JP2017509918A5 - - Google Patents
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- JP2017509918A5 JP2017509918A5 JP2016553587A JP2016553587A JP2017509918A5 JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5 JP 2016553587 A JP2016553587 A JP 2016553587A JP 2016553587 A JP2016553587 A JP 2016553587A JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- mirror
- individual mirrors
- group
- mirror array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005286 illumination Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 230000001419 dependent effect Effects 0.000 claims 4
- 238000003491 array Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001393 microlithography Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014203189.3 | 2014-02-21 | ||
| DE102014203189.3A DE102014203189A1 (de) | 2014-02-21 | 2014-02-21 | Spiegel-Array |
| PCT/EP2015/053287 WO2015124555A1 (de) | 2014-02-21 | 2015-02-17 | Spiegel-array |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509918A JP2017509918A (ja) | 2017-04-06 |
| JP2017509918A5 true JP2017509918A5 (enExample) | 2018-03-29 |
| JP6568865B2 JP6568865B2 (ja) | 2019-08-28 |
Family
ID=52595296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016553587A Active JP6568865B2 (ja) | 2014-02-21 | 2015-02-17 | ミラーアレイ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9874819B2 (enExample) |
| JP (1) | JP6568865B2 (enExample) |
| KR (1) | KR102424717B1 (enExample) |
| DE (1) | DE102014203189A1 (enExample) |
| WO (1) | WO2015124555A1 (enExample) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109194849B (zh) | 2013-06-13 | 2021-01-15 | 核心光电有限公司 | 双孔径变焦数字摄影机 |
| EP3779565B1 (en) | 2013-07-04 | 2024-05-22 | Corephotonics Ltd. | Miniature telephoto lens assembly |
| EP3028443A2 (en) | 2013-08-01 | 2016-06-08 | Corephotonics Ltd. | Thin multi-aperture imaging system with auto-focus and methods for using same |
| US9392188B2 (en) | 2014-08-10 | 2016-07-12 | Corephotonics Ltd. | Zoom dual-aperture camera with folded lens |
| US10288840B2 (en) | 2015-01-03 | 2019-05-14 | Corephotonics Ltd | Miniature telephoto lens module and a camera utilizing such a lens module |
| KR101866482B1 (ko) | 2015-04-16 | 2018-06-11 | 코어포토닉스 리미티드 | 소형 접이식 카메라의 오토 포커스 및 광학 이미지 안정화 |
| US10230898B2 (en) | 2015-08-13 | 2019-03-12 | Corephotonics Ltd. | Dual aperture zoom camera with video support and switching / non-switching dynamic control |
| WO2017115179A1 (en) | 2015-12-29 | 2017-07-06 | Corephotonics Ltd. | Dual-aperture zoom digital camera with automatic adjustable tele field of view |
| WO2017208090A1 (en) | 2016-05-30 | 2017-12-07 | Corephotonics Ltd. | Rotational ball-guided voice coil motor |
| US10616484B2 (en) | 2016-06-19 | 2020-04-07 | Corephotonics Ltd. | Frame syncrhonization in a dual-aperture camera system |
| EP4485046B1 (en) | 2016-07-07 | 2026-06-10 | Corephotonics Ltd. | Linear ball guided voice coil motor for folded optic |
| DE102016217735A1 (de) * | 2016-09-16 | 2018-03-22 | Carl Zeiss Smt Gmbh | Komponente für eine Spiegelanordnung für die EUV-Lithographie |
| KR102269547B1 (ko) | 2016-12-28 | 2021-06-25 | 코어포토닉스 리미티드 | 확장된 광-폴딩-요소 스캐닝 범위를 갖는 폴디드 카메라 구조 |
| KR102901328B1 (ko) | 2017-01-12 | 2025-12-16 | 코어포토닉스 리미티드 | 컴팩트 폴디드 카메라 |
| US11111133B1 (en) | 2017-01-30 | 2021-09-07 | Mirrorcle Technologies, Inc. | MEMS actuators with improved performance and cooling |
| CN110582724B (zh) | 2017-03-15 | 2022-01-04 | 核心光电有限公司 | 具有全景扫描范围的照相装置 |
| CN113075837B (zh) | 2017-11-23 | 2022-04-12 | 核心光电有限公司 | 摄影机及制法、移动电子设备及减小凸起占用空间的方法 |
| KR102242452B1 (ko) | 2018-02-05 | 2021-04-20 | 코어포토닉스 리미티드 | 폴디드 카메라에 대한 감소된 높이 페널티 |
| EP3707893B1 (en) | 2018-02-12 | 2023-03-08 | Corephotonics Ltd. | Folded camera with optical image stabilization |
| EP4303653A1 (en) | 2018-04-23 | 2024-01-10 | Corephotonics Ltd. | An optical-path folding-element with an extended two degree of freedom rotation range |
| CN112272829B (zh) * | 2018-07-04 | 2025-04-08 | 核心光电有限公司 | 用于汽车或监控应用具有扫描光路折叠元件的相机 |
| WO2020039302A1 (en) | 2018-08-22 | 2020-02-27 | Corephotonics Ltd. | Two-state zoom folded camera |
| AU2019359452A1 (en) * | 2018-10-10 | 2021-04-22 | Trilok VYAS | Villanova ultra efficient vertical windmill system and method |
| CN111919057B (zh) | 2019-01-07 | 2021-08-31 | 核心光电有限公司 | 具有滑动接头的旋转机构 |
| DE102019206865B4 (de) | 2019-05-13 | 2024-09-12 | Carl Zeiss Smt Gmbh | Verfahren und vorrichtung zum erzeugen eines mathematischen modells zum positionieren von einzelspiegeln eines facettenspiegels in einem optischen system |
| KR102914109B1 (ko) | 2019-07-31 | 2026-01-15 | 코어포토닉스 리미티드 | 카메라 패닝 또는 모션에서 배경 블러링을 생성하는 시스템 및 방법 |
| KR102810415B1 (ko) | 2019-12-03 | 2025-05-19 | 코어포토닉스 리미티드 | 연장된 2-자유도 회전 범위를 제공하기 위한 액추에이터 |
| US11949976B2 (en) | 2019-12-09 | 2024-04-02 | Corephotonics Ltd. | Systems and methods for obtaining a smart panoramic image |
| KR20250078581A (ko) | 2020-02-22 | 2025-06-02 | 코어포토닉스 리미티드 | 매크로 촬영을 위한 분할 스크린 기능 |
| KR102793241B1 (ko) | 2020-04-26 | 2025-04-08 | 코어포토닉스 리미티드 | 홀 바 센서 보정을 위한 온도 제어 |
| US11832018B2 (en) | 2020-05-17 | 2023-11-28 | Corephotonics Ltd. | Image stitching in the presence of a full field of view reference image |
| CN117518313A (zh) | 2020-05-30 | 2024-02-06 | 核心光电有限公司 | 用于获得超微距图像的系统 |
| US11637977B2 (en) | 2020-07-15 | 2023-04-25 | Corephotonics Ltd. | Image sensors and sensing methods to obtain time-of-flight and phase detection information |
| CN119583941A (zh) | 2020-07-15 | 2025-03-07 | 核心光电有限公司 | 用于校正扫描折叠相机和包含这样的扫描折叠相机的多相机中的视点像差的系统 |
| CN118424341A (zh) | 2020-07-31 | 2024-08-02 | 核心光电有限公司 | 位置感测单元 |
| KR20250016472A (ko) | 2020-08-12 | 2025-02-03 | 코어포토닉스 리미티드 | 스캐닝 폴디드 카메라의 광학 이미지 안정화 |
| KR102589548B1 (ko) | 2021-03-11 | 2023-10-13 | 코어포토닉스 리미티드 | 팝-아웃 카메라 시스템 |
| US12007671B2 (en) | 2021-06-08 | 2024-06-11 | Corephotonics Ltd. | Systems and cameras for tilting a focal plane of a super-macro image |
| US12520025B2 (en) | 2021-07-21 | 2026-01-06 | Corephotonics Ltd. | Pop-out mobile cameras and actuators |
| KR102770497B1 (ko) | 2022-03-24 | 2025-02-18 | 코어포토닉스 리미티드 | 슬림 컴팩트 렌즈 광학 이미지 안정화 |
| DE102022203369A1 (de) * | 2022-04-05 | 2023-10-05 | Carl Zeiss Smt Gmbh | Anordnung, Verfahren und Computerprogrammprodukt zur Kalibrierung von Facettenspiegeln |
| WO2024037916A1 (en) * | 2022-08-16 | 2024-02-22 | Carl Zeiss Smt Gmbh | Micro-optical element |
| DE102022209411A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit einer Anzahl von Einzelspiegelelementen |
| DE102022209427A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit federnd gelagerten Einzelspiegelelementen |
| DE102022212167A1 (de) | 2022-11-16 | 2023-09-14 | Carl Zeiss Smt Gmbh | EUV-Quellen-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102022212168A1 (de) | 2022-11-16 | 2024-05-16 | Carl Zeiss Smt Gmbh | EUV-Optik-Modul für eine EUV-Projektionsbelichtungsanlage |
| KR20240161846A (ko) | 2023-02-15 | 2024-11-12 | 코어포토닉스 리미티드 | 폴디드 카메라를 위한 라지 앵글 컴팩트 광학 이미지 안정화 |
| DE102023126597A1 (de) * | 2023-09-29 | 2025-04-03 | Carl Zeiss Smt Gmbh | Verfahren zur Verarbeitung analoger elektrischer Ausgangssignale |
| CN122018143B (zh) * | 2026-04-10 | 2026-06-23 | 中国科学院西安光学精密机械研究所 | 一种音圈电机驱动的反作用扰动自补偿快速反射镜 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
| US7145269B2 (en) | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
| JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
| DE102006023652B4 (de) | 2006-05-18 | 2008-10-30 | Esa Patentverwertungsagentur Sachsen-Anhalt Gmbh | Elektromotorische Einrichtung zur Betätigung von Gaswechselventilen |
| US7804603B2 (en) * | 2006-10-03 | 2010-09-28 | Asml Netherlands B.V. | Measurement apparatus and method |
| US20080100816A1 (en) * | 2006-10-31 | 2008-05-01 | Asml Netherlands B.V. | Lithographic apparatus and method |
| EP2115535B9 (de) * | 2007-02-06 | 2013-01-09 | Carl Zeiss SMT GmbH | Verfahren und vorrichtung zur überwachung von mehrfachspiegelanordnungen in einem beleuchtungssystem einer mikrolithographischen projektionsbelichtungsanlage |
| KR101492287B1 (ko) * | 2007-03-27 | 2015-02-11 | 칼 짜이스 에스엠테 게엠베하 | 편평하게 조사된 보정광을 이용한 광학 소자의 보정 |
| CN101946190B (zh) * | 2008-02-15 | 2013-06-19 | 卡尔蔡司Smt有限责任公司 | 微光刻的投射曝光设备使用的分面镜 |
| KR101769157B1 (ko) | 2008-10-20 | 2017-08-17 | 칼 짜이스 에스엠테 게엠베하 | 방사선 빔 안내를 위한 광학 모듈 |
| KR101258344B1 (ko) * | 2008-10-31 | 2013-04-30 | 칼 짜이스 에스엠티 게엠베하 | Ｅｕｖ 마이크로리소그래피용 조명 광학 기기 |
| DE102009045694B4 (de) * | 2009-10-14 | 2012-03-29 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Mikrolithographie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
| DE102010040811A1 (de) * | 2010-09-15 | 2012-03-15 | Carl Zeiss Smt Gmbh | Abbildende Optik |
| DE102011006100A1 (de) | 2011-03-25 | 2012-09-27 | Carl Zeiss Smt Gmbh | Spiegel-Array |
| DE102012213515A1 (de) * | 2012-08-01 | 2014-02-06 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102014203188A1 (de) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Verfahren zur Beleuchtung eines Objektfeldes einer Projektionsbelichtungsanlage |
-
2014
- 2014-02-21 DE DE102014203189.3A patent/DE102014203189A1/de not_active Ceased
-
2015
- 2015-02-17 WO PCT/EP2015/053287 patent/WO2015124555A1/de not_active Ceased
- 2015-02-17 JP JP2016553587A patent/JP6568865B2/ja active Active
- 2015-02-17 KR KR1020167025881A patent/KR102424717B1/ko active Active
-
2016
- 2016-08-02 US US15/226,358 patent/US9874819B2/en not_active Expired - Fee Related
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