JP2017500725A - レーザー処理及び温度誘導ストレスを用いた複合ウェハー製造方法 - Google Patents
レーザー処理及び温度誘導ストレスを用いた複合ウェハー製造方法 Download PDFInfo
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Abstract
Description
この発明の別の好ましい実施形態によれば、前記放射線源は、前記分離面を生成するために照射された光線が、前記固体物の中に、所定の深さに、特に100μmより浅く、貫通するように構成される。好ましくは、前記分離面は、前記固体物の外面及び好ましくは水準面(level surface)から隔たって、並行して形成される。好ましくは、前記分離面は、好ましくは100μmより小さく、そして好ましくは50μmよりも小さく、そして特に好ましくは、20、10、5又は2μmよりも小さく若しくは正に20、10、5又は2μmだけ、前記固体物の水準面から離れている。したがって、前記分離面は、好ましくは、ディフェクトから生成された面形状で作られており、該ディフェクトは、好ましくは100μmより小さく、そして好ましくは50μmよりも小さく、そして特に好ましくは、20、10又は2μmよりも小さく若しくは正に20、10、5又は2μmだけ、前記固体物の水準面から離れている。
この発明の別の好ましい実施形態によれば、前記放射線源は、前記分離面を生成するために照射された光線が、前記固体物の中に、所定の深さに、特に100μmより深く、貫通するように構成される。好ましくは、前記分離面は、前記固体物の外面及び好ましくは水準面から隔たって、並行して形成される。好ましくは、前記分離面は、好ましくは100μmより大きく、そして好ましくは200μmよりも大きく、そして特に好ましくは、400又は700μmよりも大きく、前記固体物の水準面から離れている。したがって、前記分離面は、好ましくは、ディフェクトから生成された面形状で作られており、該ディフェクトは、好ましくは100μmより大きく、そして好ましくは200μmよりも大きく、そして特に好ましくは400又は700μmよりも大きく、前記固体物の水準面から離れている。
Claims (13)
- 固形材料の層を製造するための方法であって、
固形材料(4)の少なくとも1つの層を分離するための固体物(2)を提供することと、
固形材料の層が前記固体物から分離される分離面を決定するために、少なくとも1つの放射線源(18)、特に1つのレーザー、によって前記固体物の内部構造内にディフェクトを生成することと、
前記固体物(2)上に前記固形材料(4)の層を保持するための受容層(10)を設けることと、
前記固体物(2)内にストレスを、特に機械的に、発生するために、前記受容層(10)に対して熱を適用することであって、前記ストレスにより前記分離面(8)に沿って前記固体物(2)内にクラックが伝播し、該クラックが前記固体物(2)から前記固形材料(4)の層を分離するものと
を少なくとも含む方法。 - 前記固体物(2)に導入される放射線(6)を提供するための前記少なくとも1つの放射線源(18)は、照射された前記光線(6)が前記固体物(2)内の所定の位置に前記ディフェクトを生成するように構成されることを特徴とする請求項1に記載の方法。
- 前記放射線源(18)は、前記分離面(8)を生成するために照射された前記光線(6)が、200μm未満の、好ましくは100μmより小さい、より好ましくは50μmより小さい、特に好ましくは20μmより小さい規定の深さに、前記固体物(2)内を貫通するように、構成されることを特徴とする請求項2に記載の方法。
- 前記放射線源(18)は、前記分離面(8)を生成するために照射された前記光線(6)が、100μmより大きい、好ましくは200μmより大きい、より好ましくは400μmより大きい、特に好ましくは700μmより大きい規定の深さに、前記固体物(2)内を貫通するように、構成されることを特徴とする請求項2に記載の方法。
- 前記固体物(2)は該固体物(2)を保持するための保持層(12)に配置され、前記保持層(12)は該固体物(2)の第1水準面部分(14)に配置され、前記固体物(2)の第1水準面部分(14)は前記固体物(2)の第2水準面部分(16)から隔離されており、前記ポリマー層(10)は前記第2水準面部分(16)に配置され、且つ、前記分離面(8)は前記第1水準面部分(14)及び/又は前記第2水準面部分(16)に対して平行に並べられることを特徴とする請求項1乃至4の何れかに記載の方法。
- 前記固体物(2)は炭化ケイ素及び/又はヒ化ガリウム及び/又はセラミック材料からなり、前記受容層はポリマー層(10)で形成され、前記ポリマー層及び/又は前記保持層(12)は少なくとも部分的にPDMSで形成され、前記保持層(12)は少なくとも部分的に少なくとも1つの金属からなる安定化装置の水準表面に少なくとも部分的に配置されることを特徴とする請求項1乃至5の何れかに記載の方法。
- 前記固体物(2)内の前記ストレスは前記クラック開始及び/又は前記クラック伝播がクラック面に製造された表面の所定のトポグラフィを生成するように制御され得るように設定されることを特徴とする請求項1乃至6の何れかに記載の方法。
- 前記放射線源はフェムト秒レーザーであることを特徴とする請求項1乃至7の何れかに記載の方法。
- 前記放射線源、特に前記レーザーは10psより小さい、好ましくは1psより小さい、特に好ましくは500fsより小さいパルス幅を持つことを特徴とする請求項1乃至8の何れかに記載の方法。
- 前記レーザービーム、特にフェムト秒レーザーのエネルギーは、前記固体物内の前記損傷の伝播がレイリー長の3倍よりも小さく、好ましくはレイリー長よりも小さく、特に好ましくはレイリー長の3分の1よりも小さくなるように、選択されることを特徴とする請求項1乃至9の何れかに記載の方法。
- 前記レーザービーム、特にフェムト秒レーザーの波長は、前記固体物の吸収が10cm-1より小さく、好ましくは1cm-1より小さく、特に好ましくは0.1cm-1より小さくなるように選択されることを特徴とする請求項1乃至10の何れかに記載の方法。
- 個々の前記ディフェクトはそれぞれ前記フェムト秒レーザーにより引き起こされた多光子励起に由来するものである請求項1乃至11の何れかに記載の方法。
- 請求項1乃至12の何れかに記載の方法により製造されたウェハー。
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US11004723B2 (en) | 2021-05-11 |
TW201901791A (zh) | 2019-01-01 |
KR20160068863A (ko) | 2016-06-15 |
KR102297306B1 (ko) | 2021-09-03 |
US11699616B2 (en) | 2023-07-11 |
US20160254232A1 (en) | 2016-09-01 |
US20200185267A1 (en) | 2020-06-11 |
US20190237359A1 (en) | 2019-08-01 |
CN105899325A (zh) | 2016-08-24 |
TWI637433B (zh) | 2018-10-01 |
US20210225694A1 (en) | 2021-07-22 |
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