TWI692544B - 用於自行調節流體化學品輸送的設備及方法 - Google Patents

用於自行調節流體化學品輸送的設備及方法 Download PDF

Info

Publication number
TWI692544B
TWI692544B TW104119580A TW104119580A TWI692544B TW I692544 B TWI692544 B TW I692544B TW 104119580 A TW104119580 A TW 104119580A TW 104119580 A TW104119580 A TW 104119580A TW I692544 B TWI692544 B TW I692544B
Authority
TW
Taiwan
Prior art keywords
storage tank
volume
heater
carrier gas
tube
Prior art date
Application number
TW104119580A
Other languages
English (en)
Chinese (zh)
Other versions
TW201608051A (zh
Inventor
薩理納斯馬丁傑夫
董友群
湯普森大衛
張鎂
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW201608051A publication Critical patent/TW201608051A/zh
Application granted granted Critical
Publication of TWI692544B publication Critical patent/TWI692544B/zh

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G05D9/02—Level control, e.g. controlling quantity of material stored in vessel without auxiliary power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C6/00—Methods and apparatus for filling vessels not under pressure with liquefied or solidified gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/021—Special adaptations of indicating, measuring, or monitoring equipment having the height as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/02—Air-humidification, e.g. cooling by humidification by evaporation of water in the air
    • F24F6/025—Air-humidification, e.g. cooling by humidification by evaporation of water in the air using electrical heating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G05D9/12—Level control, e.g. controlling quantity of material stored in vessel characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0631—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7287—Liquid level responsive or maintaining systems
    • Y10T137/7306—Electrical characteristic sensing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Combustion & Propulsion (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
TW104119580A 2014-07-03 2015-06-17 用於自行調節流體化學品輸送的設備及方法 TWI692544B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201462020825P 2014-07-03 2014-07-03
US62/020,825 2014-07-03
US14/476,215 2014-09-03
US14/476,215 US9857027B2 (en) 2014-07-03 2014-09-03 Apparatus and method for self-regulating fluid chemical delivery

Publications (2)

Publication Number Publication Date
TW201608051A TW201608051A (zh) 2016-03-01
TWI692544B true TWI692544B (zh) 2020-05-01

Family

ID=55016964

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104119580A TWI692544B (zh) 2014-07-03 2015-06-17 用於自行調節流體化學品輸送的設備及方法

Country Status (6)

Country Link
US (1) US9857027B2 (enExample)
JP (1) JP6560270B2 (enExample)
KR (1) KR102363815B1 (enExample)
CN (1) CN106470756B (enExample)
TW (1) TWI692544B (enExample)
WO (1) WO2016003891A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11393703B2 (en) * 2018-06-18 2022-07-19 Applied Materials, Inc. Apparatus and method for controlling a flow process material to a deposition chamber
US11808746B2 (en) * 2021-07-01 2023-11-07 Applied Materials, Inc. Concentration sensor for precursor delivery system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1678767A (zh) * 2002-07-17 2005-10-05 应用材料股份有限公司 向－制程室提供气体的方法及设备
US20120012186A1 (en) * 2009-03-03 2012-01-19 Seleon Gmbh Evaporation chamber, intermediate chamber, and method
CN102421930A (zh) * 2009-04-29 2012-04-18 泽瓦薄膜技术股份有限公司 用于通过高压蒸发进行高速率涂覆的方法和设备
WO2014051070A1 (ja) * 2012-09-27 2014-04-03 アイ’エムセップ株式会社 液体輸送装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2758744B1 (fr) * 1997-01-30 1999-02-19 Commissariat Energie Atomique Systeme d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant
WO2001010489A2 (de) * 1999-08-05 2001-02-15 MAP Medizintechnik für Arzt und Patient GmbH & Co. KG Vorrichtung zur zufuhr eines atemgases, befeuchtungsvorrichtung, atemgasschlauch und anschlussvorrichtung hierfür
US6244576B1 (en) * 1999-11-09 2001-06-12 Kuo Lung Tsai Mist Humidifier
DE20010553U1 (de) * 2000-06-19 2000-11-23 Hoffrichter, Helmut, 19061 Schwerin Luftbefeuchter für ein Beatmungsgerät
US6624390B1 (en) * 2001-07-20 2003-09-23 Cape Simulations, Inc. Substantially-uniform-temperature annealing
US7464917B2 (en) 2005-10-07 2008-12-16 Appiled Materials, Inc. Ampoule splash guard apparatus
US7562672B2 (en) 2006-03-30 2009-07-21 Applied Materials, Inc. Chemical delivery apparatus for CVD or ALD
NZ704650A (en) * 2007-06-05 2016-08-26 Resmed Ltd Electrical heater with particular application to humidification and fluid warming
US8356593B2 (en) * 2007-07-18 2013-01-22 Vapotherm, Inc. Delivery tube for breathing gas heating and humidification system
US8137468B2 (en) * 2008-03-17 2012-03-20 Applied Materials, Inc. Heated valve manifold for ampoule
CN102016107B (zh) * 2008-04-11 2012-11-07 国立大学法人东北大学 均热装置和有机膜成膜装置
KR20110004081A (ko) 2009-07-07 2011-01-13 삼성모바일디스플레이주식회사 증착 장치용 캐니스터, 이를 이용한 증착 장치 및 증착 방법
KR101084275B1 (ko) 2009-09-22 2011-11-16 삼성모바일디스플레이주식회사 소스 가스 공급 유닛, 이를 구비하는 증착 장치 및 방법
US10213573B2 (en) * 2011-12-22 2019-02-26 Resmed Limited Humidifiers for respiratory apparatus
US9155858B2 (en) * 2013-08-20 2015-10-13 Apex Medical Corp. Liquid container for gas humidification and liquid storage device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1678767A (zh) * 2002-07-17 2005-10-05 应用材料股份有限公司 向－制程室提供气体的方法及设备
US20120012186A1 (en) * 2009-03-03 2012-01-19 Seleon Gmbh Evaporation chamber, intermediate chamber, and method
CN102421930A (zh) * 2009-04-29 2012-04-18 泽瓦薄膜技术股份有限公司 用于通过高压蒸发进行高速率涂覆的方法和设备
WO2014051070A1 (ja) * 2012-09-27 2014-04-03 アイ’エムセップ株式会社 液体輸送装置

Also Published As

Publication number Publication date
WO2016003891A1 (en) 2016-01-07
TW201608051A (zh) 2016-03-01
US9857027B2 (en) 2018-01-02
US20160004259A1 (en) 2016-01-07
CN106470756A (zh) 2017-03-01
JP6560270B2 (ja) 2019-08-14
JP2017523606A (ja) 2017-08-17
CN106470756B (zh) 2019-11-05
KR102363815B1 (ko) 2022-02-15
KR20170026600A (ko) 2017-03-08

Similar Documents

Publication Publication Date Title
US7156380B2 (en) Safe liquid source containers
US7011299B2 (en) Liquid vapor delivery system and method of maintaining a constant level of fluid therein
EP3473747B1 (en) Chemical precursor delivery method in a deposition process
JP4393677B2 (ja) 液体材料気化方法および装置並びに制御バルブ
US20200016558A1 (en) Vapor delivery container with flow distributor
KR20190034104A (ko) 기상 반응물을 반응 챔버로 디스펜싱하는 장치 및 이와 관련된 방법
JP2013115208A (ja) 気化原料供給装置、これを備える基板処理装置、及び気化原料供給方法
CN1333106C (zh) 液体材料汽化及供给装置
US9914997B2 (en) Method for supplying a process with an enriched carrier gas
TWI667365B (zh) 用於前驅物之大量蒸發的系統及方法
CN106470756B (zh) 用于自行调节流体化学品输送的设备及方法
TWI675120B (zh) 用於使沉積製程的化學前驅物起泡之不產生氣溶膠的器皿及方法
US9914632B2 (en) Methods and apparatus for liquid chemical delivery
CN110337326A (zh) 气化装置和气化系统
JP2017523606A5 (enExample)
CN117721442A (zh) 前驱体源加热补液装置、半导体工艺设备和补液控制方法
JP2020076116A (ja) 原料ガス供給装置
TW202431485A (zh) 用於半導體製造前驅物的安瓿
KR20060104231A (ko) 반도체 제조장비용 캐니스터
HK1192935B (en) Liquid mass measurement and fluid transmitting apparatus