201144658 六、發明說明： 【發明所屬之技術領域】 本揭示内容係關於傳遞總成，且尤其更關於蒸氣產品傳 遞總成，其係用於自設置於該等蒸氣產品傳遞總成之玻璃 容器内之液體抽取蒸氣產品，及相關之方法。 此申請專利主張於2010年2月2日所申請之美國專利申請 案序號第61/300,646號之一臨時專利申請案之優先權。美 國專利申請案序號第61/3 00,646號之全部係以引用之方式 併入本文中。 【先前技術】 此區段提供關於本揭示内容之背景資訊，該背景資訊不 一定是先前技術。 在半導體工業中’電子裝置通常係藉由化學氣相沈積 (CVD)製程而生產。將一液態或固態前驅物供給於一發泡 益中，載氣（諸如氮氣或氫氣）係可經由一滴管而通過該發 泡器發泡，使得該氣體用該前驅物成為飽和。該載氣/前 驅物蒸氣混合物接著係以一受控制速率通過進入一磊晶反 應器中。此等系統被用於矽半導體及化合物半導體兩者之 中重要的疋’呈瘵氣相之化學品之濃度要極其穩 定。藉由習知單一用途類型之發泡器所提供之通道化及非 均^面會導致該等前驅物之蒸發變化，造成該氣體/前 =物浪度巾之不規則變動。此等不規職動㈣於該沈積 製程。 【發明内容】 153799.doc 201144658 此區段提供本揭示内容之一般性概述，且並非本發明之 完整範圍或其所有特徵之一全面揭示。 本揭示内容之實例實施例大致上關於用於自液體擷取蒸 氣產品之總成《在一實例實施例中，一總成大致上包含一 容器’該容器係由玻璃形成且經組態以將液體保持於其 中；及一進氣口，其係至少部分設置於該容器内且經組態 以將載氣引入該容器内之液體中》該容器包含界定於該容 器之一底部中之一凹陷部分。該進氣口至少部分延伸進入 該容器之該凹陷部分中，使得載氣可藉由該進氣口而引入 定位於該容器之該凹陷部分内之液體中。 在另一實例實施例中’一蒸氣產品傳遞總成大致上包含 一玻璃容器’其係經組態以將液體保持於其中；及一閥總 成’其係經組態以耦合至該玻璃容器。該玻璃容器係透 明’使知可自該玻璃容器之外側看到該玻璃容器内側之液 體’且包含界定於該玻璃容器之一底部中之一凹陷部分。 S亥閥總成係可操作以將載氣引入該玻璃容器中，以用於自 該谷器内之液體擷取蒸氣產品。該閥總成大致上包含一殼 體、一被耦合至該殼體之注氣管及一被耦合至該注氣管之 一端部之擴散器。當該閥總成被耦合至該玻璃容器時，該 擴散器係可至少部分定位於該容器之該凹陷部分内，因此 載氣係可藉由該擴散器而引入定位於該容器之該凹陷部分 内之液體中。 本揭示内容之實例實施例亦大致上關於用於自液體擷取 蒸氣產品之方法。在一實例實施例中，一方法大致上包含 153799.doc 201144658 將液體收集於界定於-透明玻璃容器之—底部中之一凹陷 部分中；將載氣通過至少部分設置於該凹陷部分内之一注 氣管而注入至收集於該透明玻璃容器之該底部中之該凹陷 部分内之該液體中；且經由該載氣自該液體擷取蒸氣產 品° 自本文所提供之描述，可應用性之其他領域將顯而易 見。此發明内容中之描述及具體實例僅意於閣釋且不意於 限制本揭示内容之範_。 【實施方式】 本文所述之圖式僅在於圖解說明所選擇實施例而非所有 可行實施案之目的，且無意限制本揭示内容之範疇。 在整個附圖中，對應之參考數字指示對應之部件。 現將參考附圖來更為全面地描述若干實例實施例。 提供實例實施例之目的在於使此揭示内容更為透徹，且 將其料全面地傳達給熟悉此項技術[陳述若干特定細 節(例如特定組件、裝置及方法之實例之細節)目的在於提 供對本揭不内容之實施例之—透徹理解^悉此項技術者 將理解’無須採用特定細節，即實例實施例係可以許多不 同之形式體現且亦不應將此解讀為限制本發明之範疇。在 一些實例實施例中，將不再詳盡描述廣為熟知之製程、廣 為熟知之裝置結構及廣為熟知之技術。 本文所使用之術語目的僅在於描述特定實例實施例且不 在於限制。如本文所使用，單數形式「一」、「一個」及 「該」可意於包含複數形式，除非上下文另有明確指示。 153799.doc 201144658 術。。包括」、「包含」及「具有」係包含性且因此指示 在所陳述之特徵、整數、步驟、操作、元件及/或組件， 但不排除出現額外之-個或多個其他特徵、整數、步驟、 操作、元件、組件及/或其群組。本文所描述之方法步 驟、製程及操作不應被解讀為必須要求以所論述或圖解說 明之特定順序來執行，除非經特定識別為一執行順序。亦 應理解，亦可採用額外或替代性步驟。 當一元件或層被指示為係「之上」、「接合至」、「連接 至」或「耦合至」另一元件或層’其可能直接位於、接 °連接或耦合至該另一元件或層，或者可能存在中間元 件或層。相反地’當一元件被指#「直接位於.之上」、 「直接接合至」、「直接連接至」或「直接耦合至」另一元 件或層，則不存在中間元件或層。應該以一類似的方式來 解讀用於描述元件之間的關係之其他字詞（例如，「介於… 之間」對直接介於…之間」，「鄰近」對「直接鄰近」等 等）。如本文所使用，術語「及/或」包含相關聯的列舉項 目之一個或多個之任何及所有組合。 儘管本文中可使用術語第一、第二、第三等等來描述多 個元件、組件、區域、層及/或區段，此等元件、組件、 區域、層及/或區段不應由此等術語限制。此等術語可僅 用於區別一個元件、組件、區域、層或區段與另一區域、 層或區段。諸如「第一」、「第二」之術語及其他數值術語 在用於本文中時不暗示一次序或順序，除非上下文另有明 確指示。因此’在不脫離該等實例實施例之教示下，下文 153799.doc 201144658 _述之一第一元件、組件、區域、層或區段亦可稱為一第 二元件、組件、區域、層或區段。 空間相對術語，諸如「内」、「外」、「下方」、「下部」、 下」、「上方」、「上」及此類術語用於本文中可便於描述 該等圖中所圖解說明之一個元件或特徵與另一（若干）元件 或特徵之間之關係。除了該等圖中所描述之定向之外，空 間相關術語係可涵蓋使用或操作中之裝置之不同定向。例 如，若該等圖中之該裝置被顛倒，則被描述為位於其他元 件或特徵之「下」或「下方」之元件可定向為位於該等其 他元件或特徵之「上方」。因此，實例術語「下方」可涵 蓋上方及下方兩個定向《該裝置亦可為其他之定向（旋轉 9 〇度或位於其他定向）且據此來解讀本文所使用之空間相 對描述符。 現參考該等圖，圖丨至圖9圊解說明一傳遞總成1〇〇(例 如，—發泡器總成，等等）之一實例實施例，其包含本揭 不内容之一個或多個態樣。該實例傳遞總成1〇〇係經組態 (例如’設定大小、形狀、構造等等）而視需要固持液體， 且自該液體擷取蒸氣產品，以例如用於後續之蒸氣沈積製 程（例如，在半導體製造操作中，等等）。該實例傳遞總成 100可提供濃度大致上一致之蒸氣產品，從而將該等傳遞 總成中大致上少量體積之液體用於該等蒸氣沈積製程中。 如圖1及圖2中所示，該傳遞總成1〇〇大致上包含一容器 102及一經組態而耦合至該容器ι〇2之閥總成1〇4。該容器 1 〇2係經組態以將液體（及由該液體所形成之蒸氣產品）收納 153799.doc 201144658 及固持（或保持）於其中。該閥總成104係經組態以控制載氣、 進入該容器102中之流動，以自該容器102中之該液體擷取 蒸氣產品’且控制藉由載氣擷取之該等蒸氣產品離開該容 器102之流動。在本揭示内容之範疇下，可與該實例傳遞 總成100連用之任何合適之載氣，包括例如，氮氣、氫氣 等等。 提供一連接件106以將該閥總成104耦合至該容器1〇2。 該連接件106係經組態以可釋放地 '可移除地（等等）將該閥 〜成104輕合至s亥容器j 〇2且將該閥總成i 大致上支樓於 該容器102的上方。所圖解說明的連接件106包含一接合螺 母1 08其被固定地麵合（例如，壓配合、包覆模製等等）至 該閥總成104。該接合螺母1〇8包含内螺紋（圖中未顯示）， 其經組態而旋至該容器1〇2之一對應螺紋轴環ιΐ2上（見圖3 及圖句。一旦被耦合至該容器1〇2，則該閥總成1〇4係可藉 由例如將該連接件刚自該容器1〇2之該螺紋軸環Μ旋下 而自該容器102解輕。一〇形環（圖中未顯示）係可包含於該 連接件1G6内，以幫助密封該閥總成i 〇4至該容器⑺2(及該 閥總成m之該連接件⑽至該容器1〇2之該螺紋轴環叫 之連接。在其他示例性實施例中，傳遞總成可包含若干間 總成’其經組態以用例如快速釋放連接件、麼配合連接 件、摩擦配合連接件等等搞合（例如，可釋放地、可移除 地耦合等等）至容器。 另:卜參考圖3至圖5,該容器⑽大致上為圓筒形且包含 由該容器】02的該轴環⑴界定之一大致開口構造。該開口 153799.doc 201144658 構造允許將液體添加至該容器102以備使用，且允許輕易 地將該閥總成104耦合至該容器1 〇2以與該容器1 〇2流體連 通。該容器102内界定有一均勻、大致上圓筒形之内部空 間’以將該液體固持於該容器102中（例如，在該傳遞總成 100之運輸期間’在該傳遞總成1〇〇之操作期間等等）。在 其他實例實施例中，傳遞總成可包含具有除了開口構造之 外之構造的谷器’具有除了圓筒形之外的形狀之容琴，及 /或具有内部空間除了圓筒形之外的形狀之容器。 該容器102係由玻璃（例如，由任何合適之玻璃等等）形 成’因此為δ玄谷器1 〇 2提供一大致上惰性之構造，使得該 容器102適於與例如腐蝕性液體連用。例如，該玻璃容器 102提供一大致上強健之介質，其經組態以阻止起因於該 谷器102中之腐|虫性液體的該容器1〇2之腐姓。因此，此玻 璃構有助於保留s亥谷器1 〇 2之完整性（例如，防止由於腐 银性作用專等而造成結構上弱化）及自該容器i 〇2中之液體 所棟取之蒸氣產品之純度（例如，防止起因於該容器^ 〇2之 腐鞋的污染等等）。在本揭示内容之範疇内，腐蝕性液體 可包括，但不限於，反1，2-三氣乙烯（C1CH=ccl2)、氧氣化 填（P0C13)、四氯化碳（CC14)、四溴化碳（CBr4)溶液，鹵化 物、其他腐钱性液體等等。 該玻璃容器102亦提供一大致上透明之介質，使得該容 器102中之液體係可自該容器！ 〇2之外側看到。此容許使用 者看穿該容器102且可監測該容器1〇2中之液體（例如，液 體位準）而無須分開使用液體位準感測器等等。因此，所 153799.doc 201144658 圖解說明之實施例不包含一液體位準感測器來監測該玻璃 容器102中之液體（例如，液體位準等等）。然而，在其他實 例實施例中，傳遞總成可包含液體位準感測器來監測容器 中之流體。 該容器102包含界定於該容器1〇2之一底部116中一凹陷 部分114 (例如，一水坑、一切口、一儲存器、一中空部分 等等）。該凹陷部分114位於所圖解說明之容器1〇2之該底 部116之中央且係經組態以將液體收集於該凹陷部分i 14 中。更特定而言，該凹陷部分114係經組態以當該容器1 〇2 中之液體被耗盡且該容器102中之液體位準降低時將液體 導入該凹陷部分114中（例如，在該傳遞總成1 〇〇之操作期 間等等）。此外’該容器102之該底部116之一表面118係可 朝向該凹陷部分114而大致上傾斜，以進一步將液體導至 該凹陷部分114。因此，該凹陷部分114之位置及/或形狀 可有助於促進液體自該容器1〇2之該内部空間（且自該容器 102圍繞該凹陷部分114之該底部ι16)流動進入該凹陷部分 114中。下文將對此予以更詳盡描述。 在所圖解說明之實施例中，該凹陷部分丨丨4界定一大致 上圓錐形形狀。該凹陷部分114之上區域122及下區域124 大致上為圓形。該凹陷部分之該上區域122(與該底部 之表面118大致上同平面）大致上大於該凹陷部分114之該 下區域124(例如’一底板部分等等，其大致上位於該上區 域122之下方）’使得該上區域122之一直徑尺寸大於該下 區域124之一直徑尺寸。該凹陷部分n4之該下區域124係 I53799.doc •10· 201144658 可視為界定大致上位於該底部之表面ιΐ8之下方之一中間 表面。該凹陷部分114之側部分126大致上自該上區域⑺ 向内傾斜朝向該凹陷部分114之該下區域124，從而給予該 凹陷部分114之大致上圓錐形形狀。因此，所圖解說明之 凹陷部分114係可視為界定該容器102之該底部116中之一 大致上圓形之佔用區域。所圖解說明之容器⑽之該底部 6在、、’。構上大致上為中^。$而，在其他實例實施例 :，傳遞總成可包含具有由玻璃形成之大致上實心之底 部。在又其他實例實施例中，傳遞總成可包含之容器具有 若干與本文所揭示者之位置及/或形狀不同之凹陷部分， 例如位於朝向該等容器之周邊之凹陷部分及/或界定正方 形佔用區域、橢圓形佔用區域等等之凹陷部分。 繼續參考圖1至圖5，該容器102亦包含一大致上細長、 圓筒形腔室13〇，其延伸進入（且大致上設置於）該容器1〇2 的°亥内邛空間中。該腔室13 0係經組態以允許將例如溫度 計等等通過該腔室130之一上開口 132而插入該腔室13〇 中’以測量該容器102中之液體之溫度。因此，無須直接 觸及°亥液體（例如，無須將該閥總成104自該容器1 〇2移除 專專）即可獲得該容器1〇2中之液體之溫度。在所圖解說明 之實施例中，該腔室130為由大致上與該容器1〇2 一體（或 一致）形成之一玻璃腔室130。使用此構造，該腔室13〇大 致上經密封防止該容器102中之任何液體，使得該容器102 中之液體將不會流入該腔室130中。在其他實例實施例 中’傳遞總成可包含具有除了細長且圓筒形以外之腔室之 153799.doc 11 201144658 容器及/或經形成與本文所揭示之腔室不同之腔室之容 器。 現參考圖6至圖9 ’所圖解說明之傳遞總成1 〇〇之該閥總 成104大致上包含該連接件106、一大致上正方形之殼體 136(亦稱為一閥塊、一本體等等）及一注氣管138(廣義而 言，一進氣口）（例如，一浸入腿等等）。該注氣管138係與 該閥總成104流體連通，使得由該閥總成1 〇4所接收之載氣 可流經該殼體136且流動至該注氣管138，用於傳遞進入至 例如，該容器102中。 入口間結構14 0及出口間結構14 2 (例如，接頭等等）被搞 合至該殼體13 6。在所圖解說明之實施例中，該入口閥結 構140及出口閥結構142被耦合至該殼體136之上皡口（圖中 未顯示），大致上與該殼體1 3 6之側部分相對。該入口閥結 構140促進一載氣供給線（圖中未顯示）連接至該閥總成 104，以將載氣引至該閥總成1 〇4且用於將載氣經由該注氣 管13 8而供給（及/或施配）至該容器丨〇 2 (當該閥總成丨〇 4被耦 合至該容器102時）。並且，該出口閥結構142促進將一蒸 氣產品轉移線（圖中未顯示）連接至該閥總成丨〇4，以在該容 器102之外接收由該載氣擷取之蒸氣產品（經由該殼體 136(圖9)之一下蒸氣產品埠口 144(廣義而言，一接收琿 口））且用於自該閥總成104運送蒸氣產品（當該閥總成1〇4被 耦合至該容器102時）。在其他實例實施例中，傳遞總成可 包含具有兩個以上閥結構及/或位置與本文揭示之閥結構 位置不同之閥結構之閥總成。 153799.doc 12 201144658 一閥管146被至少部分設置於該殼體136内且係可相對於 該殼體136而移動（例如’可軸向滑動等等），以控制載氣及 蒸氣產品通過該殼體136之移動。一被耗合至該閥管146之 致動器148係可操作以使該閥管146在該殼體136内移動。 尤其是，該致動器148係可操作以選擇性地開啟該閥管146 以允許該載氣及蒸氣產品流經該閥總成1〇4(及該殼體 13 6) ’且選擇性地閉合該閥管146，以阻止該載氣及蒸氣 產品流經該閥總成1 〇4(及該殼體136)。該致動器148可包含 (例如）内螺紋，其收納該閥管146之對應之外螺紋，使得該 致動器148之旋轉造成該閥管146在該殼體136内轴向地移 動（例如’滑動等等）。逆時針旋轉可使該閥管146移動至其 開啟位置，且順時針旋轉可使該閥管146移動至其閉合位 置（或反之亦然）。在其他實例實施例中，傳遞總成可包含 具有一個以上閥管及/或與本文所揭示之閥管之操作不同 之閥管之閥總成。 δ亥/主氣官13 8係經由例如一螺紋連接等等而於該殼體 136(圖9)之一下載氣埠口 152處耦合至該殼體136〇此容許 載氣自該下載氣埠口 1 5 2流動進入該注氣管13 8中，以最終 排放進入該容器102中（當該閥總成1 〇4被耦合至該容器1 〇2 時）。該注氣管138包含位於該注氣管138之一下端部之一 擴散器15 4。在所圖解說明之實施例中’該擴散器1 $ 4係經 由例如一螺紋連接而耦合至該注氣管138之該下端部。在 本揭示内容之範疇内，該擴散器154可包含可操作以例如 將載氣氣泡傳遞、注入液體中，以用於自該液體擷取蒸氣 153799.doc 201144658 產品等等之任何合適之擴散器154。 δ亥注氣管1 3 8係經組態而在該閥總成104被柄合至該容器 102(見圖1及圖2)時延伸進入（通過該容器ι〇2之該軸環112) 該容器1 02之該内部空間中。此將該注氣管13 8之該下端 部’且更特定而言被耦合至該注氣管138之該擴散器154至 少部分定位、設置（等等）於該容器1〇2之該凹陷部分114中 (緊密地鄰近該凹陷部分之下區域124之中間表面）。此處， 該擴散器154可至少部分浸在定位於該容器1〇2之該凹陷部 分114中之液體中。因此，該注氣管138及擴散器ι54可將 載氣引入、注入（等等）該容器1〇2中，大致上於該容器1〇2 之該凹陷部分114中（及進入至定位於該容器1〇2之該凹陷 部分114中之液體中）。在所圓解說明之實施例中，該注氣 管138(及擴散器154)被定位於稍微偏離該容器ι〇2之該凹陷 部分114中之中心（例如，位於該容器ι〇2之該凹陷部分114 中之一徑向偏置位置）。然而，在本揭示内容之範疇内， 該注氣管138(及擴散器154)係可定位於該容器1〇2之該凹陷 部分114之大致上中央（例如，徑向上等等）（例如，可調整 該容器102中之該凹陷部分丨丨4之位置，以容納該注氣管 138(及擴散器154)，使得該注氣管138(及擴散器154))大致 上位於該凹陷部分114之中央；該注氣管138(及擴散器154) 之位置係可調整’以容納該凹陷部分丨丨4，使得該注氣管 138(及擴散器154)大致上位於該凹陷部分〖Μ之中央，等 等）。 所圖解說明之該閥總成1 〇4較佳係由對化學反應及低位 153799.doc 201144658 準金屬或其他可萃取污染物具有高抵抗力之惰性物質製 成。在一實例實施例中，一閥總成1〇4可包含由包括完全 氣化之聚合物（諸如PFA、TFE、PTFE、FEP、ETFE或此類 物）之材料模製的組件。 現將描述所圖解說明之傳遞總成i 〇 〇將蒸氣產品以氣相 傳遞至一反應器位置（例如，經由後續用於一蒸氣沈積製 程之一载氣，等等）以備後續用於該反應器位置之操作。 該傳遞總成100初始時經製備以藉由用所需液體填充該容 器102，以產生適於該後續用途之蒸氣產品。在該容器 係由液體填充（例如，用液體填充至一所禽位準，等等）之 後，該閥總成104係經由該連接件1〇6而耦合（例如，螺合 於其上等等）至該容器1〇2。如圖i及圖2中所示，此將該殼 體136的該下埠口 144及152大致上定位於該容器1〇2内且將 該注氣管138(且更特定而言，該擴散器154)至少部分定位 於界疋於該容器102之底部Π6的該凹陷部分114中。接著 可將所製備之傳遞總成1〇〇運送至該反應器位置，以備後 續使用。 在该反應器位置，可將一載氣供給線（圖中未顯示）耦合 至該閥總成104之該入口閥結構丨4〇，以將載氣供應至該容 器102(經由該注氣管138及擴散器154)。而且可將一產品轉 移線（圖中未顯示）耦合至該闊總成1〇4之該出口閥結構 142，以在該容器1 〇2外接收藉由該載氣所擷取之蒸氣產 品。接著可選擇性地操作該閥管146之致動器148，以使該 閥管14 6在其開啟位置與其閉合位置之間移動。使該閥管 153799.doc 15 201144658 146移動至其開啟位置允許載氣自一載氣供應（經由該載氣 供應線）而流動進入且穿過該殼體136，且經由該注氣管 138及擴散器154而進入該容器102之該凹陷部分114中。該 载氣穿過該容器102中之液體且促進液體轉移/過渡至氣 相，從而使載氣飽和。因此，該載氣（即，由該擴散器15 4 而形成之載氣氣泡）使該容器102中之液體蒸發。且，該載 氣及來自該液體之蒸氣產品通過該殼體136而流出該容器 1 〇2(經由該下載氣崞口 152及該出口閥結構142)以傳遞至該 反應器位置。可視需要透過該腔室130監測該容器102十之 該液體之溫度（例如，用一溫度計等等）。且可透過檢視該 透明玻璃容器102之液體位準而監測該容器1〇2中之液體之 溫度。 如上文所述，所圖解說明之容器102之該凹陷部分114係 經組態以將液體收集於該凹陷部分114中。因此，在該傳 遞總成100之操作期間，隨著該容器1〇2中之該液體消耗 (即’ Ik著該液體在注入該容器1〇2中之載氣氣泡中蒸發）， 該凹陷部分114將該容器i 〇 2中之剩餘液體導入該凹陷部分 114中。此在該凹陷部分114中提供一體積大致一致之液 體，在操作期間，該注氣管138及擴散器154可將載氣注入 該液體中（當該擴散器154被至少部分設置於該容器1〇2之 該凹陷为114中時）。該凹陷部分丨14亦容許將該注氣管 138及擴散器154大致上定位於該容器1〇2之液體中的較深 處。此提供該載氣氣泡移動穿過該容器1〇2中之液體之— 較長路徑（即，介於該載氣被注入該容器丨〇2之該凹陷部分 153799.doc -16- 201144658 m中之液體之位置與該容器1〇2中之該液體之表面之 間）。因&，注入該㈣中之該載氣之飽和效率得以改 良’且由該傳遞總成100提供至該反應器位 之濃度可大致上-致。此外，由於可使用該等容器:ΐ;; 大體積之液體，所圖解說明之傳遞總成1〇〇之持續使用時 間可延長(且該傳遞總成100中之殘餘物可得以減少卜 在另一實例實施例中’―傳遞總成大致上包含—容器及 一經組態以编合至該容器夕 谷器之一閥總成。該容器係由玻璃形 成且包含形成於該容器之一底部之一大致上圓錐形之凹陷 Γ。該容器亦包含-體地形成於該容器之-大致上上部 ^ 内邻空間中）之一細長、管狀腔 至0 在此實施例中，形成♦女费· gg >上士 ^ 烕°亥令裔之玻璃之厚度為約3毫米且201144658 VI. Description of the Invention: [Technical Field] The present disclosure relates to a transfer assembly, and more particularly to a vapor product transfer assembly for use in a glass container disposed in the vapor product transfer assembly Liquid extraction steam products, and related methods. This application claims priority to a provisional patent application Serial No. 61/300,646, filed on Feb. 2, 2010. All of the U.S. Patent Application Serial No. 61/3 00,646 is incorporated herein by reference. [Prior Art] This section provides background information about the disclosure, which is not necessarily prior art. In the semiconductor industry, electronic devices are typically produced by chemical vapor deposition (CVD) processes. A liquid or solid precursor is supplied to a foaming benefit, and a carrier gas such as nitrogen or hydrogen can be bubbled through the bubbler via a dropper so that the gas becomes saturated with the precursor. The carrier gas/precursor vapor mixture is then passed through a deionizing reactor at a controlled rate. These systems are used in both semiconductors and compound semiconductors. The concentration of chemicals in the gas phase is extremely stable. The channelization and non-uniformity provided by conventional single-purpose types of foamers can cause evaporation changes in the precursors, causing irregular variations in the gas/pre-propagation. These irregularities (4) are in the deposition process. [Description of the Invention] 153799.doc 201144658 This section provides a general summary of the disclosure and is not a comprehensive disclosure of the full scope of the invention or all of its features. Example embodiments of the present disclosure generally relate to an assembly for drawing a vapor product from a liquid. In an example embodiment, an assembly generally comprises a container formed from glass and configured to a liquid held therein; and an air inlet disposed at least partially within the container and configured to introduce a carrier gas into the liquid in the container. The container includes a depression defined in one of the bottoms of the container section. The air inlet extends at least partially into the recessed portion of the container such that a carrier gas can be introduced into the liquid positioned within the recessed portion of the container by the air inlet. In another example embodiment, a 'steam product transfer assembly generally includes a glass container configured to retain a liquid therein; and a valve assembly 'which is configured to couple to the glass container . The glass container is transparent 'so that the liquid inside the glass container is visible from the outside of the glass container' and includes a recessed portion defined in one of the bottoms of the glass container. The S-Hail valve assembly is operable to introduce a carrier gas into the glass vessel for drawing vapor products from the liquid in the vessel. The valve assembly generally includes a housing, a gas injection tube coupled to the housing, and a diffuser coupled to an end of the gas injection tube. When the valve assembly is coupled to the glass container, the diffuser can be at least partially positioned within the recessed portion of the container, such that a carrier gas can be introduced into the recessed portion of the container by the diffuser In the liquid inside. Example embodiments of the present disclosure are also generally directed to methods for extracting vapor products from liquids. In an exemplary embodiment, a method substantially comprises 153799.doc 201144658 collecting liquid in a recessed portion defined in a bottom of a transparent glass container; passing the carrier gas through at least a portion of the recessed portion a gas injection pipe is injected into the liquid collected in the recessed portion of the bottom portion of the transparent glass container; and the vapor product is extracted from the liquid via the carrier gas. From the description provided herein, other applicable properties The field will be obvious. The description and specific examples are intended to be illustrative and not restrictive. The present invention is intended to be illustrative only, and not to limit the scope of the present disclosure. Corresponding reference numerals indicate corresponding parts throughout the drawings. Several example embodiments will now be described more fully with reference to the drawings. The example embodiments are provided for the purpose of providing a thorough understanding of the disclosure and the disclosure of the disclosure of the disclosure of the specific details (such as details of specific components, devices, and methods) The present invention will be understood by those skilled in the art that the present invention will be understood that the specific embodiments may be embodied in many different forms and should not be construed as limiting the scope of the invention. In some example embodiments, well-known processes, well-known device structures, and well-known techniques will not be described in detail. The terminology used herein is for the purpose of describing particular embodiments and embodiments As used herein, the singular forms " " " " " " " " " " 153799.doc 201144658 surgery. . Including "including" and "having" is inclusive and therefore indicates the features, integers, steps, operations, components and/or components recited, but does not exclude the presence of additional one or more other features, integers, Steps, operations, components, components, and/or groups thereof. The method steps, processes, and operations described herein are not to be interpreted as necessarily requiring a particular order in It should also be understood that additional or alternative steps may be employed. When an element or layer is referred to as "above", "joined", "connected to" or "coupled to" another element or layer, it may be directly connected, connected or coupled to the other element or Layer, or there may be intermediate elements or layers. Conversely, when an element is referred to as being "directly on," "directly connected to", "directly connected" or "directly coupled" to another element or layer, there are no intervening elements or layers. Other words used to describe the relationship between components should be interpreted in a similar manner (for example, "between" and "directly between", "proximity" versus "direct proximity", etc.) . The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items. Although the terms first, second, third, etc. may be used to describe a plurality of elements, components, regions, layers and/or sections, such elements, components, regions, layers and/or sections should not be These terms are limited. These terms may be used to distinguish one element, component, region, layer or segment from another region, layer or segment. Terms such as "first" and "second" and other numerical terms are used in the context of the present disclosure unless the context clearly indicates otherwise. Thus, the singular element, component, region, layer or section 153799.doc 201144658 may also be referred to as a second component, component, region, layer, or layer, without departing from the teachings of the example embodiments. Section. Spatially relative terms such as "inside", "outside", "below", "lower", "lower", "above", "upper" and such terms are used herein to facilitate the description of the figures. The relationship between one element or feature and another element(s). In addition to the orientations described in the figures, spatially related terms may encompass different orientations of the device in use or operation. For example, elements in the "a" or "an" or "an" or "an" or "an" Thus, the example term "below" can encompass both orientations above and below. The device can also be in other orientations (rotating 9 degrees or at other orientations) and interpreting the spatially relative descriptors used herein. Referring now to the drawings, FIG. 9 illustrates an example embodiment of a transfer assembly 1 (eg, a foamer assembly, etc.) that includes one or more of the present disclosure. A situation. The example transfer assembly 1 is configured (eg, 'set size, shape, configuration, etc.) to hold the liquid as needed, and draws a vapor product from the liquid, for example, for subsequent vapor deposition processes (eg, In semiconductor manufacturing operations, etc.). The example transfer assembly 100 can provide a vapor product having a substantially uniform concentration such that a substantially small volume of liquid in the transfer assembly is used in the vapor deposition process. As shown in Figures 1 and 2, the transfer assembly 1a generally includes a container 102 and a valve assembly 1〇4 coupled to the container ι2. The container 1 〇 2 is configured to contain and hold (or hold) the liquid (and the vapor product formed from the liquid) 153799.doc 201144658. The valve assembly 104 is configured to control the flow of carrier gas into the vessel 102 to extract vapor products from the liquid in the vessel 102 and to control the vapor products drawn by the carrier gas to exit The flow of the container 102. Any suitable carrier gas that can be used in conjunction with the example transfer assembly 100, including, for example, nitrogen, hydrogen, and the like, is within the scope of the present disclosure. A connector 106 is provided to couple the valve assembly 104 to the container 1〇2. The connector 106 is configured to releasably removably (remove) the valve to 104 to the container j 〇 2 and to substantially extend the valve assembly i to the container Above 102. The illustrated connector 106 includes a coupling nut 108 that is fixedly grounded (e.g., press fit, overmolded, etc.) to the valve assembly 104. The joint nut 1〇8 includes an internal thread (not shown) that is configured to rotate onto one of the containers 1〇2 corresponding to the threaded collar ι 2 (see Figure 3 and the figure. Once coupled to the container 1〇2, the valve assembly 1〇4 can be unwound from the container 102 by, for example, simply unscrewing the connecting member from the threaded collar of the container 1〇2. Not shown) may be included in the connector 1G6 to help seal the valve assembly i 〇 4 to the container (7) 2 (and the connector (10) of the valve assembly m to the threaded shaft of the container 1 〇 2 The ring is connected. In other exemplary embodiments, the transfer assembly can include a number of assemblies that are configured to engage with, for example, a quick release connector, a mating connector, a friction fit connector, and the like (eg, Releasably, removably coupled, etc.) to the container. Further: Referring to Figures 3 to 5, the container (10) is substantially cylindrical and comprises one of the collars (1) defined by the container 02 A generally open configuration. The opening 153799.doc 201144658 construction allows liquid to be added to the container 102 for use, and allows for easy The valve assembly 104 is coupled to the container 1 〇 2 for fluid communication with the container 1 。 2. The container 102 defines a uniform, generally cylindrical internal space therein for holding the liquid in the container 102. Medium (eg, during transport of the transfer assembly 100 during operation of the transfer assembly, etc.). In other example embodiments, the transfer assembly may include configurations having configurations other than the open configuration The trough 'has a harp with a shape other than a cylindrical shape, and/or a container having an inner space other than a cylindrical shape. The container 102 is made of glass (for example, by any suitable glass, etc.) Forming 'and thus providing a substantially inert configuration for the δ 谷谷器1 〇 2, such that the container 102 is adapted for use with, for example, a corrosive liquid. For example, the glass container 102 provides a substantially robust medium that is configured To prevent the rot of the container 1 〇 2 caused by the rot-insect liquid in the gluten 102. Therefore, the glass structure helps to preserve the integrity of the sigma 1 (for example, preventing rot Silver effect is caused by Constructing a weakening) and the purity of the vapor product taken from the liquid in the container i 〇 2 (for example, preventing contamination of the rotted shoe caused by the container 等等 2), etc. Within the scope of the present disclosure, Corrosive liquids may include, but are not limited to, anti- 1,2-triethylene (C1CH=ccl2), oxygenated (P0C13), carbon tetrachloride (CC14), carbon tetrabromide (CBr4) solution, halide The other rotted liquid, etc. The glass container 102 also provides a substantially transparent medium such that the liquid system in the container 102 can be seen from the outside of the container 〇2. This allows the user to see through the container 102. The liquid (e.g., liquid level) in the container 1〇2 can be monitored without the need to use a liquid level sensor or the like separately. Thus, the illustrated embodiment of 153799.doc 201144658 does not include a liquid level sensor to monitor liquid (e.g., liquid level, etc.) in the glass container 102. However, in other embodiment embodiments, the delivery assembly can include a liquid level sensor to monitor fluid in the container. The container 102 includes a recessed portion 114 (e.g., a puddle, a port, a reservoir, a hollow portion, etc.) defined in a bottom portion 116 of the container 1〇2. The recessed portion 114 is located in the center of the bottom portion 116 of the illustrated container 1A2 and is configured to collect liquid in the recessed portion i14. More specifically, the recessed portion 114 is configured to introduce liquid into the recessed portion 114 when the liquid in the container 1 〇 2 is depleted and the level of liquid in the container 102 is lowered (eg, Pass the assembly 1 操作 during the operation, etc.). Further, a surface 118 of the bottom portion 116 of the container 102 can be substantially inclined toward the recessed portion 114 to further direct liquid to the recessed portion 114. Accordingly, the location and/or shape of the recessed portion 114 can help facilitate the flow of liquid from the interior space of the container 1 (and from the bottom ι 16 of the container 102 about the recess 114) into the recessed portion 114. in. This will be described in more detail below. In the illustrated embodiment, the recessed portion 丨丨4 defines a generally conical shape. The upper portion 122 and the lower portion 124 of the recessed portion 114 are substantially circular. The upper region 122 of the recessed portion (substantially planar with the surface 118 of the bottom portion) is substantially larger than the lower region 124 of the recessed portion 114 (eg, a bottom plate portion or the like that is substantially located in the upper region 122) The lower portion 'makes one of the upper regions 122 to have a diameter larger than one of the lower regions 124. The lower region 124 of the recessed portion n4 is I53799.doc • 10· 201144658 can be considered to define an intermediate surface substantially below the surface ι 8 of the bottom portion. The side portion 126 of the recessed portion 114 is substantially inclined inwardly from the upper region (7) toward the lower region 124 of the recessed portion 114, thereby imparting a substantially conical shape to the recessed portion 114. Accordingly, the illustrated recessed portion 114 can be considered to define a generally circular footprint of the bottom portion 116 of the container 102. The bottom 6 of the illustrated container (10) is at , , '. The structure is roughly medium. In other embodiments, the transfer assembly can include a substantially solid bottom formed from glass. In still other example embodiments, the delivery assembly can include a container having a plurality of recessed portions that differ from the position and/or shape disclosed herein, such as a recessed portion that faces the perimeter of the container and/or defines a square footprint. A recessed portion of a region, an elliptical occupied area, and the like. With continued reference to Figures 1 through 5, the container 102 also includes a generally elongated, cylindrical chamber 13 延伸 extending into (and substantially disposed within) the inner chamber of the container 1〇2. The chamber 130 is configured to allow, for example, a thermometer or the like to be inserted into the chamber 13 through an opening 132 in one of the chambers 130 to measure the temperature of the liquid in the container 102. Therefore, the temperature of the liquid in the container 1〇2 can be obtained without directly touching the liquid (for example, without removing the valve assembly 104 from the container 1 〇 2). In the illustrated embodiment, the chamber 130 is formed by a glass chamber 130 that is generally integral (or coincident with) the container 1〇2. With this configuration, the chamber 13 is substantially sealed to prevent any liquid in the container 102 such that liquid in the container 102 will not flow into the chamber 130. In other example embodiments the 'delivery assembly' may comprise a container having a chamber other than an elongated and cylindrical shape and/or a container formed into a different chamber than the chamber disclosed herein. The valve assembly 104, now referring to the transfer assembly 1 ′ illustrated in FIGS. 6-9, substantially includes the connector 106, a substantially square housing 136 (also referred to as a valve block, a body). And so on) and a gas injection pipe 138 (in a broad sense, an air inlet) (for example, an immersion leg, etc.). The gas injection tube 138 is in fluid communication with the valve assembly 104 such that carrier gas received by the valve assembly 1 〇 4 can flow through the housing 136 and flow to the gas injection tube 138 for transfer to, for example, In the container 102. The inter-inlet structure 140 and the inter-exit structure 14 2 (e.g., joints, etc.) are incorporated into the housing 132. In the illustrated embodiment, the inlet valve structure 140 and the outlet valve structure 142 are coupled to the upper opening of the housing 136 (not shown), generally opposite the side of the housing 136. . The inlet valve structure 140 facilitates a carrier gas supply line (not shown) coupled to the valve assembly 104 for directing carrier gas to the valve assembly 1 〇 4 and for passing a carrier gas through the gas injection tube 13 8 And supplying (and/or dispensing) to the container 丨〇 2 (when the valve assembly 丨〇 4 is coupled to the container 102). Also, the outlet valve structure 142 facilitates coupling a vapor product transfer line (not shown) to the valve assembly crucible 4 to receive vapor products drawn from the carrier gas outside of the vessel 102 (via the a vapor product port 144 (in a broad sense, a receiving port) of the housing 136 (Fig. 9) and for transporting the vapor product from the valve assembly 104 (when the valve assembly 1〇4 is coupled to the Container 102). In other example embodiments, the transfer assembly may include a valve assembly having more than two valve configurations and/or valve configurations that differ from the position of the valve structure disclosed herein. 153799.doc 12 201144658 A valve tube 146 is at least partially disposed within the housing 136 and movable relative to the housing 136 (eg, 'axially slidable, etc.) to control the passage of carrier gas and vapor products Movement of the housing 136. An actuator 148 that is consuming to the valve tube 146 is operable to move the valve tube 146 within the housing 136. In particular, the actuator 148 is operable to selectively open the valve tube 146 to allow the carrier gas and vapor product to flow through the valve assembly 1〇4 (and the housing 13 6)' and optionally The valve tube 146 is closed to prevent the carrier gas and vapor product from flowing through the valve assembly 1 〇 4 (and the housing 136). The actuator 148 can include, for example, an internal thread that receives a corresponding external thread of the valve tube 146 such that rotation of the actuator 148 causes the valve tube 146 to move axially within the housing 136 (eg, 'Slide, etc.'. Counterclockwise rotation causes the valve tube 146 to move to its open position, and clockwise rotation causes the valve tube 146 to move to its closed position (or vice versa). In other example embodiments, the transfer assembly may include a valve assembly having more than one valve tube and/or a valve tube that operates differently than the valve tube disclosed herein. The AH/Main Officer 13 8 is coupled to the housing 136 at one of the housing ports 136 (Fig. 9) via a threaded connection or the like, thereby allowing the carrier gas to be purged from the download port. Port 1 5 2 flows into the gas injection tube 13 8 for final discharge into the vessel 102 (when the valve assembly 1 〇 4 is coupled to the vessel 1 〇 2). The gas injection tube 138 includes a diffuser 154 located at one of the lower ends of the gas injection tube 138. In the illustrated embodiment, the diffuser 1$4 is coupled to the lower end of the gas injection tube 138 via, for example, a threaded connection. Within the scope of the present disclosure, the diffuser 154 can comprise any suitable diffuser operable to, for example, transfer carrier gas bubbles into a liquid for drawing vapors from the liquid 153799.doc 201144658 product, and the like. 154. The delta gas injection pipe 138 is configured to extend into the collar 102 (through the collar 112 of the container ι 2) when the valve assembly 104 is shanked to the container 102 (see Figures 1 and 2) The inner space of the container 102. The diffuser 154 of the lower end portion of the gas injection tube 13 8 and more particularly the gas injection tube 138 is at least partially positioned, disposed (etc.) in the recessed portion 114 of the container 1〇2. (closely adjacent to the intermediate surface of the region 124 below the recessed portion). Here, the diffuser 154 can be at least partially immersed in the liquid positioned in the recessed portion 114 of the container 1〇2. Accordingly, the gas injection tube 138 and the diffuser ι 54 can introduce, inject, etc. the carrier gas into the container 1 〇 2 substantially in the recessed portion 114 of the container 1 〇 2 (and into the container) 1 〇 2 of the liquid in the recessed portion 114). In the illustrated embodiment, the gas injection tube 138 (and diffuser 154) is positioned slightly offset from the center of the recessed portion 114 of the container ι2 (eg, the depression in the container ι2) One of the portions 114 is radially offset). However, within the scope of the present disclosure, the gas injection tube 138 (and diffuser 154) can be positioned substantially centrally (eg, radially, etc.) of the recessed portion 114 of the container 1〇2 (eg, Adjusting the position of the recessed portion 丨丨4 in the container 102 to accommodate the gas injection pipe 138 (and the diffuser 154) such that the gas injection pipe 138 (and the diffuser 154) is substantially located at the center of the concave portion 114; The position of the gas injection pipe 138 (and the diffuser 154) is adjustable to accommodate the recessed portion ,4 such that the gas injection pipe 138 (and the diffuser 154) is located substantially in the center of the concave portion, etc. . The illustrated valve assembly 1 〇4 is preferably made of an inert material that is highly resistant to chemical reactions and low-level 153799.doc 201144658 metalloid or other extractable contaminants. In an example embodiment, a valve assembly 1〇4 may comprise an assembly molded from a material comprising a fully vaporized polymer such as PFA, TFE, PTFE, FEP, ETFE, or the like. The illustrated transfer assembly i will now be described in the vapor phase for delivery of the vapor product to a reactor location (eg, via a subsequent carrier gas for a vapor deposition process, etc.) for subsequent use in the The operation of the reactor position. The transfer assembly 100 is initially prepared to fill the container 102 with a desired liquid to produce a vapor product suitable for the subsequent use. After the container is filled with liquid (eg, filled with liquid to a bird level, etc.), the valve assembly 104 is coupled (eg, screwed onto) via the connector 1〇6, etc. ) to the container 1〇2. As shown in Figures i and 2, the lower jaws 144 and 152 of the housing 136 are positioned generally within the container 1〇2 and the gas injection tube 138 (and more particularly the diffuser) 154) is at least partially positioned in the recessed portion 114 bounded by the bottom jaw 6 of the container 102. The prepared transfer assembly can then be shipped to the reactor location for subsequent use. At the reactor location, a carrier gas supply line (not shown) can be coupled to the inlet valve structure 该4〇 of the valve assembly 104 to supply a carrier gas to the vessel 102 (via the gas injection conduit 138) And diffuser 154). Also, a product transfer line (not shown) can be coupled to the outlet valve structure 142 of the wide assembly 1 to 4 to receive the vapor product drawn from the carrier gas outside the container 1 〇2. The actuator 148 of the valve tube 146 can then be selectively operated to move the valve tube 14 6 between its open position and its closed position. Moving the valve tube 153799.doc 15 201144658 146 to its open position allows a carrier gas to flow into and through the housing 136 from a carrier gas supply (via the carrier gas supply line), and through the gas injection tube 138 and diffusion The 154 enters the recessed portion 114 of the container 102. The carrier gas passes through the liquid in the vessel 102 and promotes liquid transfer/transition to the gas phase to saturate the carrier gas. Thus, the carrier gas (i.e., the carrier gas bubbles formed by the diffuser 15 4) evaporates the liquid in the vessel 102. And, the carrier gas and vapor product from the liquid exits the vessel 1 through the housing 136 (via the purge port 152 and the outlet valve structure 142) for delivery to the reactor location. The temperature of the liquid in the container 102 can be monitored through the chamber 130 as desired (e.g., with a thermometer, etc.). The temperature of the liquid in the container 1〇2 can be monitored by examining the liquid level of the transparent glass container 102. As described above, the recessed portion 114 of the illustrated container 102 is configured to collect liquid in the recessed portion 114. Thus, during operation of the transfer assembly 100, as the liquid in the container 1〇2 is consumed (i.e., 'Ik the liquid evaporates in the carrier gas bubbles injected into the container 1〇2), the recessed portion 114 introduces the remaining liquid in the container i 〇 2 into the recessed portion 114. This provides a substantially uniform volume of liquid in the recessed portion 114. During operation, the gas injection tube 138 and diffuser 154 can inject a carrier gas into the liquid (when the diffuser 154 is at least partially disposed in the container 1) 2 of the depression is 114). The recessed portion 丨 14 also allows the gas injection tube 138 and diffuser 154 to be positioned substantially deeper in the liquid of the container 1〇2. This provides a longer path for the carrier gas bubble to move through the liquid in the container 1〇2 (ie, between the recessed portion 153799.doc -16- 201144658 m where the carrier gas is injected into the container 丨〇2 The position of the liquid is between the surface of the liquid in the container 1〇2). The saturation efficiency of the carrier gas injected into the (4) is improved by & and the concentration supplied to the reactor site by the transfer assembly 100 can be substantially uniform. In addition, since the containers can be used: 大;; large volume of liquid, the illustrated transfer assembly can be extended for a longer period of time (and the residue in the transfer assembly 100 can be reduced) In an example embodiment, a 'transfer assembly substantially includes a container and a valve assembly configured to be fitted to the container. The container is formed of glass and includes a bottom formed at one of the containers. a substantially conical depression. The container also includes one of the elongated, tubular cavities formed in the inner space of the container - substantially upper portion (in the adjacent space). In this embodiment, a female fee is formed. Gg >Sergeant ^ 烕°Heiling glass has a thickness of about 3 mm and
形成該腔室之玻璃之厚声A 坪又為力1.5毫米。該容器之一直徑 尺寸為約130毫米且高度尺寸為 了馮、力13 0耄米。因此，該容器 之體積為約1，725毫升。該衮恶 令益之一底部之厚度為約24毫 米，且界定於該容器之該 豕底邛中之该凹陷部分之一深度尺 寸為約15毫米。該凹陷部分 I刀之大致上圓形上區域之直徑 =广為約36毫米，且該凹陷部分之—大致上圓形下區域 (或底板部分）之直徑尺寸為約3〇毫米。該腔室之一長度尺 寸為約⑽毫米，且—直徑尺寸為約12毫米。 另外，在此實施例中，哕楂、路 ,μ傳遞總成可有效地操作用於以 小於約100毫升（例如， 低至15毫升等等之液體體積）之液 體體積傳遞來自該容器中 T <及體之濃度大致上恆定之蒸氣 I53799.doc -17- 201144658 產品。 在其他實施例中’傳遞總成大致上包含容器及經組態以 耦合至該等容器之閥總成。在此等實例實施例中該等容 器可包含如本文所述之容器（例如，容器iQ2等等）。而且該 專閥總成可包含如美國專利案第7,431，049號及PCT申請案 第PCT娜刪587號中所描述之_成，㈣Μ㈣ 係以引用之方式併入本文中。 本文所揭示之特定尺寸及/或值本質上為示例性且不限 制本發明之範疇。 上文提供對該等實施例之描述目的在於圖解說明及描 述。其無意於毫無遺漏或限制本發明…特定實施例之個 別元件或特徵大致上不限於該特^之實施例，而是在可應 用之情形下可互換，且可用於—選定之實施例中，即便未 有明確顯示或描述。亦可以許多方式變化本發明。此等變 動不應被視為脫離本發明，且所有此等修飾意於包含於本 發明之範疇内。 【圖式簡單說明】 圖1係包含本揭示内容之一個或多個態樣之一蒸氣產品 傳遞總成之一實例實施例之一透視圖； 圖2係圖1之該蒸氣產品傳遞總成之一側視圖； 圖3係圓1之該蒸氣産品傳遞總成之一玻璃容器之—透視 圖4係圖3之該玻璃容器在包括圖3中之線4_4之一平面中 截取之一截面圖； 153799.doc -18- 201144658 平面中 透視 :閥結 圖5係圖3之該玻璃容器在包括圖3_之線5_5之一 截取之一截面圖； 圖6係圖I之該蒸氣產品傳遞總成之一閥結構之 圖； 圖7係圖6之該閥結構之一前視圖； 圖8係圖6之閥結構之—俯視平面圖；及 圖9係圖6之該閥結構在—注氣f及—擴散器被自^ 構移除之一仰視平面圖。 【主要元件符號說明】 100 傳遞總成 102 容器 104 閥總成 106 連接件 108 連接螺母 112 螺紋軸環 114 凹陷部分 116 容器102之底部 118 底部116之表面 122 凹陷區域114之上部分 124 凹陷區域114之下部分 126 凹陷區域114之側部分 130 腔室 132 上開口 136 殼體 153799.doc 201144658 138 注氣管 140 入口閥結構 142 出口閥結構 144 蒸氣產品埠口 146 閥管 148 致動器 152 殼體136之下載氣埠口 154 擴散器 153799.doc •20-The thick sound A of the glass forming the chamber is again 1.5 mm. One of the containers has a diameter of about 130 mm and a height of 1300 mils. Therefore, the volume of the container is about 1,725 ml. One of the abhorrent benefits is a thickness of about 24 mm at the bottom, and one of the recessed portions defined in the bottom raft of the container has a depth dimension of about 15 mm. The diameter of the substantially circular upper region of the recessed portion I blade is about 36 mm wide, and the substantially circular lower region (or the bottom plate portion) of the recessed portion has a diameter of about 3 mm. One of the chambers has a length dimension of about (10) mm and a diameter of about 12 mm. Additionally, in this embodiment, the helium, road, and μ transfer assemblies are operatively operable to deliver T from the container in a liquid volume of less than about 100 milliliters (e.g., as low as 15 milliliters, etc.) <Vapor I53799.doc -17- 201144658 product with a substantially constant concentration of the body. In other embodiments the 'delivery assembly' generally includes a container and a valve assembly configured to couple to the containers. In such example embodiments the containers may comprise a container (e.g., container iQ2, etc.) as described herein. Moreover, the valve assembly can be as described in U.S. Patent No. 7,431,049 and PCT Application No. PCT No. 587, the disclosure of which is incorporated herein by reference. The particular dimensions and/or values disclosed herein are exemplary in nature and are not intended to limit the scope of the invention. The description of the embodiments above is provided for the purpose of illustration and description. It is not intended to be exhaustive or to limit the invention. The individual elements or features of a particular embodiment are not limited to the embodiments, but are interchangeable, where applicable, and can be used in selected embodiments. Even if it is not clearly shown or described. The invention can also be varied in many ways. Such changes are not to be regarded as a departure from the invention, and all such modifications are intended to be included within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of one example embodiment of a vapor product delivery assembly including one or more aspects of the present disclosure; FIG. 2 is a vapor product delivery assembly of FIG. Figure 3 is a perspective view of the glass container of the steam product transfer assembly of the circle 1 - a perspective view of the glass container of Figure 3 taken in a plane including a line 4_4 of Figure 3; 153799.doc -18- 201144658 In-plane perspective: valve junction Figure 5 is a cross-sectional view of the glass container of Figure 3 taken at one of the lines 5_5 of Figure 3; Figure 6 is the vapor product delivery assembly of Figure I Figure 7 is a front view of the valve structure of Figure 6; Figure 8 is a top plan view of the valve structure of Figure 6; and Figure 9 is a valve structure of Figure 6 - injecting gas and - The diffuser is removed from the structure by looking up one of the plans. [Main component symbol description] 100 Transfer assembly 102 Container 104 Valve assembly 106 Connector 108 Connection nut 112 Threaded collar 114 Recessed portion 116 Bottom portion 118 of container 102 Surface 122 of bottom portion 116 Upper portion of recessed portion 114 124 Recessed area 114 Lower portion 126 Side portion 130 of recessed region 114 Chamber 132 Upper opening 136 Housing 153799.doc 201144658 138 Gas injection pipe 140 Inlet valve structure 142 Outlet valve structure 144 Vapor product port 146 Valve tube 148 Actuator 152 Housing 136 Download gas port 154 diffuser 153799.doc •20-