JP2017523606A5 - - Google Patents

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Publication number
JP2017523606A5
JP2017523606A5 JP2016575812A JP2016575812A JP2017523606A5 JP 2017523606 A5 JP2017523606 A5 JP 2017523606A5 JP 2016575812 A JP2016575812 A JP 2016575812A JP 2016575812 A JP2016575812 A JP 2016575812A JP 2017523606 A5 JP2017523606 A5 JP 2017523606A5
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JP
Japan
Prior art keywords
reservoir
volume
chemical substance
delivery device
substance delivery
Prior art date
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Application number
JP2016575812A
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English (en)
Japanese (ja)
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JP2017523606A (ja
JP6560270B2 (ja
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Publication date
Priority claimed from US14/476,215 external-priority patent/US9857027B2/en
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Publication of JP2017523606A publication Critical patent/JP2017523606A/ja
Publication of JP2017523606A5 publication Critical patent/JP2017523606A5/ja
Application granted granted Critical
Publication of JP6560270B2 publication Critical patent/JP6560270B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016575812A 2014-07-03 2015-06-29 流体化学物質送出を自動調整するための装置および方法 Active JP6560270B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462020825P 2014-07-03 2014-07-03
US62/020,825 2014-07-03
US14/476,215 2014-09-03
US14/476,215 US9857027B2 (en) 2014-07-03 2014-09-03 Apparatus and method for self-regulating fluid chemical delivery
PCT/US2015/038296 WO2016003891A1 (en) 2014-07-03 2015-06-29 Apparatus and method for self-regulating fluid chemical delivery

Publications (3)

Publication Number Publication Date
JP2017523606A JP2017523606A (ja) 2017-08-17
JP2017523606A5 true JP2017523606A5 (enExample) 2018-08-09
JP6560270B2 JP6560270B2 (ja) 2019-08-14

Family

ID=55016964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016575812A Active JP6560270B2 (ja) 2014-07-03 2015-06-29 流体化学物質送出を自動調整するための装置および方法

Country Status (6)

Country Link
US (1) US9857027B2 (enExample)
JP (1) JP6560270B2 (enExample)
KR (1) KR102363815B1 (enExample)
CN (1) CN106470756B (enExample)
TW (1) TWI692544B (enExample)
WO (1) WO2016003891A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11393703B2 (en) * 2018-06-18 2022-07-19 Applied Materials, Inc. Apparatus and method for controlling a flow process material to a deposition chamber
US11808746B2 (en) * 2021-07-01 2023-11-07 Applied Materials, Inc. Concentration sensor for precursor delivery system

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2758744B1 (fr) * 1997-01-30 1999-02-19 Commissariat Energie Atomique Systeme d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant
EP1210139B1 (de) * 1999-08-05 2006-10-11 MAP Medizin-Technologie GmbH Vorrichtung zur zufuhr eines atemgases und befeuchtungsvorrichtung
US6244576B1 (en) * 1999-11-09 2001-06-12 Kuo Lung Tsai Mist Humidifier
DE20010553U1 (de) * 2000-06-19 2000-11-23 Hoffrichter, Helmut, 19061 Schwerin Luftbefeuchter für ein Beatmungsgerät
US6624390B1 (en) * 2001-07-20 2003-09-23 Cape Simulations, Inc. Substantially-uniform-temperature annealing
US7186385B2 (en) 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
US7464917B2 (en) 2005-10-07 2008-12-16 Appiled Materials, Inc. Ampoule splash guard apparatus
US7562672B2 (en) 2006-03-30 2009-07-21 Applied Materials, Inc. Chemical delivery apparatus for CVD or ALD
US8873941B2 (en) * 2007-06-05 2014-10-28 Resmed Limited Electrical heater with particular application to humidification and fluid warming
US8677993B2 (en) * 2007-07-18 2014-03-25 Vapotherm, Inc. Humidifier for breathing gas heating and humidification system
CN101960564B (zh) * 2008-03-17 2012-11-21 应用材料公司 用于安瓿的加热阀歧管
JP5143892B2 (ja) * 2008-04-11 2013-02-13 国立大学法人東北大学 均熱装置および有機膜成膜装置
DE102009011137A1 (de) * 2009-03-03 2010-09-09 Seleon Gmbh Verdunstungskammer, Zwischenkammer sowie Verfahren
DE102009019146B4 (de) * 2009-04-29 2014-07-24 THEVA DüNNSCHICHTTECHNIK GMBH Verfahren und Vorrichtung zur Hochratenbeschichtung durch Hochdruckverdampfen
KR20110004081A (ko) 2009-07-07 2011-01-13 삼성모바일디스플레이주식회사 증착 장치용 캐니스터, 이를 이용한 증착 장치 및 증착 방법
KR101084275B1 (ko) 2009-09-22 2011-11-16 삼성모바일디스플레이주식회사 소스 가스 공급 유닛, 이를 구비하는 증착 장치 및 방법
US10213573B2 (en) * 2011-12-22 2019-02-26 Resmed Limited Humidifiers for respiratory apparatus
WO2014051070A1 (ja) * 2012-09-27 2014-04-03 アイ’エムセップ株式会社 液体輸送装置
US9155858B2 (en) * 2013-08-20 2015-10-13 Apex Medical Corp. Liquid container for gas humidification and liquid storage device

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