CN106470756B - 用于自行调节流体化学品输送的设备及方法 - Google Patents

用于自行调节流体化学品输送的设备及方法 Download PDF

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Publication number
CN106470756B
CN106470756B CN201580036357.8A CN201580036357A CN106470756B CN 106470756 B CN106470756 B CN 106470756B CN 201580036357 A CN201580036357 A CN 201580036357A CN 106470756 B CN106470756 B CN 106470756B
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China
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sump
volume
fluid
chemical delivery
carrier gas
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Chinese (zh)
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CN106470756A (zh
Inventor
马丁·杰夫·萨里纳斯
董友群
戴维·汤普森
张梅
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Applied Materials Inc
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Applied Materials Inc
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C6/00—Methods and apparatus for filling vessels not under pressure with liquefied or solidified gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/021—Special adaptations of indicating, measuring, or monitoring equipment having the height as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/02—Air-humidification, e.g. cooling by humidification by evaporation of water in the air
    • F24F6/025—Air-humidification, e.g. cooling by humidification by evaporation of water in the air using electrical heating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G05D9/02—Level control, e.g. controlling quantity of material stored in vessel without auxiliary power
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G05D9/12—Level control, e.g. controlling quantity of material stored in vessel characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0631—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7287—Liquid level responsive or maintaining systems
    • Y10T137/7306—Electrical characteristic sensing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Combustion & Propulsion (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
CN201580036357.8A 2014-07-03 2015-06-29 用于自行调节流体化学品输送的设备及方法 Active CN106470756B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462020825P 2014-07-03 2014-07-03
US62/020,825 2014-07-03
US14/476,215 2014-09-03
US14/476,215 US9857027B2 (en) 2014-07-03 2014-09-03 Apparatus and method for self-regulating fluid chemical delivery
PCT/US2015/038296 WO2016003891A1 (en) 2014-07-03 2015-06-29 Apparatus and method for self-regulating fluid chemical delivery

Publications (2)

Publication Number Publication Date
CN106470756A CN106470756A (zh) 2017-03-01
CN106470756B true CN106470756B (zh) 2019-11-05

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Country Status (6)

Country Link
US (1) US9857027B2 (enExample)
JP (1) JP6560270B2 (enExample)
KR (1) KR102363815B1 (enExample)
CN (1) CN106470756B (enExample)
TW (1) TWI692544B (enExample)
WO (1) WO2016003891A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11393703B2 (en) 2018-06-18 2022-07-19 Applied Materials, Inc. Apparatus and method for controlling a flow process material to a deposition chamber
US11808746B2 (en) * 2021-07-01 2023-11-07 Applied Materials, Inc. Concentration sensor for precursor delivery system

Citations (3)

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WO2001097894A1 (de) * 2000-06-19 2001-12-27 Hoffrichter Gmbh Verfahren zum befeuchten von atemluft und luftbefeuchter für ein beatmungsgerät
CN1678767A (zh) * 2002-07-17 2005-10-05 应用材料股份有限公司 向－制程室提供气体的方法及设备
CN101690385A (zh) * 2007-06-05 2010-03-31 雷斯梅德有限公司 尤其用于加湿和液体加热的电热器

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FR2758744B1 (fr) * 1997-01-30 1999-02-19 Commissariat Energie Atomique Systeme d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant
EP2345449B1 (de) * 1999-08-05 2019-05-01 ResMed R&D Germany GmbH Atemgasschlauch, Anschlussvorrichtung hierfür und Anschlussstrukturbauteil
US6244576B1 (en) * 1999-11-09 2001-06-12 Kuo Lung Tsai Mist Humidifier
US6624390B1 (en) * 2001-07-20 2003-09-23 Cape Simulations, Inc. Substantially-uniform-temperature annealing
US7464917B2 (en) 2005-10-07 2008-12-16 Appiled Materials, Inc. Ampoule splash guard apparatus
US7562672B2 (en) 2006-03-30 2009-07-21 Applied Materials, Inc. Chemical delivery apparatus for CVD or ALD
US8356593B2 (en) * 2007-07-18 2013-01-22 Vapotherm, Inc. Delivery tube for breathing gas heating and humidification system
WO2009117440A1 (en) * 2008-03-17 2009-09-24 Applied Materials, Inc. Heated valve manifold for ampoule
US8691017B2 (en) * 2008-04-11 2014-04-08 National University Corporation Tohoku University Heat equalizer and organic film forming apparatus
DE102009011137A1 (de) * 2009-03-03 2010-09-09 Seleon Gmbh Verdunstungskammer, Zwischenkammer sowie Verfahren
DE102009019146B4 (de) * 2009-04-29 2014-07-24 THEVA DüNNSCHICHTTECHNIK GMBH Verfahren und Vorrichtung zur Hochratenbeschichtung durch Hochdruckverdampfen
KR20110004081A (ko) 2009-07-07 2011-01-13 삼성모바일디스플레이주식회사 증착 장치용 캐니스터, 이를 이용한 증착 장치 및 증착 방법
KR101084275B1 (ko) 2009-09-22 2011-11-16 삼성모바일디스플레이주식회사 소스 가스 공급 유닛, 이를 구비하는 증착 장치 및 방법
US10213573B2 (en) * 2011-12-22 2019-02-26 Resmed Limited Humidifiers for respiratory apparatus
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WO2001097894A1 (de) * 2000-06-19 2001-12-27 Hoffrichter Gmbh Verfahren zum befeuchten von atemluft und luftbefeuchter für ein beatmungsgerät
CN1678767A (zh) * 2002-07-17 2005-10-05 应用材料股份有限公司 向－制程室提供气体的方法及设备
CN101690385A (zh) * 2007-06-05 2010-03-31 雷斯梅德有限公司 尤其用于加湿和液体加热的电热器

Also Published As

Publication number Publication date
KR102363815B1 (ko) 2022-02-15
TWI692544B (zh) 2020-05-01
KR20170026600A (ko) 2017-03-08
TW201608051A (zh) 2016-03-01
JP2017523606A (ja) 2017-08-17
US9857027B2 (en) 2018-01-02
US20160004259A1 (en) 2016-01-07
JP6560270B2 (ja) 2019-08-14
WO2016003891A1 (en) 2016-01-07
CN106470756A (zh) 2017-03-01

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