JP2017509918A5 - - Google Patents
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- JP2017509918A5 JP2017509918A5 JP2016553587A JP2016553587A JP2017509918A5 JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5 JP 2016553587 A JP2016553587 A JP 2016553587A JP 2016553587 A JP2016553587 A JP 2016553587A JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- mirror
- individual mirrors
- group
- mirror array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000005286 illumination Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 230000001419 dependent effect Effects 0.000 claims 4
- 238000003491 array Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001393 microlithography Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014203189.3A DE102014203189A1 (de) | 2014-02-21 | 2014-02-21 | Spiegel-Array |
| DE102014203189.3 | 2014-02-21 | ||
| PCT/EP2015/053287 WO2015124555A1 (de) | 2014-02-21 | 2015-02-17 | Spiegel-array |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509918A JP2017509918A (ja) | 2017-04-06 |
| JP2017509918A5 true JP2017509918A5 (enExample) | 2018-03-29 |
| JP6568865B2 JP6568865B2 (ja) | 2019-08-28 |
Family
ID=52595296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016553587A Active JP6568865B2 (ja) | 2014-02-21 | 2015-02-17 | ミラーアレイ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9874819B2 (enExample) |
| JP (1) | JP6568865B2 (enExample) |
| KR (1) | KR102424717B1 (enExample) |
| DE (1) | DE102014203189A1 (enExample) |
| WO (1) | WO2015124555A1 (enExample) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105308947B (zh) | 2013-06-13 | 2018-10-02 | 核心光电有限公司 | 双孔径变焦数字摄影机 |
| CN105359006B (zh) | 2013-07-04 | 2018-06-22 | 核心光电有限公司 | 小型长焦透镜套件 |
| EP3028443A2 (en) | 2013-08-01 | 2016-06-08 | Corephotonics Ltd. | Thin multi-aperture imaging system with auto-focus and methods for using same |
| US9392188B2 (en) | 2014-08-10 | 2016-07-12 | Corephotonics Ltd. | Zoom dual-aperture camera with folded lens |
| WO2016108093A1 (en) | 2015-01-03 | 2016-07-07 | Corephotonics Ltd. | Miniature telephoto lens module and a camera utilizing such a lens module |
| KR102078978B1 (ko) | 2015-04-16 | 2020-02-19 | 코어포토닉스 리미티드 | 소형 접이식 카메라의 오토 포커스 및 광학 이미지 안정화 |
| WO2017025822A1 (en) | 2015-08-13 | 2017-02-16 | Corephotonics Ltd. | Dual aperture zoom camera with video support and switching / non-switching dynamic control |
| EP4024842A3 (en) | 2015-12-29 | 2022-08-31 | Corephotonics Ltd. | Dual-aperture zoom digital camera with automatic adjustable tele field of view |
| EP3758356B1 (en) | 2016-05-30 | 2021-10-20 | Corephotonics Ltd. | Actuator |
| KR102646151B1 (ko) | 2016-06-19 | 2024-03-08 | 코어포토닉스 리미티드 | 듀얼 애퍼처 카메라 시스템에서의 프레임 동기화 |
| KR102657464B1 (ko) | 2016-07-07 | 2024-04-12 | 코어포토닉스 리미티드 | 폴디드 옵틱용 선형 볼 가이드 보이스 코일 모터 |
| DE102016217735A1 (de) * | 2016-09-16 | 2018-03-22 | Carl Zeiss Smt Gmbh | Komponente für eine Spiegelanordnung für die EUV-Lithographie |
| US11531209B2 (en) | 2016-12-28 | 2022-12-20 | Corephotonics Ltd. | Folded camera structure with an extended light-folding-element scanning range |
| EP4145206A1 (en) | 2017-01-12 | 2023-03-08 | Corephotonics Ltd. | Compact folded camera |
| US11111133B1 (en) * | 2017-01-30 | 2021-09-07 | Mirrorcle Technologies, Inc. | MEMS actuators with improved performance and cooling |
| CN114137791A (zh) | 2017-03-15 | 2022-03-04 | 核心光电有限公司 | 具有全景扫瞄范围的照相装置及移动装置 |
| JP6806919B2 (ja) | 2017-11-23 | 2021-01-06 | コアフォトニクス リミテッド | コンパクト屈曲式カメラ構造 |
| EP3848749A1 (en) | 2018-02-05 | 2021-07-14 | Corephotonics Ltd. | Reduced height penalty for folded camera |
| CN113467031B (zh) | 2018-02-12 | 2023-07-14 | 核心光电有限公司 | 具有光学图像稳定化的折叠摄像机、数字摄像机及方法 |
| KR102781658B1 (ko) | 2018-04-23 | 2025-03-13 | 코어포토닉스 리미티드 | 연장된 2 자유도 회전 범위를 갖는 광학 경로 폴딩 요소 |
| CN119904607A (zh) * | 2018-07-04 | 2025-04-29 | 核心光电有限公司 | 用于汽车或监控应用具有扫描光路折叠元件的相机 |
| US11635596B2 (en) | 2018-08-22 | 2023-04-25 | Corephotonics Ltd. | Two-state zoom folded camera |
| US10859062B2 (en) * | 2018-10-10 | 2020-12-08 | Trilok Vyas | Villanova ultra efficient vertical windmill system and method |
| US11287081B2 (en) | 2019-01-07 | 2022-03-29 | Corephotonics Ltd. | Rotation mechanism with sliding joint |
| DE102019206865B4 (de) | 2019-05-13 | 2024-09-12 | Carl Zeiss Smt Gmbh | Verfahren und vorrichtung zum erzeugen eines mathematischen modells zum positionieren von einzelspiegeln eines facettenspiegels in einem optischen system |
| CN121284176A (zh) | 2019-07-31 | 2026-01-06 | 核心光电有限公司 | 在相机摇摄或运动中创建背景模糊的系统 |
| EP4509897A3 (en) | 2019-12-03 | 2025-05-14 | Corephotonics Ltd. | Actuators for providing an extended two-degree of freedom rotation range |
| US11949976B2 (en) | 2019-12-09 | 2024-04-02 | Corephotonics Ltd. | Systems and methods for obtaining a smart panoramic image |
| US12007668B2 (en) | 2020-02-22 | 2024-06-11 | Corephotonics Ltd. | Split screen feature for macro photography |
| CN114144898B (zh) | 2020-04-26 | 2022-11-04 | 核心光电有限公司 | 用于霍尔棒传感器校正的温度控制 |
| WO2021234515A1 (en) | 2020-05-17 | 2021-11-25 | Corephotonics Ltd. | Image stitching in the presence of a full field of view reference image |
| CN117572549A (zh) | 2020-05-30 | 2024-02-20 | 核心光电有限公司 | 用于获得超微距图像的系统和方法 |
| US11637977B2 (en) | 2020-07-15 | 2023-04-25 | Corephotonics Ltd. | Image sensors and sensing methods to obtain time-of-flight and phase detection information |
| EP4045960B1 (en) | 2020-07-15 | 2024-12-04 | Corephotonics Ltd. | Point of view aberrations correction in a scanning folded camera |
| CN114270145B (zh) | 2020-07-31 | 2024-05-17 | 核心光电有限公司 | 用于大行程线性位置感测的霍尔传感器-磁体几何结构 |
| CN116626960A (zh) | 2020-08-12 | 2023-08-22 | 核心光电有限公司 | 用于光学防抖的方法 |
| KR20250165686A (ko) | 2021-03-11 | 2025-11-26 | 코어포토닉스 리미티드 | 팝-아웃 카메라 시스템 |
| EP4726455A2 (en) | 2021-06-08 | 2026-04-15 | Corephotonics Ltd. | Systems and cameras for tilting a focal plane of a super-macro image |
| KR20260042305A (ko) | 2021-07-21 | 2026-03-30 | 코어포토닉스 리미티드 | 팝-아웃 모바일 카메라 및 액추에이터 |
| KR20250028500A (ko) | 2022-03-24 | 2025-02-28 | 코어포토닉스 리미티드 | 슬림 컴팩트 렌즈 광학 이미지 안정화 |
| DE102022203369A1 (de) * | 2022-04-05 | 2023-10-05 | Carl Zeiss Smt Gmbh | Anordnung, Verfahren und Computerprogrammprodukt zur Kalibrierung von Facettenspiegeln |
| KR20250048255A (ko) * | 2022-08-16 | 2025-04-08 | 칼 짜이스 에스엠테 게엠베하 | 마이크로 광학 요소 |
| DE102022209427A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit federnd gelagerten Einzelspiegelelementen |
| DE102022209411A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit einer Anzahl von Einzelspiegelelementen |
| DE102022212168A1 (de) | 2022-11-16 | 2024-05-16 | Carl Zeiss Smt Gmbh | EUV-Optik-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102022212167A1 (de) | 2022-11-16 | 2023-09-14 | Carl Zeiss Smt Gmbh | EUV-Quellen-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102023126597A1 (de) * | 2023-09-29 | 2025-04-03 | Carl Zeiss Smt Gmbh | Verfahren zur Verarbeitung analoger elektrischer Ausgangssignale |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
| US7145269B2 (en) | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
| JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
| DE102006023652B4 (de) | 2006-05-18 | 2008-10-30 | Esa Patentverwertungsagentur Sachsen-Anhalt Gmbh | Elektromotorische Einrichtung zur Betätigung von Gaswechselventilen |
| US7804603B2 (en) * | 2006-10-03 | 2010-09-28 | Asml Netherlands B.V. | Measurement apparatus and method |
| US20080100816A1 (en) * | 2006-10-31 | 2008-05-01 | Asml Netherlands B.V. | Lithographic apparatus and method |
| JP5194030B2 (ja) | 2007-02-06 | 2013-05-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ投影露光装置の照明系のマルチミラーアレイを監視するための方法および装置 |
| KR101492287B1 (ko) * | 2007-03-27 | 2015-02-11 | 칼 짜이스 에스엠테 게엠베하 | 편평하게 조사된 보정광을 이용한 광학 소자의 보정 |
| KR101591610B1 (ko) * | 2008-02-15 | 2016-02-03 | 칼 짜이스 에스엠티 게엠베하 | 마이크로리소그래피용 투영 노광 장치에 사용하기 위한 패싯 미러 |
| KR101769157B1 (ko) | 2008-10-20 | 2017-08-17 | 칼 짜이스 에스엠테 게엠베하 | 방사선 빔 안내를 위한 광학 모듈 |
| WO2010049020A1 (de) * | 2008-10-31 | 2010-05-06 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die euv-mikrolithographie |
| DE102009045694B4 (de) | 2009-10-14 | 2012-03-29 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Mikrolithographie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
| DE102010040811A1 (de) * | 2010-09-15 | 2012-03-15 | Carl Zeiss Smt Gmbh | Abbildende Optik |
| DE102011006100A1 (de) | 2011-03-25 | 2012-09-27 | Carl Zeiss Smt Gmbh | Spiegel-Array |
| DE102012213515A1 (de) * | 2012-08-01 | 2014-02-06 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102014203188A1 (de) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Verfahren zur Beleuchtung eines Objektfeldes einer Projektionsbelichtungsanlage |
-
2014
- 2014-02-21 DE DE102014203189.3A patent/DE102014203189A1/de not_active Ceased
-
2015
- 2015-02-17 KR KR1020167025881A patent/KR102424717B1/ko active Active
- 2015-02-17 WO PCT/EP2015/053287 patent/WO2015124555A1/de not_active Ceased
- 2015-02-17 JP JP2016553587A patent/JP6568865B2/ja active Active
-
2016
- 2016-08-02 US US15/226,358 patent/US9874819B2/en not_active Expired - Fee Related
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