-17 Hypermed Imaging, Inc. Hyperspectral/multispectral imaging in determination, assessment and monitoring of systemic physiology and shock
IL174590A (en) * 2005-03-29 2015-03-31 Yoel Arieli A method and an imaging system for the analysis of optical properties of an object illuminated by a light source
US20070019194A1 (en) * 2005-07-21 2007-01-25 Liangyao Chen Full spectral range spectrometer
DE102006034776B3 (de) 2006-07-27 2008-03-06 Infineon Technologies Ag Verfahren und Messvorrichtung zur ellipsometrischen Vermessung von Strukturelementen sowie Verwendung des Verfahrens
US7763876B2 (en) * 2007-04-06 2010-07-27 Xerox Corporation Gloss and differential gloss measuring system
DE102007018048A1 (de) * 2007-04-13 2008-10-16 Michael Schwertner Verfahren und Anordnung zur optischen Abbildung mit Tiefendiskriminierung
JP2013044729A (ja) * 2011-08-26 2013-03-04 Sumitomo Electric Ind Ltd 塗布状態測定方法
JP5475057B2 (ja) 2012-04-20 2014-04-16 株式会社 オフィス・カラーサイエンス 変角分光イメージング測定方法およびその装置

Also Published As

Publication number Publication date
EP3158323A1 (de) 2017-04-26
DE102014009372B4 (de) 2025-04-30
US20170212056A1 (en) 2017-07-27
DE102014009372A1 (de) 2015-12-24
US10228329B2 (en) 2019-03-12
WO2015197555A1 (de) 2015-12-30
JP2017525945A (ja) 2017-09-07
EP3158323B1 (de) 2022-05-11

Similar Documents

Publication Publication Date Title
ES2919872T3 (es) Disposición para la determinación de propiedades y/o parámetros de una muestra y/o al menos una capa configurada sobre o en una superficie de una muestra
Palmer The measurement of transmission, absorption, emission, and reflection
JP5537778B2 (ja) 光表面特性の測角検査装置
KR100571863B1 (ko) 대상물의 막 두께를 측정하는 장치, 대상물의분광반사율을 측정하는 장치 및 방법과, 대상물상의이물을 검사하는 장치 및 방법
US8437002B2 (en) Imaging optical inspection device with a pinhole camera
US20120182545A1 (en) Method and device for measuring optical characteristic variables of transparent, scattering measurement objects
CN103217403B (zh) 用于测量透射率的装置
JP2016001198A (ja) 光学的表面特性の検査装置および検査方法
JP2006030204A (ja) 光表面特性の測角検査装置
CA2675028A1 (en) Method and apparatus for the examination of an object
JP2012255781A (ja) 反射光の基準測定装置及びその装置の較正方法
CN106574866B (zh) 用于反射测量的测量装置
CN109444082A (zh) 漫反射光谱测量装置及测量方法
CN101165471A (zh) 多角度多通道检测装置
JP2017525945A5 (enExample)
US10605712B2 (en) Assembly for determining the permeation rate of a sample
Georgiev et al. BRDF study of gray-scale Spectralon
Juttula et al. Instrument for measurement of optical parameters of turbid media by using diffuse reflectance of laser with oblique incidence angle
ES2992384T3 (es) Disposición para determinar la fuerza adhesiva alcanzable, antes de formar una conexión unida cohesiva en una superficie de un elemento de unión
US10466274B2 (en) Arrangement for spatially resolved determination of the specific electrical resistance and/or the specific electrical conductivity of samples
Rahman et al. Effective testing for wafer reject minimization by terahertz analysis and sub-surface imaging
Tao et al. Optimization of BRDF measurement method using Spectralon white reflectance standard
Karamata et al. A review and analysis of parallel goniophotometry
Georgiev et al. SWIR calibration of spectralon reflectance factor
Li et al. Performance Evaluation and Quantitative Study of The Hyperspectral Lidar Prototype for Offshore Oil Pollution Monitoring